JPH0559406A - Production of annular compound material - Google Patents

Abstract

PURPOSE:To easily produce a high-quality annular compound material at a low cost by HIP. CONSTITUTION:A material 1 to be treated in which at least two annular base materials 2 and 3 are adjacently arranged is placed in a metallic-foil capsule 4 provided with an internal storage space 6A having almost the same shape as the material 1 and made of metallic foil, the capsule is degassed and then sealed, and the material is subjected to HIP.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a composite material in which ring-shaped materials are diffusion-bonded to each other under a high pressure using a high-pressure gas as a pressure medium at low cost.

[0002]

2. Description of the Related Art In recent years, dissimilar or similar metals are joined by diffusion joining to produce corrosion-resistant and wear-resistant machine parts, sputtering target materials and the like. For these diffusion bonding, a hot pressing method or a hot isostatic pressing method (HI
P method) is used. Especially in the case of HIP method,
It is possible to HIP a large number of processed products at one time, which is suitable for industrial production.

In the HIP method using gas pressure,
It is necessary to prevent gas from entering the joint surface. As this method, as disclosed in JP-A-47-16308, generally, a method of vacuum-sealing the whole object to be processed in a metal capsule is general. When a ring-shaped material is diffusion-bonded by HIP, the metal capsule is, as shown in FIG. 6, an inner cylinder inside the outer cylinder 21.
A double structure capsule with 22 is used. or,
As shown in FIG. 7, a capsule in which a round bar-shaped core 23 is erected inside an outer cylinder 21A is used. In the figure,
24, 24A is an upper lid, 25, 25A is a lower lid, 26, 26A is a deaeration tube,
Reference numeral 27 is an object to be treated made of ring-shaped materials 28 and 29, and 30 is a release agent interposed between the objects to be treated.

[0004]

However, in the conventional capsule, if the gap between the object to be treated and the capsule is too narrow, it cannot be inserted, while if it is too wide, the pressure transmission is hindered. Therefore, it is necessary to process the outer diameter of the object to be processed and the inner diameter of the capsule with high precision so as to have a minute gap. In addition, in the double-structured capsule of FIG.
Moreover, the number of welding points between the lower lid 25 and the outer cylinder 21 and the inner cylinder 22 increases, which increases the manufacturing cost of the capsule. Further, in the capsule of FIG. 7, when the core 23 and the object to be processed 27 have different thermal expansion coefficients, residual stress may occur and the object to be processed 27 may be damaged. In addition, when the size of the object to be processed 27 is large, it becomes difficult to transmit the pressure to the vicinity of the core, and there is a problem that the bonding strength between the materials inside the ring-shaped composite material becomes low.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a method capable of easily manufacturing a ring-shaped composite material with high quality and at low cost when manufacturing it by HIP processing.

[0006]

According to the method for producing a ring-shaped composite material of the present invention, an object to be treated in which at least two ring-shaped materials are arranged adjacent to each other is housed in a metal capsule, and the inside of the capsule is deaerated. In a method for producing a ring-shaped composite material, in which the ring-shaped raw materials are diffusion-bonded by applying hot isostatic pressure to the capsules after sealing in the state, the object to be treated is formed of a metal foil and The object to be processed is housed in a metal foil capsule having a housing space of substantially the same shape.

[0007]

The object to be processed having the ring-shaped material disposed adjacent thereto is housed in a metal foil capsule having a storage space of substantially the same shape as the object to be processed, sealed in a deaerated state, and then subjected to HIP processing. Therefore, at the time of HIP, the metal foil forming the storage space is easily deformed so as to be in close contact with the outer periphery of the object to be treated, and the HIP pressure effectively acts on the outer periphery of the object to be treated through the metal foil. For this reason, it is not necessary to process the storage space with high precision, molding by press molding or the like is sufficient, and the manufacturing cost of the capsule can be reduced.

[0008]

[Examples] The production of a composite material in which two ring-shaped materials are diffusion-bonded will be described below as an example. FIG. 1 shows an object to be processed 1 in which ring-shaped materials 2 and 3 are concentrically arranged adjacent to each other. In the present invention, a metal foil capsule is used for diffusion bonding the article 1 to be treated. To make a metal foil capsule,
A rectangular flat metal foil is used to form a storage recess, which is slightly larger than the shape of the object 1 to be processed, in the center by drawing. Reference numeral 5 denotes a metal foil storage member in which a storage recess 6 is formed. A cover member 7 made of a rectangular planar metal foil is attached to the opening of the recess 6 of the member 5 to store the recess 6 in the storage space. A metal foil capsule 4 with a size of 6A is constructed. A mold release agent 8 is applied to the central portion of the surface of the lid member 7 on the storage member 5 side in order to prevent the reaction between the object 1 to be treated and the lid member 7.

The thickness of the metal foil used is 30 to 300 μm,
It is preferably 50 to 150 μm. If it is less than 30 μm, breakage tends to occur during molding, while if it exceeds 300 μm, drawing processing becomes difficult. The material of the metal foil is selected from stainless steel, copper, aluminum, tantalum, platinum, etc., which does not melt at the HIP processing temperature, does not react with the material to be processed, and the material cost is taken into consideration. As the drawing process, uniaxial mold forming, hydraulic forming, etc. are applied, and since high accuracy of forming is not required, a low cost mold, a wooden mold, or a plastic mold can be used.

Next, the object to be processed 1 is stored in the recess 6 of the storage member 5, and the lid member 7 is attached so as to close the opening of the recess 6.
It is preferable to apply a release agent 8 such as BN (boron nitride), alumina, zirconia, or silica to the surface of the object 1 to be treated in order to prevent the reaction with the encapsulant. This release agent
8 may be applied in advance on the inner surface side of the storage recess 6.

Next, as shown in FIG. 3, the inside of the capsule is placed in a vacuum state, and the four sides of the storage member 5 and the lid member 7 in the vicinity of the outer peripheral edge are welded and sealed by welding. Reference numeral 9 indicates a welded portion. As a welding method, high pulse TIG, seam welding, or YAG laser welding is used, and lap welding is recommended from the viewpoint of simplicity and airtightness. To make the inside of the capsule a vacuum, the welding is performed in a vacuum, or the inside of the capsule is degassed by a vacuum pump. The inside of the capsule is preferably evacuated, but at the temperature at the time of heating for diffusion bonding described later, zirconium or titanium which easily absorbs oxygen and nitrogen which are the main components of air is used as a getter material in the capsule. Even if it is put in, it is possible to obtain a degassing effect similar to vacuum sealing.

The enclosed object 1 to be treated is then placed in a device such as HIP that exerts a gas pressure under high pressure, and the temperature is raised.
Boost. Temperature rise, pressure rise pattern and final temperature,
The pressure depends on the material of the material to be treated and the degree of vacuum inside the capsule, but as shown in Fig. 5, at least 10 kgf / cm
It is recommended to apply a pressure of ² or more to suppress the expansion of the capsule due to the temperature rise.

After the treatment, the object to be treated taken out from the apparatus is
Although it looks like metal foil is stuck, if you cut the overlapping part of the metal foil coated with release agent 8 that does not contain the object to be processed with scissors etc., the inside object will be It can be taken out easily. In the above example,
The recessed portion 6 for storing the object to be processed 1 was formed on one side of the metal foil, but as shown in FIG.
Half-storing member 11 having a recessed portion for storing one half thereof
You may make it overlap. In addition, the metal foil capsule is not limited to the case of storing a single object to be treated as in the embodiment, but a plurality of objects to be treated may be accommodated in a single capsule through a release agent. May be.

Next, specific examples will be given. Approximately 340 mm outer diameter, 170 mm inner diameter and 12 mm thick 12 mm thick chrome with the same outer and inner diameter of 9 mm copper is prepared, and BN (nitriding) is used as a release agent on the surface of the object to be processed by stacking two of them. Boron) spray was applied. 100 μm thick stainless steel foil (SU
S304) is cut into a size of 400 mm × 600 mm, two pieces are prepared, and one of them is molded into a shape of the object to be processed, and then the object to be processed is put into the capsule main body, and another The metal foils were overlapped, the three sides were welded using a high pulse TIG welder at a position of about 10 mm from the outer peripheral edge, and the other side was evacuated by a degassing pump. After vacuum deaeration, the remaining one was sealed by high pulse TIG welding.

As shown in FIG. 5, the capsule was subjected to an initial pressure of 20 kgf / cm ² , a simultaneous heating and pressurizing type, 900 ° C. × 1000 kgf / c.
HIP treatment was performed under the condition of holding m ² × 1 hr. After the HIP treatment, the capsule was cut with scissors, and it was possible to take out what was diffusion-bonded with chromium and copper. When the bonded interface was examined by ultrasonic flaw detection, it was found to be completely bonded and the shear strength was 20 kgf / mm ² . When the product was finished and used as a sputtering target material, it did not peel off during use and was of high quality.

[0016]

As described above, according to the method for manufacturing the ring-shaped composite material of the present invention, the object to be processed having the ring-shaped material adjacently disposed is formed of the metal foil and has substantially the same shape as the object to be processed. It is housed in a metal foil capsule equipped with a storage space for degassing, sealed, and then subjected to HIP processing, so that the capsule is easily deformed so that it adheres to the object to be processed during HIP. The pressure uniformly acts on the outer peripheral surface of the object to be processed, and a high quality composite material is obtained. Further, since the capsule is easily deformed, it is not necessary to perform highly accurate processing as in the conventional case, and the manufacturing cost of the capsule is low.

[Brief description of drawings]

FIG. 1 is a cross-sectional view of an object to be processed in which ring-shaped materials are arranged adjacent to each other.

FIG. 2 is an exploded cross-sectional view of a metal foil capsule before storing an object to be processed.

FIG. 3 is a cross-sectional view of a metal foil capsule after containing and sealing an object to be processed.

FIG. 4 is a cross-sectional view of another example of the same metal foil capsule.

FIG. 5 is a graph showing HIP processing conditions in an example.

FIG. 6 is a cross-sectional view of a conventional metal capsule.

FIG. 7 is a cross-sectional view of another example of a conventional metal capsule.

[Explanation of symbols]

 1 Object to be processed 2 Ring-shaped material 3 Ring-shaped material 4 Metal foil capsule 6 Recess for storage 6A Storage space

Claims (2)

[Claims] 1. An object to be treated in which at least two ring-shaped materials are arranged adjacent to each other is housed in a metal capsule, and the inside of the capsule is hermetically sealed in a deaerated state, and then hot isostatic pressing is applied to the capsule. In a method for manufacturing a ring-shaped composite material, which comprises applying pressure to diffusion-bond ring-shaped materials to each other, the object to be processed is formed of a metal foil, and is made of a metal foil having a storage space having substantially the same shape as the object to be processed. A method for manufacturing a ring-shaped composite material, which is characterized in that the composite material is stored in a capsule. 2. The method for producing a ring-shaped composite material according to claim 1, wherein the metal foil has a thickness of 30 to 300 μm.