JPH0560725A - Gas concentration sensor - Google Patents
Gas concentration sensorInfo
- Publication number
- JPH0560725A JPH0560725A JP3244882A JP24488291A JPH0560725A JP H0560725 A JPH0560725 A JP H0560725A JP 3244882 A JP3244882 A JP 3244882A JP 24488291 A JP24488291 A JP 24488291A JP H0560725 A JPH0560725 A JP H0560725A
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- gas concentration
- concentration
- concentration sensor
- rate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
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- Measuring Oxygen Concentration In Cells (AREA)
Abstract
(57)【要約】 （修正有）
【目的】小型、安価に広範囲の濃度の酸素等のガス濃度
の測定を可能とする。
【構成】酸素イオンを透過する固体電解質１の一方の側
に２対以上の電極２１，２２，３１，３２を設け、各対
の一方に互いに律速性能を異にする律速手段を設け、各
対の電極間に電圧を印加し、電極間に流れる電流値から
広範囲の濃度の酸素等のガス濃度を測定する。
(57) [Summary] (Correction) [Purpose] It is possible to measure the concentration of gas such as oxygen in a wide range of concentration in a compact and inexpensive manner. [Structure] Two or more pairs of electrodes 21, 22, 31, 32 are provided on one side of a solid electrolyte 1 permeable to oxygen ions, and a rate-controlling means having different rate-controlling performance is provided on one side of each pair. A voltage is applied between the electrodes and the concentration of gas such as oxygen in a wide range of concentration is measured from the value of the current flowing between the electrodes.
Description
【０００１】[0001]
【産業上の利用分野】この発明は、固体電解質を利用し
て酸素ガス等のガス濃度を測定するセンサに関するもの
である。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sensor for measuring a gas concentration of oxygen gas or the like using a solid electrolyte.
【０００２】[0002]
【従来の技術】従来、たとえば固体電解質を利用した、
限界電流式の酸素センサは、出願人が特開昭６３−２６
５６８号公報で提案している。そして限界電流式の酸素
センサは、濃淡電池式の酸素センサと比較して動作範囲
が狭いため、ｐｐｍのオーダーから１００％Ｏ2 近傍ま
で１個のセンサでカバーすることは困難である。このた
め低濃度用、高濃度用の２種以上のセンサを必要として
いた。2. Description of the Related Art Conventionally, for example, a solid electrolyte is used,
The limiting current type oxygen sensor is disclosed by the applicant in JP-A-63-26.
It is proposed in Japanese Patent No. 568. Since the limiting current type oxygen sensor has a narrower operating range than the concentration cell type oxygen sensor, it is difficult to cover from the ppm order to the vicinity of 100% O 2 with one sensor. Therefore, two or more kinds of sensors for low concentration and high concentration are required.
【０００３】[0003]
【発明が解決しようとする課題】このように従来のもの
は、装置のスペースを多く必要とし、全体的に形状が大
きくなる等の問題点があった。As described above, the conventional device requires a large amount of space for the device and has a problem that the overall size is large.
【０００４】この発明の目的は、以上の点に鑑み、小
型、高性能に、広範囲の酸素濃度を測定することができ
るガス濃度センサを提供することである。In view of the above points, an object of the present invention is to provide a gas concentration sensor which is small in size and high in performance and capable of measuring a wide range of oxygen concentration.
【０００５】[0005]
【課題を解決するための手段】この発明は、酸素イオン
を透過する固体電解質の一方の側に２対以上の電極を設
け、各対の一方に互いに律速性能を異にする律速手段を
設け、各対の電極間に電圧を印加し、電極間を流れる電
流値から広い範囲の濃度の酸素等のガス濃度を測定する
ようにしたガス濃度センサである。According to the present invention, two or more pairs of electrodes are provided on one side of a solid electrolyte that allows oxygen ions to pass therethrough, and one of each pair is provided with a rate-determining means having different rate-limiting performance. It is a gas concentration sensor adapted to measure a gas concentration of oxygen or the like in a wide range of concentration from a current value flowing between the electrodes by applying a voltage between electrodes of each pair.
【０００６】[0006]
【実施例】図１、２は、この発明の一実施例を示す構成
説明図である。1 and 2 are configuration explanatory views showing an embodiment of the present invention.
【０００７】図において、１は酸化ジルコニウムＺｒＯ
2 等に酸化イットリウムＹ2 Ｏ3 等を固溶させた酸素イ
オンを透過する基板状の固体電解質で、この固体電解質
１の一方の側にＰｔ、Ａｇ等よりなる２対の電極２１、
２２、３１、３２が蒸着スパッタリング等で形成され、
この各対の一方の電極３１、３２、には律速手段として
の拡散孔４１０、４２０を有する有孔キャップ４１、４
２が設けられている。In the figure, 1 is zirconium oxide ZrO.
A solid electrolyte in the form of a substrate, which is a solid solution of yttrium oxide Y 2 O 3 and the like in 2 and the like and is permeable to oxygen ions.
22, 31, 32 are formed by vapor deposition sputtering or the like,
The perforated caps 41, 4 having diffusion holes 410, 420 as rate-controlling means are provided on one electrode 31, 32 of each pair.
Two are provided.
【０００８】つまり、電極３１、３２上には固体電解質
と同一材料の無機質粉末からなる多孔質の無機質層５
１、５２が設けられて、この無機質層５１、５２の上に
有孔キャップ４１１、４２１が設けられている。この各
有孔キャップの拡散孔４１０、４２０の大きさは、ほぼ
φ０．４ｍｍ、φ２０μｍで、各々０〜１０００ＰＰｍ
Ｏ2 、０〜９９％Ｏ2 の低濃度、高濃度測定に対応して
いる。低濃度の方は拡散孔が大とされ、高感度化を図っ
ている。そして、側面にはガラス質の気密層６１、６２
が設けられている。有孔キャップ４１１、４１２は各々
１ｍｍ程度の同一厚みのものとされ、棒状のものをスラ
イスして容易に製造できるものである。、無機質層５
１、５２は、気密層６１、６２を溶融形成するとき、同
時に焼成される。この無機質層５１、５２を設けること
により、気密層６１、６２が直接電極３１、３２をおお
うことがなく、性能が向上する。また、固体電解質１の
他方の側には、絶縁層７を介してＰｔ等のヒータ８が形
成されている。この絶縁層７は、ヒータ８への電流が固
体電解質１を流れ、測定誤差を招くのを防止する。That is, a porous inorganic layer 5 made of an inorganic powder of the same material as the solid electrolyte is formed on the electrodes 31 and 32.
1, 52 are provided, and perforated caps 411, 421 are provided on the inorganic layers 51, 52. The size of the diffusion holes 410 and 420 of the perforated caps is approximately 0.4 mm and 20 μm, respectively, and is 0 to 1000 PPm.
It supports low and high concentration measurements of O 2 and 0 to 99% O 2 . The lower the concentration, the larger the diffusion holes, and the higher the sensitivity. And, on the side surfaces, glassy airtight layers 61, 62
Is provided. The perforated caps 411 and 412 have the same thickness of about 1 mm, and can be easily manufactured by slicing a rod-shaped cap. , Inorganic layer 5
1, 52 are fired at the same time when the hermetic layers 61, 62 are melted and formed. By providing the inorganic layers 51 and 52, the airtight layers 61 and 62 do not directly cover the electrodes 31 and 32, and the performance is improved. A heater 8 of Pt or the like is formed on the other side of the solid electrolyte 1 with an insulating layer 7 interposed therebetween. This insulating layer 7 prevents the current to the heater 8 from flowing through the solid electrolyte 1 and causing a measurement error.
【０００９】そして、図３でも概略示すように、低濃度
検出部Ｄ１の各対の電極２１、３１間および、高濃度検
出部Ｄ２の電極２２、３２間には直流の電圧源Ｖ１、Ｖ
２から電極２１、２２を陽極、電極３１、３２を陰極と
して所定の電圧が印加され、測定手段Ｍ１、Ｍ２で電極
２１、３１間および電極２２、３２間を流れる電流値が
測定される。またヒータ８には図示しない電圧源より電
流が供給される。As schematically shown in FIG. 3, DC voltage sources V1 and V are provided between the electrodes 21 and 31 of each pair of the low concentration detector D1 and between the electrodes 22 and 32 of the high concentration detector D2.
A predetermined voltage is applied from 2 to the electrodes 21 and 22 as anodes and the electrodes 31 and 32 as cathodes, and the current values flowing between the electrodes 21 and 31 and between the electrodes 22 and 32 are measured by the measuring means M1 and M2. A current is supplied to the heater 8 from a voltage source (not shown).
【００１０】つまり、低濃度または高濃度の酸素ガス濃
度を測定する場合、ヒータ８に通電加熱し、測定手段Ｍ
１、Ｍ２の出力を判別手段Ｃ１、Ｃ２で判別し、低濃度
のときはスイッチ手段Ｓ１１をオン、スイッチ手段１０
をＡ側とし、検出部Ｄ１を作動させて低濃度測定を行
い、高濃度のときは、スイッチ手段Ｓ１２をオン、スイ
ッチ手段Ｓ１０をＢ側として高濃度測定を行い、各々表
示手段Ｅに表示等を行う。 低濃度の酸素濃度測定の場
合の特性図を図４、高濃度の場合の特性図を図５に示
す。このように、同一固体電解質の複数対の電極の各律
速手段の律速性能を異にすることで、高感度に広いダイ
ナミックレンジで酸素濃度等の測定ができる。That is, when measuring a low or high concentration oxygen gas concentration, the heater 8 is energized and heated, and the measuring means M
The outputs of 1 and M2 are discriminated by the discrimination means C1 and C2. When the concentration is low, the switch means S11 is turned on and the switch means 10 is turned on.
On the A side, the detection unit D1 is operated to measure the low concentration, and when the concentration is high, the switch means S12 is turned on, the switch means S10 is set on the B side, and the high concentration measurement is performed. I do. FIG. 4 shows a characteristic diagram in the case of measuring low concentration oxygen concentration, and FIG. 5 shows a characteristic diagram in the case of high concentration. As described above, by differentiating the rate controlling performance of each rate controlling means of a plurality of pairs of electrodes of the same solid electrolyte, it is possible to measure the oxygen concentration and the like with high sensitivity and in a wide dynamic range.
【００１１】[0011]
【発明の効果】固体電解質の一方の側に複数対の電極を
形成しその律速手段の律速性能を異にしたガス濃度セン
サで、小型、安価に、広範囲の濃度の酸素等のガス濃度
の測定ができ、ヒータも他方の側に共通化でき、各種の
回路の簡素化も図れる。EFFECTS OF THE INVENTION A gas concentration sensor in which a plurality of pairs of electrodes are formed on one side of a solid electrolyte and the rate-controlling means of the electrodes have different rate-controlling performances, and the gas concentration of oxygen or the like in a wide range of concentration can be measured compactly and inexpensively. The heater can be shared on the other side, and various circuits can be simplified.
【図１】この発明の一実施例を示す構成説明図。FIG. 1 is a structural explanatory view showing an embodiment of the present invention.
【図２】この発明の一実施例を示す構成説明図。FIG. 2 is a structural explanatory view showing an embodiment of the present invention.
【図３】この発明の一実施例を示す測定回路の説明図。FIG. 3 is an explanatory diagram of a measuring circuit showing an embodiment of the present invention.
【図４】この発明の一実施例を示す特性説明図。FIG. 4 is a characteristic explanatory view showing an embodiment of the present invention.
【図５】この発明の一実施例を示す特性説明図。FIG. 5 is a characteristic explanatory view showing an embodiment of the present invention.
１ 固体電解質 ２１、２２、３１、３２ 電極 ４１、４２ 律速手段 ５１、５２ 無機質層 ６１、６２ 気密層 ７ 絶縁層 ８ ヒータ 1 Solid Electrolyte 21, 22, 31, 32 Electrode 41, 42 Rate Controlling Means 51, 52 Inorganic Layer 61, 62 Airtight Layer 7 Insulating Layer 8 Heater
Claims (5)
の側に設けられた２対以上の電極と、この各対の一方の
電極に設けられた互いに律速性能を異にする律速手段
と、各対の電極間に電圧を印加する電圧源と、各電極間
を流れる電流値を測定する電流測定手段とを備え、この
電流測定手段の電流値から複数のガス濃度を測定するガ
ス濃度センサ。1. Two or more pairs of electrodes provided on one side of a solid electrolyte through which oxygen ions permeate, and rate-controlling means provided on one electrode of each pair and having different rate-controlling performances. A gas concentration sensor comprising a voltage source for applying a voltage between a pair of electrodes and a current measuring means for measuring a current value flowing between the electrodes, and for measuring a plurality of gas concentrations from the current value of the current measuring means.
い、その拡散孔の大きさを異にした請求項１記載のガス
濃度センサ。2. The gas concentration sensor according to claim 1, wherein a perforated cap is used as the rate controlling means, and the size of the diffusion hole is different.
方に律速手段を設け両電極に電圧を印加したとき流れる
電流値から酸素等のガス濃度を測定するセンサにおい
て、前記律速手段として無機質層を介して有孔キャップ
を設け、側面を気密層としたガス濃度センサ。3. A sensor for measuring a gas concentration of oxygen or the like from a value of a current flowing when a voltage is applied to both electrodes by providing a rate controlling means on one of a pair of electrodes provided on a solid electrolyte, and the rate controlling means is an inorganic material. A gas concentration sensor in which a perforated cap is provided through a layer and the side surface is an airtight layer.
一厚さのものとされた請求項３記載のガス濃度センサ。4. The gas concentration sensor according to claim 3, wherein the perforated cap of the rate controlling means has substantially the same thickness.
スして形成してなる請求項４記載のガス濃度センサ。5. The gas concentration sensor according to claim 4, wherein the perforated cap is formed by slicing a rod-shaped cap.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP03244882A JP3105959B2 (en) | 1991-08-30 | 1991-08-30 | Gas concentration sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP03244882A JP3105959B2 (en) | 1991-08-30 | 1991-08-30 | Gas concentration sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0560725A true JPH0560725A (en) | 1993-03-12 |
| JP3105959B2 JP3105959B2 (en) | 2000-11-06 |
Family
ID=17125393
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP03244882A Expired - Lifetime JP3105959B2 (en) | 1991-08-30 | 1991-08-30 | Gas concentration sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3105959B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07116018A (en) * | 1993-10-04 | 1995-05-09 | Masanori Sato | Toothbrush and motor-driven toothbrush |
| USRE36025E (en) * | 1992-07-15 | 1999-01-05 | Kabushiki Kaisha Suzuki Shoki | Crawler pad |
| US7361258B2 (en) | 1998-05-18 | 2008-04-22 | Ngk Spark Plug Co., Ltd. | Sensor element and gas sensor |
-
1991
- 1991-08-30 JP JP03244882A patent/JP3105959B2/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USRE36025E (en) * | 1992-07-15 | 1999-01-05 | Kabushiki Kaisha Suzuki Shoki | Crawler pad |
| JPH07116018A (en) * | 1993-10-04 | 1995-05-09 | Masanori Sato | Toothbrush and motor-driven toothbrush |
| US7361258B2 (en) | 1998-05-18 | 2008-04-22 | Ngk Spark Plug Co., Ltd. | Sensor element and gas sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3105959B2 (en) | 2000-11-06 |
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