JPH0571952A - Measuring apparatus for surface roughness - Google Patents
Measuring apparatus for surface roughnessInfo
- Publication number
- JPH0571952A JPH0571952A JP25845591A JP25845591A JPH0571952A JP H0571952 A JPH0571952 A JP H0571952A JP 25845591 A JP25845591 A JP 25845591A JP 25845591 A JP25845591 A JP 25845591A JP H0571952 A JPH0571952 A JP H0571952A
- Authority
- JP
- Japan
- Prior art keywords
- surface roughness
- detection
- parameter
- data
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003746 surface roughness Effects 0.000 title claims abstract description 76
- 238000001514 detection method Methods 0.000 claims abstract description 45
- 238000011156 evaluation Methods 0.000 claims abstract description 33
- 238000004364 calculation method Methods 0.000 claims description 17
- 238000005259 measurement Methods 0.000 claims description 9
- 238000010586 diagram Methods 0.000 description 8
- 241001422033 Thestylus Species 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 1
- 238000004439 roughness measurement Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は表面粗さ測定装置、特に
粗さパラメータの演算機構の改良に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface roughness measuring device, and more particularly to improvement of a roughness parameter calculating mechanism.
【０００２】[0002]
【従来の技術】被測定物の表面粗さを評価する装置とし
て表面粗さ測定装置が周知であり、該表面粗さ測定装置
は被測定物表面よりその凹凸を検出する検出手段と、該
検出手段より得られた凹凸情報に基づき表面粗さを適切
に表現するパラメータを出力するパラメータ演算手段と
を備えている。2. Description of the Related Art A surface roughness measuring device is well known as a device for evaluating the surface roughness of an object to be measured. The surface roughness measuring device includes a detecting means for detecting irregularities on the surface of the object to be measured, and the detecting means. And parameter calculation means for outputting a parameter that appropriately expresses the surface roughness based on the unevenness information obtained by the means.
【０００３】すなわち、検出手段より得られた凹凸情報
をそのまま表示するのみでは、単に表面状態を示す粗さ
曲線が得られるのみであり、その表面粗さを適切に把握
することができない。That is, if the unevenness information obtained by the detecting means is displayed as it is, only the roughness curve showing the surface condition can be obtained, and the surface roughness cannot be properly grasped.
【０００４】そこで、従来より粗さパラメータとして、
粗さ曲線とその中心線までの偏差の絶対値の平均である
中心線平均値、最も高い山頂から最も深い谷底までの高
さ方向の距離である最大高さなどを用い、被測定物の表
面粗さを適切に表現することが試みられていた。Therefore, as a roughness parameter, conventionally,
The surface of the measured object using the roughness curve and the center line average value that is the average of the absolute values of the deviations to the center line, and the maximum height that is the distance in the height direction from the highest peak to the deepest valley bottom. It has been attempted to properly express the roughness.
【０００５】[0005]
【発明が解決しようとする課題】ところで、従来の表面
粗さ測定装置は、検出した断面曲線もしくは粗さ曲線を
二次元データとして処理することを原則としており、し
かも粗さパラメータの演算に際しては曲線全区間を対象
とした唯一の値を出力するものである。しかし、現実の
測定対象面における粗さパラメータ値の分布は、直線区
間内で通常かなりのバラツキを示すことが知られてお
り、実際的な粗さ測定を行なうためには、このバラツキ
を考慮したデータ処理を併用することが必要である。By the way, in the conventional surface roughness measuring apparatus, it is a principle to process the detected cross-section curve or roughness curve as two-dimensional data. It outputs a unique value for all intervals. However, it is known that the actual distribution of roughness parameter values on the surface to be measured shows a considerable variation within a straight line section, and this variation has been taken into consideration in order to perform actual roughness measurement. It is necessary to use data processing together.
【０００６】これに対し、近年三次元粗さ測定装置とし
て断面曲線もしくは粗さ曲線をそれらの抽出断面に垂直
な方向の配列として検出し得るものも見受けられ、その
粗さパラメータの演算機能は、配列曲線群を構成する各
々を個別的に扱って前記同様の処理を行なうものと、全
曲線を一群の三次元データとして統計的に処理するもの
がある。しかしながら、一個の測定対象面に於ける粗さ
の異方性は甚だしく、その異方性を必然的に排除する従
来の三次元粗さ測定装置には課題が多々残されていた。On the other hand, in recent years, it has been found that a three-dimensional roughness measuring device can detect a cross-section curve or a roughness curve as an array in a direction perpendicular to the extracted cross-section, and the function of calculating the roughness parameter is There are one that individually treats each constituting the array curve group and performs the same processing as described above, and one that statistically processes all the curves as a group of three-dimensional data. However, the anisotropy of roughness on one surface to be measured is extremely large, and many problems remain in the conventional three-dimensional roughness measuring device that necessarily eliminates the anisotropy.
【０００７】さらに、断面曲線を二次元データとして処
理する表面粗さ測定装置と同様に、粗さパラメータは面
領域内においても大きなバラツキを示し、このバラツキ
を考慮したパラメータ演算は三次元データとして取扱う
場合にも行なわれていなかった。本発明は前記従来技術
の課題に鑑みなされたものであり、その目的は断面曲線
もしくは粗さ曲線、更にはそれらの集合に対し、全体を
唯一の値として評価するだけであった粗さパラメータの
演算処理機能を、二次元粗さパラメータによる局部的評
価の連続、ないし断続的分布を求められる表面粗さ測定
装置を提供することにある。Further, similar to the surface roughness measuring device that processes a cross-section curve as two-dimensional data, the roughness parameter shows a large variation even within the surface area, and the parameter calculation in consideration of this variation is treated as three-dimensional data. Even if it wasn't done. The present invention has been made in view of the above-mentioned problems of the prior art, and the object thereof is a cross-section curve or a roughness curve, and further, with respect to a set thereof, the roughness parameter that was only evaluated as a whole. It is an object of the present invention to provide a surface roughness measuring device having a calculation processing function capable of obtaining a continuous or intermittent distribution of local evaluation based on a two-dimensional roughness parameter.
【０００８】[0008]
【課題を解決するための手段】前記目的を達成するため
に本発明にかかる表面粗さ測定装置は、表面粗さ検出手
段と、検出位置制御手段と、検出信号記憶手段と、パラ
メータ演算表示手段とを備える。そして、表面粗さ検出
手段は、被測定物の表面粗さを検出する。また、検出位
置制御手段は、該表面粗さ検出手段の検出位置を被測定
面の基準点に位置させ、該基準点より表面粗さ検出手段
を所定範囲で走査する。検出信号記憶手段は、前記被測
定物の表面粗さデータを、被測定部位の位置とその部位
における表面粗さの検出データを対応づけて記憶する。To achieve the above object, a surface roughness measuring device according to the present invention comprises a surface roughness detecting means, a detection position controlling means, a detection signal storing means, and a parameter calculation displaying means. With. The surface roughness detecting means detects the surface roughness of the measured object. Further, the detection position control means positions the detection position of the surface roughness detection means at a reference point of the surface to be measured, and scans the surface roughness detection means from the reference point within a predetermined range. The detection signal storage means stores the surface roughness data of the object to be measured in association with the position of the measurement site and the detection data of the surface roughness at the site.
【０００９】パラメータ演算表示手段は、前記検出信号
記憶手段に記憶された表面粗さデータ及びその座標値に
基づき、前記表面粗さ検出手段の走査検出する全区間よ
りも短く設定された評価区間を、表面粗さ検出手段の移
動方向に所望長さづつスライドさせながら、前記表面粗
さの検出データ及び必要に応じて該位置の座標値を演算
し、評価区間毎のパラメータ値を算出して表示する。The parameter calculation display means, based on the surface roughness data and its coordinate values stored in the detection signal storage means, sets an evaluation section set to be shorter than the entire section for scanning detection of the surface roughness detection means. While sliding the desired length in the movement direction of the surface roughness detecting means, the detection data of the surface roughness and the coordinate value of the position if necessary are calculated, and the parameter value for each evaluation section is calculated and displayed. To do.
【００１０】[0010]
【作用】本発明にかかる表面粗さ測定装置は、前述した
ように表面粗さデータは一時的にその座標値と対応させ
て検出信号記憶手段に記憶される。そして、パラメータ
演算表示手段により、粗さ曲線を分割した複数の評価区
間毎にパラメータ値を求めるので、被測定物の局部的な
粗さパラメータの連続・断続分布を求めることが可能と
なる。In the surface roughness measuring device according to the present invention, as described above, the surface roughness data is temporarily stored in the detection signal storage means in correspondence with the coordinate values thereof. Then, the parameter calculation display means obtains the parameter value for each of the plurality of evaluation sections obtained by dividing the roughness curve, so that it is possible to obtain the continuous / intermittent distribution of the local roughness parameter of the object to be measured.
【００１１】[0011]
【実施例】以下、図面に基づき本発明の好適な実施例を
説明する。なお、本発明は実施例に限定されるものでは
ない。図１には本発明の一実施例にかかる表面粗さ測定
装置の概略構成が示されている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT A preferred embodiment of the present invention will be described below with reference to the drawings. The present invention is not limited to the embodiments. FIG. 1 shows a schematic structure of a surface roughness measuring apparatus according to an embodiment of the present invention.
【００１２】同図に示す表面粗さ測定装置１０は、プロ
ーブを被測定物表面に接触・移動させ、その表面粗さを
検出する接触式表面粗さ測定装置であり、ベース１２上
に立設された支柱１４と、該支柱１４に支持された表面
粗さ検出手段１６とを備える。そして、前記支柱１４に
はアーム１８が上下動可能に支持され、更にアーム１８
には移動部材２０がＸ軸方向に移動可能に支持されてい
る。前記表面粗さ検出手段１６は移動部材２０に固定さ
れ、モータ２２を駆動させて移動部材２０をＸ方向に移
動させることにより、該表面粗さ検出手段１６のＸ方向
への移動を可能としている。A surface roughness measuring device 10 shown in FIG. 1 is a contact type surface roughness measuring device for contacting and moving a probe with respect to the surface of an object to be measured, and detecting the surface roughness thereof. The column 14 and the surface roughness detecting means 16 supported by the column 14. An arm 18 is vertically movably supported on the column 14, and the arm 18 is further supported.
The movable member 20 is supported by the movable member 20 in the X-axis direction. The surface roughness detecting means 16 is fixed to the moving member 20, and by driving the motor 22 to move the moving member 20 in the X direction, the surface roughness detecting means 16 can be moved in the X direction. ..
【００１３】また、アーム１８は支柱に平行に設置され
たボールネジ２４に螺合されており、モータ２６により
ボールネジ２４を回転駆動することにより、該アーム１
８（すなわち表面粗さ検出手段１６）をＺ軸方向に移動
させることができる。一方、ベース１２上にはＹ軸方向
に移動可能なテーブル２８が載置されており、該テーブ
ル２８はモータ３０の回転駆動によりＹ軸方向に移動す
る。この結果、表面粗さ検出手段１６をＸないしＺ方向
に移動し、テーブル２８をＹ方向に移動させることで、
テーブル２８上に載置された被測定物３２と表面粗さ検
出手段１６との相対位置を三軸方向で設定することがで
きる。Further, the arm 18 is screwed into a ball screw 24 installed in parallel with the supporting column, and the ball screw 24 is rotationally driven by a motor 26, whereby the arm 1 is rotated.
8 (that is, the surface roughness detecting means 16) can be moved in the Z-axis direction. On the other hand, a table 28 that is movable in the Y-axis direction is placed on the base 12, and the table 28 is moved in the Y-axis direction by the rotational driving of the motor 30. As a result, by moving the surface roughness detecting means 16 in the X or Z direction and moving the table 28 in the Y direction,
The relative position between the object to be measured 32 placed on the table 28 and the surface roughness detecting means 16 can be set in the triaxial directions.
【００１４】前記各モータ２２，２６，３０は、それぞ
れドライバー４０，４２，４４を介して各軸方向駆動制
御部３４，３６，３８により駆動制御されている。ま
た、各モータ２２，２６，３０は、その駆動量を検出す
るロータリーエンコーダ２３，２７，３１を備えてお
り、各エンコーダ２３，２７，３１の出力は各軸方向駆
動制御部３４，３６，３８にフィードバックされる。従
って、検出位置制御手段４６が各駆動制御部３４，３
６，３８に指示することで、表面粗さ検出手段１６を所
望の位置に位置決めする。そして、例えばＹ位置及びＺ
位置を基準位置に設定し、Ｘ方向に表面粗さ検出手段１
６をスライド移動することで、該Ｙ座標における表面粗
さを測定し、更にＹ軸方向位置をずらして同様の操作を
繰返すことで、被測定物３２の測定面の表面粗さ信号を
得ることができる。The respective motors 22, 26, 30 are drive-controlled by respective axial drive control units 34, 36, 38 via drivers 40, 42, 44, respectively. The motors 22, 26, 30 are equipped with rotary encoders 23, 27, 31 for detecting the drive amounts thereof, and the outputs of the encoders 23, 27, 31 are output to the axial drive control units 34, 36, 38. Be fed back to. Therefore, the detection position control means 46 causes the drive control units 34, 3 to
6 and 38, the surface roughness detecting means 16 is positioned at a desired position. Then, for example, Y position and Z
The position is set to the reference position, and the surface roughness detecting means 1 is set in the X direction.
By sliding 6 to measure the surface roughness at the Y-coordinate, and further shifting the position in the Y-axis direction and repeating the same operation, a surface roughness signal of the measurement surface of the DUT 32 is obtained. You can
【００１５】この表面粗さ検出結果はＡ／Ｄ変換器４８
によりデジタル信号に変換され、その検出座標に対応し
て検出信号記憶手段５０に記憶される。ここで、記憶手
段５０はＲＡＭからなり、図２に模式的に示されるよう
に各デジタル信号はその信号の得られた座標（ｘ，ｙ）
に対応してＺxyの形態でマトリックス状に記憶される。
なお、測定範囲が広い場合等データ量が著しく多い場合
には、記憶手段５０としてフロッピーディスク或いはハ
ードディスク等の外部記憶装置を用いることも可能であ
る。そして、検出信号記憶手段５０からの表面粗さ情報
に基づき、パラメータ演算手段５２がパラメータ演算を
行ない、表示手段５４へ所望の表示形式で表面粗さパラ
メータの表示を行なう。This surface roughness detection result is the A / D converter 48.
Is converted into a digital signal by means of, and is stored in the detection signal storage means 50 corresponding to the detected coordinates. Here, the storage means 50 is composed of a RAM, and each digital signal has coordinates (x, y) at which the signal is obtained, as schematically shown in FIG.
Are stored in a matrix in the form of Z xy .
When the amount of data is extremely large such as when the measurement range is wide, an external storage device such as a floppy disk or a hard disk can be used as the storage unit 50. Then, based on the surface roughness information from the detection signal storage means 50, the parameter calculation means 52 performs the parameter calculation and displays the surface roughness parameter on the display means 54 in a desired display format.
【００１６】次に本発明において特徴的なパラメータ演
算方式について説明する。図３に示すように、表面粗さ
検出手段１６の触針５６は、所定Ｙ軸座標上でＸ軸方向
に一単位測定当たり被測定物３２の表面をＬだけ走査す
る。従って、表面粗さデータとしては図４に示すような
断面曲線が得られる。次にＹ軸座標を一単位移動し、更
に同様に被測定物３２の表面をＸ軸方向にＬだけ走査す
る操作を繰返す。この結果、表面粗さデータとしては図
５に示すように、被測定面のＸ−Ｙ面に対応した複数の
断面曲線を得ることができる。Next, a parameter calculation method characteristic of the present invention will be described. As shown in FIG. 3, the stylus 56 of the surface roughness detecting means 16 scans the surface of the DUT 32 per unit measurement in the X-axis direction on the predetermined Y-axis coordinate by L. Therefore, a cross-sectional curve as shown in FIG. 4 is obtained as the surface roughness data. Next, the operation of moving the Y-axis coordinate by one unit and similarly scanning the surface of the DUT 32 by L in the X-axis direction is repeated. As a result, as the surface roughness data, as shown in FIG. 5, a plurality of sectional curves corresponding to the XY plane of the measured surface can be obtained.
【００１７】次に、測定者が任意に設定した評価区間Ｌ
v毎に表面粗さパラメータを算出する。すなわち、図４
において、ｎ番目の評価区間、ｎ＋１番目の評価区間…
というように走査距離Ｌ内で複数個の評価区間が設定さ
れ、この各評価区間毎に所望の表面粗さパラメータＲを
算出している。このようにして、パラメータ演算手段５
２で算出されたパラメータＲも、それぞれ対応する被測
定物３２の座標区域毎に得られることとなり、これらの
パラメータＲは図６に示すようにその得られた座標に応
じてＲx,yの形態でパラメータ記憶手段５８に記憶され
る。Next, the evaluation section L arbitrarily set by the measurer
Calculate the surface roughness parameter for each v . That is, FIG.
, The n-th evaluation section, the (n + 1) -th evaluation section ...
Thus, a plurality of evaluation sections are set within the scanning distance L, and a desired surface roughness parameter R is calculated for each evaluation section. In this way, the parameter calculation means 5
Some parameters R calculated in 2, respectively will be obtained for each coordinate area of the corresponding object to be measured 32, these parameters R is in accordance with the obtained coordinates as shown in FIG. 6 R x, and y It is stored in the parameter storage means 58 in the form.
【００１８】そして、被測定物の座標に応じて表示手段
５４上に例えば一単位走査の結果であれば、図７に示す
ように、又被測定面全体であれば図８に示すようにそれ
ぞれの評価区間のパラメータの連続的ないし断続的な表
示が可能となる。図９には本実施例にかかる表面粗さ測
定装置の作動状態を示すフローチャート図が示されてい
る。同図に示すように、まず触針５６のＸ軸方向測定距
離Ｌを設定し、更に所定Ｙ軸座標値でのＸ軸方向への走
査が終了した後にＹ軸方向へ移動させる駆動ピッチＰ及
びＹ軸方向への駆動回数Ｎ（被測定面上で何本の断面曲
線を得るか）を設定する。Then, according to the coordinates of the object to be measured, as shown in FIG. 7 for the result of, for example, one unit scan on the display means 54, and for the entire surface to be measured, as shown in FIG. It is possible to continuously or intermittently display the parameters of the evaluation section of. FIG. 9 is a flow chart showing the operating state of the surface roughness measuring apparatus according to this embodiment. As shown in the drawing, first, a measurement distance L of the stylus 56 in the X-axis direction is set, and further, a driving pitch P for moving the stylus 56 in the Y-axis direction after scanning in the X-axis direction at a predetermined Y-axis coordinate value and The number of times of driving N in the Y-axis direction (how many cross-section curves are obtained on the surface to be measured) is set.
【００１９】そして測定開始スイッチをＯＮすると、検
出手段１６の触針５６がＺ軸方向に降下し、頂点位置合
せを行なった後、第一回目のＸ軸方向走査が行なわれ
る。そして、検出手段１６からの信号Ｚijをピッチｐ毎
に採取して検出信号記憶手段５０に記憶し、距離Ｌの走
査が終了すると、検出手段１６をＸ方向原点位置に復帰
させる。When the measurement start switch is turned on, the stylus 56 of the detecting means 16 descends in the Z-axis direction, the vertex position is adjusted, and then the first X-axis direction scanning is performed. Then, the signal Z ij from the detection means 16 is sampled for each pitch p and stored in the detection signal storage means 50, and when the scanning of the distance L is completed, the detection means 16 is returned to the X-direction origin position.
【００２０】次に検出手段１６をＹ軸方向にピッチＰだ
け移動させ、同様の走査を繰返し、走査回数ｊがＮとな
ったらば測定走査を終了する。ここで必要により測定手
段１６の上昇、検出信号の表示を行なう。Next, the detecting means 16 is moved in the Y-axis direction by the pitch P, the same scanning is repeated, and when the number of scanning times j becomes N, the measurement scanning is ended. Here, if necessary, the measuring means 16 is raised and the detection signal is displayed.
【００２１】次に所望パラメータの演算を行なうため、
Ｘ軸方向評価範囲Ｘ、Ｙ軸方向評価範囲ｊ、評価区間Ｌ
v、移動長さＬSの設定をおこなう。そして、Ｘ軸方向評
価範囲の算出パラメータ数Ｓを演算し、更に求めるべき
パラメータＲの選択を行なった後、パラメータ演算を開
始する。そして、Ｙ軸方向の基準位置ｊに於ける、各
（Ｘ方向）評価区間について検出データＺmj〜ＺMjを検
出信号記憶手段５０より読み込んでＲajを演算し、パラ
メータ記憶手段５８に記憶する。Next, in order to calculate the desired parameters,
X-axis direction evaluation range X, Y-axis direction evaluation range j, evaluation section L
v , and set the moving length L S. Then, after calculating the number S of calculated parameters in the X-axis direction evaluation range and selecting the parameter R to be obtained, the parameter calculation is started. Then, the detection data Z mj to Z Mj for each (X-direction) evaluation section at the reference position j in the Y-axis direction is read from the detection signal storage means 50, Raj is calculated, and stored in the parameter storage means 58.
【００２２】この操作をＳ回繰返し、Ｘ軸方向評価範囲
についてＳ個の表面粗さパラメータＲajを得る。このＹ
軸位置ｊでのパラメータ算出が終了したならば、次にＹ
軸方向にピッチＰだけ離れた隣接するＸ軸方向評価範囲
についても同様の操作を行なう。全てのパラメータの演
算が終了したらば、各パラメータが得られた被測定物表
面上の座標と対応させて表示手段上にパラメータを三次
元的に出力する。以上説明したように本実施例の表面粗
さ測定装置によれば、被測定物のＸ，Ｙ平面上の表面粗
さを、任意のＸ軸方向評価範囲毎に演算・表示すること
が可能となる。This operation is repeated S times to obtain S surface roughness parameters Raj in the X-axis direction evaluation range. This Y
If the parameter calculation at the axis position j is completed, then Y
The same operation is performed for adjacent evaluation ranges in the X-axis direction that are separated by the pitch P in the axial direction. When the calculation of all the parameters is completed, the parameters are three-dimensionally output on the display means in association with the coordinates on the surface of the measured object where each parameter is obtained. As described above, according to the surface roughness measuring apparatus of this embodiment, it is possible to calculate and display the surface roughness of the object to be measured on the X and Y planes for each arbitrary evaluation range in the X-axis direction. Become.
【００２３】なお、本発明において算出パラメータ数を
多くしたい場合には、例えば図１０ないし図１１に示す
ように移動長さを評価区間より短くし、評価区間が重な
るようにしてもよい。また、本発明において被測定面に
おけるＸ−Ｙ面での面情報を要求されない場合、すなわ
ち一本のＸ軸方向断面曲線だけを対象とする場合には、
例えば図１２に示すように、前記図９に示すフローチャ
ートよりＹ軸方向への移動を行なう工程を除去した手順
で操作を行なえばよい。この場合には前記図７に相当す
る表面粗さパラメータ情報を得ることができる。When it is desired to increase the number of calculation parameters in the present invention, the movement length may be set shorter than the evaluation section so that the evaluation sections overlap each other as shown in FIGS. Further, in the present invention, when the surface information on the XY plane of the measured surface is not required, that is, when only one X-axis direction sectional curve is targeted,
For example, as shown in FIG. 12, the operation may be performed in a procedure in which the step of moving in the Y-axis direction is removed from the flowchart shown in FIG. In this case, the surface roughness parameter information corresponding to FIG. 7 can be obtained.
【００２４】以上説明したように本発明によれば、断面
曲線若しくは粗さ曲線における評価区間方向に沿って粗
さパラメータ値の分布情報を得るために、曲線全区間よ
りも短く設定された評価区間を、同じく設定された移動
長さずつ評価区間方向にずらしながらパラメータ値を求
め、それをグラフ化することとしたので、測定範囲内で
の粗さパラメータのバラツキを適切に拾い上げることが
可能となる。また、この操作を平行測定された複数の断
面曲線に対して行なうことにより、適切な面粗さパラメ
ータ分布を得ることができる。なお、必要に応じて得ら
れたパラメータ値の分布データに統計演算処理等を施
し、平均値、標準偏差等を求めて表示することも好適で
ある。As described above, according to the present invention, in order to obtain the distribution information of the roughness parameter value along the evaluation section direction in the sectional curve or roughness curve, the evaluation section set shorter than the entire curve section. Since it was decided to calculate the parameter value while shifting in the direction of the evaluation section by the same set movement length and graph it, it is possible to appropriately pick up the variation of the roughness parameter within the measurement range. .. Further, by performing this operation on a plurality of cross-section curves measured in parallel, an appropriate surface roughness parameter distribution can be obtained. It is also preferable to subject the distribution data of the parameter values obtained as necessary to statistical calculation processing or the like to obtain and display the average value, standard deviation, and the like.
【００２５】[0025]
【発明の効果】以上説明したように本発明にかかる表面
粗さ測定装置によれば、被測定物の表面粗さデータをそ
の座標値と対応させて記憶する検出信号記憶手段、及び
検出信号記憶手段に記憶された表面粗さデータ及びその
座標値に基づき、曲線全区間よりも短く設定された評価
区間を、所定移動長さづつ評価区間方向にずらしながら
パラメータ値を求めるパラメータ演算手段を備えたの
で、二次元粗さパラメータによる局部的評価の連続、断
続的分布を求めることができる。As described above, according to the surface roughness measuring device of the present invention, the detection signal storage means for storing the surface roughness data of the object to be measured in correspondence with the coordinate values thereof, and the detection signal storage. Based on the surface roughness data and the coordinate values stored in the means, a parameter calculating means for deriving a parameter value while shifting the evaluation section set shorter than the entire curve section in the evaluation section direction by a predetermined movement length is provided. Therefore, it is possible to obtain the continuous or intermittent distribution of the local evaluation based on the two-dimensional roughness parameter.
【図１】本発明の一実施例にかかる表面粗さ測定装置の
概略構成の説明図である。FIG. 1 is an explanatory diagram of a schematic configuration of a surface roughness measuring device according to an embodiment of the present invention.
【図２】図１に示した装置において、検出信号記憶手段
における信号記憶形態の説明図である。FIG. 2 is an explanatory diagram of a signal storage mode in a detection signal storage means in the device shown in FIG.
【図３】図１に示した装置において、表面粗さ検出手段
の作動状態の説明図である。FIG. 3 is an explanatory diagram of an operating state of surface roughness detecting means in the apparatus shown in FIG.
【図４】，[Fig. 4]
【図５】図１に示した装置において、移動長さと評価区
間の関係の一例の説明図である。5 is an explanatory diagram of an example of a relationship between a movement length and an evaluation section in the device shown in FIG.
【図６】図１に示した装置において、処理データの記憶
形態の説明図である。FIG. 6 is an explanatory diagram of a storage form of processed data in the apparatus shown in FIG.
【図７】図４に示したデータに基づく粗さパラメータ分
布曲線の表示例である。7 is a display example of a roughness parameter distribution curve based on the data shown in FIG.
【図８】図５に示したデータに基づく粗さパラメータ分
布曲線の表示例である。8 is a display example of a roughness parameter distribution curve based on the data shown in FIG.
【図９】図１に示した装置の作動状態を示すフローチャ
ート図である。9 is a flow chart diagram showing an operating state of the apparatus shown in FIG. 1. FIG.
【図１０】，FIG. 10
【図１１】図１に示した装置において、移動長さと評価
区間の他の関係の説明図である。FIG. 11 is an explanatory diagram of another relationship between the movement length and the evaluation section in the device shown in FIG.
【図１２】本発明の他の実施例の説明図である。FIG. 12 is an explanatory diagram of another embodiment of the present invention.
１０ 表面粗さ測定装置 １６ 表面粗さ検出手段 ４６ 検出位置制御手段 ５０ 検出信号記憶手段 ５２ パラメータ演算手段 ５４ 表示手段 ５８ パラメータ記憶手段 10 Surface Roughness Measuring Device 16 Surface Roughness Detection Means 46 Detection Position Control Means 50 Detection Signal Storage Means 52 Parameter Calculation Means 54 Display Means 58 Parameter Storage Means
Claims (1)
検出手段と、 該表面粗さ検出手段の検出位置を被測定面の基準点に位
置させ、該基準点より表面粗さ検出手段を所定範囲で走
査する検出位置制御手段と、 前記被測定物の表面粗さデータを、被測定部位の位置と
その部位における表面粗さの検出データを対応づけて記
憶する検出信号記憶手段と、 前記記憶手段に記憶された表面粗さデータ及びその座標
値に基づき、前記表面粗さ検出手段の走査検出する全区
間よりも短く設定された評価区間を、表面粗さ検出手段
の移動方向に所望長さづつスライドさせながら、前記表
面粗さの検出データ及び必要に応じて該位置の座標値を
演算し、評価区間毎のパラメータ値を算出して表示する
パラメータ演算表示手段と、を備えたことを特徴とする
表面粗さ測定装置。1. A surface roughness detecting means for detecting the surface roughness of an object to be measured, and a detection position of the surface roughness detecting means is located at a reference point of a surface to be measured, and the surface roughness is detected from the reference point. Detection position control means for scanning the means in a predetermined range, the surface roughness data of the object to be measured, a detection signal storage means for storing the position of the measurement target and the detection data of the surface roughness at the position in association with each other. , Based on the surface roughness data and its coordinate values stored in the storage means, an evaluation section set shorter than the entire section for scanning detection of the surface roughness detection means, in the moving direction of the surface roughness detection means. And a parameter calculation display means for calculating and displaying the detection data of the surface roughness and the coordinate value of the position as required while sliding the desired length, and calculating and displaying the parameter value for each evaluation section. Table characterized by Surface roughness measuring device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3258455A JPH0820249B2 (en) | 1991-09-09 | 1991-09-09 | Surface roughness measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3258455A JPH0820249B2 (en) | 1991-09-09 | 1991-09-09 | Surface roughness measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0571952A true JPH0571952A (en) | 1993-03-23 |
| JPH0820249B2 JPH0820249B2 (en) | 1996-03-04 |
Family
ID=17320456
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3258455A Expired - Fee Related JPH0820249B2 (en) | 1991-09-09 | 1991-09-09 | Surface roughness measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0820249B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7366637B2 (en) | 2005-11-08 | 2008-04-29 | Mitutoyo Corporation | Form measuring instrument |
| CN116295138A (en) * | 2023-02-15 | 2023-06-23 | 中国铁道科学研究院集团有限公司铁道建筑研究所 | Quantitative evaluation method and system of concrete bonding surface roughness based on DIC |
| CN119748670A (en) * | 2024-10-23 | 2025-04-04 | 杭州华航新材料科技有限公司 | Preparation method of silicon carbide substrate |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62235511A (en) * | 1986-03-11 | 1987-10-15 | Kobe Steel Ltd | Surface condition inspecting apparatus |
| JPH0328708A (en) * | 1989-06-27 | 1991-02-06 | Fanuc Ltd | Measurement and display of surface roughness for object worked by laser |
-
1991
- 1991-09-09 JP JP3258455A patent/JPH0820249B2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62235511A (en) * | 1986-03-11 | 1987-10-15 | Kobe Steel Ltd | Surface condition inspecting apparatus |
| JPH0328708A (en) * | 1989-06-27 | 1991-02-06 | Fanuc Ltd | Measurement and display of surface roughness for object worked by laser |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7366637B2 (en) | 2005-11-08 | 2008-04-29 | Mitutoyo Corporation | Form measuring instrument |
| CN116295138A (en) * | 2023-02-15 | 2023-06-23 | 中国铁道科学研究院集团有限公司铁道建筑研究所 | Quantitative evaluation method and system of concrete bonding surface roughness based on DIC |
| CN119748670A (en) * | 2024-10-23 | 2025-04-04 | 杭州华航新材料科技有限公司 | Preparation method of silicon carbide substrate |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0820249B2 (en) | 1996-03-04 |
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