JPH0577431A - Fixed structure of laminated piezoelectric displacement element - Google Patents
Fixed structure of laminated piezoelectric displacement elementInfo
- Publication number
- JPH0577431A JPH0577431A JP3243636A JP24363691A JPH0577431A JP H0577431 A JPH0577431 A JP H0577431A JP 3243636 A JP3243636 A JP 3243636A JP 24363691 A JP24363691 A JP 24363691A JP H0577431 A JPH0577431 A JP H0577431A
- Authority
- JP
- Japan
- Prior art keywords
- displacement
- laminated piezoelectric
- base
- displacement element
- laminated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 95
- 239000010410 layer Substances 0.000 abstract description 41
- 239000000853 adhesive Substances 0.000 abstract description 8
- 230000001070 adhesive effect Effects 0.000 abstract description 8
- 239000012790 adhesive layer Substances 0.000 abstract description 6
- 239000000758 substrate Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 description 5
- 238000005192 partition Methods 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 230000000452 restraining effect Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
(57)【要約】
【目的】 積層形変位圧電変位素子を基台と接着して使
用する場合、基台と積層形圧電変位素子との間の接着層
にクラック及び剥離が入らず、変位の歪みの発生がない
単一方向へ振動の指向性があり、同一基板上の積層形圧
電変位素子同士の干渉が小さく、変位量及び変位速度の
ばらつきが小さく、接着剤のはみ出しによる変位の拘束
がない積層形圧電変位素子の固定構造を提供する。
【構成】 一方の電極を構成する導電層１と、他方の電
極を構成する導電層２とが、互いに平行になるように交
互に圧電体３をサンドイッチ状に配設する。前記各導電
層１、２に挟まれた部位が活性部６であり、挟まれない
部位５、５ａが不活性部である。変位部９（活性部６）
は矢印Ａ方向に振動し、不活性部５は張り出させて基台
４と接合部４ａにて接合する。
(57) [Abstract] [Purpose] When the laminated displacement piezoelectric displacement element is used by adhering it to the base, the adhesive layer between the base and the laminated piezoelectric displacement element is not cracked or peeled and the displacement There is no distortion and there is directivity of vibration in a single direction, there is little interference between laminated piezoelectric displacement elements on the same substrate, variation in displacement amount and displacement speed is small, and displacement constraint due to adhesive sticking out is restrained. A fixed structure of a laminated piezoelectric displacement element is provided. [Structure] Piezoelectric bodies 3 are alternately arranged in a sandwich shape so that a conductive layer 1 forming one electrode and a conductive layer 2 forming the other electrode are parallel to each other. The part sandwiched between the conductive layers 1 and 2 is the active part 6, and the parts 5 and 5a not sandwiched are the inactive parts. Displacement part 9 (active part 6)
Vibrates in the direction of arrow A, and the inactive portion 5 is projected so as to be joined to the base 4 at the joining portion 4a.
Description
【０００１】[0001]
【産業上の利用分野】本発明は、インクジェットヘッド
などに用いられる積層形圧電変位素子の固定構造に関す
るものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fixing structure for a laminated piezoelectric displacement element used in an ink jet head or the like.
【０００２】[0002]
【従来の技術】従来、積層形圧電変位素子と基台との固
定構造としては、例えば特開昭６３−２９５２６９号公
報に示されているように、電極と圧電体とを交互にサン
ドイッチ状に積層した積層形圧電変位素子の一端を基台
に接着した構造が提案されている。2. Description of the Related Art Conventionally, as a fixing structure of a laminated piezoelectric displacement element and a base, as shown in, for example, Japanese Patent Laid-Open No. 63-295269, electrodes and piezoelectric bodies are alternately sandwiched. A structure has been proposed in which one end of a laminated piezoelectric displacement element is bonded to a base.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、従来の
ように積層形圧電変位素子の一端を固定部としてこれを
基台に接着した構造であると、電圧を印加した場合、固
定部においても伸縮が生じる。このため、積層形圧電変
位素子と基台との間にある接着層にクラックが入り剥離
が生じ、さらに、積層形圧電変位素子の変位の歪みが起
こる。また、同一基台に数個の積層形圧電変位素子を固
定したとき、基台の振動により積層形圧電変位素子が互
いに干渉して、安定した変位量及び変位速度が得られな
い。なお、固定長さのばらつきにより、変位量及び変位
速度がばらつく。接着剤のはみ出しにより、変位が拘束
されるという問題がある。However, in the conventional structure in which one end of the laminated piezoelectric displacement element is used as a fixed part and this is bonded to the base, expansion and contraction also occur in the fixed part when a voltage is applied. Occurs. For this reason, a crack occurs in the adhesive layer between the laminated piezoelectric displacement element and the base to cause peeling, and further displacement distortion of the laminated piezoelectric displacement element occurs. Further, when several laminated piezoelectric displacement elements are fixed to the same base, the laminated piezoelectric displacement elements interfere with each other due to the vibration of the base, and a stable displacement amount and displacement speed cannot be obtained. Note that the amount of displacement and the displacement speed vary due to the variation in the fixed length. There is a problem that displacement is restrained by the protrusion of the adhesive.
【０００４】そこで本発明の目的とするところは、第１
に基台と積層形圧電変位素子との接着層にクラック及び
剥離の入らない積層形圧電変位素子の固定構造を提供す
ることにある。The object of the present invention is therefore the first
Another object of the present invention is to provide a fixing structure for a laminated piezoelectric displacement element that does not cause cracks or peeling in the adhesive layer between the base and the laminated piezoelectric displacement element.
【０００５】第２の目的は、基台と接着して使用する場
合、変位の歪みの発生がなく単一方向へ振動の指向性の
ある積層形圧電変位素子の固定構造を提供することにあ
る。A second object of the present invention is to provide a fixing structure for a laminated piezoelectric displacement element which, when used by being bonded to a base, does not cause distortion of displacement and has directivity of vibration in a single direction. ..
【０００６】第３の目的は、基台に数個の積層形圧電変
位素子を固定したとき、互いの干渉が小さい積層形変位
素子の固定構造を提供することにある。A third object of the present invention is to provide a fixing structure for a laminated displacement element in which mutual interference is small when several laminated piezoelectric displacement elements are fixed to a base.
【０００７】第４の目的は、固定長さのばらつきによ
り、変位量及び変位速度のばらつきが小さい積層形圧電
変位素子の固定構造を提供することにある。A fourth object is to provide a fixing structure for a laminated piezoelectric displacement element in which variations in displacement amount and displacement velocity are small due to variations in fixed length.
【０００８】第５の目的は、接着剤のはみ出しに対し
て、変位が拘束されず要求されるだけの変位量及び変位
速度が得られる積層形圧電変位素子の固定構造を提供す
ることにある。A fifth object of the present invention is to provide a fixing structure of a laminated piezoelectric displacement element which can obtain a required displacement amount and displacement speed without restraining displacement against the protrusion of an adhesive.
【０００９】[0009]
【課題を解決するための手段】本発明の積層形圧電変位
素子の固定構造は、圧電体と電極とが交互に積層された
積層形圧電変位素子を基台に固定する構造であって、前
記積層形圧電変位素子に電圧印加時に変位する活性部と
変位しない不活性部とを設け、前記不活性部を基台から
張り出させて不活性部のみを基台と接着することを特徴
とする。A fixing structure for a laminated piezoelectric displacement element according to the present invention is a structure for fixing a laminated piezoelectric displacement element in which piezoelectric bodies and electrodes are alternately laminated to a base. The laminated piezoelectric displacement element is characterized in that an active part that displaces when a voltage is applied and an inactive part that does not displace are provided, and the inactive part projects from the base to bond only the inactive part to the base. ..
【００１０】[0010]
【作用】本発明の固定構造によると、不活性部のみが基
台に接着されているので、接着層における変位は殆ど生
じない。従って、接着層にクラックや剥離が生ずる事も
なくなる。According to the fixing structure of the present invention, since only the inactive portion is adhered to the base, displacement in the adhesive layer hardly occurs. Therefore, the adhesive layer is not cracked or peeled.
【００１１】また不活性部だけが基台に接着されている
ので、活性部の振動運動が妨害されず、歪みのない単一
方向へ振動の指向性のある変位が得られる。Further, since only the inactive portion is adhered to the base, the oscillating motion of the active portion is not disturbed, and a directional displacement of vibration can be obtained in a single direction without distortion.
【００１２】不活性部を張り出させることにより、基台
を振動が伝わって積層形圧電変位素子が互いに干渉する
ことが少なくなる。By overhanging the inactive portion, it is less likely that vibration will be transmitted through the base and the laminated piezoelectric displacement elements will interfere with each other.
【００１３】また、張り出させて固定することにより、
変位量及び変位速度のばらつきは活性部の長さばらつき
によるもののみとなり、固定長さのばらつきによるもの
は小さくなる。さらに、接着剤のはみ出しによって活性
部が拘束されることがないので、変位が拘束されず要求
されるだけの変位量及び変位速度が得られる。[0013] Further, by overhanging and fixing,
The variation of the displacement amount and the displacement speed is only due to the variation of the length of the active portion, and the variation due to the variation of the fixed length is small. Further, since the active portion is not constrained by the protrusion of the adhesive, the displacement is not constrained and the required displacement amount and displacement speed can be obtained.
【００１４】[0014]
【実施例】図１は、本発明の積層形圧電変位素子の固定
構造図を示す部分斜視図である。図中１は、それぞれ一
方の電極を構成する導電層である。２は、他方の電極を
構成する導電層で、各導電層は互いに平行となるように
交互に圧電体３、例えばチタン酸・ジルコン酸鉛系複合
ペロブスカイトセラミックス内にサンドイッチ状に配設
されている。 また、一方の電極となる導電層１は一方
の端面５３に露出され、また他方の電極となる導電層２
は他方の端面５４に露出するように構成されている。こ
れらの電極の露出されている面５３、５４には、共通導
電層７、８（図２（ｆ）参照）が形成されていて、導電
層１、２は正または負となり、電気的に並列となってい
る。1 is a partial perspective view showing a fixed structure of a laminated piezoelectric displacement element of the present invention. In the figure, 1 is a conductive layer that constitutes one of the electrodes. Reference numeral 2 denotes a conductive layer that constitutes the other electrode, and the conductive layers are alternately arranged so as to be parallel to each other in a piezoelectric material 3, for example, sandwiched in a composite perovskite ceramic of titanate / lead zirconate system. .. In addition, the conductive layer 1 serving as one electrode is exposed on one end face 53, and the conductive layer 2 serving as the other electrode.
Is configured to be exposed on the other end surface 54. Common conductive layers 7 and 8 (see FIG. 2F) are formed on the exposed surfaces 53 and 54 of these electrodes, and the conductive layers 1 and 2 are positive or negative, and are electrically parallel to each other. Has become.
【００１５】前記各導電層１、２に挟まれた部位が活性
部６であり、挟まれない部位５、５ａが不活性部であ
る。The portion sandwiched between the conductive layers 1 and 2 is the active portion 6, and the portions 5 and 5a not sandwiched are the inactive portions.
【００１６】こうして作られた積層形圧電変位素子ブロ
ックを、不活性部張り出し部５０だけ張り出して基台４
と接着する。また、固定のライン５１と活性部６の終端
に位置する電極のライン５２及び変位方向の端面５３は
平行になっていて、導電層１、２と接合部４ａも平行に
なるように配設されている。こうして接合した積層形圧
電変位素子ブロックを所定の幅で切断し、一定間隔で配
列して積層形圧電変位素子列を構成する。The laminated piezoelectric displacement element block thus produced is overhanged only by the inactive portion overhanging portion 50 and the base 4
Glue with. Further, the fixed line 51, the electrode line 52 at the end of the active portion 6 and the end face 53 in the displacement direction are parallel to each other, and the conductive layers 1 and 2 and the joint portion 4a are also arranged to be parallel to each other. ing. The laminated piezoelectric displacement element blocks thus joined are cut into a predetermined width and arranged at regular intervals to form a laminated piezoelectric displacement element row.
【００１７】このように構成された前記積層形圧電変位
素子列に、電気的信号を印加すると、活性部６の変位に
より変位部９のみが矢印Ａ方向に振動する。こうして、
変位領域である変位部９と基台４の間に、変位の生じな
い不活性部５が存在し、これがバッファとなる。もとよ
り、圧電体３は電極や基台４と比較して弾性率が大きい
が、活性部６の変位は、不活性部５に緩衝されて基台４
に伝達される為に、接合部４ａでの変位や応力が極めて
小さくなる。When an electric signal is applied to the laminated piezoelectric displacement element array thus configured, only the displacement portion 9 vibrates in the direction of arrow A due to the displacement of the active portion 6. Thus
Between the displacement portion 9 which is the displacement area and the base 4, there is an inactive portion 5 where no displacement occurs, and this serves as a buffer. Of course, the piezoelectric body 3 has a larger elastic modulus than the electrodes and the base 4, but the displacement of the active portion 6 is buffered by the inactive portion 5 and the base 4 is
Therefore, the displacement and stress at the joint portion 4a are extremely small.
【００１８】このことから、不活性部５を基台４から張
り出させて接着して使用することにより、基台４と接着
部の剥離を少なくし、歪みのない単一方向へ振動の指向
性のある変位を得ることができる。基台４の振動も小さ
くなるため、積層形圧電変位素子間の干渉も小さくな
る。さらに、実際に変形をする活性部６の長さのばらつ
きによる変位量及び変位速度のばらつきはあるが、固定
長さがばらつくことによる変位量及び変位速度のばらつ
きは小さくなる。Therefore, by using the inactive portion 5 by sticking it out from the base 4 and adhering it, peeling between the base 4 and the adhesive portion is reduced, and vibration is directed in a single direction without distortion. It is possible to obtain a proper displacement. Since the vibration of the base 4 is also small, the interference between the laminated piezoelectric displacement elements is also small. Furthermore, although there are variations in the displacement amount and the displacement speed due to variations in the length of the active portion 6 that is actually deformed, variations in the displacement amount and the displacement velocity due to variations in the fixed length are small.
【００１９】なお、好ましくは、活性部６に対する不活
性部５の長さの比率が、１０倍から０．５倍が望まし
く、さらに、接着強度および変位量から１倍から３倍が
より好ましい。不活性部張り出し部５０は０〜０．５mm
ぐらいが接着剤のはみ出しが不活性領域内となり、活性
領域に及んで変位を拘束することもなく、不活性部張り
出し部５０の固有振動が変位に乗ってくることもないの
で好ましい。The ratio of the length of the inactive portion 5 to the active portion 6 is preferably 10 to 0.5 times, and more preferably 1 to 3 times in terms of the adhesive strength and the displacement amount. Inert portion overhang 50 is 0 to 0.5 mm
It is preferable that the protrusion of the adhesive is in the inactive region, the displacement is not restricted to the active region, and the natural vibration of the inactive portion protruding portion 50 does not ride on the displacement.
【００２０】次に、積層形圧電変位素子の製造方法を図
２を使って説明する。まず、定板１０の上にペースト状
に調整した圧電体、例えばチタン酸・ジルコン酸鉛系複
合ペロブスカイトセラミックス材料を薄く塗布して第１
の圧電体層３１を形成する（同図 （ａ））。Next, a method of manufacturing the laminated piezoelectric displacement element will be described with reference to FIG. First, a piezoelectric body prepared in the form of a paste, for example, a titanate / lead zirconate-based composite perovskite ceramic material is thinly applied on the surface plate 10 to form a first layer.
The piezoelectric layer 31 is formed ((a) in the same figure).
【００２１】この表面に蒸着や導電性塗料により一方の
電極となる第１の導電層１１を形成する（ｂ）。A first conductive layer 11 to be one of the electrodes is formed on this surface by vapor deposition or a conductive coating (b).
【００２２】さらに、この導電層１１、及び第１の圧電
体層３１の表面に圧電体を薄く塗布して第２の圧電体層
３２を形成する（ｃ）。Further, a thin piezoelectric material is applied to the surfaces of the conductive layer 11 and the first piezoelectric material layer 31 to form a second piezoelectric material layer 32 (c).
【００２３】この表面に他方の電極となる導電層２１を
上述の方法で形成する（ｄ）。A conductive layer 21 to be the other electrode is formed on this surface by the method described above (d).
【００２４】この様な作業を必要とする積層数だけ繰り
返す。The above operation is repeated for the required number of layers.
【００２５】このようにして、所定の層数を形成した段
階で、乾燥させ、これに圧力を加えた状態で温度１００
０乃至１２００℃で１時間程度焼成することにより直方
体状のセラミックに仕上がる（ｅ）。In this way, when a predetermined number of layers are formed, it is dried, and a temperature of 100 is applied in a state where pressure is applied thereto.
By firing at 0 to 1200 ° C. for about 1 hour, a rectangular parallelepiped ceramic is finished (e).
【００２６】この直方体状のものの導電層１１が露出し
ている面と導電層１１、２１が露出している面にそれぞ
れ導電塗料を塗布して導電層７、８を形成する（ｆ）。Conductive paints are applied to the surface of the rectangular parallelepiped in which the conductive layer 11 is exposed and the surfaces in which the conductive layers 11 and 21 are exposed to form conductive layers 7 and 8 (f).
【００２７】この一方の電極を接続している導電層７に
は、独立のリード部材を接続し、また、他方の電極を接
続している導電層８には共通のリード部材を接続する。An independent lead member is connected to the conductive layer 7 connecting the one electrode, and a common lead member is connected to the conductive layer 8 connecting the other electrode.
【００２８】このように構成した積層形圧電変位素子に
電気信号が印加されると、導電層７、８を介して電極を
形成する導電層間に、同一の電圧が同時に印加される。When an electric signal is applied to the laminated piezoelectric displacement element thus constructed, the same voltage is simultaneously applied between the conductive layers forming the electrodes via the conductive layers 7 and 8.
【００２９】このため、導電層１１、２１に挟まれてい
る部位間である活性部だけは、電極間の圧電体層３２、
３２、３２‥‥が同時に伸縮し、各層の圧電体層３２、
３２、３２‥‥の変位が足し合わされて、自由端側が矢
印方向へ変位する積層形圧電変位素子が形成される。Therefore, only the active portion between the portions sandwiched by the conductive layers 11 and 21 is the piezoelectric layer 32 between the electrodes.
32, 32 ... Simultaneously expands and contracts, and each of the piezoelectric layers 32,
The displacements of 32, 32 ... Are added to form a laminated piezoelectric displacement element in which the free end side is displaced in the direction of the arrow.
【００３０】前記積層形圧電変位素子を図３に示すイン
クジェット記録装置であるカイザータイプの積層形圧電
変位素子縦振動型ヘッドに適用した場合、歪みのない単
一方向へ振動の指向性のある変位を得ることができる。
そこで、図３を平面Ａで切りＺ方向から見た場合の駆動
部の拡大図を図４に示し、ノズル開口部４４からインク
滴が吐出するまでの過程を説明する。When the laminated piezoelectric displacement element is applied to a Kaiser type laminated piezoelectric displacement element longitudinal vibration type head which is an ink jet recording apparatus shown in FIG. 3, a displacement having a directivity of vibration in a single direction without distortion. Can be obtained.
Therefore, an enlarged view of the driving unit when FIG. 3 is cut in the plane A and viewed from the Z direction is shown in FIG. 4, and a process until the ink droplets are ejected from the nozzle openings 44 will be described.
【００３１】図４において、ドットを形成すべきノズル
プレート４４ａに形成されたノズル開口部に対向する積
層形圧電素子４１に電圧を印加すると、積層形圧電素子
４１が弾性に富むバネ板材４５を変形させながら伸長し
て、積層形圧電素子の対向面に配置した隔壁４２と隔壁
中のインク４３を押出し、ノズル開口部からインク滴と
して吐出させることができる。In FIG. 4, when a voltage is applied to the laminated piezoelectric element 41 facing the nozzle opening formed in the nozzle plate 44a on which dots are formed, the laminated piezoelectric element 41 deforms the elastic spring plate member 45. While extending, the partition wall 42 disposed on the opposing surface of the laminated piezoelectric element and the ink 43 in the partition wall can be extruded and ejected as an ink droplet from the nozzle opening.
【００３２】[0032]
【発明の効果】本発明による積層形圧電変位素子の固定
構造は、基台における接着層で剥離が生じず、歪みのな
い単一方向へ振動の指向性のある変位を得ることができ
る。また同一基台上の積層圧電変位素子同士の干渉が小
さい。変位量及び変位速度のばらつきが小さい。接着剤
のはみ出しによる変位の拘束がないという効果がある。According to the fixing structure of the laminated piezoelectric displacement element according to the present invention, peeling does not occur in the adhesive layer on the base, and it is possible to obtain a directional displacement of vibration in a single direction without distortion. Further, the interference between the laminated piezoelectric displacement elements on the same base is small. The variation in displacement amount and displacement speed is small. There is an effect that the displacement of the adhesive is not restricted by the protrusion.
【図１】図１は、本発明の積層型圧電変位素子の固定構
造の一実施例を示す部分斜視図。FIG. 1 is a partial perspective view showing an embodiment of a fixing structure for a laminated piezoelectric displacement element according to the present invention.
【図２】（ａ）乃至（ｆ）は、それぞれ図１に用いられ
ている積層形圧電変位素子の製造方法を示す説明図。2A to 2F are explanatory views showing a method of manufacturing the laminated piezoelectric displacement element used in FIG. 1, respectively.
【図３】図１の層構造を持つ積層形圧電変位素子を使っ
たカイザータイプの積層形圧電変位素子縦振動型のイン
クジェットヘッド部を表した構造図。FIG. 3 is a structural diagram showing a vertical vibration type inkjet head section of a Kaiser type laminated piezoelectric displacement element using the laminated piezoelectric displacement element having the layer structure of FIG.
【図４】図３のカイザータイプの積層形圧電変位素子縦
振動型のインクジェットヘッド構造図を平面Ａで切りＺ
方向から見た時の駆動部拡大図。FIG. 4 is a sectional view taken along plane A of the Kaiser type laminated piezoelectric displacement element longitudinal vibration type inkjet head structure diagram shown in FIG.
FIG. 3 is an enlarged view of a drive unit when viewed from the direction.
１ ・・・・ 一方の電極を構成する導電層 ２ ・・・・ 他方の電極を構成する導電層 ３ ・・・・ 圧電体 ４ ・・・・ 基台 ４ａ・・・・ 接合部 ５ ・・・・ 不活性部 ５ａ・・・・ 不活性部 ６ ・・・・ 活性部 ７ ・・・・ 導電層 ８ ・・・・ 導電層 ９ ・・・・ 変位部 １０ ・・・・ 定板 １１ ・・・・ 一方の電極となる第１の導電層 ２１ ・・・・ 他方の電極となる導電層 ３１ ・・・・ 第１の圧電体層 ３２ ・・・・ 第２の圧電体層 ４１ ・・・・ 積層形圧電変位素子 ４２ ・・・・ 隔壁 ４３ ・・・・ インク ４４ ・・・・ ノズル開口部 ４４ａ・・・・ ノズルプレート ４５ ・・・・ バネ板材 ５０ ・・・・ 不活性部張り出し部 ５１ ・・・・ 固定のライン ５２ ・・・・ 活性層終端の電極のライン ５３ ・・・・ 変位方向の端面 1 ... Conductive layer constituting one electrode 2 ... Conductive layer constituting the other electrode 3 ... Piezoelectric body 4 ... Base 4a ... Joining portion 5 ...・ ・ Inactive portion 5a ・ ・ ・ ・ Inactive portion 6 ・ ・ ・ ・ Active portion 7 ・ ・ ・ ・ Conductive layer 8 ・ ・ ・ ・ Conductive layer 9 ・ ・ ・ ・ Displacement portion 10 ・ ・ ・ ・ Fixed plate 11 ・・ ・ ・ First conductive layer serving as one electrode 21 ・ ・ ・ Conductive layer serving as the other electrode 31 ・ ・ ・ First piezoelectric layer 32 ・ ・ ・ Second piezoelectric layer 41 ・ ・ ・・ ・ Layered piezoelectric displacement element 42 ・ ・ ・ ・ Partition wall 43 ・ ・ ・ ・ Ink 44 ・ ・ ・ ・ Nozzle opening 44a ・ ・ ・ ・ Nozzle plate 45 ・ ・ ・ ・ Spring plate material 50 ・ ・ ・ ・ Inactive portion overhang Part 51 ··· Fixed line 52 ··· Active layer terminal electrode line 53 ··· End face in displacement direction
フロントページの続き (72)発明者 阿部 知明 長野県諏訪市大和３丁目３番５号 セイコ ーエプソン株式会社内Front page continuation (72) Inventor Tomoaki Abe 3-5 Yamato, Suwa City, Nagano Seiko Epson Corporation
Claims (1)
形圧電変位素子を基台に固定する構造であって、前記積
層形圧電変位素子に電圧印加時に変位する活性部と変位
しない不活性部とを設け、前記不活性部を基台から張り
出させて不活性部のみを基台に接着したことを特徴とす
る積層形圧電変位素子の固定構造。1. A structure in which a laminated piezoelectric displacement element in which piezoelectric bodies and electrodes are alternately laminated is fixed to a base, and an active portion that is displaced when a voltage is applied to the laminated piezoelectric displacement element is not displaced. A fixing structure for a laminated piezoelectric displacement element, characterized in that an active portion is provided, the inactive portion is projected from a base, and only the inactive portion is bonded to the base.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24363691A JP3347346B2 (en) | 1991-09-24 | 1991-09-24 | Piezoelectric displacement unit for inkjet recording apparatus and recording head for inkjet recording apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24363691A JP3347346B2 (en) | 1991-09-24 | 1991-09-24 | Piezoelectric displacement unit for inkjet recording apparatus and recording head for inkjet recording apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0577431A true JPH0577431A (en) | 1993-03-30 |
| JP3347346B2 JP3347346B2 (en) | 2002-11-20 |
Family
ID=17106771
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24363691A Expired - Lifetime JP3347346B2 (en) | 1991-09-24 | 1991-09-24 | Piezoelectric displacement unit for inkjet recording apparatus and recording head for inkjet recording apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3347346B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008050432A1 (en) | 2006-10-26 | 2008-05-02 | Cluster Technology Co., Ltd. | Droplet ejecting apparatus and method for manufacturing the same |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3041952B2 (en) | 1990-02-23 | 2000-05-15 | セイコーエプソン株式会社 | Ink jet recording head, piezoelectric vibrator, and method of manufacturing these |
-
1991
- 1991-09-24 JP JP24363691A patent/JP3347346B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008050432A1 (en) | 2006-10-26 | 2008-05-02 | Cluster Technology Co., Ltd. | Droplet ejecting apparatus and method for manufacturing the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3347346B2 (en) | 2002-11-20 |
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