JPH0577176B2 - - Google Patents
Info
- Publication number
- JPH0577176B2 JPH0577176B2 JP102186A JP102186A JPH0577176B2 JP H0577176 B2 JPH0577176 B2 JP H0577176B2 JP 102186 A JP102186 A JP 102186A JP 102186 A JP102186 A JP 102186A JP H0577176 B2 JPH0577176 B2 JP H0577176B2
- Authority
- JP
- Japan
- Prior art keywords
- gate
- arsenic
- polycrystalline silicon
- ion implantation
- implantation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP102186A JPS62159469A (ja) | 1986-01-07 | 1986-01-07 | 絶縁ゲ−ト型電界効果トランジスタの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP102186A JPS62159469A (ja) | 1986-01-07 | 1986-01-07 | 絶縁ゲ−ト型電界効果トランジスタの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62159469A JPS62159469A (ja) | 1987-07-15 |
| JPH0577176B2 true JPH0577176B2 (de) | 1993-10-26 |
Family
ID=11489911
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP102186A Granted JPS62159469A (ja) | 1986-01-07 | 1986-01-07 | 絶縁ゲ−ト型電界効果トランジスタの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62159469A (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0995235B1 (de) | 1997-07-16 | 2002-04-03 | Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. | Kontakt für kleinste bondkontakte sowie verfahren zur herstellung eines kontaktes |
-
1986
- 1986-01-07 JP JP102186A patent/JPS62159469A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62159469A (ja) | 1987-07-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |