JPH0575159A - Optical semiconductor device - Google Patents

Optical semiconductor device

Info

Publication number
JPH0575159A
JPH0575159A JP23753991A JP23753991A JPH0575159A JP H0575159 A JPH0575159 A JP H0575159A JP 23753991 A JP23753991 A JP 23753991A JP 23753991 A JP23753991 A JP 23753991A JP H0575159 A JPH0575159 A JP H0575159A
Authority
JP
Japan
Prior art keywords
area
emitter
semiconductor device
light
optical semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23753991A
Other languages
Japanese (ja)
Inventor
Hideaki Noguchi
英明 野口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP23753991A priority Critical patent/JPH0575159A/en
Publication of JPH0575159A publication Critical patent/JPH0575159A/en
Pending legal-status Critical Current

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  • Light Receiving Elements (AREA)
  • Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)

Abstract

PURPOSE:To prevent the deterioration of transistor characteristics due to the residual resistance effect and current concentration effect and lessen the chip size by providing a light entrance window or the electrodes in emitter area section of bipolar transistor-type optical semiconductor device. CONSTITUTION:A P-type semiconductor layer 12 is formed to comprise a base area on an N-type semiconductor layer 11 forming a collector area, and further an N-type semiconductor 13 is formed to comprise an emitter area on the layer 12. Then, electrodes 14 are provided on the layer 13 and simultaneously the area on the emitter area excluding the electrodes 14 is used as a light entrance window 15. Thanks to such construction, the enlarged emitter area can be utilized as it is as a light absorbing area, resulting in reduction of chip area. On the other hand, when a light 18 enters uniformly, collector current will flow evenly in a whole emitter area and there occurs no lowering of transistor efficiency resulting from the concentration of collector current to the periphery of emitter.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、光半導体装置に関し、
特にバイポーラトランジスタ型の光半導体装置に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical semiconductor device,
In particular, it relates to a bipolar transistor type optical semiconductor device.

【0002】[0002]

【従来の技術】従来の光半導体装置、特にバイポーラト
ランジスタ型光半導体装置は、図3(a)に示す構造と
なっていた。図3(a)に示す例はNPN型フォトトラ
ンジスタの例であり、コレクタ領域を形成する半導体層
31上に、ベース領域を形成する半導体層32が形成さ
れ、そのベース領域の一部にエミッタ領域を形成する半
導体層33が形成されている。そして、エミッタ領域を
形成する半導体層33上には電極34がエミッタ領域を
覆いつくすように形成されている。すなわち、図3
(a)中、領域Bのトランジスタ構造部のPN接合は電
極で覆いつくされており、直接光37を受けない構造と
なっている。一方、ベース領域を延長したPN接合部、
すなわち図3(a)中領域Aにダイオードが形成され、
光37はこの部分で吸収され、光電変換が行なわれてい
る。尚、図中35,36は各々裏面電極,表面保護膜を
示す。
2. Description of the Related Art A conventional optical semiconductor device, in particular, a bipolar transistor type optical semiconductor device has a structure shown in FIG. The example shown in FIG. 3A is an example of an NPN type phototransistor, in which a semiconductor layer 32 forming a base region is formed on a semiconductor layer 31 forming a collector region, and an emitter region is formed in a part of the base region. The semiconductor layer 33 forming the is formed. An electrode 34 is formed on the semiconductor layer 33 forming the emitter region so as to cover the emitter region. That is, FIG.
In (a), the PN junction of the transistor structure portion in the region B is covered with the electrode, so that the structure does not receive the direct light 37. On the other hand, a PN junction with an extended base region,
That is, a diode is formed in the region A in FIG.
The light 37 is absorbed in this portion and photoelectric conversion is performed. Incidentally, reference numerals 35 and 36 in the figure respectively denote a back electrode and a surface protective film.

【0003】図3(b)は、上記に説明した従来の光半
導体装置の動作状態を示す図である。すなわち領域Aの
ダイオード部に入射した光37によって発生した光電流
38が、領域Bのトランジスタのベース部に注入され、
フォトトランジスタとして動作する。
FIG. 3B is a diagram showing an operating state of the conventional optical semiconductor device described above. That is, the photocurrent 38 generated by the light 37 incident on the diode portion in the region A is injected into the base portion of the transistor in the region B,
Operates as a phototransistor.

【0004】[0004]

【発明が解決しようとする課題】この従来の光半導体は
次に示すような問題点があった。光半導体装置は一般に
光の量子効率を確保するため、一般にコレクタ領域の半
導体層厚が厚く、また比抵抗が高い構造となっている。
このためコレクタ電流が残留抵抗効果で飽和しやすい。
この問題点を回避するには、エミッタ面積を大きくする
必要があり、チップ面積が大きくなり、結果として高コ
ストになりやすい問題点があった。また一方、図3
(b)に示すようにベース領域部の抵抗Rによりコレク
タ電流は、エミッタ周辺部39に集中しやすく、トラン
ジスタの特性を悪化させる問題点もあった。
This conventional optical semiconductor has the following problems. In order to secure the quantum efficiency of light, the optical semiconductor device generally has a structure in which the semiconductor layer in the collector region is thick and the specific resistance is high.
Therefore, the collector current is easily saturated due to the residual resistance effect.
In order to avoid this problem, it is necessary to increase the emitter area, the chip area becomes large, and as a result, there is a problem that the cost tends to be high. On the other hand, FIG.
As shown in (b), the collector current is likely to concentrate on the emitter peripheral portion 39 due to the resistance R of the base region, and there is also a problem that the characteristics of the transistor are deteriorated.

【0005】[0005]

【課題を解決するための手段】本発明の光半導体装置
は、バイポーラ型トランジスタのエミッタ領域部に接続
するように形成された電極の少なくとも一部に光の入射
窓を有している。
The optical semiconductor device of the present invention has a light entrance window in at least a part of the electrode formed so as to be connected to the emitter region of the bipolar transistor.

【0006】[0006]

【実施例】次に本発明の光半導体装置について図面を参
照して説明する。図1(a)は本発明の光半導体装置の
一実施例の構造を示す図である。コレクタ領域を形成す
るN型半導体層11上にベース領域を形成するP型半導
体層12が形成され、さらにこのベース領域を形成する
半導体層上にエミッタ領域を形成するN型半導体層13
が形成されている。このエミッタ領域を形成する半導体
層13上に電極14が形成され、同時にこのエミッタ領
域上に電極のない領域が光の入射窓15として形成され
る。尚図中16,17,18は各々裏面電極と表面保護
膜、及び入射光である。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, an optical semiconductor device of the present invention will be described with reference to the drawings. FIG. 1A is a diagram showing the structure of an embodiment of an optical semiconductor device of the present invention. A P-type semiconductor layer 12 forming a base region is formed on an N-type semiconductor layer 11 forming a collector region, and an N-type semiconductor layer 13 forming an emitter region is further formed on the semiconductor layer forming a base region.
Are formed. An electrode 14 is formed on the semiconductor layer 13 forming this emitter region, and at the same time, a region having no electrode is formed as a light incident window 15 on this emitter region. In the figure, reference numerals 16, 17 and 18 denote a back electrode, a surface protective film, and incident light, respectively.

【0007】次に図1(b)を用いて本発明の光半導体
装置の動作を説明する。光の入射窓15から入射した光
18は、トランジスタのpn接合部で吸収され、光電流
19としてトランジスタのベース部12に注入される。
この結果トランジスタにコレクタ電流が流れる。
Next, the operation of the optical semiconductor device of the present invention will be described with reference to FIG. The light 18 incident from the light incident window 15 is absorbed by the pn junction of the transistor and injected into the base 12 of the transistor as a photocurrent 19.
As a result, a collector current flows through the transistor.

【0008】このような構造にすると、大きくしたエミ
ッタ領域がそのまま光の吸収領域として活用でき、結果
としてチップ面積が小さくても良好なトランジスタ特性
を得ることができる。
With such a structure, the enlarged emitter region can be used as it is as a light absorbing region, and as a result, good transistor characteristics can be obtained even if the chip area is small.

【0009】また、光電流は主にコレクタ領域11から
ベース領域12に供給されるので、図1(b)に示すベ
ース抵抗Rの影響は受けない。光18が、エミッタ領域
に一様に入射されれば、エミッタ領域全域に亘って一様
にコレクタ電流が流れる。すなわち、従来の光半導体装
置で発生していたベース抵抗によるコレクタ電流のエミ
ッタ周辺への集中によるトランジスタ効率の低下は発生
しない。具体的には、従来の半導体装置ではエミッタ幅
は20μm〜30μm程度以下にして電流集中効果を防
止する必要があったのに対し、本発明の光半導体装置で
はエミッタ幅を100μm以上にしても、光の入射領域
を広くしてあれば本質的に電流集中が生じない。したが
って電流集中によるトランジスタ特性の悪化も防止でき
る。
Further, since the photocurrent is mainly supplied from the collector region 11 to the base region 12, it is not affected by the base resistance R shown in FIG. 1 (b). If the light 18 is uniformly incident on the emitter region, a collector current flows uniformly over the entire emitter region. That is, the transistor efficiency is not reduced due to the concentration of the collector current around the emitter due to the base resistance, which has occurred in the conventional optical semiconductor device. Specifically, in the conventional semiconductor device, it is necessary to set the emitter width to about 20 μm to 30 μm or less to prevent the current concentration effect, whereas in the optical semiconductor device of the present invention, the emitter width is set to 100 μm or more. If the light incident area is widened, current concentration does not occur essentially. Therefore, deterioration of transistor characteristics due to current concentration can be prevented.

【0010】尚PNP型のフォトトランジスタの場合も
上記と同様の効果を得ることができる。
In the case of a PNP type phototransistor, the same effect as above can be obtained.

【0011】図2は本発明の第2の実施例の構造を示す
図である。ここで21,22,23は各々コレクタ,ベ
ース,エミッタ領域を示す半導体層であり、25は光の
入射窓である。この構造においては図中領域Aに入射し
た光28aは、領域Aに形成されているダイオード部で
吸収され、光電流としてトランジスタのベース22に供
給される。また、領域Bのトランジスタ部に入射した光
28bはトランジスタ部のpn接合部で吸収され、同様
にベース領域22に供給され、増幅される。このように
本発明の第2の実施例の場合も第1の実施例の場合と同
様に、入射窓25から入射した光は有効にベース電流と
なり、第1の実施例の場合と同様の効果が得られる。
FIG. 2 is a diagram showing the structure of the second embodiment of the present invention. Here, 21, 22, and 23 are semiconductor layers showing collector, base, and emitter regions, respectively, and 25 is a light incident window. In this structure, the light 28a incident on the area A in the figure is absorbed by the diode portion formed in the area A, and is supplied to the base 22 of the transistor as a photocurrent. Further, the light 28b incident on the transistor portion in the region B is absorbed by the pn junction portion of the transistor portion, is similarly supplied to the base region 22, and is amplified. In this way, also in the case of the second embodiment of the present invention, as in the case of the first embodiment, the light incident from the entrance window 25 effectively becomes the base current, and the same effect as in the case of the first embodiment. Is obtained.

【0012】またこれらの光半導体装置はフォトカプラ
やフォトインタラプタ等の複合型光半導体装置の受光素
子として利用することができる。
Further, these optical semiconductor devices can be used as a light receiving element of a composite type optical semiconductor device such as a photo coupler and a photo interrupter.

【0013】[0013]

【発明の効果】以上説明したように本発明の光半導体装
置は、バイポーラ型トランジスタのエミッタ領域部に接
続するように形成された電極の少なくとも一部に光の入
射窓を有した構造をしている。
As described above, the optical semiconductor device of the present invention has a structure in which at least a part of the electrode formed so as to be connected to the emitter region of the bipolar transistor has a light incident window. There is.

【0014】このような構造にしたので、トランジスタ
領域部に入射された光も有効に吸収され、光電流として
ベースに注入される。このためチップサイズを小さくし
ても良好な特性が得られる効果がある。また、光電流
は、コレクタ領域部から直接ベース領域に注入されるの
で、ベース抵抗の影響を受けなく、エミッタ周辺での電
流集中効果によるトランジスタ特性の悪化が生じない効
果も有する。
With this structure, the light incident on the transistor region is effectively absorbed and injected into the base as a photocurrent. Therefore, even if the chip size is reduced, good characteristics can be obtained. Further, since the photocurrent is directly injected into the base region from the collector region, it is not affected by the base resistance, and the transistor characteristics are not deteriorated due to the current concentration effect around the emitter.

【図面の簡単な説明】[Brief description of drawings]

【図1】(a)は本発明の一実施例の光半導体装置の構
造を示す図、(b)は本発明の光半導体装置の動作を説
明する図。
1A is a diagram showing a structure of an optical semiconductor device according to an embodiment of the present invention, and FIG. 1B is a diagram explaining an operation of the optical semiconductor device of the present invention.

【図2】本発明の第2の実施例の光半導体装置の構造を
示す図。
FIG. 2 is a diagram showing the structure of an optical semiconductor device according to a second embodiment of the present invention.

【図3】(a)は従来の光半導体装置の構造を示す図、
(b)は従来の光半導体装置の動作を説明する図。
FIG. 3A is a diagram showing a structure of a conventional optical semiconductor device,
(B) is a figure explaining operation | movement of the conventional optical semiconductor device.

【符号の説明】[Explanation of symbols]

11,21,31 コレクタ領域を形成する半導体層 12,22,32 ベース領域を形成する半導体層 13,23,33 エミッタ領域を形成する半導体層 14,24,34 電極 15,25 光の入射窓 16,26,35 裏面電極 17,27,36 表面保護膜 18,37 光 28a ダイオード部に入射する光 28b トランジスタ部に入射する光 19,38 光電流 39 エミッタ周辺の電流集中領域 11, 21, 31 Semiconductor layers forming collector regions 12, 22, 32 Semiconductor layers forming base regions 13, 23, 33 Semiconductor layers forming emitter regions 14, 24, 34 Electrodes 15, 25 Light incident window 16 , 26, 35 Backside electrode 17, 27, 36 Surface protective film 18, 37 Light 28a Light incident on diode portion 28b Light incident on transistor portion 19,38 Photocurrent 39 Current concentration area around emitter

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 NPNまたはPNP型のバイポーラトラ
ンジスタを有する半導体装置において、該パイポーラト
ランジスタのエミッタ領域部に接続して形成された電極
の少なくとも一部に光入射窓を有することを特徴とする
光半導体装置。
1. A semiconductor device having an NPN or PNP type bipolar transistor, wherein at least a part of an electrode formed to be connected to an emitter region of the bipolar transistor has a light incident window. Semiconductor device.
【請求項2】 発光素子と受光素子が同一パッケージ内
に内蔵されたフォトカプラまたはフォトインタラプタ型
光半導体装置において、受光素子が請求項1に該当する
光半導体装置。
2. A photocoupler or photointerrupter type optical semiconductor device in which a light emitting element and a light receiving element are incorporated in the same package, wherein the light receiving element corresponds to claim 1.
JP23753991A 1991-09-18 1991-09-18 Optical semiconductor device Pending JPH0575159A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23753991A JPH0575159A (en) 1991-09-18 1991-09-18 Optical semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23753991A JPH0575159A (en) 1991-09-18 1991-09-18 Optical semiconductor device

Publications (1)

Publication Number Publication Date
JPH0575159A true JPH0575159A (en) 1993-03-26

Family

ID=17016836

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23753991A Pending JPH0575159A (en) 1991-09-18 1991-09-18 Optical semiconductor device

Country Status (1)

Country Link
JP (1) JPH0575159A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011059115A (en) * 2009-09-07 2011-03-24 National Central Univ Fluorescence detection system, method, and device for measuring biologic molecule

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4942294A (en) * 1972-03-03 1974-04-20
JPS5994476A (en) * 1983-10-03 1984-05-31 Sharp Corp Photocoupler

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4942294A (en) * 1972-03-03 1974-04-20
JPS5994476A (en) * 1983-10-03 1984-05-31 Sharp Corp Photocoupler

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011059115A (en) * 2009-09-07 2011-03-24 National Central Univ Fluorescence detection system, method, and device for measuring biologic molecule

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