JPH0587575A - Vibration gyroscope - Google Patents
Vibration gyroscopeInfo
- Publication number
- JPH0587575A JPH0587575A JP3271795A JP27179591A JPH0587575A JP H0587575 A JPH0587575 A JP H0587575A JP 3271795 A JP3271795 A JP 3271795A JP 27179591 A JP27179591 A JP 27179591A JP H0587575 A JPH0587575 A JP H0587575A
- Authority
- JP
- Japan
- Prior art keywords
- coriolis force
- vibrating
- side surfaces
- piezoelectric elements
- vibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Abstract
(57)【要約】
【目的】 コリオリの力の検出結果の安定性を高めると
ともに、角速度の検出精度を高める。
【構成】 四角形横断面形状を有する振動体１の、少な
くとも、一の隅部を隔てて位置する二側面に、検出機能
を有するそれぞれの圧電素子２，３を貼着してなる振動
子４を、振動体１の横断面内の一の対角線方向に励振さ
せる振動ジャイロである。それぞれの圧電素子２，３
を、それらの各貼着側面内で、励振方向12と直交する方
向の隅部に近接させて位置させる。
(57) [Summary] [Purpose] To improve the stability of Coriolis force detection results and to improve angular velocity detection accuracy. A vibrator 4 is formed by attaching piezoelectric elements 2 and 3 each having a detection function to at least two side surfaces of a vibrating body 1 having a quadrangular cross-sectional shape, the side surfaces being separated by one corner. , A vibrating gyro that is excited in one diagonal direction in the cross section of the vibrating body 1. Each piezoelectric element 2, 3
Are located close to the corners in the direction orthogonal to the excitation direction 12 in each of the sticking side surfaces.
Description
【０００１】[0001]
【産業上の利用分野】この発明は、角速度の検出に用い
る振動ジャイロに関するものであり、とくには、角速度
の検出精度の向上をもたらすものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibrating gyroscope used to detect angular velocity, and more particularly to improving the accuracy of angular velocity detection.
【０００２】[0002]
【従来の技術】従来の振動ジャイロとしては、たとえば
図４に示すものがある。これは、図４(a) に示すよう
に、四角形横断面形状を有する振動体１の、隅部を隔て
て隣接する二側面に、それぞれの圧電素子２，３を貼着
して振動子４を構成したところにおいて、それぞれの圧
電素子２，３の接続端子５，６を、図４(b) に示すよう
に、それぞれのインピーダンス素子Ｚ1 ，Ｚ2 に接続す
るとともに、それらの圧電素子２，３と並列に配置した
それぞれの容量素子７，８の接続端子９，10を、それぞ
れのインピーダンス素子Ｚ3 ，Ｚ4 に接続し、そして、
インピーダンス素子Ｚ1 ，Ｚ2 およびＺ3 ，Ｚ4 のそれ
ぞれを、接続端子11を介して図示しない振動用駆動手段
に接続したものである。2. Description of the Related Art As a conventional vibrating gyroscope, for example, there is one shown in FIG. As shown in FIG. 4 (a), the piezoelectric element 2 and 3 are attached to the two side surfaces of the vibrating body 1 having a quadrangular cross-sectional shape, which are adjacent to each other with a corner portion therebetween. 4B, the connection terminals 5 and 6 of the respective piezoelectric elements 2 and 3 are connected to the respective impedance elements Z 1 and Z 2 as shown in FIG. , 3 connected in parallel with the respective capacitive elements 7, 8 connected to the respective impedance elements Z 3 , Z 4 , and
Each of the impedance elements Z 1 , Z 2 and Z 3 , Z 4 is connected to a vibration driving means (not shown) via a connection terminal 11.
【０００３】このような振動ジャイロでは、振動用駆動
手段からそれぞれの圧電素子２，３に、駆動用交流電圧
が印加されると、振動子４は、たとえば図４(a) に矢印
12で示すように上下方向に屈曲振動される。そして、か
かる屈曲振動時における、接続端子５と９との差動出力
および、接続端子６と10との差動出力のそれぞれを振動
用駆動手段に帰還させることで自励振動ループが形成さ
れ、振動子４は、矢印12方向に継続的に屈曲振動される
ことになる。In such a vibrating gyroscope, when a driving AC voltage is applied from the vibrating driving means to the respective piezoelectric elements 2 and 3, the vibrator 4 is indicated by an arrow in FIG. 4 (a), for example.
As shown by 12, it is flexurally vibrated vertically. Then, a self-excited vibration loop is formed by feeding back each of the differential output between the connection terminals 5 and 9 and the differential output between the connection terminals 6 and 10 to the vibration driving means at the time of such bending vibration. The vibrator 4 is continuously flexurally vibrated in the direction of arrow 12.
【０００４】ここにおいて、振動子４がその軸線の周り
で、図４(a) に矢印13で示すように回転されると、その
振動子４はコリオリの力によって、矢印14で示すよう
に、自励振動方向とは直交する方向に屈曲振動すること
になり、これにより、それぞれの圧電素子２，３の発生
電圧に差が生じることから、その差を求めることによっ
て角速度を測定することができる。Here, when the oscillator 4 is rotated around its axis as indicated by the arrow 13 in FIG. 4 (a), the oscillator 4 is rotated by Coriolis force, as indicated by the arrow 14. Flexural vibration occurs in a direction orthogonal to the self-excited vibration direction, and this causes a difference in the voltage generated between the piezoelectric elements 2 and 3, so that the angular velocity can be measured by obtaining the difference. ..
【０００５】[0005]
【発明が解決しようとする課題】ところが、かかる従来
技術にあっては、それぞれの圧電素子２，３の貼着位置
が、振動子４の駆動時における屈曲振動の中立面15およ
び、その振動子４のコリオリの力による屈曲振動の中立
面16のそれぞれからともに等距離にあって、それぞれの
圧電素子２，３が、それらの屈曲振動のいずれに対して
も同程度の感度を有することになり、これがため、帰還
信号の上に重畳して検出される、コリオリの力に基づく
それぞれの圧電素子２，３の出力電圧が、コリオリの力
以外の原因によって生じる出力電圧の変化、たとえば、
温度変化等に起因する帰還信号レベルの変化に大きな影
響を受け、そのような出力電圧の変化もコリオリの力の
変化によるものとみなされるという検出精度上の問題が
あった。However, in such a conventional technique, the attachment positions of the piezoelectric elements 2 and 3 are such that the neutral surface 15 of the bending vibration when the vibrator 4 is driven and the vibration thereof. The piezoelectric elements 2 and 3 are equidistant from each of the neutral planes 16 of the bending vibration due to the Coriolis force of the child 4, and the respective piezoelectric elements 2 and 3 have the same sensitivity to any of the bending vibrations. Therefore, the output voltage of each piezoelectric element 2 and 3 based on the Coriolis force, which is detected by being superimposed on the feedback signal, changes in the output voltage caused by a cause other than the Coriolis force, for example,
There is a problem in detection accuracy that it is greatly affected by a change in the feedback signal level due to a temperature change or the like, and such a change in output voltage is also considered to be due to a change in Coriolis force.
【０００６】しかも、コリオリの力による屈曲振動の振
幅は、駆動による屈曲振動の振幅に比べて小さいため、
帰還信号レベルが大きい程、温度変化等による出力電圧
の変化も大きくなって、コリオリの力の安定した検出が
困難になるという不都合があった。Moreover, since the amplitude of bending vibration due to the Coriolis force is smaller than the amplitude of bending vibration due to driving,
The larger the feedback signal level, the larger the change in the output voltage due to temperature changes and the like, which makes it difficult to stably detect the Coriolis force.
【０００７】この発明は、従来の振動ジャイロの有する
このような問題点を課題として検討することによってな
されたものであり、この発明の目的は、コリオリの力の
検出感度を高めるとともに、温度変化等に起因する出力
電圧の変化の、コリオリの力の検出精度におよぼす影響
を低減することによって、コリオリの力の十分に安定し
た検出を可能とし、角速度の検出精度を向上させた振動
ジャイロを提供するにある。The present invention has been made by studying such a problem of the conventional vibration gyro as a problem, and an object of the present invention is to enhance the detection sensitivity of the Coriolis force and to change the temperature. By reducing the effect of output voltage change caused by the change on Coriolis force detection accuracy, it is possible to detect Coriolis force sufficiently stably and provide a vibration gyro with improved angular velocity detection accuracy. It is in.
【０００８】[0008]
【課題を解決するための手段】この発明の振動ジャイロ
は、横断面形状が四角形をなす振動体の、少なくとも、
一の隅部を隔てて隣接する二側面に、コリオリの力の検
出機能を有するそれぞれの圧電素子を貼着してなる振動
子を、振動体の横断面内の一の対角線方向に励振させる
ものであって、それぞれの圧電素子を、それらの各貼着
側面内で、励振方向と直交する方向の隅部に近接させて
位置させることを特徴とするものである。A vibrating gyroscope according to the present invention comprises at least a vibrating body having a rectangular cross section,
A vibrator in which piezoelectric elements each having a function of detecting Coriolis force are attached to two side surfaces adjacent to each other across one corner to excite in a diagonal direction in a cross section of a vibrating body. It is characterized in that each piezoelectric element is positioned close to a corner in a direction orthogonal to the excitation direction within each of the sticking side surfaces thereof.
【０００９】[0009]
【作用】この振動ジャイロでは、それぞれの圧電素子
が、駆動による屈曲振動の中立面に近く、コリオリの力
による屈曲振動の中立面から遠く位置することになり、
これがため、それぞれの圧電素子の屈曲振動に対する感
度は、コリオリの力によるものの方が、駆動によるもの
より相対的に高くなる。In this vibrating gyroscope, each piezoelectric element is located close to the neutral plane of flexural vibration due to driving and far from the neutral plane of flexural vibration due to the Coriolis force.
For this reason, the sensitivity of each piezoelectric element to bending vibration is higher due to the Coriolis force than that due to driving.
【００１０】従って、この振動ジャイロによれば、コリ
オリの力の検出感度を高めることをもって、しかも、温
度変化等による帰還信号レベルの変化の影響を有効に低
減することをもって、コリオリの力の検出を十分安定な
ものとするとともに、角速度の検出精度を有利に向上さ
せることができる。Therefore, according to this vibrating gyro, the Coriolis force can be detected by increasing the detection sensitivity of the Coriolis force and effectively reducing the influence of the change of the feedback signal level due to the temperature change. In addition to being sufficiently stable, the angular velocity detection accuracy can be advantageously improved.
【００１１】[0011]
【実施例】以下にこの発明の実施例を図面に基づいて説
明する。図１はこの発明の実施例を示す図であり、図中
従来技術で述べた部分と同様の部分は、それらと同一の
番号で示す。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing an embodiment of the present invention, in which the same parts as those described in the prior art are designated by the same numbers.
【００１２】これは、四角形横断面形状を有する振動体
１の、一の隅部を隔てて隣接する二側面に、それぞれの
圧電素子２，３を貼着して振動子４としたところにおい
て、それらの各圧電素子２，３を、図中矢印12で示す自
励振動方向と直交する方向、図では矢印14で示す方向の
各隅部17, 18に近接させて位置させたものである。This is because the piezoelectric element 2 and 3 are attached to two adjacent side surfaces of a vibrating body 1 having a quadrangular cross-sectional shape, which are adjacent to each other with one corner portion, to form a vibrator 4. The piezoelectric elements 2 and 3 are located close to the corners 17 and 18 in the direction orthogonal to the self-excited vibration direction indicated by arrow 12 in the figure, that is, in the direction indicated by arrow 14 in the figure.
【００１３】この振動子４もまた、従来技術で述べたよ
うに、それぞれの圧電素子２，３に駆動用交流電圧を印
加することにより矢印12の方向に屈曲振動し、そして、
その自励屈曲振動を維持したまま、その振動子４を矢印
13で示す方向に回転させることにより、コリオリの力に
基づき、矢印14の方向に屈曲振動する。This vibrator 4 also flexurally vibrates in the direction of arrow 12 by applying a driving AC voltage to the respective piezoelectric elements 2 and 3 as described in the prior art, and
While maintaining the self-excited bending vibration, move the oscillator 4 to the arrow
By rotating in the direction indicated by 13, bending vibration occurs in the direction of arrow 14 based on the Coriolis force.
【００１４】ところで、この振動ジャイロによれば、圧
電素子２，３の貼着位置が、振動子４の駆動時における
屈曲振動の中立面15に近く、コリオリの力による屈曲振
動の中立面16から遠いことから、それらの圧電素子２，
３は、一定振幅の駆動振動に対しては歪が小さく、従っ
て感度が低く、逆に、コリオリの力による一定振幅の屈
曲振動に対しては歪が大きく、従って感度が高くなる。By the way, according to this vibration gyro, the bonding positions of the piezoelectric elements 2 and 3 are close to the neutral plane 15 of the flexural vibration when the vibrator 4 is driven, and the neutral plane of the flexural vibration due to the Coriolis force is applied. Since they are far from 16, those piezoelectric elements 2,
In No. 3, the strain is small with respect to the driving vibration of the constant amplitude, and therefore the sensitivity is low, and conversely, the strain is large with respect to the bending vibration of the constant amplitude due to the Coriolis force, and therefore the sensitivity is high.
【００１５】これがため、この振動ジャイロでは、コリ
オリの力の検出感度が向上する一方、温度変化等による
帰還信号レベルの変化の検出感度が有効に低下すること
になり、これらの結果として、コリオリの力の検出結果
を十分安定なものとし、併せて、角速度の検出精度を高
めることができる。For this reason, in this vibrating gyro, the detection sensitivity of the Coriolis force is improved, while the detection sensitivity of the change in the feedback signal level due to the temperature change is effectively reduced. The force detection result can be made sufficiently stable, and at the same time, the angular velocity detection accuracy can be improved.
【００１６】図２は他の実施例を示す正面図であり、こ
れは、それぞれの圧電素子２，３の分極極性を相互に反
転させたものである。FIG. 2 is a front view showing another embodiment, in which the polarization polarities of the piezoelectric elements 2 and 3 are mutually inverted.
【００１７】この場合には、振動子４は、それの駆動に
際して図の左右方向に屈曲振動するので、それぞれの圧
電素子２，３を、それらの間に位置する隅部19に近接さ
せて位置させ、このことによって、図１に示した実施例
と同様に、駆動時における一定振幅の屈曲振動に対して
は感度を低下させ、そして、コリオリの力による一定振
幅の屈曲振動に対しては感度の向上をもたらす。In this case, since the vibrator 4 bends and vibrates in the left-right direction in the drawing when it is driven, the piezoelectric elements 2 and 3 are positioned close to the corner 19 located between them. As a result, similarly to the embodiment shown in FIG. 1, the sensitivity is lowered with respect to the bending vibration with a constant amplitude during driving, and the sensitivity is reduced with respect to the bending vibration with a constant amplitude due to the Coriolis force. Bring about an improvement.
【００１８】また、図３に示す実施例は、図１に示す例
のそれぞれの圧電素子２，３の貼着面と対抗する側面
に、それらの各圧電素子２，３と対をなす各圧電素子2
a, 3aを貼着したところにおいて、それぞれの圧電素子
２，3aを隅部17に近接させて、また、圧電素子３，2aを
隅部18に近接させてそれぞれ位置させたものであり、こ
の例によってもまた、前述した各実施例と同様の作用効
果をもたらすことができる。In the embodiment shown in FIG. 3, the piezoelectric elements 2 and 3 of the example shown in FIG. Element 2
When the a and 3a are pasted, the respective piezoelectric elements 2 and 3a are positioned close to the corner 17, and the piezoelectric elements 3 and 2a are positioned close to the corner 18, respectively. The examples can also bring about the same effects as those of the above-described embodiments.
【００１９】以上この発明を、圧電素子２，2a，３，3a
のそれぞれに、駆動、帰還および検出の三機能をもたせ
た場合について説明したが、この発明では、検出機能を
有する圧電素子だけを上述したところに従って配設すれ
ば足りるので、駆動用および帰還用の圧電素子のそれぞ
れを上述したところに加えて別途配設することも可能で
ある。As described above, the present invention is applied to the piezoelectric elements 2, 2a, 3, 3a.
Each of the above has been described for the case of having the three functions of drive, feedback and detection.However, in the present invention, since it is sufficient to dispose only the piezoelectric element having the detection function according to the above description, it is necessary for the drive and the feedback. It is also possible to separately arrange each of the piezoelectric elements in addition to those described above.
【００２０】[0020]
【発明の効果】かくして、この発明によれば、とくに
は、検出機能を有するそれぞれの圧電素子を、それらの
各貼着側面内で、励振方向と直交する方向の、一または
複数の隅部に近接させて位置させることにより、コリオ
リの力による屈曲振動に対する感度を、駆動による屈曲
振動に対する感度に比して相対的に高めることができ、
しかも、帰還信号レベルの、温度変化等に起因する変化
の影響を低減することができるので、コリオリの力の検
出の安定性を高め、角速度の検出精度を高めることがで
きる。As described above, according to the present invention, in particular, each piezoelectric element having a detecting function is provided at one or a plurality of corners in a direction orthogonal to the excitation direction in each sticking side surface thereof. By positioning them close to each other, the sensitivity to flexural vibration due to the Coriolis force can be relatively increased compared to the sensitivity to flexural vibration due to driving,
Moreover, it is possible to reduce the influence of the change in the feedback signal level due to the temperature change and the like, so that it is possible to improve the stability of the detection of the Coriolis force and the detection accuracy of the angular velocity.
【図１】この発明の実施例を示す正面図である。FIG. 1 is a front view showing an embodiment of the present invention.
【図２】この発明の他の実施例を示す正面図である。FIG. 2 is a front view showing another embodiment of the present invention.
【図３】この発明のさらに他の実施例を示す正面図であ
る。FIG. 3 is a front view showing still another embodiment of the present invention.
【図４】従来例を示す図である。FIG. 4 is a diagram showing a conventional example.
１ 振動体 ２，2a，３，3a 圧電素子 ４ 振動子 ５，5a，６，6a 接続端子 12 励振方向 1 Vibrating body 2,2a, 3,3a Piezoelectric element 4 Vibrator 5,5a, 6,6a Connection terminal 12 Excitation direction
Claims (1)
なくとも、一の隅部を隔てて隣接する二側面に、検出機
能を有するそれぞれの圧電素子を貼着してなる振動子
を、振動体の横断面内の一の対角線方向に励振させる振
動ジャイロであって、 それぞれの圧電素子を、それらの各貼着側面内で、励振
方向と直交する方向の隅部に近接させて位置させてなる
振動ジャイロ。1. A vibrating body comprising a vibrating body having a quadrangular cross-sectional shape, to which at least two piezoelectric elements having a detecting function are attached to at least two side surfaces adjacent to each other with a corner portion thereof vibrating. A vibrating gyro that excites in one diagonal direction in the cross section of the body, in which each piezoelectric element is positioned close to a corner in the direction orthogonal to the excitation direction in each of the sticking side surfaces thereof. Vibrating gyro.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3271795A JP2589422B2 (en) | 1991-09-25 | 1991-09-25 | Vibrating gyro |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3271795A JP2589422B2 (en) | 1991-09-25 | 1991-09-25 | Vibrating gyro |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0587575A true JPH0587575A (en) | 1993-04-06 |
| JP2589422B2 JP2589422B2 (en) | 1997-03-12 |
Family
ID=17504962
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3271795A Expired - Lifetime JP2589422B2 (en) | 1991-09-25 | 1991-09-25 | Vibrating gyro |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2589422B2 (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6367921U (en) * | 1986-10-24 | 1988-05-07 | ||
| JPH02266214A (en) * | 1989-04-06 | 1990-10-31 | Murata Mfg Co Ltd | Vibration gyro |
-
1991
- 1991-09-25 JP JP3271795A patent/JP2589422B2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6367921U (en) * | 1986-10-24 | 1988-05-07 | ||
| JPH02266214A (en) * | 1989-04-06 | 1990-10-31 | Murata Mfg Co Ltd | Vibration gyro |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2589422B2 (en) | 1997-03-12 |
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