JPH0569548A - Piezoelectric element bonding method - Google Patents
Piezoelectric element bonding methodInfo
- Publication number
- JPH0569548A JPH0569548A JP23350791A JP23350791A JPH0569548A JP H0569548 A JPH0569548 A JP H0569548A JP 23350791 A JP23350791 A JP 23350791A JP 23350791 A JP23350791 A JP 23350791A JP H0569548 A JPH0569548 A JP H0569548A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- adhesive tape
- substrate
- adhering
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
(57)【要約】
【目的】基板に対して複数圧電素子を位置精度良くかつ
十分に密着させて接着する圧電素子の接着方法を提供す
る。
【構成】複数圧電素子を相対位置関係を保持させた状態
で一方の面で粘着テープに仮貼着する第１の工程と；各
圧電素子の他方の面を接着剤を介して基板に位置決めし
て仮置きする第２の工程と；各圧電素子の平面形状，寸
法に応じた平面部分を突出表面とし、相対位置関係を保
持して配置される突出部が、一体的に形成されてなる共
通な弾性部材を用いて、粘着テープの貼着面とは逆側で
各圧電素子に応じた表面部分に、対応する突出部の突出
表面を当接させる形で加圧する第３の工程と；からな
る。
(57) [Abstract] [PROBLEMS] To provide a method for adhering a plurality of piezoelectric elements to a substrate with good positional accuracy and sufficient adhesion. [Structure] A first step of temporarily adhering a plurality of piezoelectric elements to an adhesive tape on one surface while maintaining a relative positional relationship; positioning the other surface of each piezoelectric element on a substrate through an adhesive. And a second step of temporarily placing the piezoelectric element on a flat surface corresponding to the planar shape and size of each piezoelectric element as a projecting surface, and a projecting section that is arranged in a relative positional relationship is integrally formed. A third step of applying pressure using a different elastic member such that the protruding surface of the corresponding protruding portion is brought into contact with the surface portion corresponding to each piezoelectric element on the side opposite to the sticking surface of the adhesive tape; Become.
Description
【０００１】[0001]
【産業上の利用分野】この発明は、とくにインクジェッ
ト記録ヘッド用の振動板に対して複数圧電素子を位置精
度良くかつ十分に密着させて接着し、もって噴射性能ひ
いては印字品質の向上を図る圧電素子の接着方法に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric element for adhering a plurality of piezoelectric elements to a vibrating plate for an ink jet recording head with good positional accuracy and sufficient close contact, thereby improving jetting performance and thus printing quality. Regarding the adhesion method.
【０００２】[0002]
【従来の技術】従来方法について、それが適用されたイ
ンクジェット記録ヘッド（以下、記録ヘッドという）の
最終工程における側面図である図２を参照しながら説明
する。この従来方法に係る記録ヘッドは、両面に圧電素
子が接着される方式である。図２において、１は加圧室
やノズル等が溝の形で形成されるシリコンの基板、２は
ガラスの振動板、３はインク噴射の駆動力を加える圧電
素子、４は粘着テープ、５は接着剤、７は基台、８は重
り、９は加圧ゴムである。まず第１工程では、複数の圧
電素子３が相対位置関係を保持させた状態で一方の面で
粘着テープ４に仮貼着される。第２工程では、この粘着
テープ４に仮貼着された各圧電素子３が他方の面で接着
剤５を介して振動板２の表面に位置決めして仮置きされ
る。最終工程の第３工程では、振動板２の表面に接着剤
５を介して仮置きされた各圧電素子３が、平板状の加圧
ゴム９を介し、上下各側から基台７，重り８によって挟
まれた形で加圧される。2. Description of the Related Art A conventional method will be described with reference to FIG. 2 which is a side view of a final step of an ink jet recording head (hereinafter referred to as a recording head) to which the conventional method is applied. The recording head according to this conventional method is a system in which piezoelectric elements are adhered to both surfaces. In FIG. 2, 1 is a silicon substrate in which pressure chambers and nozzles are formed in the shape of grooves, 2 is a glass vibration plate, 3 is a piezoelectric element that applies a driving force for ink ejection, 4 is an adhesive tape, and 5 is An adhesive, 7 is a base, 8 is a weight, and 9 is a pressure rubber. First, in the first step, the plurality of piezoelectric elements 3 are temporarily attached to the adhesive tape 4 on one surface while maintaining the relative positional relationship. In the second step, each piezoelectric element 3 temporarily attached to the adhesive tape 4 is positioned and temporarily placed on the surface of the diaphragm 2 via the adhesive 5 on the other surface. In the third step of the final step, each piezoelectric element 3 temporarily placed on the surface of the vibration plate 2 with the adhesive 5 interposed therebetween is pressed with the flat press rubber 9 from above and below to the base 7 and the weight 8 respectively. It is pressed in the form sandwiched by.
【０００３】[0003]
【発明が解決しようとする課題】従来方法では、各圧電
素子に働く加圧力が不均一になる傾向が若干ながらみら
れる。それは、加圧ゴムで、隣り合う圧電素子を加圧す
る部分が互いに影響し合う結果であると思われる。その
ため、側方の力を受けて圧電素子の位置ずれを生じた
り、またはある圧電素子が振動板に対し十分に密着して
接着されない、などの問題を起こす。これらの問題は、
とくに圧電素子が記録ヘッドに適用されるときには、圧
電素子の歪みが的確に加圧室に伝達されず、インクの噴
射性能ひいては印字品質を低下させる結果を招きかねな
い。In the conventional method, there is a slight tendency that the pressure applied to each piezoelectric element becomes non-uniform. It is considered that this is a result of the pressure rubbers that the portions that press the adjacent piezoelectric elements influence each other. Therefore, there arises a problem that the piezoelectric element is displaced due to a lateral force, or that a certain piezoelectric element is not sufficiently adhered and adhered to the diaphragm. These issues are
Especially when the piezoelectric element is applied to a recording head, the distortion of the piezoelectric element is not accurately transmitted to the pressure chamber, which may result in deterioration of ink ejection performance and thus print quality.
【０００４】この発明の課題は、従来の技術がもつ以上
の問題点を解消し、基板に対して複数圧電素子を位置精
度良くかつ十分に密着させて接着する圧電素子の接着方
法を提供することにある。SUMMARY OF THE INVENTION An object of the present invention is to solve the above problems of the prior art and to provide a method for adhering a plurality of piezoelectric elements to a substrate with sufficient positional accuracy and sufficient adhesion. It is in.
【０００５】[0005]
【課題を解決するための手段】請求項１に係る圧電素子
の接着方法は、基板に複数圧電素子を位置決めして接着
する方法において、この各圧電素子を相対位置関係を保
持させた状態で一方の面で粘着テープに仮貼着する第１
の工程と；この粘着テープに仮貼着された各圧電素子を
他方の面で接着剤を介して前記基板に位置決めして仮置
きする第２の工程と；前記各圧電素子の平面形状，寸法
に応じた平面部分を突出表面とし、前記相対位置関係を
保持して配置される突出部が、一体的に形成されてなる
共通な弾性部材を用いて、前記粘着テープの貼着面とは
逆側で前記各圧電素子に応じた表面部分に、対応する前
記突出部の突出表面を当接させる形で加圧する第３の工
程と；を備える。According to a first aspect of the present invention, there is provided a piezoelectric element bonding method, wherein a plurality of piezoelectric elements are positioned and bonded to a substrate, and the piezoelectric elements are held in a relative positional relationship. First to temporarily attach to adhesive tape
A second step of positioning and temporarily placing each piezoelectric element temporarily attached to this adhesive tape on the substrate on the other surface via an adhesive agent; and a planar shape and dimensions of each piezoelectric element. Is a projecting surface, and a projecting portion that is arranged while maintaining the relative positional relationship is formed using a common elastic member that is integrally formed, and is opposite to the sticking surface of the adhesive tape. And a third step of applying pressure to the surface portion corresponding to each piezoelectric element on the side so as to abut the protruding surface of the corresponding protruding portion.
【０００６】請求項２に係る圧電素子の接着方法は、請
求項１に記載の方法において、圧電素子が、基板の両側
各面に接着される。A method for adhering a piezoelectric element according to a second aspect is the method according to the first aspect, wherein the piezoelectric element is adhered to each side surface of the substrate.
【０００７】請求項３に係る圧電素子の接着方法は、請
求項１または２に記載の方法において、圧電素子が、イ
ンクジェット記録ヘッド用である。According to a third aspect of the present invention, there is provided a piezoelectric element bonding method, wherein the piezoelectric element is for an ink jet recording head.
【０００８】[0008]
【作用】請求項１ないし３のいずれかに係る圧電素子の
接着方法では、第１工程で、各圧電素子が、相対位置関
係を保持させた状態で一方の面で粘着テープに仮貼着さ
れ、第２工程で、各圧電素子の他方の面が、接着剤を介
し基板に位置決め，仮置きされ、第３工程で、弾性部材
を用い、その各突出部と圧電素子とを対応させ圧力が均
一化される形で、粘着テープの貼着面とは逆側の表面が
加圧され、また隣り合うもの同士の間で圧力の不均一に
よる側方の力を受けることがない。In the method for adhering a piezoelectric element according to any one of claims 1 to 3, in the first step, each piezoelectric element is temporarily attached to an adhesive tape on one surface while maintaining a relative positional relationship. In the second step, the other surface of each piezoelectric element is positioned and temporarily placed on the substrate via an adhesive, and in the third step, an elastic member is used to make each protrusion and the piezoelectric element correspond to each other. In a uniformed form, the surface of the pressure-sensitive adhesive tape opposite to the surface on which the adhesive tape is adhered is pressed, and no lateral force due to uneven pressure is applied between adjacent ones.
【０００９】[0009]
【実施例】この発明に係る圧電素子の接着方法の適用例
について、以下に図を参照しながら説明する。この発明
方法の適用例が従来方法のそれと異なる点は、加圧ゴム
の形状にある。図１は適用された記録ヘッドの最終工程
における側面図である。この適用例における記録ヘッド
は、両面に圧電素子が固着される方式である。図１にお
いて、加圧ゴム６は各圧電素子３に対応する突出部６ａ
を一体的に具備する形で形成される。この突出部６ａ
は、圧電素子３の平面形状，寸法に応じた平面部分を突
出表面とし、相対位置関係を保持して配置される。DESCRIPTION OF THE PREFERRED EMBODIMENTS An application example of the piezoelectric element bonding method according to the present invention will be described below with reference to the drawings. The application of the method of the present invention differs from that of the conventional method in the shape of the pressure rubber. FIG. 1 is a side view in the final process of the applied recording head. The recording head in this application example is a system in which piezoelectric elements are fixed on both surfaces. In FIG. 1, the pressure rubber 6 is a protrusion 6 a corresponding to each piezoelectric element 3.
Is integrally formed. This protrusion 6a
Are arranged such that the plane portion corresponding to the plane shape and size of the piezoelectric element 3 is the protruding surface and the relative positional relationship is maintained.
【００１０】接着方法について述べると、第１工程で、
各圧電素子３が、相対位置関係を保持させた状態で一方
の面で粘着テープ４に仮貼着され、第２工程で、各圧電
素子４の他方の面が、接着剤５を介し基板１に位置決
め，仮置きされ、第３工程で、加圧ゴム６を用い、その
各突出部６ａと圧電素子３とを対応させ、粘着テープ４
の貼着面とは逆側の表面が、上下各側から基台７，重り
８によって挟まれた形で加圧される。その結果、各圧電
素子３に、対応する突出部６ａだけによる均一化された
形で圧力が加えられ、また隣り合うもの同士の間で圧力
の不均一による側方の力を受けることがない。The adhesion method will be described below.
Each piezoelectric element 3 is temporarily attached to the adhesive tape 4 on one surface while maintaining the relative positional relationship, and in the second step, the other surface of each piezoelectric element 4 is bonded to the substrate 1 via the adhesive 5. Then, in the third step, the pressure rubber 6 is used, the respective protrusions 6a of the pressure rubber 6 are made to correspond to the piezoelectric elements 3, and the adhesive tape 4 is attached.
The surface on the side opposite to the sticking surface is pressed by the base 7 and the weight 8 from the upper and lower sides. As a result, the pressure is applied to each piezoelectric element 3 in a uniformed manner only by the corresponding protrusions 6a, and the lateral force due to the non-uniformity of pressure between adjacent elements is not received.
【００１１】[0011]
【発明の効果】請求項１ないし３のいずれかに係る圧電
素子の接着方法では、第１工程で、各圧電素子が、相対
位置関係を保持させた状態で一方の面で粘着テープに仮
貼着され、第２工程で、各圧電素子の他方の面が、接着
剤を介して基板に位置決めして仮置きされ、第３工程
で、弾性部材を用い、その各突出部と圧電素子とを対応
させ圧力が均一化される形で、粘着テープの貼着面とは
逆側の表面が加圧される。また、隣り合うもの同士の間
で圧力の不均一による側方の力を受けることがないか
ら、基板に対して複数圧電素子が、すべて位置精度良く
かつ十分に密着して接着される。また、各圧電素子が基
板の両側各面に接着されるときも、同様の効果があり、
とくにインクジェット記録ヘッド用のときには、噴射性
能ひいては印字品質の向上が図れる。According to the method of adhering a piezoelectric element according to any one of claims 1 to 3, in the first step, each piezoelectric element is temporarily attached to an adhesive tape on one surface while maintaining a relative positional relationship. Then, in the second step, the other surface of each piezoelectric element is positioned and temporarily placed on the substrate via an adhesive. In a third step, an elastic member is used to separate each protrusion and the piezoelectric element. The surface of the pressure-sensitive adhesive tape opposite to the surface where the adhesive tape is adhered is pressed in such a manner that the pressure is made uniform. In addition, since no lateral force due to non-uniform pressure is applied between adjacent ones, all of the plurality of piezoelectric elements are adhered to the substrate with sufficient positional accuracy and in sufficient contact. Also, when each piezoelectric element is bonded to both sides of the substrate, the same effect can be obtained.
Particularly when used for an ink jet recording head, the ejection performance and thus the printing quality can be improved.
【図１】本発明に係る方法の適用例の最終工程における
側面図FIG. 1 is a side view of a final step of an application example of a method according to the present invention.
【図２】従来方法の適用例の最終工程における側面図FIG. 2 is a side view in a final step of an application example of a conventional method.
１ 基板 ２ 振動板 ３ 圧電素子 ４ 粘着テープ ５ 接着剤 ６ 加圧ゴム ６ａ 突出部 ７ 基台 ８ 重り 1 Substrate 2 Vibration Plate 3 Piezoelectric Element 4 Adhesive Tape 5 Adhesive 6 Pressure Rubber 6a Projection 7 Base 8 Weight
Claims (3)
る方法において、この各圧電素子を相対位置関係を保持
させた状態で一方の面で粘着テープに仮貼着する第１の
工程と；この粘着テープに仮貼着された各圧電素子を他
方の面で接着剤を介して前記基板に位置決めして仮置き
する第２の工程と；前記各圧電素子の平面形状，寸法に
応じた平面部分を突出表面とし、前記相対位置関係を保
持して配置される突出部が、一体的に形成されてなる共
通な弾性部材を用いて、前記粘着テープの貼着面とは逆
側で前記各圧電素子に応じた表面部分に、対応する前記
突出部の突出表面を当接させる形で加圧する第３の工程
と；を備えることを特徴とする圧電素子の接着方法。1. A method of positioning and adhering a plurality of piezoelectric elements to a substrate, the first step of temporarily adhering one of the piezoelectric elements to an adhesive tape while maintaining the relative positional relationship thereof; A second step of positioning and temporarily placing each piezoelectric element temporarily adhered to this adhesive tape on the other surface through an adhesive on the other surface; and a plane corresponding to the planar shape and dimensions of each piezoelectric element. Using a common elastic member formed by integrally forming a projecting portion with the portion as a projecting surface and holding the relative positional relationship, each of the projecting portions is provided on the opposite side of the sticking surface of the adhesive tape. A third step of applying pressure to the surface portion corresponding to the piezoelectric element in such a manner that the protruding surface of the corresponding protruding portion is brought into contact with the surface portion;
は、基板の両側の各面に接着されることを特徴とする圧
電素子の接着方法。2. The method for adhering a piezoelectric element according to claim 1, wherein the piezoelectric element is adhered to each side of the substrate.
圧電素子は、インクジェット記録ヘッド用であることを
特徴とする圧電素子の接着方法。3. The method according to claim 1, wherein
A piezoelectric element bonding method, wherein the piezoelectric element is for an inkjet recording head.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23350791A JPH0569548A (en) | 1991-09-13 | 1991-09-13 | Piezoelectric element bonding method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23350791A JPH0569548A (en) | 1991-09-13 | 1991-09-13 | Piezoelectric element bonding method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0569548A true JPH0569548A (en) | 1993-03-23 |
Family
ID=16956116
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23350791A Pending JPH0569548A (en) | 1991-09-13 | 1991-09-13 | Piezoelectric element bonding method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0569548A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1996041721A1 (en) * | 1995-06-12 | 1996-12-27 | Citizen Watch Co., Ltd. | Ink jet head method of production thereof, and jig for producing ink jet head |
-
1991
- 1991-09-13 JP JP23350791A patent/JPH0569548A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6168255B1 (en) | 1995-06-07 | 2001-01-02 | Citizen Watch Co., Ltd. | Ink jet head method of production thereof, and jig for producing ink jet head |
| WO1996041721A1 (en) * | 1995-06-12 | 1996-12-27 | Citizen Watch Co., Ltd. | Ink jet head method of production thereof, and jig for producing ink jet head |
| EP1034929A1 (en) * | 1995-06-12 | 2000-09-13 | Citizen Watch Co., Ltd. | Jig for manufacturing an ink jet head |
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