JPH0573268B2 - - Google Patents

Info

Publication number
JPH0573268B2
JPH0573268B2 JP61283245A JP28324586A JPH0573268B2 JP H0573268 B2 JPH0573268 B2 JP H0573268B2 JP 61283245 A JP61283245 A JP 61283245A JP 28324586 A JP28324586 A JP 28324586A JP H0573268 B2 JPH0573268 B2 JP H0573268B2
Authority
JP
Japan
Prior art keywords
heat
lsi
cooling
heat dissipation
electronic circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61283245A
Other languages
Japanese (ja)
Other versions
JPS63136656A (en
Inventor
Minoru Okano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP61283245A priority Critical patent/JPS63136656A/en
Publication of JPS63136656A publication Critical patent/JPS63136656A/en
Publication of JPH0573268B2 publication Critical patent/JPH0573268B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/851Dispositions of multiple connectors or interconnections
    • H10W72/874On different surfaces
    • H10W72/877Bump connectors and die-attach connectors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/721Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
    • H10W90/724Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL

Landscapes

  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は、電子回路パツケージの放熱構造に関
するもので、特に発熱量の大きい高密度集積回路
素子(以下LSIと云う)からの熱を効率よく放熱
する構造に関する。
[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a heat dissipation structure for an electronic circuit package, and in particular to a structure for efficiently dissipating heat from a high-density integrated circuit element (hereinafter referred to as LSI) that generates a large amount of heat. Regarding structures that dissipate heat.

[従来の技術] 一般に電子機器を構成する電子回路パツケージ
は、配線基板上に多数個のLSI等電子回路部品を
搭載して構成され、電子回路パツケージ収容架に
取付けられている冷却用フアンにより強制空冷さ
れる構造をとる。しかしながら、特に大型の情報
処理装置等においては、装置の高性能化の目的
で、LSI素子は高集積・高速化され、更にこれら
が配線基板上に高密度に実装されるためLSI及び
電子回路パツケージの発熱量及び発熱密度は大幅
に増大し、従来の強制空冷では十分な冷却ができ
なくなりつつある。即ち、高い発熱量・発熱密度
を有するLSI電子回路パツケージを冷却するため
には、大量の冷却空気を必要とするが、冷却用フ
アンの能力及び騒音の点でおのずと制約されるた
めである。このため、空気に比べ熱伝達性能に優
れた液体冷媒を発熱部であるLSIの近傍を循環さ
せ、LSIからの熱を直接伝導により液体冷媒に移
送する熱伝導冷却構造がとられるようになつてき
た。
[Prior Art] An electronic circuit package that constitutes an electronic device is generally constructed by mounting a large number of LSI and other electronic circuit components on a wiring board, and is forced to cool down by a cooling fan attached to the electronic circuit package housing rack. It has an air-cooled structure. However, especially in large-scale information processing equipment, LSI elements are becoming more highly integrated and faster in order to improve the performance of the equipment, and they are also mounted in high density on wiring boards, so LSI and electronic circuit packages are The amount of heat generated and the density of heat generated have increased significantly, and conventional forced air cooling is no longer able to provide sufficient cooling. That is, in order to cool an LSI electronic circuit package that has a high calorific value and heat density, a large amount of cooling air is required, but this is naturally limited by the capacity and noise of the cooling fan. For this reason, a heat conduction cooling structure has been adopted in which a liquid refrigerant, which has superior heat transfer performance compared to air, is circulated near the LSI, which is a heat generating part, and heat from the LSI is transferred to the liquid refrigerant by direct conduction. Ta.

従来、この種の放熱構造をとる電子回路パツケ
ージは、第3図に示すように複数個のLSI2を取
付けたプリント基板1組立体の上面に冷却板5を
取付具6にて規定の間隔を保つてネジ61にて固
定する構造がとれらている。こで、冷却板5は内
部に液体冷媒が循環する流路51を有し、かつ端
部にフレームの冷却配管(図示せず)に接続され
る1対の冷媒出入口52を有している。また、
LSI2の上面と冷却板5の間には、プリント基板
1の反り・ねじれやLSI2の取付高さのバラツ
キ・傾き等を吸収するために金属バネや熱伝導性
ゴム等の可撓性を有する伝熱体7を介在させてお
り、LSI2を熱は伝熱体7、冷却板5、冷媒8の
経路で排熱される構造となつている。
Conventionally, an electronic circuit package with this type of heat dissipation structure has a cooling plate 5 mounted on the top surface of a printed circuit board 1 assembly on which a plurality of LSIs 2 are mounted, using fixtures 6 to maintain a specified interval, as shown in FIG. The structure is such that it is fixed with screws 61. Here, the cooling plate 5 has a flow path 51 through which a liquid refrigerant circulates therein, and has a pair of refrigerant inlet/outlet ports 52 connected to cooling piping (not shown) of the frame at the end thereof. Also,
A flexible conductor such as a metal spring or thermally conductive rubber is installed between the top surface of the LSI 2 and the cooling plate 5 in order to absorb warpage/twisting of the printed circuit board 1 and variation/inclination of the mounting height of the LSI 2. A heating body 7 is interposed, and the heat is dissipated from the LSI 2 through a path of the heat transfer body 7, the cooling plate 5, and the coolant 8.

[解決すべき問題点] しかしながら、上述した従来の電子回路パツケ
ージの放熱構造は、伝熱体7の構造又は材質が問
題となる。即ち、LSI2と冷却板5の間に熱伝導
性ゴムや放熱シート等からなる伝熱体7を介在さ
せる場合は、それ自体が金属等に比べると非常に
熱伝導率が低いため厚みを出来る限り薄くしなけ
ればならず、従つて厚さ方向の可撓性が少なくな
りLSI2の取付け高さのバラツキをかなり厳密に
揃えなければならないといいう欠点が生じる。ま
た、伝熱体7として金属バネやベローズ等を使用
すれば、LSIの取付け高さのバラツキはある程度
大きく容認できうるが、LSI2及びプリント基板
1に対して常に力が加わる構造となるため、プリ
ント基板1及び冷却板5を反りが出ないように堅
牢に作らねばならず、そのための構造が複雑とな
り、かつ重量も重くなるという欠点が生じる。更
には、上記いずれの伝熱体7であつても、冷却板
5とプリント基板組立体が積み重なる構造のた
め、全体の厚みが厚くなりこの電子回路パツケー
ジ組立体を多数枚、三次元的に架に収容する場
合、高密度に実装できず装置の高性能が困難であ
るという致命的な欠点を有する。
[Problems to be Solved] However, in the conventional heat dissipation structure of the electronic circuit package described above, the structure or material of the heat transfer body 7 poses a problem. That is, when interposing the heat transfer body 7 made of thermally conductive rubber, heat dissipation sheet, etc. between the LSI 2 and the cooling plate 5, the thickness should be reduced as much as possible because the heat conductivity itself is very low compared to metal etc. It has to be made thinner, and therefore has less flexibility in the thickness direction, resulting in the drawback that variations in the mounting heights of the LSIs 2 must be fairly closely aligned. Furthermore, if a metal spring, bellows, etc. are used as the heat transfer body 7, variations in the mounting height of the LSI can be tolerated to some extent, but since the structure is such that force is constantly applied to the LSI 2 and the printed circuit board 1, The substrate 1 and the cooling plate 5 must be made robust so as not to warp, resulting in a disadvantage that the structure becomes complicated and the weight increases. Furthermore, in any of the heat transfer bodies 7 described above, since the cooling plate 5 and the printed circuit board assembly are stacked on top of each other, the overall thickness is increased, and a large number of electronic circuit package assemblies must be mounted three-dimensionally. If the device is housed in a large area, it has the fatal disadvantage that high-density packaging is not possible and it is difficult to achieve high performance of the device.

[問題点を解決手段] 上記従来の問題点を解決する本発明の電子回路
パツケージの放熱構造は、配線基板上に複数搭載
される集積回路素子の上部放熱面に、ネジ止め用
のスタツドを設け、上記集積回路素子相互間に内
部を液体冷媒が流れる冷却管を敷設し、かつ上記
冷却管を挟み込んで保持する複数個の熱伝導プレ
ートの両側面を上記スタツドにネジ止めして上記
集積回路素子の上部放熱面に固着して構成してな
る。
[Means for Solving Problems] The heat dissipation structure of the electronic circuit package of the present invention which solves the above-mentioned conventional problems includes providing screw studs on the upper heat dissipation surface of a plurality of integrated circuit elements mounted on a wiring board. , a cooling pipe through which a liquid refrigerant flows is laid between the integrated circuit elements, and both sides of a plurality of heat-conducting plates holding the cooling pipes sandwiched therebetween are screwed to the studs to form the integrated circuit element. It is configured by being fixed to the upper heat dissipation surface of the.

[実施例] 次に本発明の一実施例について図面を参照して
説明する。
[Example] Next, an example of the present invention will be described with reference to the drawings.

第1図aは本発明の一実施例に係る電子回路パ
ツケージの放熱構造の平面図、第1図bは同図の
A−A断面図であり、第2図は同実施例のLSI周
辺を部分拡大した分解斜視図である。
FIG. 1a is a plan view of a heat dissipation structure of an electronic circuit package according to an embodiment of the present invention, FIG. 1b is a sectional view taken along line A-A in the same figure, and FIG. FIG. 3 is a partially enlarged exploded perspective view.

本発明による電子回路パツケージの放熱構造
は、プリント基板等からなる配線基板1とこの基
板上に実装された多数個のLSI2と、配線基板の
部品搭載面側に敷設した冷却管3と、LSI2と冷
却管3とを熱的に接続する複数個の熱伝導プレー
ト4とで構成される。
The heat dissipation structure of the electronic circuit package according to the present invention includes a wiring board 1 made of a printed circuit board or the like, a large number of LSIs 2 mounted on this board, cooling pipes 3 laid on the component mounting surface side of the wiring board, and LSIs 2. It is composed of a plurality of heat conductive plates 4 that thermally connect the cooling pipes 3.

LSI2は、ケースの上面が放熱面となるよう
LSIチツプが内部に封止されており、放熱面上に
垂直に雄ネジをきつたスタツド21がろう付けさ
れる構造をとる。
For LSI2, the top surface of the case is the heat dissipation surface.
The LSI chip is sealed inside, and a male-threaded stud 21 is vertically brazed onto the heat radiation surface.

冷却管3は、内部を水などの液体冷媒8が流れ
る良熱伝導性の金属管(例えば銅管)であり、配
線基板1上に整列して実装されたLSI2の列の少
なくとも一辺と隣接して位置するようにLSI2間
に敷設され冷媒の出入口31,32間で閉じた流
路が形成されている。ここで冷媒8の入口部3
1、出口部32には、架の冷媒系の主配管と容易
に着脱でき且つ着脱しても内部の冷媒8が外部に
漏れ出ないセルフシールカツプラ等が用いられて
いる。
The cooling pipe 3 is a metal pipe (for example, a copper pipe) with good thermal conductivity through which a liquid coolant 8 such as water flows, and is adjacent to at least one side of a row of LSIs 2 arranged and mounted on the wiring board 1. A closed flow path is formed between the refrigerant inlets and outlets 31 and 32. Here, the inlet part 3 of the refrigerant 8
1. For the outlet portion 32, a self-sealing coupler or the like is used, which can be easily attached to and detached from the main piping of the refrigerant system of the rack, and which prevents the internal refrigerant 8 from leaking outside even when attached and detached.

熱伝導プレート4は、2枚の薄い銅板からなる
プレート41,42で構成されている。これら2
枚のプレート41,42は、冷却管3を上下から
狭み込み密着する様中央部が半円状に曲げ加工さ
れており、更に両端の平坦部にはLSI2上にろう
付けされているスタツド21に嵌合する穴43が
夫々明けられている。この2枚のプレート41,
42は、LSI2を配線基板1上に半田付けした
後、冷却管3を中央にして上下から挟み付けなが
ら冷却管3の両側に位置するLSI2の上面に密着
するように取付けられ、ワツシヤ22、ナツト2
3によりスタツド21に機械的に固定される。
The heat conduction plate 4 is composed of plates 41 and 42 made of two thin copper plates. These 2
The plates 41 and 42 are bent into a semicircular shape at the center so that they squeeze the cooling pipe 3 from above and below and are in close contact with each other, and the flat parts at both ends have studs 21 which are brazed on the LSI 2. A hole 43 that fits into each is drilled. These two plates 41,
After the LSI 2 is soldered onto the wiring board 1, the washer 22 and the nut 42 are attached to the top surface of the LSI 2 located on both sides of the cooling pipe 3 by sandwiching them from above and below with the cooling pipe 3 in the center. 2
3 mechanically fixed to the stud 21.

このような構造をとることにより、LSI2で発
生した熱は、LSI2の放熱面→熱伝導プレート4
→冷却管3→冷媒8といつた熱伝導経路で排熱さ
れることにより、極めて効率の良い冷却特性を得
ることができる。即ち、液体冷媒8をLSI2のす
ぐ近傍を循環させ、LSI2と冷媒8間を熱伝導率
の良い金属板からなる熱伝導プレート4を用いて
機械的に強固に接続したことにより、伝熱経路を
極めて短くなり、またLSI2と熱伝導プレート4
及び熱伝導プレート4と冷却管3の接触部の熱抵
抗も十分小さくできる。
With this structure, the heat generated in LSI 2 is transferred from the heat dissipation surface of LSI 2 to the heat conduction plate 4.
By discharging heat through the heat conduction path of → cooling pipe 3 → refrigerant 8, extremely efficient cooling characteristics can be obtained. That is, by circulating the liquid refrigerant 8 in the immediate vicinity of the LSI 2 and mechanically and firmly connecting the LSI 2 and the refrigerant 8 using the heat conduction plate 4 made of a metal plate with good thermal conductivity, the heat transfer path is established. It is extremely short, and LSI 2 and heat conduction plate 4
The thermal resistance of the contact portion between the heat conductive plate 4 and the cooling pipe 3 can also be made sufficiently small.

更に、熱伝導プレート4の薄い銅板等を使用し
たことにより、LSI2の配線基板1に対する取付
け高さにバラツキや傾きがあつたとしても、熱伝
導プレート4が容易に追随して変形しLSI2上面
に密着するため、良好な熱伝導性を得ることがで
きる。また、熱伝導プレート4をLSI2を2個単
位で使用し小分割化したことにより、配線基板1
を反らせるような力が発生せずスチフナ等の構造
物は不要となり、電子回路パツケージ組立構造が
簡略化でき、かつ軽量化することができる。更に
は、冷却管3がLSI2相互間のスペースに敷設さ
れるため、全体の実装高さがLSI2の実装高さと
さほど違わない高さで実装でき、電子回路パツケ
ージの組立体を複数個架のバツクパネル等に三次
元的に実装する場合も高密度に実装可能になり装
置の高性能化が図れる。
Furthermore, by using a thin copper plate or the like for the heat conduction plate 4, even if there are variations or inclinations in the mounting height of the LSI 2 to the wiring board 1, the heat conduction plate 4 easily follows and deforms, causing the top surface of the LSI 2 to Since they are in close contact, good thermal conductivity can be obtained. In addition, by subdividing the heat conduction plate 4 by using two LSIs 2, the wiring board 1
Since no force is generated to warp the electronic circuit, structures such as stiffeners are not required, and the electronic circuit package assembly structure can be simplified and reduced in weight. Furthermore, since the cooling pipe 3 is laid in the space between the LSIs 2, the overall mounting height can be mounted at a height not much different from the mounting height of the LSI 2, and the electronic circuit package assembly can be mounted on the back panel of multiple racks. Even when three-dimensionally mounting the device, it is possible to perform high-density mounting, and the performance of the device can be improved.

本実施例では、熱伝導プレート4を冷却管3両
側のLSI2間を接続する構成となつているが、
LSI2の発熱量が少ない場合には、複数個のLSI
2を直列に接続するような熱伝導プレート形状と
してもよく、また逆にLSIの発熱量が大きく伝熱
特性を更に改善する必要がある場合には、LSI2
と熱伝導プレート4間及び熱伝導プレート4と冷
却管3間の接触界面に熱伝導性グリースを塗布し
たり熱伝導板の幅を広くする等の手段をとりうる
ことは云うまでもない。
In this embodiment, the heat conduction plate 4 is configured to connect the LSIs 2 on both sides of the cooling pipe 3.
If the heat generation amount of LSI2 is small, multiple LSI
2 may be connected in series, or conversely, if the LSI generates a large amount of heat and it is necessary to further improve the heat transfer characteristics, LSI 2 may be connected in series.
It goes without saying that measures such as applying thermally conductive grease to the contact interfaces between the heat conductive plate 4 and the heat conductive plate 4 and between the heat conductive plate 4 and the cooling pipe 3, or increasing the width of the heat conductive plate can be taken.

[発明の効果] 以上説明したように本発明は、集積回路素子間
に冷却管を敷設し、冷却管を挟み込む熱伝導プレ
ートを集積回路素子の上部放熱面に固着すること
により、配線基板上のLSIの実装高さにバラツキ
や傾きがあつても均一な熱伝導特性を得ることが
でき、また伝熱手段が比較的簡単な構成で、しか
も部品実装高さにさほど影響を与えない高さで実
現できる事から、小型軽量化でき、かつ架への実
装も高密度化できると云つた優れた効果がある。
[Effects of the Invention] As explained above, the present invention provides cooling pipes between integrated circuit elements, and fixes heat-conducting plates sandwiching the cooling pipes to the upper heat dissipation surface of the integrated circuit elements. Uniform heat conduction characteristics can be obtained even if there are variations or inclinations in the mounting height of the LSI, and the heat transfer means has a relatively simple configuration, and the height does not significantly affect the component mounting height. Since it can be realized, it has excellent effects such as being able to be made smaller and lighter, and can be mounted on a rack at a higher density.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図aは本発明の一実施例による電子回路パ
ツケージの放熱構造を示す平面図、第1図bは第
1図aのA−A線断面図、第2図は第1図aに示
す放熱構造のLSI実装部分を拡大した分解斜視
図、第3図は従来の電子回路パツケージの放熱構
造を示す側断面図である。 1:配線基板、2:集積回路素子、21:スタ
ツド、3:冷却管、4:熱伝導プレート、5:冷
却板、6:取付具、7:伝熱体、8:冷媒。
FIG. 1a is a plan view showing a heat dissipation structure of an electronic circuit package according to an embodiment of the present invention, FIG. 1b is a sectional view taken along line A-A in FIG. 1a, and FIG. 2 is shown in FIG. FIG. 3 is an enlarged exploded perspective view of the LSI mounting portion of the heat dissipation structure, and FIG. 3 is a side sectional view showing the heat dissipation structure of a conventional electronic circuit package. 1: Wiring board, 2: Integrated circuit element, 21: Stud, 3: Cooling pipe, 4: Heat conduction plate, 5: Cooling plate, 6: Fixture, 7: Heat transfer body, 8: Refrigerant.

Claims (1)

【特許請求の範囲】[Claims] 1 配線基板上に複数搭載される集積回路素子の
上部放熱面に、ネジ止め用のスタツドを設け、上
記集積回路素子相互間に内部を液体冷媒が流れる
冷却管を敷設し、かつ上記冷却管を挟み込んで保
持する複数個の熱伝導プレートの両側面を上記ス
タツドにネジ止めして上記集積回路素子の上部放
熱面に固着してなることを特徴とする電子回路パ
ツケージの放熱構造。
1. A stud for screwing is provided on the upper heat dissipation surface of a plurality of integrated circuit elements mounted on a wiring board, cooling pipes are laid between the integrated circuit elements through which a liquid coolant flows, and the cooling pipes are A heat dissipation structure for an electronic circuit package, characterized in that both sides of a plurality of heat conductive plates held by sandwiching are screwed to the studs and fixed to the upper heat dissipation surface of the integrated circuit element.
JP61283245A 1986-11-28 1986-11-28 Heat sink structure for electronic circuit package Granted JPS63136656A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61283245A JPS63136656A (en) 1986-11-28 1986-11-28 Heat sink structure for electronic circuit package

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61283245A JPS63136656A (en) 1986-11-28 1986-11-28 Heat sink structure for electronic circuit package

Publications (2)

Publication Number Publication Date
JPS63136656A JPS63136656A (en) 1988-06-08
JPH0573268B2 true JPH0573268B2 (en) 1993-10-14

Family

ID=17662967

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61283245A Granted JPS63136656A (en) 1986-11-28 1986-11-28 Heat sink structure for electronic circuit package

Country Status (1)

Country Link
JP (1) JPS63136656A (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0992994A (en) * 1995-09-21 1997-04-04 Asia Electron Inc Cooling plate
DE102007008753A1 (en) * 2007-02-22 2008-08-28 Rohde & Schwarz Gmbh & Co. Kg load coupler
JP5348282B2 (en) 2011-07-20 2013-11-20 ダイキン工業株式会社 Refrigerant piping mounting structure

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