JPH0576543B2 - - Google Patents

Info

Publication number
JPH0576543B2
JPH0576543B2 JP60119171A JP11917185A JPH0576543B2 JP H0576543 B2 JPH0576543 B2 JP H0576543B2 JP 60119171 A JP60119171 A JP 60119171A JP 11917185 A JP11917185 A JP 11917185A JP H0576543 B2 JPH0576543 B2 JP H0576543B2
Authority
JP
Japan
Prior art keywords
high voltage
anode
voltage terminal
vacuum chamber
ion beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60119171A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61276968A (ja
Inventor
Toshio Nemoto
Kintaro Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koki Holdings Co Ltd
Original Assignee
Hitachi Koki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Koki Co Ltd filed Critical Hitachi Koki Co Ltd
Priority to JP11917185A priority Critical patent/JPS61276968A/ja
Publication of JPS61276968A publication Critical patent/JPS61276968A/ja
Publication of JPH0576543B2 publication Critical patent/JPH0576543B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP11917185A 1985-05-31 1985-05-31 イオンビームスパッタ装置の陽極高電圧端子への二次電子飛び込み防止装置 Granted JPS61276968A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11917185A JPS61276968A (ja) 1985-05-31 1985-05-31 イオンビームスパッタ装置の陽極高電圧端子への二次電子飛び込み防止装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11917185A JPS61276968A (ja) 1985-05-31 1985-05-31 イオンビームスパッタ装置の陽極高電圧端子への二次電子飛び込み防止装置

Publications (2)

Publication Number Publication Date
JPS61276968A JPS61276968A (ja) 1986-12-06
JPH0576543B2 true JPH0576543B2 (pt) 1993-10-22

Family

ID=14754667

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11917185A Granted JPS61276968A (ja) 1985-05-31 1985-05-31 イオンビームスパッタ装置の陽極高電圧端子への二次電子飛び込み防止装置

Country Status (1)

Country Link
JP (1) JPS61276968A (pt)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5675572A (en) * 1979-11-22 1981-06-22 Fujitsu Ltd Sputtering device

Also Published As

Publication number Publication date
JPS61276968A (ja) 1986-12-06

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