JPH0573579A - Work content switching instruction device - Google Patents

Abstract

PURPOSE:To properly instruct the working contents of each manufacturing lot by comparing a working condition changing date with the working date of manufacturing lot changing reference work, deciding a working condition and determining the succeeding working contents. CONSTITUTION:When a change in working contents is instructed, a working condition file 6 for storing the working condition of device work stores also a changing date and changing reference work to specify a manufacturing lot to be changed. When the start of work is commanded, a work name is retrieved from a lot master file 5 and the working history of the manufacturing lot is read out from a lot working history file 7. When a change in the working condition is instructed, is compared the changing date read out from the file 6 is compared with a working date on which the manufacturing lot ends the change reference work, and when the working date is delayed from the changing date, working is executed under the unchanged working condition, and when advanced from the changing date, the changed working condition is adopted. Then the succeeding working condition of the manufacturing lot is displayed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a work content switching instructing device, and more particularly to a work content switching device for correctly instructing work contents for each manufacturing lot when a work condition changing command is issued in a production management system using a computer. Regarding the indicating device.

[0002]

2. Description of the Related Art A semiconductor device is manufactured through a large number (hundreds) of operations in a certain order according to its type. For example, at the stage of a semiconductor wafer, the manufacture is performed from about 25 to 50 wafers. It is carried out under the manufacturing control in units of manufacturing lots. The production management of semiconductor wafers in a production lot is performed by information processing by a computer system to instruct a worker or by directly controlling a production apparatus.

By the way, a series of operations is determined in accordance with the model of each manufacturing lot. Specifically, the content, condition, and work order of each work are determined. And, in principle, once the series of work is decided, it does not change. It should be noted that there are many types of the series of operations, and each is given a different identification number.
It is called process 02. Further, a series of works called hundreds of works called processes is divided into a plurality of work groups for convenience of cost calculation and the like, and one work group is called a process.

By the way, in principle, when a series of operations (processes) to be performed on a manufacturing lot is determined, it is not changed, but sometimes it is necessary to change it exceptionally. For example, in the process for diffusion, it may be preferable to change the cleaning condition as the pretreatment operation, add the pretreatment operation, or delete the pretreatment operation. In a specific case, the cleaning effect due to the pretreatment work is not obtained as expected, and the yield is reduced if it is left as it is. Therefore, it is necessary to change the cleaning conditions. On the contrary, since the cleaning effect becomes excessive and overetching occurs, it may be preferable to shorten the cleaning time or to eliminate the pretreatment that has been performed so far.

By the way, in the past, a production control system using a computer erases the information on the work condition before the change when there is such a work change and keeps only the work condition after the change, that is, the information on the new work condition. I was doing Then, every time there is a change, the work is stopped, the change is explained to the worker verbally or by documents, and the change is dealt with by the worker, that is, manually.

[0006]

However, manual handling of changes is apt to make mistakes. This is because, for example, when there is a change in the 123rd work and the 156th work, the 156th work is performed for the manufacturing lot in which the work is performed under the new work condition in the 123rd work. In the case of, the work must be performed under the new working conditions after the change. However, for the manufacturing lot in which the work has been performed under the old work condition in the 123rd work, the work in the 156th work must be performed under the old work condition before the change. Therefore, the first
The worker who carries out the 56th work has to judge whether or not the manufacturing lot is the target of the change, which is easily mistaken.

In particular, the production system (line) has the ability to process a large number of production lots, and the configuration of the line is extremely complicated. Therefore, a large number of production lots are put into the production system in order. It is not always emitted from the system. A manufacturing lot that was input later may overtake a manufacturing lot that was input earlier and flow through the production system. Therefore, it is easy to be confused as to whether or not the changed working condition should be performed for the manufacturing lot that has reached the work related to a certain change.

[0008] Further, it is possible that after the working condition after the change is performed for the work related to the change, the working condition before the change must be performed for the next manufacturing lot, but the conventional management system is changed. Since the condition related to the previous work condition has been eliminated, the worker cannot receive an instruction about the work condition from the system, and the worker must perform the work under the work condition before the change based on the memory of the worker and a separately prepared manual. Not only that, mistakes are likely to occur, the burden on workers is heavy, and work delays occur.

The present invention has been made to solve such a problem, and when a work content change command is issued, the work content can be appropriately and automatically instructed for each production lot in response to the command. An object is to provide a switching instruction device.

[0010]

In the work content switching instructing device of the present invention, the date and time of the working condition and the work date and time of the change reference work of the manufacturing lot are compared by the date and time comparing means, and the above manufacturing is performed based on the comparison result. Judge whether the lot should be operated under the condition before or after the change,
Thereby, the working condition of the next work for the manufacturing lot is determined.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The work content switching instruction device of the present invention will be described in detail below with reference to the illustrated embodiments. 1 and 2 are for explaining one embodiment of the work content switching instruction device of the present invention. FIG. 1 is a configuration diagram and FIG. 2 is a flowchart showing the operation. In the drawings, 1 is a CPU, 2 is a ROM, 3 is a RAM, 4 is an input / output device, and 5 is a lot master file that stores in-process information for each manufacturing lot. Etc. are memorized.

A work condition file 6 stores the work conditions of the work in progress. Specifically, the work conditions are stored using the work name as a key. Further, when an instruction to change the work content (including addition and deletion of work in addition to simple change of work conditions) is given, the change date and time and change reference work are also stored in order to specify the production lot to be changed. That is, the change instruction is
It is carried out in such a manner that the working condition is changed for another one or a plurality of works for a manufacturing lot for which a work is finished at a certain date and time. The change reference work refers to work in which it is asked whether or not the manufacturing lot is completed at that date and time.

A lot work history file 7 stores the work history of each manufacturing lot. Specifically, the end date and time of the work is stored using the manufacturing lot number and the work name as keys. Reference numeral 8 is a change date / time storage means for storing the change date / time when there is a work change instruction. 9 stores the work end date and time for the above-described change standard work of the manufacturing lot. The change date / time storage means 8 stores the work date / time storage means 9 based on the work condition file.
Stores date and time information loaded from the lot work history file 7.

Reference numeral 10 is a date and time comparing means for comparing the dates and times stored in the change date and time storage means 8 and the work date and time storage means 9, and 11
Is a work condition instructing means for instructing the work condition after or before the change related to the work to be changed according to the output of the date and time comparing means 10, and is composed of, for example, a CRT or a liquid crystal display. Specifically, when the date and time stored in the work date and time storage means 9 is later than the change date and time stored in the change date and time storage means 8, the work condition before the change is instructed, and the date and time in the change date and time storage means 8 is changed. Also, when the date and time of the work date and time storage means 9 is early, the changed work condition is instructed.

FIG. 2 is a flow chart for explaining the operation of the work content switching instruction device. First, a work start command is issued, and the lot number of the manufacturing lot to be worked is read. Next, the work name is retrieved from the lot master file. Next, data regarding the work condition is read from the work condition file. When the change of the work condition is instructed, the change date and time, the change reference work, the work condition before the change, and the work condition after the change are read.

Next, the lot work history of the manufacturing lot is read from the lot work history file. Then, the change date and time read from the work condition file 6 is compared with the work date and time when the manufacturing lot read from the lot work history file 7 finished the change reference work.

Then, when the work date and time (that is, the date and time when the manufacturing lot has finished the change reference work) is later than the change date and time, the work is performed under the work condition before the change. On the contrary, when the work date and time is earlier than the change date and time, the work is performed under the changed work condition. Then, based on the determination, the working conditions to be performed next by the manufacturing lot are displayed. It should be noted that instead of simply displaying the work conditions on the display, the manufacturing apparatus can be automatically controlled so that the work is performed according to the work conditions.

FIGS. 3A to 3C show one modification example of the work contents. FIG. 3A is the modification data on the computer, and FIG. 3B is the work performed under the working conditions before the modification. Sequence (C) shows a work sequence performed under the changed work conditions. In this modification, as shown in FIG. 3A, the final work of the fifth step 5, work number 59
Is the change reference work, and the change date and time is 1:00 pm on the 6th.

The work in step 6 is the work condition before change, that is, the old work condition is 60, 61, 64 ₁ , 65 in this order, and the post-change work condition, that is, new work condition 61, 62, 6
The work conditions are set so that the process must be performed in the order of ₃ , 64 ₂ , and 65. It should be noted that 64 ₁ and 64 ₂ have the same work but different work conditions. The broken line shows the case where no work is performed.

Therefore, a young production lot is shown in FIG. 3 (B).
As shown in, the final work of the fifth step 5, work number 5
When the work of 9 is completed at 5 pm on the 6th, the work of the manufacturing lot is performed in steps 6, 60, 61, 62, 64 ₁ , 65.

Further, as shown in FIG. 3C, if the final work of the fifth step 5, work of work number 59, ends at 10:00 am on the 6th, the production lot is 61 , 62, 63, 64 ₂ , 65 and so on.

As described above, according to the work content switching instruction device, when the work condition is changed, not only the new work condition after the change but also the old work condition before the change are stored in the work condition file, The date and time stored in the change date and time storage means and the work date and time storage means are compared with each other by the date and time comparison means to determine which work condition before and after the production lot should be performed. Can determine and instruct or control work conditions. Therefore, unlike the case of manual operation, there is no risk of making a mistake between the old and new working conditions for the manufacturing lot, and the working conditions can be correctly indicated even when the working conditions before the change have to be applied.

[0023]

The work content switching instructing device of the present invention comprises a lot master file for storing in-process information of manufacturing lots,
A work condition file that stores work information that is information about work conditions in the work in progress, a lot work history file that is a processing history of the manufacturing lot, and a modification date and time that stores at least the modification date and time of the work condition as the work information. Storage means, work date / time storage means for storing the work date / time of the processing history, comparison means for comparing the change date / time stored in the change date / time storage means with the work date / time stored in the work date / time storage means According to the result of the comparison by the comparison means, the manufacturing lot is a manufacturing lot to be processed under the old working condition before the working condition is changed, or a manufacturing lot under the new working condition after the working condition is changed. It is characterized in that the next work content is determined by determining whether or not it is. Therefore, according to the present invention, the date and time stored in the change date and time storage means and the work date and time storage means are compared by the date and time comparison means to determine which work condition should be performed before and after the production lot is changed. The work conditions can be determined and the work conditions can be determined and instructed or controlled accordingly. Therefore, unlike the case of manual operation, there is no risk that the conditions instructing the manufacturing lot will make a mistake between the old and new working conditions, and the correct working conditions must be applied even when the working conditions before the change must be applied. Can be shown.

[Brief description of drawings]

FIG. 1 is a configuration diagram showing an embodiment of a work content switching instruction device of the present invention.

FIG. 2 is a flowchart showing the operation of the above embodiment.

FIG. 3A to FIG. 3C are diagrams showing examples of changing work conditions.

[Explanation of symbols]

 5 lot master file 6 work condition file 7 lot work history file 8 change date / time storage means 9 work date / time storage means 10 date / time comparison means

Claims (1)

[Claims] 1. A lot master file for storing work-in-process information of a production lot, a work condition file for storing work information that is information about work conditions in the work-in-progress, and a lot work history for processing history of the production lot. A file, a change date and time storage means for storing at least the change date and time of the work condition as the work information, a work date and time storage means for storing the work date and time of the processing history, and a change date and time stored in the change date and time storage means A manufacturing lot to be processed under the old working condition before the working condition is changed from the result of the comparison by the comparing device, and at least a comparing unit for comparing the working date and time stored in the working date and time storing unit. Or the production lot to be processed under the new work condition after changing the work condition, determine the next work content. Work switching instruction apparatus characterized by comprising