JPH0559134B2 - - Google Patents

Info

Publication number: JPH0559134B2
Authority: JP; Japan
Prior art keywords: fluorine; forming; thin layer; gas; layer according
Prior art date: 1990-09-07
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

JP23823190A

Other languages

English (en)

Japanese (ja)

Other versions

JPH04117435A (ja

Inventor

Akifumi Nishikawa

Micho Ueno

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Fukui Prefecture

Original Assignee

Fukui Prefecture

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1990-09-07

Filing date

1990-09-07

Publication date

1993-08-30

1990-09-07 Application filed by Fukui Prefecture filed Critical Fukui Prefecture

1990-09-07 Priority to JP23823190A priority Critical patent/JPH04117435A/ja

1992-04-17 Publication of JPH04117435A publication Critical patent/JPH04117435A/ja

1993-08-30 Publication of JPH0559134B2 publication Critical patent/JPH0559134B2/ja

Status Granted legal-status Critical Current

Links

YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 53
229910052731 fluorine Inorganic materials 0.000 claims description 53
239000011737 fluorine Substances 0.000 claims description 53
238000000034 method Methods 0.000 claims description 35
239000007789 gas Substances 0.000 claims description 33
239000000758 substrate Substances 0.000 claims description 29
239000000463 material Substances 0.000 claims description 28
238000009832 plasma treatment Methods 0.000 claims description 20
150000001875 compounds Chemical class 0.000 claims description 14
229920000620 organic polymer Polymers 0.000 claims description 14
239000002344 surface layer Substances 0.000 claims description 13
125000001153 fluoro group Chemical group F* 0.000 claims description 10
239000010410 layer Substances 0.000 claims description 9
239000000835 fiber Substances 0.000 claims description 5
239000010408 film Substances 0.000 claims description 5
229920005615 natural polymer Polymers 0.000 claims description 5
229920001059 synthetic polymer Polymers 0.000 claims description 5
239000000919 ceramic Substances 0.000 claims description 4
239000000126 substance Substances 0.000 claims description 3
125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 2
239000000203 mixture Substances 0.000 claims description 2
238000012986 modification Methods 0.000 claims description 2
230000004048 modification Effects 0.000 claims description 2
239000004745 nonwoven fabric Substances 0.000 claims description 2
239000004033 plastic Substances 0.000 claims description 2
229920003023 plastic Polymers 0.000 claims description 2
125000000217 alkyl group Chemical group 0.000 claims 1
125000005843 halogen group Chemical group 0.000 claims 1
239000007787 solid Substances 0.000 claims 1
238000012545 processing Methods 0.000 description 11
NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 10
238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 5
239000004744 fabric Substances 0.000 description 5
-1 polytetrafluoroethylene Polymers 0.000 description 5
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
239000000654 additive Substances 0.000 description 4
230000000996 additive effect Effects 0.000 description 4
229920001577 copolymer Polymers 0.000 description 4
239000000178 monomer Substances 0.000 description 4
229920000728 polyester Polymers 0.000 description 4
229920000642 polymer Polymers 0.000 description 4
229910052573 porcelain Inorganic materials 0.000 description 4
MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 3
238000004458 analytical method Methods 0.000 description 3
239000012298 atmosphere Substances 0.000 description 3
239000004568 cement Substances 0.000 description 3
230000000052 comparative effect Effects 0.000 description 3
229910001882 dioxygen Inorganic materials 0.000 description 3
150000002894 organic compounds Chemical class 0.000 description 3
229920001343 polytetrafluoroethylene Polymers 0.000 description 3
239000004810 polytetrafluoroethylene Substances 0.000 description 3
239000010409 thin film Substances 0.000 description 3
QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
229920000742 Cotton Polymers 0.000 description 2
CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 description 2
RAHZWNYVWXNFOC-UHFFFAOYSA-N Sulphur dioxide Chemical compound O=S=O RAHZWNYVWXNFOC-UHFFFAOYSA-N 0.000 description 2
239000004809 Teflon Substances 0.000 description 2
229920006362 Teflon® Polymers 0.000 description 2
PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
229910052786 argon Inorganic materials 0.000 description 2
QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
229910052799 carbon Inorganic materials 0.000 description 2
238000001035 drying Methods 0.000 description 2
RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
239000011521 glass Substances 0.000 description 2
229910052734 helium Inorganic materials 0.000 description 2
238000005259 measurement Methods 0.000 description 2
239000001301 oxygen Substances 0.000 description 2
229910052760 oxygen Inorganic materials 0.000 description 2
239000002861 polymer material Substances 0.000 description 2
238000006116 polymerization reaction Methods 0.000 description 2
238000003672 processing method Methods 0.000 description 2
238000012360 testing method Methods 0.000 description 2
238000002834 transmittance Methods 0.000 description 2
BQCIDUSAKPWEOX-UHFFFAOYSA-N 1,1-Difluoroethene Chemical compound FC(F)=C BQCIDUSAKPWEOX-UHFFFAOYSA-N 0.000 description 1
MGWGWNFMUOTEHG-UHFFFAOYSA-N 4-(3,5-dimethylphenyl)-1,3-thiazol-2-amine Chemical compound CC1=CC(C)=CC(C=2N=C(N)SC=2)=C1 MGWGWNFMUOTEHG-UHFFFAOYSA-N 0.000 description 1
UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
229920001780 ECTFE Polymers 0.000 description 1
102000004190 Enzymes Human genes 0.000 description 1
108090000790 Enzymes Proteins 0.000 description 1
108010022355 Fibroins Proteins 0.000 description 1
239000004677 Nylon Substances 0.000 description 1
239000002033 PVDF binder Substances 0.000 description 1
229930182556 Polyacetal Natural products 0.000 description 1
239000004695 Polyether sulfone Substances 0.000 description 1
239000004642 Polyimide Substances 0.000 description 1
239000004372 Polyvinyl alcohol Substances 0.000 description 1
239000011398 Portland cement Substances 0.000 description 1
VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
239000003570 air Substances 0.000 description 1
229910021529 ammonia Inorganic materials 0.000 description 1
229920003235 aromatic polyamide Polymers 0.000 description 1
230000015572 biosynthetic process Effects 0.000 description 1
239000005385 borate glass Substances 0.000 description 1
239000001569 carbon dioxide Substances 0.000 description 1
229910002092 carbon dioxide Inorganic materials 0.000 description 1
229910002091 carbon monoxide Inorganic materials 0.000 description 1
239000000969 carrier Substances 0.000 description 1
239000012159 carrier gas Substances 0.000 description 1
239000003795 chemical substances by application Substances 0.000 description 1
239000000460 chlorine Substances 0.000 description 1
229910052801 chlorine Inorganic materials 0.000 description 1
KYKAJFCTULSVSH-UHFFFAOYSA-N chloro(fluoro)methane Chemical compound F[C]Cl KYKAJFCTULSVSH-UHFFFAOYSA-N 0.000 description 1
230000006378 damage Effects 0.000 description 1
230000007423 decrease Effects 0.000 description 1
238000007872 degassing Methods 0.000 description 1
230000006866 deterioration Effects 0.000 description 1
238000011161 development Methods 0.000 description 1
230000000694 effects Effects 0.000 description 1
229920000840 ethylene tetrafluoroethylene copolymer Polymers 0.000 description 1
150000002222 fluorine compounds Chemical class 0.000 description 1
238000010438 heat treatment Methods 0.000 description 1
239000001307 helium Substances 0.000 description 1
SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
229920001519 homopolymer Polymers 0.000 description 1
239000001257 hydrogen Substances 0.000 description 1
229910052739 hydrogen Inorganic materials 0.000 description 1
229910052738 indium Inorganic materials 0.000 description 1
APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
239000004922 lacquer Substances 0.000 description 1
239000000395 magnesium oxide Substances 0.000 description 1
229910052754 neon Inorganic materials 0.000 description 1
GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
229910052757 nitrogen Inorganic materials 0.000 description 1
JCXJVPUVTGWSNB-UHFFFAOYSA-N nitrogen dioxide Inorganic materials O=[N]=O JCXJVPUVTGWSNB-UHFFFAOYSA-N 0.000 description 1
239000001272 nitrous oxide Substances 0.000 description 1
229920001778 nylon Polymers 0.000 description 1
210000000056 organ Anatomy 0.000 description 1
239000003960 organic solvent Substances 0.000 description 1
239000012785 packaging film Substances 0.000 description 1
229920006280 packaging film Polymers 0.000 description 1
239000005365 phosphate glass Substances 0.000 description 1
238000001420 photoelectron spectroscopy Methods 0.000 description 1
229920002493 poly(chlorotrifluoroethylene) Polymers 0.000 description 1
229920002492 poly(sulfone) Polymers 0.000 description 1
229920000058 polyacrylate Polymers 0.000 description 1
239000004417 polycarbonate Substances 0.000 description 1
229920000515 polycarbonate Polymers 0.000 description 1
239000005023 polychlorotrifluoroethylene (PCTFE) polymer Substances 0.000 description 1
229920000647 polyepoxide Polymers 0.000 description 1
229920006393 polyether sulfone Polymers 0.000 description 1
229920001721 polyimide Polymers 0.000 description 1
229920000193 polymethacrylate Polymers 0.000 description 1
229920006324 polyoxymethylene Polymers 0.000 description 1
229920002635 polyurethane Polymers 0.000 description 1
239000004814 polyurethane Substances 0.000 description 1
229920002451 polyvinyl alcohol Polymers 0.000 description 1
229920002981 polyvinylidene fluoride Polymers 0.000 description 1
230000001105 regulatory effect Effects 0.000 description 1
238000009991 scouring Methods 0.000 description 1
239000005368 silicate glass Substances 0.000 description 1
229910052710 silicon Inorganic materials 0.000 description 1
239000010703 silicon Substances 0.000 description 1
239000011343 solid material Substances 0.000 description 1
238000005507 spraying Methods 0.000 description 1
238000005211 surface analysis Methods 0.000 description 1
229920002994 synthetic fiber Polymers 0.000 description 1
239000012209 synthetic fiber Substances 0.000 description 1
229910052719 titanium Inorganic materials 0.000 description 1
239000010936 titanium Substances 0.000 description 1
230000001988 toxicity Effects 0.000 description 1
231100000419 toxicity Toxicity 0.000 description 1
239000002023 wood Substances 0.000 description 1
238000004383 yellowing Methods 0.000 description 1
229910052845 zircon Inorganic materials 0.000 description 1
GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 1

Landscapes

Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Chemical Or Physical Treatment Of Fibers (AREA)
Treatments Of Macromolecular Shaped Articles (AREA)

JP23823190A 1990-09-07 1990-09-07 フッ素含有表面薄層の形成方法 Granted JPH04117435A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP23823190A JPH04117435A (ja)	1990-09-07	1990-09-07	フッ素含有表面薄層の形成方法

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP23823190A JPH04117435A (ja)	1990-09-07	1990-09-07	フッ素含有表面薄層の形成方法

Publications (2)

Publication Number	Publication Date
JPH04117435A JPH04117435A (ja)	1992-04-17
JPH0559134B2 true JPH0559134B2 (fr)	1993-08-30

Family

ID=17027100

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP23823190A Granted JPH04117435A (ja)	1990-09-07	1990-09-07	フッ素含有表面薄層の形成方法

Country Status (1)

Country	Link
JP (1)	JPH04117435A (fr)

1990
- 1990-09-07 JP JP23823190A patent/JPH04117435A/ja active Granted

Also Published As

Publication number	Publication date
JPH04117435A (ja)	1992-04-17

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