JPH0577316B2 - - Google Patents

Info

Publication number
JPH0577316B2
JPH0577316B2 JP62095855A JP9585587A JPH0577316B2 JP H0577316 B2 JPH0577316 B2 JP H0577316B2 JP 62095855 A JP62095855 A JP 62095855A JP 9585587 A JP9585587 A JP 9585587A JP H0577316 B2 JPH0577316 B2 JP H0577316B2
Authority
JP
Japan
Prior art keywords
superconducting
superconducting material
oxide superconducting
impurity
control electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP62095855A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63261768A (ja
Inventor
Shunpei Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP62095855A priority Critical patent/JPS63261768A/ja
Publication of JPS63261768A publication Critical patent/JPS63261768A/ja
Publication of JPH0577316B2 publication Critical patent/JPH0577316B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0661—Processes performed after copper oxide formation, e.g. patterning
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0884—Treatment of superconductor layers by irradiation, e.g. ion-beam, electron-beam, laser beam or X-rays

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP62095855A 1987-04-18 1987-04-18 超電導素子の作製方法 Granted JPS63261768A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62095855A JPS63261768A (ja) 1987-04-18 1987-04-18 超電導素子の作製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62095855A JPS63261768A (ja) 1987-04-18 1987-04-18 超電導素子の作製方法

Publications (2)

Publication Number Publication Date
JPS63261768A JPS63261768A (ja) 1988-10-28
JPH0577316B2 true JPH0577316B2 (de) 1993-10-26

Family

ID=14148982

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62095855A Granted JPS63261768A (ja) 1987-04-18 1987-04-18 超電導素子の作製方法

Country Status (1)

Country Link
JP (1) JPS63261768A (de)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS564290A (en) * 1979-06-25 1981-01-17 Nippon Telegr & Teleph Corp <Ntt> Superconductive element
JPS5873172A (ja) * 1981-10-27 1983-05-02 Nippon Telegr & Teleph Corp <Ntt> 超伝導集積回路装置
JPS60160675A (ja) * 1984-02-01 1985-08-22 Hitachi Ltd 準粒子注入型超電導素子
JPS60223175A (ja) * 1984-04-19 1985-11-07 Hitachi Ltd 超電導スイツチングデバイス
JPS61206279A (ja) * 1985-03-11 1986-09-12 Hitachi Ltd 超電導素子
JPS62238674A (ja) * 1986-04-09 1987-10-19 Rikagaku Kenkyusho 超伝導体の製造方法

Also Published As

Publication number Publication date
JPS63261768A (ja) 1988-10-28

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Legal Events

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R250 Receipt of annual fees

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LAPS Cancellation because of no payment of annual fees