JPH0585859B2 - - Google Patents

Info

Publication number
JPH0585859B2
JPH0585859B2 JP61276678A JP27667886A JPH0585859B2 JP H0585859 B2 JPH0585859 B2 JP H0585859B2 JP 61276678 A JP61276678 A JP 61276678A JP 27667886 A JP27667886 A JP 27667886A JP H0585859 B2 JPH0585859 B2 JP H0585859B2
Authority
JP
Japan
Prior art keywords
range
section
vacuum gauge
pressure
comparison
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61276678A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63132128A (ja
Inventor
Takeyoshi Shibata
Toshio Koike
Shigehiko Masubuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Atomic Energy Agency
Ulvac Inc
Original Assignee
Japan Atomic Energy Research Institute
Ulvac Inc
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Atomic Energy Research Institute, Ulvac Inc, Nihon Shinku Gijutsu KK filed Critical Japan Atomic Energy Research Institute
Priority to JP61276678A priority Critical patent/JPS63132128A/ja
Publication of JPS63132128A publication Critical patent/JPS63132128A/ja
Publication of JPH0585859B2 publication Critical patent/JPH0585859B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Indication And Recording Devices For Special Purposes And Tariff Metering Devices (AREA)
JP61276678A 1986-11-21 1986-11-21 レンジホ−ルド付オ−トレンジ電離真空計 Granted JPS63132128A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61276678A JPS63132128A (ja) 1986-11-21 1986-11-21 レンジホ−ルド付オ−トレンジ電離真空計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61276678A JPS63132128A (ja) 1986-11-21 1986-11-21 レンジホ−ルド付オ−トレンジ電離真空計

Publications (2)

Publication Number Publication Date
JPS63132128A JPS63132128A (ja) 1988-06-04
JPH0585859B2 true JPH0585859B2 (2) 1993-12-09

Family

ID=17572791

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61276678A Granted JPS63132128A (ja) 1986-11-21 1986-11-21 レンジホ−ルド付オ−トレンジ電離真空計

Country Status (1)

Country Link
JP (1) JPS63132128A (2)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108318178A (zh) * 2017-01-16 2018-07-24 横河电机株式会社 压力测量器

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5752837A (en) * 1980-09-16 1982-03-29 Toshiba Corp Vacuum degree measuring instrument
JPS59138933A (ja) * 1983-01-31 1984-08-09 Anelva Corp 自動レンジ真空計

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108318178A (zh) * 2017-01-16 2018-07-24 横河电机株式会社 压力测量器
JP2018115865A (ja) * 2017-01-16 2018-07-26 横河電機株式会社 圧力測定器
US10620074B2 (en) 2017-01-16 2020-04-14 Yokogawa Electric Corporation Pressure gauge with variable measurement range and display thereof

Also Published As

Publication number Publication date
JPS63132128A (ja) 1988-06-04

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