JPH0584854B2 - - Google Patents
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- Publication number
- JPH0584854B2 JPH0584854B2 JP62068497A JP6849787A JPH0584854B2 JP H0584854 B2 JPH0584854 B2 JP H0584854B2 JP 62068497 A JP62068497 A JP 62068497A JP 6849787 A JP6849787 A JP 6849787A JP H0584854 B2 JPH0584854 B2 JP H0584854B2
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- interference film
- light
- detector
- optical fiber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Measuring Temperature Or Quantity Of Heat (AREA)
Description
【発明の詳細な説明】
［産業上の利用分野］
この発明は、光フアイバを利用した光学式温度
測定装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to an optical temperature measuring device using an optical fiber.
［従来の技術］
従来、温度により透過率等が変化する半導体等
を感温部とし、これにフアイバにより光を投光、
受光し、検出器の受光量から温度を測定するもの
がある。[Prior art] Conventionally, a semiconductor or the like whose transmittance changes depending on temperature is used as a temperature sensing part, and light is emitted onto it using a fiber.
There is one that receives light and measures the temperature from the amount of light received by a detector.
［この発明が解決しようとする問題点］
しかしながら、感温部として半導体等を用いる
と、材料の性質から透過率等の特性は決つてしま
い、必要に応じた測温範囲、感度を自由に選択し
にくい等の問題点があつた。[Problems to be Solved by the Invention] However, when a semiconductor or the like is used as the temperature-sensing part, the characteristics such as transmittance are determined by the properties of the material, so it is not possible to freely select the temperature measurement range and sensitivity according to needs. There were some problems, such as difficulty.
この発明の目的は、以上の点に鑑み、感温部と
して干渉膜フイルタを用い、高感度の温度測定を
可能とした光学式温度測定装置を提供することで
ある。 In view of the above points, an object of the present invention is to provide an optical temperature measuring device that uses an interference film filter as a temperature sensing section and is capable of highly sensitive temperature measurement.
［問題点を解決するための手段］
この発明は、温度により透過率または反射率が
変化する感温部としての２個の干渉膜フイルタに
光フアイバを介して光源からの光を投受光し、光
フアイバからの光を検出し、測定手段で温度差を
測定するようにした光学式測定装置である。[Means for Solving the Problems] The present invention projects and receives light from a light source via an optical fiber to two interference film filters as temperature-sensitive parts whose transmittance or reflectance changes depending on temperature. This is an optical measuring device that detects light from an optical fiber and measures temperature differences using measuring means.
［実施例］
第１図は、この発明の一実施例を示す構成説明
図である。[Embodiment] FIG. 1 is a configuration explanatory diagram showing an embodiment of the present invention.
図において、白熱電球、ハロゲンランプ、
LED等の光源１の光は、光フアイバ２１を介し
て感温部としての第１の（多層の）干渉膜フイル
タ３１に投光され、このバンドパスフイルタのよ
うな第１の干渉膜フイルタ３１を透過した光は、
光フアイバ光フアイバ２２を介して感温部として
の第２の干渉膜フイルタ３２に投光され、このバ
ンドパスフイルタのような第２の干渉膜フイルタ
３２を透過した光は光フアイバ２３を介して取り
出され、検出器４で受光され、この検出器４の出
力から、第１、第２の干渉膜フイルタ３１，３２
の温度差を測定手段５で演算される。 In the figure, incandescent bulbs, halogen lamps,
Light from a light source 1 such as an LED is projected through an optical fiber 21 to a first (multilayer) interference film filter 31 as a temperature sensing section. The light that has passed through the
The light is projected through the optical fiber 22 to the second interference film filter 32 as a temperature sensing section, and the light transmitted through the second interference film filter 32 such as a bandpass filter is transmitted through the optical fiber 23. The light is taken out and received by the detector 4, and from the output of the detector 4, it is passed through the first and second interference film filters 31, 32.
The measuring means 5 calculates the temperature difference.
つまり、第１の干渉膜フイルタ３１の温度T1
を一定とすれば、この透過波長特性は第２図Ｂで
示すように変わらず、また、第２の干渉膜フイル
タ３２は、その温度T2が上昇すると第２図Ａか
らA′というように長波長側に透過波長特性がシ
フトし、従つて、ＡまたはA′とＢとの重なり具
合は両干渉膜フイルタ３１，３２の温度差T2−
T1により変化し、検出器４に入射する放射エネ
ルギーが変化する。この検出器４の出力から、測
定手段５により、あらかじめ実験、計算等で求め
た演算式、テーブル等から温度差T2−T1を測定
する。 In other words, the temperature T 1 of the first interference film filter 31
If T is constant, this transmission wavelength characteristic does not change as shown in FIG. 2B, and the second interference film filter 32 changes from A to A' in FIG. 2 as its temperature T2 increases. The transmission wavelength characteristic shifts to the long wavelength side, and therefore, the degree of overlap between A or A' and B is determined by the temperature difference T 2 - of both interference film filters 31 and 32.
T 1 changes, and the radiant energy incident on the detector 4 changes. From the output of the detector 4, the temperature difference T2 - T1 is measured by the measuring means 5 from an arithmetic expression, table, etc., obtained in advance through experiments, calculations, etc.
また、第１の干渉膜フイルタ３１の温度T1が
変化し、第２の干渉膜フイルタ３２の温度T2が
一定の場合、または、第１、第２の干渉膜フイル
タ３１，３２の各温度T1，T2が両方とも変化し
た場合も、同様にして温度差の測定を行うことが
できる。 Further, when the temperature T 1 of the first interference film filter 31 changes and the temperature T 2 of the second interference film filter 32 is constant, or each temperature of the first and second interference film filters 31 and 32 Even when both T 1 and T 2 change, the temperature difference can be measured in the same way.
なお、干渉膜フイルタ３１，３２としては、高
屈折率膜にSiまたはGe、低屈折率膜にSiO等を用
い、蒸着等により多層膜を形成し、温度範囲、感
度に応じた所望の透過波長特性をもつフイルタと
する。このように多層の干渉膜フイルタの層数、
膜構成を変えることにより必要とするバンドパス
特性をもつフイルタが得られ、また、Si，Geの
屈折率の温度係数は約1.5×10-4／℃と十分大き
く、感温部として十分使用できる。 For the interference film filters 31 and 32, a multilayer film is formed by vapor deposition or the like using Si or Ge for the high refractive index film and SiO for the low refractive index film, and the desired transmission wavelength is adjusted according to the temperature range and sensitivity. A filter with characteristics. In this way, the number of layers of a multilayer interference film filter,
By changing the film configuration, a filter with the required bandpass characteristics can be obtained, and the temperature coefficient of the refractive index of Si and Ge is sufficiently large at approximately 1.5 × 10 -4 /℃, making it suitable for use as a temperature sensing section. .
第３図は、この発明の他の一実施例を示す構成
説明図で、第１図と同一符号は同等の構成要素を
示す。 FIG. 3 is a configuration explanatory diagram showing another embodiment of the present invention, in which the same reference numerals as in FIG. 1 indicate equivalent components.
光源１からの光は、ハーフミラー６を介し光フ
アイバ２１により第１の干渉膜フイルタ３１に投
光され、この第１の干渉膜フイルタ３１を透過し
た光は光フアイバ２２により第２の干渉膜フイル
タ３２に投光され、第２の干渉膜フイルタ３２を
反射した光は、再び光フアイバ２２、第１の干渉
膜フイルタ３１、光フアイバ２１を介して取り出
され、ハーフミラー６で反射し、検出器４に入射
して受光され、検出器４の出力から測定手段５で
温度差の演算が行われる。 Light from the light source 1 is projected onto a first interference film filter 31 via an optical fiber 21 via a half mirror 6, and the light transmitted through the first interference film filter 31 is transmitted through an optical fiber 22 to a second interference film filter 31. The light that is projected onto the filter 32 and reflected by the second interference film filter 32 is extracted again via the optical fiber 22, the first interference film filter 31, and the optical fiber 21, and is reflected by the half mirror 6 and detected. The light enters the detector 4 and is received, and the temperature difference is calculated by the measuring means 5 from the output of the detector 4.
つまり、第１の干渉膜フイルタ３１の透過波長
特性は、温度T1が一定とすれば、第４図Ｂのよ
うに一定であり、第２の干渉膜フイルタ３２は、
その温度T2が上昇すると第４図ＡからA′という
ように長波長側に反射波長特性がシフトし、Ａま
たはA′とＢとの重なり具合が、両干渉膜フイル
タ３１，３２の温度差T2−T1により変化するの
で、検出器４の出力から同様にして、測定手段５
で温度差の測定ができる。 That is, if the temperature T1 is constant, the transmission wavelength characteristics of the first interference film filter 31 are constant as shown in FIG. 4B, and the transmission wavelength characteristics of the second interference film filter 32 are as follows.
When the temperature T2 rises, the reflection wavelength characteristic shifts to the long wavelength side from A to A' in FIG. Since it changes depending on T 2 −T 1 , similarly from the output of the detector 4, the measuring means 5
Temperature differences can be measured.
なお、第５図に示すように、光フアイバ２０の
端面に干渉膜フイルタ３を蒸着等で形成すること
により（たとえば多数の光フアイバの端面に同時
に干渉膜フイルタを形成することにより）、均一
な感温部が、安価、大量に生産でき、互換性も有
し、また、光コネクタ２０ａにより光フアイバ２
１，２２に蒸着可能とすることにより、取り扱
い、保守等が容易なものとなる。 As shown in FIG. 5, by forming the interference film filter 3 on the end face of the optical fiber 20 by vapor deposition or the like (for example, by forming the interference film filter 3 on the end face of a large number of optical fibers at the same time), uniform The temperature sensing part can be produced in large quantities at low cost, has compatibility, and can be connected to the optical fiber 2 using the optical connector 20a.
By making it possible to deposit on 1 and 22, handling, maintenance, etc. become easy.
［発明の効果］
以上述べたように、この発明は、感温部として
２個の干渉膜フイルタを用い、光フアイバを利用
して容易に温度差を測定することが可能となり、
また、干渉膜フイルタは膜構成等により透過波長
特性を自由に変えることができ、測温範囲、感度
等に応じた各種測温が容易に可能となる。[Effects of the Invention] As described above, the present invention uses two interference film filters as temperature-sensing parts and makes it possible to easily measure temperature differences using optical fibers.
In addition, the interference film filter can freely change the transmission wavelength characteristics by changing the film configuration, etc., and it becomes possible to easily measure various temperatures according to the temperature measurement range, sensitivity, etc.
第１図、第３図、第５図は、この発明の一実施
例を示す構成説明図、第２図、第４図は、波長特
性説明図である。
１……光源、２０，２１，２２，２３……光フ
アイバ、３１，３２……干渉膜フイルタ、４……
検出器、５……測定手段、６……ハーフミラー、
２０ａ……光コネクタ。
FIGS. 1, 3, and 5 are configuration explanatory diagrams showing one embodiment of the present invention, and FIGS. 2 and 4 are wavelength characteristic diagrams. 1... Light source, 20, 21, 22, 23... Optical fiber, 31, 32... Interference film filter, 4...
Detector, 5... Measuring means, 6... Half mirror,
20a...Optical connector.
Claims (1)
温部としての２個の干渉膜フイルタと、この２個
の干渉膜フイルタに光源からの光を順次投光して
透過または反射した光を検出器に受光させる光フ
アイバと、検出器の出力から２つの干渉膜フイル
タの温度差を測定する測定手段とを備えたことを
特徴とする光学式測定装置。1. Two interference film filters as temperature-sensitive parts whose transmittance or reflectance changes depending on temperature, and a detector that sequentially projects light from a light source onto these two interference film filters and detects the transmitted or reflected light. 1. An optical measuring device comprising: an optical fiber for receiving light; and a measuring means for measuring a temperature difference between two interference film filters from the output of a detector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62068497A JPS63234127A (en) | 1987-03-23 | 1987-03-23 | Optical temperature measuring instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62068497A JPS63234127A (en) | 1987-03-23 | 1987-03-23 | Optical temperature measuring instrument |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63234127A JPS63234127A (en) | 1988-09-29 |
| JPH0584854B2 true JPH0584854B2 (en) | 1993-12-03 |
Family
ID=13375391
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62068497A Granted JPS63234127A (en) | 1987-03-23 | 1987-03-23 | Optical temperature measuring instrument |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63234127A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101555153B1 (en) * | 2014-09-03 | 2015-10-06 | 한국기초과학지원연구원 | Appratus and method for measuring temperature distributuin |
-
1987
- 1987-03-23 JP JP62068497A patent/JPS63234127A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63234127A (en) | 1988-09-29 |
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