JPH0567943A - Piezoelectric resonator - Google Patents
Piezoelectric resonatorInfo
- Publication number
- JPH0567943A JPH0567943A JP3258316A JP25831691A JPH0567943A JP H0567943 A JPH0567943 A JP H0567943A JP 3258316 A JP3258316 A JP 3258316A JP 25831691 A JP25831691 A JP 25831691A JP H0567943 A JPH0567943 A JP H0567943A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- electrodes
- piezoelectric substrate
- substrate
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims abstract description 102
- 239000003990 capacitor Substances 0.000 claims abstract description 21
- 238000000605 extraction Methods 0.000 description 24
- 238000010586 diagram Methods 0.000 description 10
- 238000007789 sealing Methods 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明は圧電共振子に関し、特
に３つの圧電共振素子と２つのコンデンサとを有し、た
とえばフィルタとして用いられる、圧電共振子に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric resonator, and more particularly to a piezoelectric resonator having three piezoelectric resonance elements and two capacitors and used as, for example, a filter.
【０００２】[0002]
【従来の技術】この種の従来の圧電共振子には、１枚の
圧電基板の一方主面および他方主面に多数の電極を形成
して、１枚の圧電基板に３つの圧電共振素子および２つ
のコンデンサを形成したものがあった。2. Description of the Related Art In this type of conventional piezoelectric resonator, a large number of electrodes are formed on one main surface and the other main surface of a single piezoelectric substrate, and three piezoelectric resonance elements and There was one that formed two capacitors.
【０００３】[0003]
【発明が解決しようとする課題】このような従来の圧電
共振子では、１枚の圧電基板に３つの圧電共振素子とと
もに２つのコンデンサを形成するため、基板がたとえば
横長となり、その実装面積が大きく、高密度実装するこ
とができない。In such a conventional piezoelectric resonator, since two piezoelectric capacitors are formed on one piezoelectric substrate together with three piezoelectric resonant elements, the substrate is laterally long and its mounting area is large. , High density mounting is not possible.
【０００４】それゆえに、この発明の主たる目的は、実
装面積を小さくすることができる、圧電共振子を提供す
ることである。Therefore, a main object of the present invention is to provide a piezoelectric resonator capable of reducing the mounting area.
【０００５】[0005]
【課題を解決するための手段】この発明は、第１の圧電
基板と、第１の圧電基板に形成され、それぞれが２つの
分割電極とそれらの２つの分割電極に対向する１つの共
通電極とを有する２つの圧電共振素子と、第１の圧電基
板に積層される第２の圧電基板と、第２の圧電基板に形
成され、２つの分割電極とそれらの２つの分割電極に対
向する１つの共通電極とを有する別の圧電共振素子と、
第２の圧電基板に形成され、それぞれが対向する２つの
対向電極を有する２つのコンデンサとを含み、別の圧電
共振素子の一方の分割電極が、一方の圧電共振素子の一
方の分割電極に接続され、別の圧電共振素子の他方の分
割電極が、他方の圧電共振素子の一方の分割電極に接続
され、別の圧電共振素子の共通電極が、２つの圧電共振
素子の共通電極に共通に接続され、一方のコンデンサの
２つの対向電極が、別の圧電共振素子の一方の分割電極
および共通電極にそれぞれ接続され、さらに他方のコン
デンサの２つの対向電極が、別の圧電共振素子の他方の
分割電極および共通電極にそれぞれ接続された、圧電共
振子である。According to the present invention, there is provided a first piezoelectric substrate, two divided electrodes each formed on the first piezoelectric substrate, and one common electrode facing the two divided electrodes. And a second piezoelectric substrate laminated on the first piezoelectric substrate, and two divided electrodes formed on the second piezoelectric substrate and one divided electrode opposed to the two divided electrodes. Another piezoelectric resonant element having a common electrode,
A second piezoelectric substrate, which includes two capacitors each having two opposing electrodes facing each other, and one divided electrode of another piezoelectric resonant element is connected to one divided electrode of one piezoelectric resonant element. The other divided electrode of the other piezoelectric resonance element is connected to one divided electrode of the other piezoelectric resonance element, and the common electrode of the other piezoelectric resonance element is commonly connected to the common electrode of the two piezoelectric resonance elements. The two opposing electrodes of one capacitor are connected to one split electrode and the common electrode of another piezoelectric resonant element, respectively, and the two opposing electrodes of the other capacitor are split to the other split electrode of another piezoelectric resonant element. Piezoelectric resonators connected to the electrodes and the common electrode, respectively.
【０００６】[0006]
【作用】３つの圧電共振素子および２つのコンデンサの
うち、２つの圧電共振素子が第１の圧電基板に形成さ
れ、別の１つの圧電共振素子および２つのコンデンサが
第２の圧電基板に形成される。また、これら第１の圧電
基板および第２の圧電基板は積層される。したがって、
１枚の圧電基板に３つの圧電共振素子および２つのコン
デンサを形成する従来例と比べて、圧電基板ないし圧電
共振子の平面的に見た面積を減らすことができる。Of the three piezoelectric resonance elements and the two capacitors, two piezoelectric resonance elements are formed on the first piezoelectric substrate, and another piezoelectric resonance element and two capacitors are formed on the second piezoelectric substrate. It The first piezoelectric substrate and the second piezoelectric substrate are laminated. Therefore,
Compared with the conventional example in which three piezoelectric resonance elements and two capacitors are formed on one piezoelectric substrate, the planar area of the piezoelectric substrate or the piezoelectric resonator can be reduced.
【０００７】[0007]
【発明の効果】この発明によれば、実装面積を減らすこ
とができる、圧電共振子が得られる。According to the present invention, it is possible to obtain a piezoelectric resonator in which the mounting area can be reduced.
【０００８】この発明の上述の目的，その他の目的，特
徴および利点は、図面を参照して行う以下の実施例の詳
細な説明から一層明らかとなろう。The above-mentioned objects, other objects, features and advantages of the present invention will become more apparent from the detailed description of the embodiments below with reference to the drawings.
【０００９】[0009]
【実施例】図１は、この発明の一実施例を示す図であ
り、（Ａ）はその斜視図であり、（Ｂ）はその分解図解
図であり、（Ｃ）はその回路図である。この圧電共振子
１０は、たとえば矩形の第１の圧電基板１２を含む。1 is a diagram showing an embodiment of the present invention, (A) is a perspective view thereof, (B) is an exploded schematic view thereof, and (C) is a circuit diagram thereof. .. The piezoelectric resonator 10 includes a rectangular first piezoelectric substrate 12, for example.
【００１０】第１の圧電基板１２の一方主面には、特に
図２（Ａ）に示すように、その長手方向に間隔を隔て
て、２つの圧電共振素子の分割電極となる４つの分割電
極１４ａ，１４ｂ，１４ｃおよび１４ｄが形成される。
さらに、第１の圧電基板１２の一方主面には、４つの引
出し電極１６ａ，１６ｂ，１６ｃおよび１６ｄが形成さ
れる。この場合、２つの引出し電極１６ａおよび１６ｄ
は、両側の２つの分割電極１４ａおよび１４ｄから延び
て、第１の圧電基板１２の長手方向の両端部に形成され
る。また、他の２つの引出し電極１６ｂおよび１６ｃ
は、中央の２つの分割電極１４ｂおよび１４ｃから第１
の圧電基板１２の幅方向の一端に延びて形成される。さ
らに、第１の圧電基板１２の一方主面には、その幅方向
の一端から他端にわたって、２つの分割電極１４ｂおよ
び１４ｃ間に、アース電極１８が形成される。このアー
ス電極１８は、第１の圧電基板１２に形成される２つの
圧電共振素子間のアイソレーションをよくするためのも
のであるが、特に形成されなくてもよい。As shown in FIG. 2A, on one main surface of the first piezoelectric substrate 12, four divided electrodes which are divided electrodes of two piezoelectric resonance elements are arranged at intervals in the longitudinal direction. 14a, 14b, 14c and 14d are formed.
Further, four extraction electrodes 16a, 16b, 16c and 16d are formed on one main surface of the first piezoelectric substrate 12. In this case, the two extraction electrodes 16a and 16d
Are formed on both ends of the first piezoelectric substrate 12 in the longitudinal direction, extending from the two divided electrodes 14a and 14d on both sides. In addition, the other two extraction electrodes 16b and 16c
Is the first from the two center split electrodes 14b and 14c.
The piezoelectric substrate 12 is formed so as to extend to one end of the piezoelectric substrate 12 in the width direction. Further, the ground electrode 18 is formed on the one main surface of the first piezoelectric substrate 12 from one end to the other end in the width direction between the two divided electrodes 14b and 14c. The ground electrode 18 is provided to improve the isolation between the two piezoelectric resonance elements formed on the first piezoelectric substrate 12, but need not be formed in particular.
【００１１】また、第１の圧電基板１２の他方主面に
は、特に図２（Ｂ）に示すように、その中央に、共通電
極２０が、４つの分割電極１４ａ〜１４ｄに対向するよ
うに形成される。この共通電極２０は、第１の圧電基板
１２とともに、２つの分割電極１４ａおよび１４ｂと協
働して１つの圧電共振素子２２ａを構成し、他の２つの
分割電極１４ｃおよび１４ｄと協働して他の１つの圧電
共振素子２２ｂを構成する。さらに、この共通電極２０
から第１の圧電基板１２の幅方向の両端に延びて、引出
し電極２４が形成される。なお、第１の圧電基板１２の
他方主面には、共通電極２０に代えて、２つの分割電極
１４ａおよび１４ｂに対向する１つの共通電極と他の２
つの分割電極１４ｃおよび１４ｄに対向する他の１つの
共通電極が形成されてもよい。この場合、２つの共通電
極は、たとえば引出し電極２４で接続すればよい。Further, on the other main surface of the first piezoelectric substrate 12, as shown in FIG. 2 (B), the common electrode 20 faces the four divided electrodes 14a to 14d at the center thereof. It is formed. The common electrode 20, together with the first piezoelectric substrate 12, cooperates with the two divided electrodes 14a and 14b to form one piezoelectric resonance element 22a, and cooperates with the other two divided electrodes 14c and 14d. The other one piezoelectric resonance element 22b is configured. Furthermore, this common electrode 20
To extend to both ends of the first piezoelectric substrate 12 in the width direction, the extraction electrodes 24 are formed. In addition, on the other main surface of the first piezoelectric substrate 12, instead of the common electrode 20, one common electrode facing the two divided electrodes 14a and 14b and another two electrodes.
Another common electrode may be formed to face one of the divided electrodes 14c and 14d. In this case, the two common electrodes may be connected by the extraction electrode 24, for example.
【００１２】したがって、第１の圧電基板１２に形成さ
れる２つの圧電共振素子２２ａおよび２２ｂは、図２
（Ｃ）に示すように、それらの共通電極すなわち共通電
極２０が引出し電極２４に接続され、それらの分割電極
１４ａ〜１４ｄが引出し電極１６ａ〜１６ｄにそれぞれ
接続される。Therefore, the two piezoelectric resonance elements 22a and 22b formed on the first piezoelectric substrate 12 are arranged as shown in FIG.
As shown in (C), those common electrodes, that is, the common electrodes 20 are connected to the extraction electrodes 24, and the divided electrodes 14a to 14d are connected to the extraction electrodes 16a to 16d, respectively.
【００１３】この圧電共振子１０は、さらに、第１の圧
電基板１２と同じ大きさの第２の圧電基板２６を含む。The piezoelectric resonator 10 further includes a second piezoelectric substrate 26 having the same size as the first piezoelectric substrate 12.
【００１４】第２の圧電基板２６の一方主面には、特に
図３（Ａ）に示すように、その中央に別の圧電共振素子
の分割電極となる２つの分割電極２８ａおよび２８ｂが
間隔を隔てて形成される。さらに、第２の圧電基板２６
の一方主面には、２つの分割電極２８ａおよび２８ｂの
外側に、２つの対向電極３０ａおよび３０ｂが形成され
る。さらに、第２の圧電基板２６の一方主面には、たと
えばＴ字形の２つの引出し電極３２ａおよび３２ｂが形
成される。この場合、一方の引出し電極３２ａは、一方
の分割電極２８ａおよび対向電極３０ａから第２の圧電
基板２６の幅方向の一端に延びて形成され、他方の引出
し電極３２ｂは、他方の分割電極２８ｂおよび対向電極
３０ｂから第２の圧電気基板２６の幅方向の一端に延び
て形成される。In particular, as shown in FIG. 3A, on one main surface of the second piezoelectric substrate 26, two split electrodes 28a and 28b to be split electrodes of another piezoelectric resonant element are provided at the center thereof. Are formed separately. Further, the second piezoelectric substrate 26
Two counter electrodes 30a and 30b are formed on the one main surface outside the two divided electrodes 28a and 28b. Further, on one main surface of the second piezoelectric substrate 26, for example, two T-shaped extraction electrodes 32a and 32b are formed. In this case, one extraction electrode 32a is formed to extend from one divided electrode 28a and the counter electrode 30a to one end in the width direction of the second piezoelectric substrate 26, and the other extraction electrode 32b is formed to extend to the other divided electrode 28b and the other divided electrode 28b. It is formed so as to extend from the counter electrode 30b to one end in the width direction of the second piezoelectric substrate 26.
【００１５】また、第２の圧電基板２６の他方主面に
は、特に図３（Ｂ）に示すように、その中央に、共通電
極３４が、２つの分割電極２８ａおよび２８ｂに対向す
るように形成される。この共通電極３４は、第２の圧電
基板２６とともに２つの分割基板２８ａおよび２８ｂと
協働して別の圧電共振素子３６を構成する。また、この
共通電極３４から第２の圧電基板２６の幅方向の両端に
延びて、引出し電極３８が形成される。さらに、第２の
圧電基板２６の他方主面には、２つの対向電極４０ａお
よび４０ｂが、先の２つの対向電極３０ａおよび３０ｂ
に対向するように形成される。これらの対向電極４０ａ
および４０ｂは、第２の圧電基板２６とともに対向電極
３０ａおよび３０ｂと協働して、２つのコンデンサ４２
ａおよび４２ｂをそれぞれ構成する。さらに、第２の圧
電基板２６の他方主面には、対向電極４０ａおよび４０
ｂから引出し電極３８の一端に延びる引出し電極４４ａ
および４４ｂがそれぞれ形成される。Further, on the other main surface of the second piezoelectric substrate 26, particularly, as shown in FIG. 3B, in the center thereof, the common electrode 34 is arranged so as to face the two divided electrodes 28a and 28b. It is formed. The common electrode 34 cooperates with the two divided substrates 28a and 28b together with the second piezoelectric substrate 26 to form another piezoelectric resonant element 36. Further, lead electrodes 38 are formed extending from the common electrode 34 to both ends in the width direction of the second piezoelectric substrate 26. Further, on the other main surface of the second piezoelectric substrate 26, the two counter electrodes 40a and 40b are provided with the two counter electrodes 30a and 30b.
Are formed so as to face each other. These counter electrodes 40a
And 40b cooperate with the counter electrodes 30a and 30b together with the second piezoelectric substrate 26 to provide two capacitors 42
a and 42b respectively. Further, on the other main surface of the second piezoelectric substrate 26, the counter electrodes 40a and 40a are provided.
Extraction electrode 44a extending from b to one end of extraction electrode 38
And 44b are respectively formed.
【００１６】したがって、図３（Ｃ）に示すように、別
の圧電共振素子３６は、その分割電極２８ａ，２８ｂお
よび共通電極３４が、引出し電極３２ａ，３２ｂおよび
３８にそれぞれ接続される。さらに、一方のコンデンサ
４２ａは２つの引出し電極３２ａおよび３８間に接続さ
れ、他方のコンデンサ４２ｂは２つの引出し電極３２ｂ
および３８間に接続される。Therefore, as shown in FIG. 3C, the divided electrodes 28a, 28b and the common electrode 34 of another piezoelectric resonance element 36 are connected to the extraction electrodes 32a, 32b and 38, respectively. Further, one capacitor 42a is connected between the two extraction electrodes 32a and 38, and the other capacitor 42b is connected to the two extraction electrodes 32b.
And 38.
【００１７】これら第１の圧電基板１２および第２の圧
電基板２６がたとえば圧電材料などの絶縁体からなる２
枚の封止基板４６および４８で挟まれるように、それら
の圧電基板および封止基板は、接着剤で接着される。こ
の場合、第１の圧電基板１２および第２の圧電基板２６
は、第１の圧電基板１２の他方主面と第２の圧電基板２
６の一方主面とが対向し、かつ、第１の圧電基板１２の
引出し電極１６ｂおよび１６ｃと第２の圧電基板２６の
引出し電極３２ａおよび３２ｂとが同じ側に揃うよう
に、積層される。また、接着剤によって、各圧電共振素
子２２ａ，２２ｂおよび３６の周囲に振動のための空間
部が形成される。The first piezoelectric substrate 12 and the second piezoelectric substrate 26 are made of an insulating material such as a piezoelectric material.
The piezoelectric substrate and the sealing substrate are bonded with an adhesive so as to be sandwiched between the sealing substrates 46 and 48. In this case, the first piezoelectric substrate 12 and the second piezoelectric substrate 26
Is the other main surface of the first piezoelectric substrate 12 and the second piezoelectric substrate 2
6 are laminated so that one main surface of the first piezoelectric substrate 12 faces each other, and the extraction electrodes 16b and 16c of the first piezoelectric substrate 12 and the extraction electrodes 32a and 32b of the second piezoelectric substrate 26 are aligned on the same side. Further, the adhesive forms a space for vibration around each of the piezoelectric resonance elements 22a, 22b and 36.
【００１８】さらに、それらの圧電基板および封止基板
の積層体の表面には、特に図１（Ｂ）に示すように、５
つの外部電極５０ａ，５０ｂ，５０ｃ，５０ｄおよび５
０ｅが形成される。この場合、２つの外部電極５０ａお
よび５０ｂは、第１の圧電基板１２の引出し電極１６ａ
および１６ｄにそれぞれ接続するように、積層体の長手
方向の一端部および他端部にそれぞれ形成される。ま
た、他の１つの外部電極５０ｃは、第１の圧電基板１２
のアース電極１８および引出し電極２４と第２の圧電基
板１２の引出し電極３８とを接続するように、積層体の
長手方向の中央部に形成される。さらに他の１つの外部
電極５０ｄは、第１の圧電基板１２の引出し電極１６ｂ
と第２の圧電基板１２の引出し電極３２ａとを接続する
ように、積層体の一端面に形成される。また、残りの外
部電極５０ｅは、第１の圧電基板１２の引出し電極１６
ｃと第２の圧電基板１２の引出し電極３２ｂとを接続す
るように、積層体の一端面に形成される。Furthermore, as shown in FIG. 1 (B), the surface of the laminated body of the piezoelectric substrate and the sealing substrate is, as shown in FIG.
One external electrode 50a, 50b, 50c, 50d and 5
0e is formed. In this case, the two external electrodes 50 a and 50 b are the extraction electrodes 16 a of the first piezoelectric substrate 12.
And 16d, respectively, are formed at one end and the other end in the longitudinal direction of the laminate. In addition, the other one external electrode 50c is connected to the first piezoelectric substrate 12
The ground electrode 18 and the extraction electrode 24 are connected to the extraction electrode 38 of the second piezoelectric substrate 12 at the central portion in the longitudinal direction of the laminated body. Still another external electrode 50d is the extraction electrode 16b of the first piezoelectric substrate 12.
And the lead electrode 32a of the second piezoelectric substrate 12 are connected to each other on one end surface of the laminated body. The remaining external electrodes 50e are the extraction electrodes 16 of the first piezoelectric substrate 12.
It is formed on one end face of the laminated body so as to connect c and the extraction electrode 32b of the second piezoelectric substrate 12.
【００１９】したがって、この圧電共振子１０では、そ
の回路を図１（Ｃ）に示すように、圧電共振素子３６の
分割電極２８ａおよび２８ｂが、２つの圧電共振素子２
２ａおよび２２ｂの一方の分割電極１４ｂおよび１４ｃ
にそれぞれ接続される。さらに、それらの圧電共振素子
２２ａ，２２ｂおよび３６の共通電極２０および３４
が、外部電極５０ｃに接続される。また、２つの圧電共
振素子２２ａおよび２２ｂの他方の分割電極１４ａおよ
び１４ｄが、外部電極５０ａおよび５０ｂにそれぞれ接
続される。さらに、一方のコンデンサ４２ａが圧電共振
素子３６の一方の分割電極２８ａおよび共通電極３４間
に接続され、他方のコンデンサ４２ｂが圧電共振素子３
６の他方の分割電極２８ｂおよび共通電極３４間に接続
される。Therefore, in this piezoelectric resonator 10, as shown in the circuit diagram of FIG. 1C, the divided electrodes 28a and 28b of the piezoelectric resonance element 36 have two piezoelectric resonance elements 2.
Split electrodes 14b and 14c of one of 2a and 22b
Respectively connected to. Further, the common electrodes 20 and 34 of those piezoelectric resonance elements 22a, 22b and 36 are
Is connected to the external electrode 50c. The other divided electrodes 14a and 14d of the two piezoelectric resonance elements 22a and 22b are connected to the external electrodes 50a and 50b, respectively. Further, one capacitor 42 a is connected between one divided electrode 28 a and the common electrode 34 of the piezoelectric resonance element 36, and the other capacitor 42 b is connected to the piezoelectric resonance element 3.
6 is connected between the other divided electrode 28b and the common electrode 34.
【００２０】この圧電振動子１０では、２つの圧電共振
素子２２ａおよび２２ｂが第１の圧電基板１２に形成さ
れ、別の１つの圧電共振素子３６と２つのコンデンサ４
２ａおよび４２ｂとが第２の圧電基板２６に形成され、
これら第１の圧電基板１２および第２の圧電基板２６が
積層されるので、１枚の圧電基板に３つの圧電共振素子
および２つのコンデンサを形成する従来例と比べて、圧
電基板ないし全体の平面的に見た面積、すなわち実装面
積を減らすことができる。In this piezoelectric vibrator 10, two piezoelectric resonance elements 22a and 22b are formed on the first piezoelectric substrate 12, and another piezoelectric resonance element 36 and two capacitors 4 are provided.
2a and 42b are formed on the second piezoelectric substrate 26,
Since the first piezoelectric substrate 12 and the second piezoelectric substrate 26 are laminated, the piezoelectric substrate or the entire planar surface can be compared with the conventional example in which three piezoelectric resonance elements and two capacitors are formed on one piezoelectric substrate. It is possible to reduce the area viewed from the viewpoint, that is, the mounting area.
【００２１】なお、この発明では、第１の圧電基板およ
び第２の圧電基板に形成される各電極の形状ないし配置
を任意に変更してもよい。また、各電極は、圧電基板の
一方主面および他方主面のどちらの主面に形成されても
よい。さらに、引出し電極の数を任意に変更してもよ
い。In the present invention, the shape or arrangement of the electrodes formed on the first piezoelectric substrate and the second piezoelectric substrate may be arbitrarily changed. Further, each electrode may be formed on either one of the main surfaces of the piezoelectric substrate and the other main surface. Furthermore, the number of extraction electrodes may be changed arbitrarily.
【００２２】上述の実施例では、接着剤で圧電共振素子
の振動のための空間を形成したが、これらの空間は、封
止板に凹部を形成しその凹部で構成してもよい。あるい
は、２枚の圧電基板の間や圧電基板および封止板の間に
Ｈ形の絶縁基板や２つのＩ形の絶縁基板を挿入して、そ
れらの空間を形成してもよい。このように絶縁基板を挿
入する場合には、シールド効果を有する絶縁基板を用い
てもよい。In the above-mentioned embodiment, the space for vibrating the piezoelectric resonance element is formed by the adhesive, but these spaces may be formed by forming a recess in the sealing plate. Alternatively, an H-shaped insulating substrate or two I-shaped insulating substrates may be inserted between the two piezoelectric substrates or between the piezoelectric substrate and the sealing plate to form the spaces therebetween. When the insulating substrate is inserted in this way, an insulating substrate having a shield effect may be used.
【００２３】また、圧電共振子を作成するためには、各
電極を有する第１の基板，第２の基板および封止基板の
それぞれのマザー基板を作り、それらのマザー基板を積
層接着すれば、多数の圧電共振子の各基板を一度に積層
接着することができ、複数の圧電共振子を効率的に作成
することができる。この場合、積層接着したマザー基板
を個々の積層体に切断し、積層体の表面に外部電極を形
成すればよい。Further, in order to produce the piezoelectric resonator, mother substrates of the first substrate, the second substrate and the sealing substrate having respective electrodes are prepared, and these mother substrates are laminated and adhered. The substrates of a large number of piezoelectric resonators can be laminated and bonded at one time, and a plurality of piezoelectric resonators can be efficiently produced. In this case, the laminated and bonded mother substrate may be cut into individual laminated bodies, and external electrodes may be formed on the surfaces of the laminated bodies.
【図１】この発明の一実施例を示す図であり、（Ａ）は
その斜視図であり、（Ｂ）はその分解図解図であり、
（Ｃ）はその回路図である。FIG. 1 is a diagram showing an embodiment of the present invention, (A) is a perspective view thereof, and (B) is an exploded schematic diagram thereof,
(C) is a circuit diagram thereof.
【図２】図１に示す実施例に用いられる第１の圧電基板
およびその周辺部分を示す図であり、（Ａ）はその平面
図であり、（Ｂ）はその底面図であり、（Ｃ）はその回
路図である。2A and 2B are diagrams showing a first piezoelectric substrate used in the embodiment shown in FIG. 1 and a peripheral portion thereof, FIG. 2A being a plan view thereof, FIG. 2B being a bottom view thereof, and FIG. ) Is the circuit diagram.
【図３】図１に示す実施例に用いられる第２の圧電基板
およびその周辺部分を示す図であり、（Ａ）はその平面
図であり、（Ｂ）はその底面図であり、（Ｃ）はその回
路図である。3A and 3B are diagrams showing a second piezoelectric substrate used in the embodiment shown in FIG. 1 and a peripheral portion thereof, FIG. 3A being a plan view thereof, FIG. 3B being a bottom view thereof, and FIG. ) Is the circuit diagram.
１０ 圧電共振子 １２ 第１の圧電基板 １４ａ〜１４ｄ 分割基板 ２０ 共通電極 ２２ａ，２２ｂ 圧電共振素子 ２６ 第２の圧電基板 ２８ａ，２８ｂ 分割電極 ３０ａ，３０ｂ，４０ａ，４０ｂ 対向電極 ３４ 共通電極 ３６ 別の圧電共振素子 ４２ａ，４２ｂ コンデンサ ５０ａ〜５０ｅ 外部電極 10 Piezoelectric Resonator 12 First Piezoelectric Substrate 14a to 14d Divided Substrate 20 Common Electrode 22a, 22b Piezoelectric Resonance Element 26 Second Piezoelectric Substrate 28a, 28b Divided Electrode 30a, 30b, 40a, 40b Counter Electrode 34 Common Electrode 36 Another Piezoelectric resonance elements 42a, 42b Capacitors 50a-50e External electrodes
Claims (1)
形成され、それぞれが２つの分割電極とそれらの２つの
分割電極に対向する１つの共通電極とを有する２つの圧
電共振素子、 前記第１の圧電基板に積層される第２の圧電基板、 前記第２の圧電基板に形成され、２つの分割電極とそれ
らの２つの分割電極に対向する１つの共通電極とを有す
る別の圧電共振素子、および前記第２の圧電基板に形成
され、それぞれが対向する２つの対向電極を有する２つ
のコンデンサを含み、 前記別の圧電共振素子の一方の前記分割電極が、一方の
前記圧電共振素子の一方の前記分割電極に接続され、 前記別の圧電共振素子の他方の前記分割電極が、他方の
前記圧電共振素子の一方の前記分割電極に接続され、 前記別の圧電共振素子の前記共通電極が、前記２つの圧
電共振素子の前記共通電極に共通に接続され、 一方の前記コンデンサの前記２つの対向電極が、前記別
の圧電共振素子の一方の前記分割電極および前記共通電
極にそれぞれ接続され、さらに他方の前記コンデンサの
前記２つの対向電極が、前記別の圧電共振素子の他方の
前記分割電極および前記共通電極にそれぞれ接続され
た、圧電共振子。1. A first piezoelectric substrate, two piezoelectric resonance elements formed on the first piezoelectric substrate, each piezoelectric resonator element having two split electrodes and one common electrode facing the two split electrodes. A second piezoelectric substrate laminated on the first piezoelectric substrate, and another piezoelectric formed on the second piezoelectric substrate and having two split electrodes and one common electrode facing the two split electrodes. A resonant element, and two capacitors formed on the second piezoelectric substrate and having two opposing electrodes respectively facing each other, wherein one of the divided electrodes of the other piezoelectric resonant element is one of the piezoelectric resonant elements. Connected to one of the divided electrodes, the other divided electrode of the other piezoelectric resonant element is connected to one of the divided electrodes of the other piezoelectric resonant element, the common electrode of the other piezoelectric resonant element But before The two common electrodes of the two piezoelectric resonance elements are commonly connected, and the two opposite electrodes of one of the capacitors are respectively connected to one of the divided electrodes and the common electrode of the other piezoelectric resonance element, and the other A piezoelectric resonator in which the two opposite electrodes of the capacitor are connected to the other divided electrode and the common electrode of the other piezoelectric resonant element, respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25831691A JP3209762B2 (en) | 1991-09-09 | 1991-09-09 | Piezoelectric resonator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25831691A JP3209762B2 (en) | 1991-09-09 | 1991-09-09 | Piezoelectric resonator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0567943A true JPH0567943A (en) | 1993-03-19 |
| JP3209762B2 JP3209762B2 (en) | 2001-09-17 |
Family
ID=17318558
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25831691A Expired - Lifetime JP3209762B2 (en) | 1991-09-09 | 1991-09-09 | Piezoelectric resonator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3209762B2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6002308A (en) * | 1997-04-01 | 1999-12-14 | Murata Manufacturing Co., Ltd. | Piezoelectric filter with a capacitor on a substrate having an unpolarized portion |
| US6011451A (en) * | 1997-04-01 | 2000-01-04 | Murata Manufacturing Co., Ltd. | Chip type piezoelectric filter having internal common electrodes or a shield electrode |
| US6160462A (en) * | 1997-08-12 | 2000-12-12 | Ngk Spark Plug Co., Ltd. | Energy trapping type piezoelectric filter with identical piezoelectric substrates |
| DE19824793C2 (en) * | 1997-07-17 | 2001-02-22 | Murata Manufacturing Co | Piezoelectric filter |
| DE19923476C2 (en) * | 1998-06-02 | 2001-09-20 | Murata Manufacturing Co | Chip-shaped piezoelectric resonator and method for adjusting its resonance frequency |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59164329U (en) * | 1983-04-18 | 1984-11-05 | 株式会社村田製作所 | Chip type piezoelectric filter |
| JPS6312401A (en) * | 1986-06-25 | 1988-01-19 | 株式会社東京商会 | Divider for granule |
| JP3020530U (en) * | 1994-06-20 | 1996-02-02 | 葛原 慎二 | Water treatment |
-
1991
- 1991-09-09 JP JP25831691A patent/JP3209762B2/en not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59164329U (en) * | 1983-04-18 | 1984-11-05 | 株式会社村田製作所 | Chip type piezoelectric filter |
| JPS6312401A (en) * | 1986-06-25 | 1988-01-19 | 株式会社東京商会 | Divider for granule |
| JP3020530U (en) * | 1994-06-20 | 1996-02-02 | 葛原 慎二 | Water treatment |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6002308A (en) * | 1997-04-01 | 1999-12-14 | Murata Manufacturing Co., Ltd. | Piezoelectric filter with a capacitor on a substrate having an unpolarized portion |
| US6011451A (en) * | 1997-04-01 | 2000-01-04 | Murata Manufacturing Co., Ltd. | Chip type piezoelectric filter having internal common electrodes or a shield electrode |
| DE19813735B4 (en) * | 1997-04-01 | 2010-04-29 | Murata Mfg. Co., Ltd., Nagaokakyo-shi | Piezoelectric filter |
| DE19824793C2 (en) * | 1997-07-17 | 2001-02-22 | Murata Manufacturing Co | Piezoelectric filter |
| US6160462A (en) * | 1997-08-12 | 2000-12-12 | Ngk Spark Plug Co., Ltd. | Energy trapping type piezoelectric filter with identical piezoelectric substrates |
| DE19923476C2 (en) * | 1998-06-02 | 2001-09-20 | Murata Manufacturing Co | Chip-shaped piezoelectric resonator and method for adjusting its resonance frequency |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3209762B2 (en) | 2001-09-17 |
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