JPH0578897B2 - - Google Patents
Info
- Publication number
- JPH0578897B2 JPH0578897B2 JP63094518A JP9451888A JPH0578897B2 JP H0578897 B2 JPH0578897 B2 JP H0578897B2 JP 63094518 A JP63094518 A JP 63094518A JP 9451888 A JP9451888 A JP 9451888A JP H0578897 B2 JPH0578897 B2 JP H0578897B2
- Authority
- JP
- Japan
- Prior art keywords
- lining plate
- lid
- ion source
- vacuum container
- generation chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 3
- 150000002500 ions Chemical class 0.000 description 32
- 239000000463 material Substances 0.000 description 14
- 229920006395 saturated elastomer Polymers 0.000 description 8
- 238000010891 electric arc Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000000470 constituent Substances 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63094518A JPH01267944A (ja) | 1988-04-19 | 1988-04-19 | イオン源 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63094518A JPH01267944A (ja) | 1988-04-19 | 1988-04-19 | イオン源 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01267944A JPH01267944A (ja) | 1989-10-25 |
| JPH0578897B2 true JPH0578897B2 (pt) | 1993-10-29 |
Family
ID=14112547
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63094518A Granted JPH01267944A (ja) | 1988-04-19 | 1988-04-19 | イオン源 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01267944A (pt) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03109258U (pt) * | 1990-02-22 | 1991-11-11 |
-
1988
- 1988-04-19 JP JP63094518A patent/JPH01267944A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01267944A (ja) | 1989-10-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |