JPH058516Y2 - - Google Patents

Info

Publication number: JPH058516Y2
Authority: JP; Japan
Prior art keywords: sample; light; spectrophotometer; light source; marker
Prior art date: 1987-09-21
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

JP14397187U

Other languages

English (en)

Japanese (ja)

Other versions

JPS6448659U (fr

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1987-09-21

Filing date

1987-09-21

Publication date

1993-03-03

1987-09-21 Application filed filed Critical

1987-09-21 Priority to JP14397187U priority Critical patent/JPH058516Y2/ja

1989-03-27 Publication of JPS6448659U publication Critical patent/JPS6448659U/ja

1993-03-03 Application granted granted Critical

1993-03-03 Publication of JPH058516Y2 publication Critical patent/JPH058516Y2/ja

2002-09-21 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Links

239000003550 marker Substances 0.000 claims description 31
238000003384 imaging method Methods 0.000 claims description 7
238000009434 installation Methods 0.000 claims description 6
230000000694 effects Effects 0.000 claims description 3
238000005375 photometry Methods 0.000 description 23
230000003287 optical effect Effects 0.000 description 12
238000005286 illumination Methods 0.000 description 8
238000010586 diagram Methods 0.000 description 6
238000000034 method Methods 0.000 description 3
238000005259 measurement Methods 0.000 description 2
238000001228 spectrum Methods 0.000 description 2
206010034972 Photosensitivity reaction Diseases 0.000 description 1
VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
230000015572 biosynthetic process Effects 0.000 description 1
238000005516 engineering process Methods 0.000 description 1
238000004519 manufacturing process Methods 0.000 description 1
230000036211 photosensitivity Effects 0.000 description 1
229910052710 silicon Inorganic materials 0.000 description 1
239000010703 silicon Substances 0.000 description 1
229910052814 silicon oxide Inorganic materials 0.000 description 1
230000003595 spectral effect Effects 0.000 description 1
238000004611 spectroscopical analysis Methods 0.000 description 1
230000000007 visual effect Effects 0.000 description 1
235000012431 wafers Nutrition 0.000 description 1

Landscapes

Spectrometry And Color Measurement (AREA)
Investigating Or Analysing Materials By Optical Means (AREA)

JP14397187U 1987-09-21 1987-09-21 Expired - Lifetime JPH058516Y2 (fr)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP14397187U JPH058516Y2 (fr)	1987-09-21	1987-09-21

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP14397187U JPH058516Y2 (fr)	1987-09-21	1987-09-21

Publications (2)

Publication Number	Publication Date
JPS6448659U JPS6448659U (fr)	1989-03-27
JPH058516Y2 true JPH058516Y2 (fr)	1993-03-03

Family

ID=31411270

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP14397187U Expired - Lifetime JPH058516Y2 (fr)	1987-09-21	1987-09-21

Country Status (1)

Country	Link
JP (1)	JPH058516Y2 (fr)

1987
- 1987-09-21 JP JP14397187U patent/JPH058516Y2/ja not_active Expired - Lifetime

Also Published As

Publication number	Publication date
JPS6448659U (fr)	1989-03-27

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