JPH0569362B2 - - Google Patents
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- Publication number
- JPH0569362B2 JPH0569362B2 JP19089086A JP19089086A JPH0569362B2 JP H0569362 B2 JPH0569362 B2 JP H0569362B2 JP 19089086 A JP19089086 A JP 19089086A JP 19089086 A JP19089086 A JP 19089086A JP H0569362 B2 JPH0569362 B2 JP H0569362B2
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- Prior art keywords
- objective lens
- curvature
- distance
- radius
- light source
- Prior art date
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- Length Measuring Devices By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Description
【発明の詳細な説明】
ａ 技術分野
本発明は、光学部品等のなめらかな光学反射面
を有する曲面（被検面）の屈折面パワー、曲率半
径及び面精度を測定・検査する装置に関するもの
である。Detailed Description of the Invention: a. Technical Field The present invention relates to an apparatus for measuring and inspecting the refractive surface power, radius of curvature, and surface accuracy of a curved surface (test surface) having a smooth optical reflection surface, such as an optical component. be.
ｂ 従来技術及びその問題点
従来より、光学反射面の曲率半径及び面精度を
測定・検査する種々の装置が提案され実施されて
いる。第２図は、れらの測定装置のうちで、最も
一般的に実施されている測定原理図であり、光学
技術ハンドブツク増補版239ページおよび、
ISO／TC172／SC7／WG4 N22（1985年７月１日
付）において、記載されている。b. Prior Art and its Problems Conventionally, various devices for measuring and inspecting the radius of curvature and surface accuracy of optical reflective surfaces have been proposed and put into practice. Figure 2 is a diagram of the principle of measurement that is most commonly used among these measuring devices, and is shown on page 239 of the expanded edition of the Optical Technology Handbook.
Described in ISO/TC172/SC7/WG4 N22 (dated July 1, 1985).
第２図ａは、凹面の曲率半径を測定する装置を
説明した図である。光源（又は２次光源）２０１
とスクリーン２０６は、ハーフミラー２０２に関
し互に共役な位置関係にあり、従つて光源（又は
２次光源）２０１の像が凹面の反射によつてスク
リーン２０６上に結ばれるには、凹面は光源（又
は２次光源）２０１が対物レンズ２０３によつて
結像される位置２０４か、オートコリメーシヨン
の位置２０５のいずれかになければならない。こ
れらの位置２０４及び２０５の間の距離を測定す
ることによつて、凹面の曲率半径が知れる。 FIG. 2a is a diagram illustrating an apparatus for measuring the radius of curvature of a concave surface. Light source (or secondary light source) 201
and the screen 206 are in a mutually conjugate positional relationship with respect to the half mirror 202. Therefore, in order for the image of the light source (or secondary light source) 201 to be focused on the screen 206 by the reflection of the concave surface, the concave surface is or a secondary light source) 201 must be at either the position 204 where it is imaged by the objective lens 203 or the autocollimation position 205. By measuring the distance between these positions 204 and 205, the radius of curvature of the concave surface is known.
また、オートコリメーシヨンの位置２０５に凹
面を設置したままで、スクリーン２０６上の反射
光源像の変形状態を観察することにより、凹面の
局所的な面精度を知ることができる。同様にし
て、凸面の曲率半径も測定が可能で、第２図ｂは
その模様を図に示したものである。凹面の場合と
異なる点は、前記位置２０４と２０５との相対的
な位置関係が入れ換つている点である。その相違
点を除けば、曲率半径や面精度の測定・検査は凹
面の場合と全く同じである。 Further, by observing the deformation state of the reflected light source image on the screen 206 while the concave surface is placed at the autocollimation position 205, the local surface accuracy of the concave surface can be determined. Similarly, the radius of curvature of the convex surface can be measured, and the pattern is shown in FIG. 2b. The difference from the case of a concave surface is that the relative positional relationship between the positions 204 and 205 is reversed. Other than this difference, the measurement and inspection of the radius of curvature and surface accuracy is exactly the same as for concave surfaces.
さて、第２図に示された測定装置には重大な問
題点が存在する。それは、全ての曲率半径が測定
できるという訳ではないという点である。例え
ば、凹面の場合には、もし、その曲率半径が5000
mmであつたとしたならば、位置２０４と位置２０
５の間隔は5000mmとなり、測定装置が極めて大き
なものになつてしまう。一方、凸面の場合には、
対物レンズ２０３と位置２０４の間にしか、位置
２０５存在しえないので、凸面の曲率半径も限定
されてしまう。 Now, the measuring device shown in FIG. 2 has a serious problem. The point is that not all radii of curvature can be measured. For example, in the case of a concave surface, if its radius of curvature is 5000
If mm, then position 204 and position 20
5 is 5000 mm, making the measuring device extremely large. On the other hand, in the case of a convex surface,
Since position 205 can exist only between objective lens 203 and position 204, the radius of curvature of the convex surface is also limited.
Ｃ 目 的
それ故、本発明の目的は、全ての曲率半径を測
定しえて、同時に面精度並びに屈折面パワーをも
検査・焦点可能なコンパクトな光学部品等の曲面
測定装置を提供することにある。C. Purpose Therefore, it is an object of the present invention to provide a compact curved surface measurement device for optical components that can measure all radii of curvature and simultaneously inspect and focus surface accuracy and refractive surface power. .
ｄ 実施例の構成
第１図は本発明の一実施例を示す説明図であ
る。適当な波長のレーザービームを光源として用
い、そのビームは、ハーフミラー１０１を通りコ
ンデンサーレンズ１０２により一度絞られた後、
発散する。そして、後方に配置された対物レンズ
１０３を透過した後、固定開口１０４に当て付い
た光学部品等の曲面である被検査１０５で反射さ
れ、逆行し、ハーフミラー１０１で90゜に曲げら
れ、スクリーン１０６に到る。測定光学系からの
反射光を除去る為に、レーザービームは直線焦光
を用いてもよい。その場合、λ／４板１０７を対
物レンズ１０３と固定開口１０４に入れ、ハーフ
ミラー１０１とスクリーン１０６の間に偏光板１
０８を配し、各々の偏光方向を調整して、最も迷
光の少なくなる所をさがす。また、ハーフミラー
１０１には偏光ビームスプリツターを用いると光
量の損失が少なくてすむ。更に、ハーフミラー１
０１、コンデンサーレンズ１０２、偏光板１０８
及びスクリーン１０６を含む枠１０９が、図示せ
ぬ公知の移動手段（例えば、ラツクとピニオン）
によつて光軸（矢印方向）に沿つて移動が可能で
あり、コンデンサーレンズ１０２と対物レンズ１
０３との間隔（距離）を変化させることができ、
その間隔の変化を読み取る為の図示せぬ読み取り
手段を備えている。この読み取り手段、つまり移
動可能を計測する手段については種々提案されて
おり、例えば、ダイヤルゲーンによるとか、ある
いは、電気的な後処理を必要とするものに対して
は、移動量を回転量に変換し、それをもつてポテ
ンシヨメータの回転角となる様にポテンシヨメー
タと結合させ、ポテンシヨメータからの出力電圧
をＡ／Ｄ変換器に導きデジタル量となし、しかる
後に演算処理等の後処理を行う等である。d Configuration of Embodiment FIG. 1 is an explanatory diagram showing an embodiment of the present invention. A laser beam with an appropriate wavelength is used as a light source, and after passing through a half mirror 101 and being condensed by a condenser lens 102,
Diverge. After passing through the objective lens 103 placed at the rear, the light is reflected by the object 105 to be inspected, which is a curved surface of an optical component placed against the fixed aperture 104, travels backwards, is bent at 90 degrees by the half mirror 101, and is directed to the screen. It reaches 106. In order to eliminate reflected light from the measurement optical system, a linearly focused laser beam may be used. In that case, a λ/4 plate 107 is placed between the objective lens 103 and the fixed aperture 104, and a polarizing plate 107 is placed between the half mirror 101 and the screen 106.
08, and adjust the polarization direction of each to find the location where the stray light is least. Further, if a polarizing beam splitter is used for the half mirror 101, the loss of light amount can be reduced. Furthermore, half mirror 1
01, condenser lens 102, polarizing plate 108
and a frame 109 including the screen 106 is a known moving means (for example, rack and pinion) (not shown).
The condenser lens 102 and objective lens 1 can be moved along the optical axis (in the direction of the arrow) by
You can change the distance (distance) from 03,
A reading means (not shown) is provided to read the change in the interval. Various methods have been proposed for this reading means, that is, means for measuring the amount of movement.For example, there are methods that use dial gain, or for those that require electrical post-processing, converting the amount of movement into the amount of rotation. Then, combine it with a potentiometer so that it becomes the rotation angle of the potentiometer, and guide the output voltage from the potentiometer to an A/D converter to convert it into a digital quantity, and then after arithmetic processing etc. processing, etc.
被検面１０５は、固定開口１０４に当て付いた
時に、対物レンズ１０３の像側焦点F′上に設定さ
れる様になされている。 The test surface 105 is configured to be set on the image-side focal point F' of the objective lens 103 when it comes into contact with the fixed aperture 104.
ｅ 実施例の作用
枠１０９を移動して、コンデンサーレンズ１０
２によるビームの集光点が、被検面１０５の曲率
中心Ｏと対物レンズ１０３に関して共役となる位
置に設定されたとする。この時、スクリーン１０
６上には、被検面１０５からのオートコリメーシ
ヨン像が結ばれている。e Effects of the embodiment Move the frame 109 and attach the condenser lens 10
Assume that the convergence point of the beam by 2 is set at a position that is conjugate with respect to the center of curvature O of the surface to be measured 105 and the objective lens 103. At this time, screen 10
An autocollimation image from the surface to be inspected 105 is focused on 6.
ここで、対物レンズ１０３の物側焦点Ｆから、
コンデンサーレンズ１０２によるビームの集光点
までの距離をｘとし、対物レンズ１０３の焦点距
離をｆとおき、被検面１０５の曲率半径をｒとす
ると、第１図よりニユートンの式が適用できて、
ｘ・ｒ＝f2
が求まる。故に、
１／ｒ＝−１／f2ｘ ……(1)
となり、被検面１０５の曲率半径の逆数１／ｒ
は、ｘに比例することが解る。もし、枠１０９の
座標原点をｘ＝０、つまりコンデンサーレンズ１
０２によるビームの集光点が、対物レンズ１０３
の物側焦点Ｆと一致したときと定めると、枠１０
９の座標原点からの移動量を読みとつて、(1)式の
ｘに代入すれば、容易に曲率半径ｒが求まる。 Here, from the object side focus F of the objective lens 103,
Assuming that the distance to the condensing point of the beam by the condenser lens 102 is x, the focal length of the objective lens 103 is f, and the radius of curvature of the surface to be measured 105 is r, Newton's equation can be applied from Fig. 1. , x・r=f 2 is found. Therefore, 1/r=-1/f 2 x ...(1), and the reciprocal of the radius of curvature of the test surface 105 is 1/r
It turns out that is proportional to x. If the coordinate origin of the frame 109 is x=0, that is, the condenser lens 1
The convergence point of the beam by 02 is the objective lens 103
frame 10.
The radius of curvature r can be easily determined by reading the amount of movement from the origin of coordinates 9 and substituting it for x in equation (1).
いま、被検面１０５の屈折率をｎとして、ｎ−
１を(1)式の両辺にかけると、
（ｎ−１）／ｒ＝−（ｎ−１）／f2ｘ ……(2)
となつて、左辺は屈折面のパワーを与える式であ
る。 Now, assuming that the refractive index of the surface to be inspected 105 is n, n-
Multiplying both sides of equation (1) by 1 gives (n-1)/r=-(n-1)/f 2 x ...(2), and the left side is the equation that gives the power of the refractive surface. .
それゆえ、本発明の装置は、直接的には屈折面
パワーを測定する装置と云えるものである。 Therefore, the device of the present invention can be directly said to be a device for measuring refractive surface power.
尚、枠１０９の移動量を、移動方向に応じて、
正負の符号つきで読み取れば、被検面１０５の凹
凸に対応して、曲率半径ｒを符号付きで算出する
ことが可能である。 Note that the amount of movement of the frame 109 is determined according to the direction of movement.
If it is read with a positive or negative sign, it is possible to calculate the radius of curvature r with a sign corresponding to the unevenness of the surface to be inspected 105.
更に、もし、ｘを適当な値に固定して、被検面
１０５を除いて全ての光学要素を枠１０９の移動
方向と同じ方向に一体で移動でき、かつその移動
量を測定できるとすると、従来の曲率半径の測定
装置と等価となる。尚、レーザービームは平行光
速で本装置に入射するので、一体で移動する際に
レーザー光源（図に表われていない）まで同時に
移動する必要がないことは明白である。 Furthermore, if x is fixed at an appropriate value and all optical elements except the surface to be inspected 105 can be moved integrally in the same direction as the moving direction of the frame 109, and the amount of movement can be measured, It is equivalent to a conventional curvature radius measurement device. It should be noted that since the laser beam enters the apparatus at parallel light speed, it is clear that when moving together, it is not necessary to move to the laser light source (not shown) at the same time.
以上より、本発明の部分より測定される曲率半
径ｒの範囲を
｜ｒ｜≧｜rn｜
とし、rnは枠１０９の移動量ｘの限界より定まる
最小の絶対値をもつ曲率半径とする。 From the above, the range of the radius of curvature r measured by the part of the present invention is |r|≧|r n |, and r n is the radius of curvature with the minimum absolute value determined by the limit of the movement amount x of the frame 109. .
一方、従来方式による曲率半径ｒの測定範囲を
｜ｒ｜≧｜rM｜
とし、rMは一体で移動できる移動量の限界より定
まる最大の絶対値をもつ曲率半径とすると、も
し、｜rn｜≦｜rM｜が満足されるのならば、全て
の曲率半径を測定しうるコンパクトな装置を提供
するという目的を達する。 On the other hand, if the measurement range of the radius of curvature r using the conventional method is |r|≧|r M |, and r M is the radius of curvature with the maximum absolute value determined by the limit of the amount of movement that can be made as a unit, then if |r If n |≦|r M | is satisfied, the objective of providing a compact device capable of measuring all radii of curvature is achieved.
事実、｜rn｜≦｜rM｜なる条件を満たすことは
容易に可能である。また、本発明にかかる装置で
は、常にオートコリメーシヨンの位置を探してい
るので、被検面１０５の面精度をいつも観察して
いるのと同じである。すなわち、本発明の目的は
全て達成されたといえる。 In fact, it is easily possible to satisfy the condition |r n |≦|r M |. Furthermore, since the apparatus according to the present invention constantly searches for the autocollimation position, it is the same as constantly observing the surface accuracy of the surface to be inspected 105. In other words, it can be said that all the objects of the present invention have been achieved.
なお、レーザービームは、コンデンサーレンズ
１０２まで平行光束であるから、あらかじめハー
フミラー１０１とコンデンサーレンズ１０２の間
隔を十分確保しておけば、測定は、枠１０９の移
動によるものではなく、単にコンデンサーレンズ
１０２のみの移動だけでも達成できることは明ら
かである。 Note that since the laser beam is a parallel beam up to the condenser lens 102, if a sufficient distance is secured between the half mirror 101 and the condenser lens 102 in advance, the measurement will not be due to the movement of the frame 109, but will simply be due to the condenser lens 102. It is clear that this can be achieved by just moving the chisel.
ｆ 効 果
以上に述べた如く、コンデンサーレンズによつ
て生成された２次光源を対物レンズにより再結像
した位置と、被検面のオートコリメーシヨンの位
置との間の距離から、被検面の曲率半径を求める
従来からの装置に対して、対物レンズの像側焦点
上に固定開口を設置し、２次光源と対物レンズと
の間の距離が変化できるようにし、その距離を読
みとることによつて、固定開口に当てつけられて
いる被検面の曲率半径及び屈折面パワーを式(1)及
び式(2)から算出して求める機能を付加すること
で、全ての曲率半径を測定することが可能となつ
た。f Effect As mentioned above, the distance between the position where the secondary light source generated by the condenser lens is re-imaged by the objective lens and the autocollimation position on the test surface In contrast to the conventional device for determining the radius of curvature of a surface, a fixed aperture is installed on the image side focal point of the objective lens, the distance between the secondary light source and the objective lens can be changed, and the distance can be read. All radii of curvature can be measured by adding a function to calculate the radius of curvature and refracting surface power of the surface to be measured that is applied to the fixed aperture from equations (1) and (2). It became possible.
更に、局所的な面精度に関しても、全ての曲率
半径に渡つて１つの装置で観察が可能となつた。
しかも、本発明にかかる装置は、コンバクトで卓
上にて簡易に取り扱うことが可能であるという効
果を有することが明らかとなつた。 Furthermore, it has become possible to observe local surface accuracy over all radii of curvature with one device.
Furthermore, it has been revealed that the apparatus according to the present invention has the advantage that it is compact and can be easily handled on a tabletop.
第１図は、本発明の一実施例を示す説明図、第
２図ａは従来例の曲率半径を測定する装置にて、
凹面を被検面としたときの測定原理図、第２図ｂ
は同じく凸面を被検面としたときの測定原理図で
ある。
FIG. 1 is an explanatory diagram showing an embodiment of the present invention, and FIG. 2 a shows a conventional device for measuring the radius of curvature.
Diagram of the measurement principle when a concave surface is the test surface, Figure 2b
is a diagram of the measurement principle when a convex surface is similarly used as the surface to be tested.
Claims (1)
光源を対物レンズにより再結像した位置と、被検
面のオートコリメーシヨンの位置との間の距離か
ら、被検面の曲率半径を求める装置において、 対物レンズの像側焦点上に固定開口を設置し、 ２次光源と対物レンズとの間の距離を変化でき
る様になし、 該距離を読みとる手段を含んでなり、 前記固定開口に被検面を当てつけて前記２次光
源と対物レンズ間の距離を変化し、オートコリメ
ーシヨンの位置が求まつた所の距離を読みとつて （ｎ−１）／ｒ＝−（ｎ−１）／f2ｘ又は１／ｒ＝−
ｘ／f2 なる式から被検面の屈折面パワー及び曲率半径を
求めることを特徴とする光学部品等の曲面測定装
置。ここで、ｆは対物レンズの焦点距離、ｒは被
検面の曲率半径、ｎは被検面の屈折率、ｘは対物
レンズの物側焦点からコンデンサーレンズによる
ビームの集光点までの距離である。 ２ 特許請求の範囲第１項において、光源に直線
偏光されたレーザーを用い、前記対物レンズと前
記固定開口との間にλ／４板を配置し、スクリー
ンに近接して偏光板を置き、迷光を除去するよう
偏光方向を調整したことを特徴とする光学部品等
の曲面測定装置。[Claims] 1. The distance between the position where the secondary light source generated by the condenser lens is re-imaged by the objective lens and the auto-collimation position on the test surface. A device for determining the radius of curvature, comprising: a fixed aperture placed above the image-side focal point of the objective lens so that the distance between the secondary light source and the objective lens can be changed; and means for reading the distance; Place the test surface against the fixed aperture, change the distance between the secondary light source and the objective lens, read the distance where the autocollimation position is found, and calculate (n-1)/r=-( n-1)/f 2 x or 1/r=-
A curved surface measuring device for optical components, etc., characterized by determining the refractive surface power and radius of curvature of a surface to be inspected from the formula x/f 2 . Here, f is the focal length of the objective lens, r is the radius of curvature of the surface to be measured, n is the refractive index of the surface to be measured, and x is the distance from the object side focus of the objective lens to the condensing point of the beam by the condenser lens. be. 2. In claim 1, a linearly polarized laser is used as a light source, a λ/4 plate is placed between the objective lens and the fixed aperture, and a polarizing plate is placed close to the screen to eliminate stray light. An apparatus for measuring curved surfaces of optical components, etc., characterized in that the direction of polarization is adjusted to remove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19089086A JPS6347607A (en) | 1986-08-13 | 1986-08-13 | Apparatus for measuring curved surface of optical parts |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19089086A JPS6347607A (en) | 1986-08-13 | 1986-08-13 | Apparatus for measuring curved surface of optical parts |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6347607A JPS6347607A (en) | 1988-02-29 |
| JPH0569362B2 true JPH0569362B2 (en) | 1993-09-30 |
Family
ID=16265440
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19089086A Granted JPS6347607A (en) | 1986-08-13 | 1986-08-13 | Apparatus for measuring curved surface of optical parts |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6347607A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2636378B2 (en) * | 1988-11-04 | 1997-07-30 | ユー・シー・インダストリーズ・インコーポレーテッド | Foam extrusion apparatus and method |
| JP2736997B2 (en) * | 1989-04-27 | 1998-04-08 | 本田技研工業株式会社 | Valve drive device and valve drive method for internal combustion engine |
-
1986
- 1986-08-13 JP JP19089086A patent/JPS6347607A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6347607A (en) | 1988-02-29 |
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| LAPS | Cancellation because of no payment of annual fees |