JPH0580623B2 - - Google Patents

Info

Publication number
JPH0580623B2
JPH0580623B2 JP60168322A JP16832285A JPH0580623B2 JP H0580623 B2 JPH0580623 B2 JP H0580623B2 JP 60168322 A JP60168322 A JP 60168322A JP 16832285 A JP16832285 A JP 16832285A JP H0580623 B2 JPH0580623 B2 JP H0580623B2
Authority
JP
Japan
Prior art keywords
sound field
propagation medium
field propagation
base
microscope according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60168322A
Other languages
Japanese (ja)
Other versions
JPS6228659A (en
Inventor
Toshiaki Myamoto
Ryosuke Suganuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honda Electronics Co Ltd
Original Assignee
Honda Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honda Electronics Co Ltd filed Critical Honda Electronics Co Ltd
Priority to JP60168322A priority Critical patent/JPS6228659A/en
Publication of JPS6228659A publication Critical patent/JPS6228659A/en
Publication of JPH0580623B2 publication Critical patent/JPH0580623B2/ja
Granted legal-status Critical Current

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  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、トランスジユーサで発生した超音波
を集束する超音波顕微鏡の音場伝搬媒体に関する
ものである。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a sound field propagation medium for an ultrasound microscope that focuses ultrasound generated by a transducer.

従来技術 現在使用されている超音波顕微鏡の音場伝搬媒
体は、一端に超音波を発生するトランスジユーサ
を設け、他端にこのトランスジユーサで発生した
超音波を集束して試料に照射する音響レンズ部が
設けられている。
Prior Art The sound field propagation medium of ultrasound microscopes currently in use has a transducer that generates ultrasonic waves at one end, and focuses the ultrasonic waves generated by the transducer at the other end to irradiate the sample. An acoustic lens section is provided.

また、異なる超音波ビームを発生する手段とし
て、音場伝搬媒体に一端にトランスジユーサの電
極を同心円状に分割して設け、これらの電極を組
み合わせることによりトランスジユーサの音波発
生面積を変化させるものがある。
In addition, as a means of generating different ultrasonic beams, the electrodes of the transducer are divided concentrically at one end of the sound field propagation medium, and by combining these electrodes, the sound wave generation area of the transducer is changed. There is something.

発明が解決しようとする問題点 しかしながら、この音場伝搬媒体では、焦点深
度が一定で、超音波ビームの開口角が一定である
ため、一種類の超音波ビームしか得ることができ
ず、他の超音波ビームを得るためには、トランス
ジユーサを付設した音場伝搬媒体全体を取り替え
なければならず、コストが高くなるという欠点が
あつた。
Problems to be Solved by the Invention However, in this sound field propagation medium, the depth of focus is constant and the aperture angle of the ultrasound beam is constant, so only one type of ultrasound beam can be obtained; In order to obtain an ultrasonic beam, the entire sound field propagation medium to which the transducer is attached must be replaced, which has the disadvantage of increasing costs.

またトランスジユーサを同心状に分割した場合
には、超音波が音場伝搬媒体内で拡散し、特に開
口角の小さい超音波ビームは得難いという欠点が
あり、さらにこの音場伝搬媒体では、超音波ビー
ムの開口角を変えることしかできず、焦点距離を
変えることはできなかつた。
Furthermore, when the transducer is divided concentrically, the ultrasonic waves are diffused within the sound field propagation medium, which has the disadvantage that it is difficult to obtain an ultrasonic beam with a particularly small aperture angle. They could only change the aperture angle of the sound beam, not the focal length.

問題点を解決するための手段 本発明は、上記問題点を解決するために、支柱
の支持体に固定された音場伝搬媒体からなる基体
の上端にトランスジユーサを装着し、前記支柱に
回転可能に円盤が装着され、かつ該円盤に下端に
設けた球面レンズの焦点深度または開口角が互い
に異なつた多数の音場伝搬媒体からなる交換体が
装着され、該交換体上端面は前記基体の下端面と
摺接されるように構成されていることを特徴とす
る。
Means for Solving the Problems In order to solve the above-mentioned problems, the present invention mounts a transducer on the upper end of a base made of a sound field propagation medium fixed to a support of a column, and rotates the transducer on the column. A disk is attached to the disk, and an exchanger is attached to the disk, which is made up of a number of sound field propagation media having different focal depths or aperture angles of spherical lenses provided at the lower end, and the upper end surface of the exchanger is attached to the base. It is characterized by being configured to be in sliding contact with the lower end surface.

作 用 本発明では、トランスジユーサを一端に付設し
た基体に、焦点深度及び開口角の異つた交換体を
機械的に接合するだけで、簡単に交換することが
でき、作業性が非常に良い。
Effects In the present invention, exchangers with different focal depths and aperture angles are simply joined mechanically to a base body with a transducer attached to one end, allowing for easy exchange and very high workability. .

実施例 1 第1図は、本発明の第1実施例の超音波顕微鏡
の一部の側面図及び第2図は、交換体を装着した
円盤の平面図を示したもので、支柱1に支持体2
が固定され、この支持体2に音場伝搬媒体からな
る基体3が装着され、この基体3の上面にトラン
スジユーサ4が付設されている。また基体3の下
面に接触するように円盤5に多数の音場伝搬媒体
からなる交換体6が装着され、この交換体6は下
端に球面レンズ部7が形成されている。そして、
これらの交換体6はそれぞれの球面レンズ7の焦
点深度または開口角を互いに異ならせている。な
お、円盤5は軸受8によつて支柱1に回転自在に
装着されている。
Embodiment 1 FIG. 1 shows a side view of a part of an ultrasonic microscope according to the first embodiment of the present invention, and FIG. body 2
is fixed, a base body 3 made of a sound field propagation medium is attached to this support body 2, and a transducer 4 is attached to the upper surface of this base body 3. Further, an exchanger 6 made of a plurality of sound field propagation media is attached to the disk 5 so as to be in contact with the lower surface of the base 3, and a spherical lens portion 7 is formed at the lower end of the exchanger 6. and,
These exchangers 6 have their respective spherical lenses 7 having different focal depths or aperture angles. Note that the disk 5 is rotatably mounted on the support column 1 via a bearing 8.

このように構成した本実施例の超音波顕微鏡の
音場伝搬媒体では、円盤5を回転するだけで所望
の焦点深度及び開口角度を持つた音場伝搬媒体を
得ることができるので、被検査体の検査作業が非
常にやり易く、作業性がよいという利点がある。
With the sound field propagation medium of the ultrasonic microscope of this embodiment configured in this way, it is possible to obtain a sound field propagation medium with a desired depth of focus and aperture angle simply by rotating the disk 5. It has the advantage of being very easy to perform inspection work and having good workability.

なお、基体3と交換体6は例えばサフアイヤや
溶融石英の同一物質で構成してもよいし、また基
体3と交換体6とを別の物質で構成してもよい。
また、基体3と交換体6の接触を良くするため
に、基体3または交換体6の接触面に水またはオ
イルを小量塗布した後、基体と交換体6を接触さ
せれば、音響効果はより良くなる。
The base 3 and the exchanger 6 may be made of the same material, such as sapphire or fused silica, or the base 3 and the exchanger 6 may be made of different materials.
In addition, in order to improve the contact between the base 3 and the exchanger 6, the acoustic effect can be improved by applying a small amount of water or oil to the contact surface of the base 3 or the exchanger 6, and then bringing the base and the exchanger 6 into contact. Get better.

実施例 2 第3図は、本発明の第2実施例の超音波顕微鏡
の一部の構成図を示したもので、1は支柱、2は
支持体、3は基体、4はトランスジユーサ、5は
円盤、6は交換体、7は球面レンズ部、8は軸受
であり、これらの構成は前述の実施例と同じであ
るが、本実施例では、基体3と交換体6の間に音
場伝搬媒体からなる中間体9が装着されている。
この中間体9は基体3に装着してもよいし、また
交換体6に装着してもよく、さらに中間体9を半
分に分割してそれぞれ基体3及び交換体6に装着
してもよい。なお、この中間体9の厚さtはその
使用する超音波の周波数の波長λの1/4の偶数倍、
即ち t=2n×λ/4(nは正の整数) とする。また、基体3と交換体6を異なる音場伝
搬媒体で構成した場合は、中間体9の厚さtは、 t=(2n−1)×λ/4(nは正の整数) とする。
Embodiment 2 FIG. 3 shows a partial configuration diagram of an ultrasonic microscope according to a second embodiment of the present invention, in which 1 is a support column, 2 is a support body, 3 is a base body, 4 is a transducer, 5 is a disk, 6 is an exchanger, 7 is a spherical lens part, and 8 is a bearing, and these structures are the same as in the previous embodiment, but in this embodiment, there is no sound between the base 3 and the exchanger 6. An intermediate body 9 consisting of a field propagation medium is mounted.
This intermediate body 9 may be attached to the base body 3, or may be attached to the exchanger body 6, or furthermore, the intermediate body 9 may be divided in half and attached to the base body 3 and the exchange body 6, respectively. The thickness t of this intermediate body 9 is an even number multiple of 1/4 of the wavelength λ of the frequency of the ultrasonic wave used.
That is, t=2n×λ/4 (n is a positive integer). Further, when the base body 3 and the exchanger body 6 are constructed of different sound field propagation media, the thickness t of the intermediate body 9 is set as follows: t=(2n-1)×λ/4 (n is a positive integer).

このように構成した本実施例の超音波顕微鏡の
音場伝搬媒体では、基体3と交換体6の間に中間
体9を設けることにより、これらの間の音響イン
ピーダンスをマツチングさせることができる。ま
た、中間体の音響インピーダンスは上記基体及び
交換体の音響インピーダンスの相乗平均となるよ
うにしてもよい。
In the sound field propagation medium of the ultrasonic microscope of this embodiment configured as described above, by providing the intermediate body 9 between the base body 3 and the exchange body 6, it is possible to match the acoustic impedance between them. Further, the acoustic impedance of the intermediate body may be the geometric mean of the acoustic impedances of the base body and the exchange body.

実施例 3 上記実施例では、基体3と作換体6の接触面を
それらの側面に対してほぼ垂直に接断したが、第
4図aに示したように斜めに切断してもよい。ま
た第4図bに示したように斜めに切断した基体3
と作換体6の間に中間体9を介在させてもよい。
Embodiment 3 In the above embodiment, the contact surfaces of the base body 3 and the switching body 6 were cut almost perpendicularly to their side surfaces, but they may be cut obliquely as shown in FIG. 4a. In addition, as shown in FIG. 4b, the base 3 is cut diagonally.
An intermediate body 9 may be interposed between the modified body 6 and the modified body 6.

なお、上記実施例では、円盤5に多数の交換体
6を装着したが、基体3を支持する支持体2の下
部支柱1に取り外し自在の支持部を設け、この1
つの支持部に1つの交換体を装着し、支持部ごと
交換体を交換できるようにしてもよいし、また支
持部は支柱に固着し、基体3の下に設けた支持部
の穴に交換体を挿入して装着するようにしてもよ
い。また、基体または交換体を2つ以上に分割し
てもよい。
In the above embodiment, a large number of exchangers 6 are attached to the disk 5, but a removable support part is provided on the lower column 1 of the support 2 that supports the base 3, and this one
One replacement body may be attached to two support parts so that the replacement body can be replaced together with the support part, or the support part may be fixed to a column and the replacement body may be inserted into a hole in the support part provided under the base body 3. It is also possible to insert and attach it. Further, the base body or the exchange body may be divided into two or more parts.

発明の効果 以上の説明から明らかなように、本発明は、音
場伝搬媒体からなる基体に対して、機械的に焦点
深度及び開口角がそれぞれ異なつた音場伝搬媒体
からなる交換体を直接接合させるか、音場伝搬媒
体からなる中間体を介して接合させるようにした
ので、作業性が非常に良いという利点がある。
Effects of the Invention As is clear from the above description, the present invention mechanically connects exchangers made of sound field propagation media with different focal depths and aperture angles directly to a base made of sound field propagation media. The advantage is that workability is very good because the two parts are bonded via an intermediate body made of a sound field propagation medium.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、本発明の第1実施例の超音波顕微鏡
の一部の断面図、第2図は第1図の交換体を装着
した円盤の一部断面図、第3図は本発明の第2実
施例の超音波顕微鏡の一部の断面図、第4図は本
発明の第3実施例の超音波顕微鏡の音場伝搬媒体
の側面図である。 1……支柱、2……支持体、3……基体、4…
…トランスジユーサ、5……円盤、6……交換
体、7……球面レンズ部、8……軸受、9……中
間体。
FIG. 1 is a partial cross-sectional view of an ultrasonic microscope according to a first embodiment of the present invention, FIG. 2 is a partial cross-sectional view of a disk equipped with the exchanger shown in FIG. 1, and FIG. FIG. 4 is a cross-sectional view of a part of the ultrasound microscope according to the second embodiment, and a side view of a sound field propagation medium of the ultrasound microscope according to the third embodiment of the present invention. 1... Strut, 2... Support, 3... Base, 4...
...transducer, 5...disc, 6...exchangeable body, 7...spherical lens section, 8...bearing, 9...intermediate body.

Claims (1)

【特許請求の範囲】 1 支柱の支持体に固定された音場伝搬媒体から
なる基体の上端にトランスジユーサを装着し、前
記支柱に回転可能に円盤が装着され、かつ該円盤
に下端に設けた球面レンズの焦点深度または開口
角が互いに異なつた多数の音場伝搬媒体からなる
交換体が装着され、該交換体上端面は前記基体の
下端面と摺接されるように構成されている超音波
顕微鏡の音場伝搬媒体。 2 上記基体及び交換体はサフアイヤからなるこ
とを特徴とする特許請求の範囲第1項記載の超音
波顕微鏡の音場伝搬媒体。 3 上記基体及び交換体は溶融石英からなること
を特徴とする特許請求の範囲第1項記載の超音波
顕微鏡の音場伝搬媒体。 4 上記基体と交換体の間に音響伝搬媒体である
中間体を設けたことを特徴とする特許請求の範囲
第1項から第3項のいずれか1項記載の超音波顕
微鏡の音場伝搬媒体。 5 上記中間体の厚さをその使用超音波の周波数
の1/4波長の偶数倍とすることを特徴とする特許
請求の範囲第4項記載の超音波顕微鏡の音場伝搬
媒体。 6 上記基体に中間体を設け、上記交換体に他の
中間体を設けたことを特徴とする特許請求の範囲
第1項記載の超音波顕微鏡の音場伝搬媒体。 7 上記中間体の音響インピーダンスが上記基体
及び上記交換体の音響インピーダンスの相乗平均
となるようにしたことを特徴とする特許請求の範
囲第6項記載の超音波顕微鏡の音場伝搬媒体。 8 上記基体に中間体を設け、上記交換体に他の
中間体を設けたことを特徴とする特許請求の範囲
第1項記載の超音波顕微鏡の音場伝搬媒体。 9 上記基体は支柱に固着された支持体に装着さ
れ、上記多数の交換体が上記支柱に回転自在に装
着された円盤に間隔をあけて装着されることを特
徴とする特許請求の範囲第1項記載の超音波顕微
鏡の音場伝搬媒体。
[Scope of Claims] 1. A transducer is attached to the upper end of a base made of a sound field propagation medium fixed to a support of a column, a disk is rotatably attached to the column, and a transducer is attached to the lower end of the disk. an exchanger made of a plurality of sound field propagation media having different focal depths or aperture angles of spherical lenses, and an upper end surface of the exchanger is configured to be in sliding contact with a lower end surface of the base. Sound field propagation medium for acoustic microscopes. 2. The sound field propagation medium for an ultrasound microscope according to claim 1, wherein the base body and the exchanger body are made of saphire. 3. The sound field propagation medium for an ultrasound microscope according to claim 1, wherein the base body and the exchanger body are made of fused silica. 4. A sound field propagation medium for an ultrasound microscope according to any one of claims 1 to 3, characterized in that an intermediate body serving as a sound propagation medium is provided between the base body and the exchange body. . 5. The sound field propagation medium for an ultrasound microscope according to claim 4, wherein the thickness of the intermediate body is an even multiple of a quarter wavelength of the frequency of the ultrasound used. 6. The sound field propagation medium for an ultrasound microscope according to claim 1, wherein the base body is provided with an intermediate body, and the exchange body is provided with another intermediate body. 7. The sound field propagation medium for an ultrasound microscope according to claim 6, wherein the acoustic impedance of the intermediate body is the geometric mean of the acoustic impedances of the base body and the exchange body. 8. A sound field propagation medium for an ultrasonic microscope according to claim 1, characterized in that the base body is provided with an intermediate body, and the exchange body is provided with another intermediate body. 9. Claim 1, wherein the base body is attached to a support fixed to a support column, and the plurality of exchangers are attached at intervals to a disk rotatably attached to the column. Sound field propagation medium for the ultrasonic microscope described in Section 1.
JP60168322A 1985-07-30 1985-07-30 Medium for propagating sound field of ultrasonic microscope Granted JPS6228659A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60168322A JPS6228659A (en) 1985-07-30 1985-07-30 Medium for propagating sound field of ultrasonic microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60168322A JPS6228659A (en) 1985-07-30 1985-07-30 Medium for propagating sound field of ultrasonic microscope

Publications (2)

Publication Number Publication Date
JPS6228659A JPS6228659A (en) 1987-02-06
JPH0580623B2 true JPH0580623B2 (en) 1993-11-09

Family

ID=15865886

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60168322A Granted JPS6228659A (en) 1985-07-30 1985-07-30 Medium for propagating sound field of ultrasonic microscope

Country Status (1)

Country Link
JP (1) JPS6228659A (en)

Also Published As

Publication number Publication date
JPS6228659A (en) 1987-02-06

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