JPH0582538B2 - - Google Patents
Info
- Publication number
- JPH0582538B2 JPH0582538B2 JP59061777A JP6177784A JPH0582538B2 JP H0582538 B2 JPH0582538 B2 JP H0582538B2 JP 59061777 A JP59061777 A JP 59061777A JP 6177784 A JP6177784 A JP 6177784A JP H0582538 B2 JPH0582538 B2 JP H0582538B2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- diaphragm
- receiving plate
- pressure sensor
- pressure receiving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
- G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、圧力センサに関する。本発明に係る
圧力センサは油圧計、水位計または血圧計等に使
用される。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a pressure sensor. The pressure sensor according to the present invention is used for an oil pressure gauge, a water level gauge, a blood pressure gauge, or the like.
従来技術
この種の圧力センサは、振動板の一面側に圧電
振動子を一体に接合し、振動板の開放面を受圧面
とした構造となつていて、発振回路との組合せに
より、振動板に加わる圧力を、発振周波数の変化
として検出するものである。第１図はこの種の圧
力センサの従来例を示し、円板状に形成された振
動板２の一面２０１上に圧電振動子１を一体に接
合したものを、ケース３内に内蔵させ、ケース３
の蓋部材３０１に設けられた圧力導入孔３０２を
通して導入される圧力を、振動板２の他面２０２
で受圧する構造となつている。圧伝振動子１は、
例えば第２図及び第３図に示すように、円板状に
形成された圧電磁器素体１０１の一面側の略全面
に電極１０２を設けると共に、他面側にギヤツプ
G1を隔てて電極１０３及び１０４を同軸状に形
成した構造とし、電極１０２側を振動板２の一面
上に固着してある。Prior Art This type of pressure sensor has a structure in which a piezoelectric vibrator is integrally bonded to one side of a diaphragm, and the open surface of the diaphragm is used as a pressure-receiving surface. The applied pressure is detected as a change in the oscillation frequency. FIG. 1 shows a conventional example of this type of pressure sensor, in which a piezoelectric vibrator 1 is integrally bonded onto one surface 201 of a diaphragm 2 formed in a disc shape, and the piezoelectric vibrator 1 is built in a case 3. 3
The pressure introduced through the pressure introduction hole 302 provided in the lid member 301 is applied to the other surface 202 of the diaphragm 2.
The structure is such that it receives pressure. The piezoelectric vibrator 1 is
For example, as shown in FIGS. 2 and 3, an electrode 102 is provided on substantially the entire surface of one surface of a piezoelectric ceramic body 101 formed in the shape of a disk, and a gap is provided on the other surface.
It has a structure in which electrodes 103 and 104 are coaxially formed with G 1 in between, and the electrode 102 side is fixed on one surface of the diaphragm 2 .
振動板２は、その周縁をケース底板３０３に立
設された筒状の支持体３０４の上端面上に気密に
固着されている。３０５は振動板２の周縁を抑え
る固定部材、４〜６は圧電振動子１の電極１０
２，１０３及び１０４をそれぞれ導通接続させた
端子である。 The diaphragm 2 has its circumferential edge hermetically fixed onto the upper end surface of a cylindrical support 304 erected on the case bottom plate 303 . 305 is a fixing member that suppresses the periphery of the diaphragm 2; 4 to 6 are electrodes 10 of the piezoelectric vibrator 1;
2, 103, and 104 are electrically connected to each other.
上記圧力センサを用いて圧力検出を行なうに
は、第４図に示すような自励発振式検出回路を構
成する。第４図において、７は第１図に示した圧
力センサ、８は増幅器、C1〜C3はコンデンサ、
R1〜R4は抵抗、VRは可変抵抗、Vccは直流電源
電圧、９は出力端子である。 In order to detect pressure using the pressure sensor described above, a self-oscillation type detection circuit as shown in FIG. 4 is constructed. In FIG. 4, 7 is the pressure sensor shown in FIG. 1, 8 is an amplifier, C 1 to C 3 are capacitors,
R 1 to R 4 are resistors, VR is a variable resistor, Vcc is a DC power supply voltage, and 9 is an output terminal.
この自励発振回路においては、圧力センサ７を
構成する振動板２側の電極１０２と電極１０３と
の間に印加される電圧によつて圧電振動子１に振
動を起させ、それによつて生じる電圧を電極１０
４から増幅器８の入力に帰還させることにより、
自励発振動作を継続させる。ここで、振動板２の
受圧面２０２（第１図）に加わる圧力が変化する
と、それにつれて振動板２の張力が変わり、共振
周波数が変化する。このため、電極１０４を通し
て増幅器８に入力される帰還信号の周波数が変化
し、発振周波数が変化する。従つて、発振周波数
からそのときの圧力を検出することができる。 In this self-excited oscillation circuit, the piezoelectric vibrator 1 is caused to vibrate by the voltage applied between the electrode 102 and the electrode 103 on the diaphragm 2 side that constitute the pressure sensor 7, and the resulting voltage is The electrode 10
By feeding back from 4 to the input of amplifier 8,
Continue self-excited vibration operation. Here, when the pressure applied to the pressure receiving surface 202 (FIG. 1) of the diaphragm 2 changes, the tension of the diaphragm 2 changes accordingly, and the resonant frequency changes. Therefore, the frequency of the feedback signal input to the amplifier 8 through the electrode 104 changes, and the oscillation frequency changes. Therefore, the pressure at that time can be detected from the oscillation frequency.
従来技術の欠点
上述の如く、従来の圧力センサは、振動板２の
他面２０２を受圧面とする構造となつていたた
め、圧力媒体が油、水または血液等の液体である
ときは、振動板２における受圧圧力が大きくなり
過ぎ、発振停止するか、または発振を継続してい
ても圧力に比例する発振周波数が得られなくなる
と言う難点があつた。Disadvantages of the Prior Art As mentioned above, the conventional pressure sensor has a structure in which the other surface 202 of the diaphragm 2 is the pressure-receiving surface, so when the pressure medium is a liquid such as oil, water, or blood, the diaphragm There was a problem in that the received pressure at No. 2 became too large and the oscillation stopped, or even if the oscillation continued, an oscillation frequency proportional to the pressure could not be obtained.
本発明の目的
そこで本発明は、上述する従来の欠点を除去
し、圧力媒体が液体であつても、発振停止等を招
くことなく、圧力に比例した発振出力を得ること
の可能な圧力センサを提供することを目的とする
本発明の構成
上記目的を達成するため、本発明に係る圧力セ
ンサは、一面上に圧電振動子を装着した振動板の
他面側の前方に、間隔を隔てて、受圧板を配置し
た圧力センサであつて、前記受圧板及び前記振動
板は、全周縁が前記振動板と前記受圧板との間に
前記間隔による密閉空間を形成するように封止さ
れ、かつ、支持されており、前記受圧板は、前記
密閉空間上に位置する面の周辺部にヒダ状で、か
つ、リング状の屈曲部を有することを特徴とす
る。Purpose of the Invention Therefore, the present invention eliminates the above-mentioned conventional drawbacks and provides a pressure sensor that can obtain an oscillation output proportional to the pressure without causing oscillation stoppage, etc. even when the pressure medium is a liquid. Configuration of the present invention aimed to provide In order to achieve the above object, the pressure sensor according to the present invention includes a diaphragm having a piezoelectric vibrator mounted on one surface thereof, and a diaphragm having a piezoelectric vibrator mounted on the other surface of the diaphragm. A pressure sensor having a pressure receiving plate arranged therein, wherein the pressure receiving plate and the diaphragm are sealed on their entire periphery so as to form a sealed space between the diaphragm and the pressure receiving plate by the interval, and The pressure receiving plate is characterized in that it has a fold-like and ring-like bent portion on the periphery of the surface located above the closed space.
実施例
第５図は本発明に係る圧力センサの部分断面図
である。図において、第１図と同一の参照符号は
同一性ある構成部分を示している。この実施例で
は、圧電振動子１を固着した振動板２の全周縁
を、ケース底板３０３に取付けられた筒状の支持
部材３０４の上端面と、その上に結合される筒状
の固定部材３０５とにより気密に固着すると共
に、前記固定部材３０５の上端面に金属薄板また
は高分子フイルム等で成る受圧板１０を載せ、こ
の受圧板１０の全周縁を、固定部材３０５の端面
と、この固定部材３０５の外周に嵌着される固定
部材３０６の端面との間で密着固定した構造とな
つている。従つて、振動板２の面２０２と受圧板
１０との間には密閉空間１１が形成される。受圧
板１０は、第６図及び第７図にも示すように、密
閉空間上に位置する面の周辺部にヒダ状で、か
つ、リング状の屈曲部イを形成したものを使用し
ている。このような屈曲部イがあると、同一の圧
力に対して受圧板１０の撓み量が増大する。Embodiment FIG. 5 is a partial sectional view of a pressure sensor according to the present invention. In the figure, the same reference numerals as in FIG. 1 indicate the same components. In this embodiment, the entire periphery of the diaphragm 2 to which the piezoelectric vibrator 1 is fixed is connected to the upper end surface of a cylindrical support member 304 attached to a case bottom plate 303, and to a cylindrical fixing member 305 coupled thereon. At the same time, a pressure receiving plate 10 made of a thin metal plate, a polymer film, etc. is placed on the upper end surface of the fixing member 305, and the entire periphery of the pressure receiving plate 10 is connected to the end surface of the fixing member 305 and this fixing member. The fixing member 305 is tightly fixed to the end surface of a fixing member 306 that is fitted onto the outer periphery of the fixing member 305 . Therefore, a sealed space 11 is formed between the surface 202 of the diaphragm 2 and the pressure receiving plate 10. As shown in FIGS. 6 and 7, the pressure receiving plate 10 has a pleated and ring-shaped bent portion A formed in the periphery of the surface located above the closed space. . If there is such a bent portion A, the amount of deflection of the pressure receiving plate 10 increases with respect to the same pressure.
本発明に係る圧力センサは上述のような構造で
あつて、圧力導入孔３０２を通してケース３内部
に導入された圧力は、まず、受圧板１０によつて
受圧され、受圧板１０に圧力に比例した撓みを生
じさせる。そして、この受圧板１０の撓みによ
り、密閉空間１１の圧力を撓み量に比例して変化
させ、密閉空間１１の圧力の変化を振動板２で受
圧する。従つて、圧力媒体が油、水等の液体であ
つても、振動板２に対して過大な圧力が加わるこ
とがない。このため、第４図のような圧力検出回
路を構成して圧力検出を行なう場合、発振停止等
を招くことなく、圧力に比例して、発振周波数を
変化させることが可能になる。 The pressure sensor according to the present invention has the above-described structure, and the pressure introduced into the case 3 through the pressure introduction hole 302 is first received by the pressure receiving plate 10, and the pressure sensor 10 receives the pressure proportional to the pressure. causes deflection. Then, due to the deflection of the pressure receiving plate 10, the pressure in the closed space 11 is changed in proportion to the amount of deflection, and the change in the pressure in the closed space 11 is received by the diaphragm 2. Therefore, even if the pressure medium is a liquid such as oil or water, excessive pressure will not be applied to the diaphragm 2. Therefore, when a pressure detection circuit as shown in FIG. 4 is configured to detect pressure, it is possible to change the oscillation frequency in proportion to the pressure without causing oscillation to stop or the like.
第８図は本発明に係る圧力センサを利用して第
４図に示す圧力検出回路を構成した場合の圧力−
周波数特性図である。圧力範囲は最も広い範囲で
使えるように設計できる。 FIG. 8 shows the pressure when the pressure detection circuit shown in FIG. 4 is configured using the pressure sensor according to the present invention.
It is a frequency characteristic diagram. The pressure range can be designed to be used over the widest range.
また、密閉空間上に位置する面の周辺部にヒダ
状で、かつ、リング状の屈曲部イを設けてあるの
で、受圧板１０の撓み量が増大し、圧力変化に対
する発振周波数変化幅が大きくなり、精度の高い
圧力検出が可能になる。 In addition, since the folded and ring-shaped bent portion A is provided at the periphery of the surface located in the sealed space, the amount of deflection of the pressure receiving plate 10 is increased, and the width of the oscillation frequency change in response to pressure changes is increased. This enables highly accurate pressure detection.
本発明の効果
以上述べたように、本発明に係る圧力センサ
は、一面上に圧電振動子を装着した振動板の他面
側の前方に、間隔を隔てて、受圧板を配置した圧
力センサであつて、前記受圧板及び前記振動板
は、全周縁が前記振動板と前記受圧板との間に前
記間隔による密閉空間を形成するように封止さ
れ、かつ、支持されており、前記受圧板は、前記
密閉空間上に位置する面の周辺部にヒダ状で、か
つ、リング状の屈曲部を有することを特徴とする
から、圧力媒体が液体であつても、発振停止等を
招くことなく、圧力に比例した発振出力を得るこ
との可能な圧力センサを提供することができる。Effects of the Present Invention As described above, the pressure sensor according to the present invention is a pressure sensor in which pressure receiving plates are arranged at intervals in front of the other surface of a diaphragm on which a piezoelectric vibrator is mounted. The pressure receiving plate and the diaphragm are sealed and supported such that the entire periphery thereof forms a sealed space between the diaphragm and the pressure receiving plate, and the pressure receiving plate is characterized by having fold-shaped and ring-shaped bent parts on the periphery of the surface located above the sealed space, so even if the pressure medium is a liquid, the oscillation does not stop, etc. , it is possible to provide a pressure sensor capable of obtaining an oscillation output proportional to pressure.
しかも、密閉空間上に位置する面の周辺部にヒ
ダ状で、かつ、リング状の屈曲部を有するから、
受圧板の撓み量が増大し、圧力変化に対する発振
周波数変化幅が大きくなり、精度の高い圧力検出
が可能になる。 Moreover, since it has fold-like and ring-like bent parts on the periphery of the surface located in the closed space,
The amount of deflection of the pressure receiving plate increases, the range of change in oscillation frequency with respect to pressure changes increases, and highly accurate pressure detection becomes possible.
第１図は従来の圧力センサの部分断面図、第２
図は圧電振動子の平面図、第３図は同じくその断
面図、第４図は圧力検出回路の電気回路図、第５
図は本発明に係る圧力センサの正面部分断面図、
第６図は受圧板の平面図、第７図は同じく断面
図、第８図は本発明に係る圧力センサを使用して
第４図に示すような圧力検出回路を構成した場合
の圧力−発振出力周波数特性図である。
１……圧電振動子、２……振動板、３……ケー
ス、１０……受圧板、１１……密閉空間。
Figure 1 is a partial sectional view of a conventional pressure sensor, Figure 2 is a partial sectional view of a conventional pressure sensor.
The figure is a plan view of the piezoelectric vibrator, Figure 3 is a cross-sectional view thereof, Figure 4 is an electric circuit diagram of the pressure detection circuit, and Figure 5
The figure is a front partial sectional view of a pressure sensor according to the present invention,
FIG. 6 is a plan view of the pressure receiving plate, FIG. 7 is a cross-sectional view, and FIG. 8 is a pressure-oscillation when a pressure detection circuit as shown in FIG. 4 is constructed using the pressure sensor according to the present invention. It is an output frequency characteristic diagram. 1... Piezoelectric vibrator, 2... Vibration plate, 3... Case, 10... Pressure receiving plate, 11... Closed space.
Claims (1)
側の前方に、間隔を隔てて、受圧板を配置した圧
力センサであつて、 前記受圧板及び前記振動板は、全周縁が前記振
動板と前記受圧板との間に前記間隔による密閉空
間を形成するように封止され、かつ、支持されて
おり、 前記受圧板は、前記密閉空間上に位置する面の
周辺部にヒダ状で、かつ、リング状の屈曲部を有
すること を特徴とする圧力センサ。[Scope of Claims] 1. A pressure sensor in which a pressure receiving plate is arranged at intervals in front of the other side of a diaphragm on which a piezoelectric vibrator is mounted, the pressure receiving plate and the diaphragm being , the entire periphery is sealed and supported so as to form a sealed space between the diaphragm and the pressure receiving plate, and the pressure receiving plate has a surface located above the sealed space. A pressure sensor characterized by having a fold-shaped and ring-shaped bent part in the peripheral part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6177784A JPS60203831A (en) | 1984-03-28 | 1984-03-28 | Pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6177784A JPS60203831A (en) | 1984-03-28 | 1984-03-28 | Pressure sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60203831A JPS60203831A (en) | 1985-10-15 |
| JPH0582538B2 true JPH0582538B2 (en) | 1993-11-19 |
Family
ID=13180860
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6177784A Granted JPS60203831A (en) | 1984-03-28 | 1984-03-28 | Pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60203831A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002168719A (en) * | 2000-12-01 | 2002-06-14 | Ngk Spark Plug Co Ltd | Charge amplifier for piezoelectric pressure sensor |
| DE102006040731A1 (en) * | 2006-08-31 | 2008-03-13 | Siemens Ag | Device for energy conversion, in particular piezoelectric micro-power converter |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5484979U (en) * | 1977-11-28 | 1979-06-15 | ||
| JPS5658632A (en) * | 1979-10-18 | 1981-05-21 | Seikosha Co Ltd | Pressure detecting device |
| JPS5941735U (en) * | 1982-09-08 | 1984-03-17 | ティーディーケイ株式会社 | pressure sensor |
-
1984
- 1984-03-28 JP JP6177784A patent/JPS60203831A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60203831A (en) | 1985-10-15 |
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