JPH05672B2 - - Google Patents
Info
- Publication number
- JPH05672B2 JPH05672B2 JP2806487A JP2806487A JPH05672B2 JP H05672 B2 JPH05672 B2 JP H05672B2 JP 2806487 A JP2806487 A JP 2806487A JP 2806487 A JP2806487 A JP 2806487A JP H05672 B2 JPH05672 B2 JP H05672B2
- Authority
- JP
- Japan
- Prior art keywords
- hole
- ultrasonic transducer
- lower electrode
- ultrasonic
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Transducers For Ultrasonic Waves (AREA)
- Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2806487A JPS63196877A (ja) | 1987-02-12 | 1987-02-12 | 超音波トランスジユ−サ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2806487A JPS63196877A (ja) | 1987-02-12 | 1987-02-12 | 超音波トランスジユ−サ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63196877A JPS63196877A (ja) | 1988-08-15 |
| JPH05672B2 true JPH05672B2 (de) | 1993-01-06 |
Family
ID=12238333
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2806487A Granted JPS63196877A (ja) | 1987-02-12 | 1987-02-12 | 超音波トランスジユ−サ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63196877A (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3040554B2 (ja) * | 1991-10-08 | 2000-05-15 | ジーイー横河メディカルシステム株式会社 | 超音波探触子 |
-
1987
- 1987-02-12 JP JP2806487A patent/JPS63196877A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63196877A (ja) | 1988-08-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |