JPH0593640A - Coriolis mass flow meter - Google Patents

Coriolis mass flow meter

Info

Publication number
JPH0593640A
JPH0593640A JP3172473A JP17247391A JPH0593640A JP H0593640 A JPH0593640 A JP H0593640A JP 3172473 A JP3172473 A JP 3172473A JP 17247391 A JP17247391 A JP 17247391A JP H0593640 A JPH0593640 A JP H0593640A
Authority
JP
Japan
Prior art keywords
measuring tube
coriolis
vibration
natural frequency
coriolis force
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3172473A
Other languages
Japanese (ja)
Inventor
Yoshinori Matsunaga
義則 松永
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP3172473A priority Critical patent/JPH0593640A/en
Publication of JPH0593640A publication Critical patent/JPH0593640A/en
Pending legal-status Critical Current

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30Hydrogen technology
    • Y02E60/50Fuel cells

Landscapes

  • Measuring Volume Flow (AREA)

Abstract

(57)【要約】 【目的】 コリオリ力による変位を大きくすることで、
SN比の高いコリオリ質量流量計を実現する。 【構成】 振動する測定管内に測定流体を流し、その流
れと測定管の角振動によって生じるコリオリ力により、
測定管を変形振動させるコリオリ質量流量計において、
前記測定管の駆動モ―ドの節となる箇所を弾性材を介し
て拘束し、駆動モ―ドの固有振動数と、コリオリ振動モ
―ドの固有振動数とをほぼ一致させるようにした事を特
徴とするコリオリ質量流量計である。
(57) [Summary] [Purpose] By increasing the displacement due to Coriolis force,
Realizes a Coriolis mass flowmeter with a high SN ratio. [Structure] A measuring fluid is caused to flow in an oscillating measuring tube, and due to the flow and the Coriolis force generated by the angular vibration of the measuring tube,
In a Coriolis mass flowmeter that deforms and vibrates the measuring tube,
The section of the measuring tube which is the driving mode is constrained through an elastic material so that the natural frequency of the driving mode and the natural frequency of the Coriolis vibration mode are substantially the same. Is a Coriolis mass flowmeter characterized by.

Description

【発明の詳細な説明】Detailed Description of the Invention 【産業上の利用分野】[Industrial applications]

【0001】本発明は、コリオリ力による変位を大きく
することで、SN比の高いコリオリ質量流量計に関する
ものである。
The present invention relates to a Coriolis mass flowmeter having a high S / N ratio by increasing displacement due to Coriolis force.

【0002】[0002]

【従来の技術】図6は、従来より一般に使用されている
従来例の構成説明図で、コリオリ質量流量計に使用せる
例で、例えば、米国特許4,491,025号、発明の
名称「PARALLEL PATH CORIOLIS MASSFLOW RATE METER
」1982年11月3日出願、1985年1月1日特
許に示されている。図において、1は配管Aに、両端が
取付けられたU字形の測定管である。2は管路Aへの測
定管1の取付けフランジである。3はU字形をなす測定
管1の先端に設けられた振動子である。4,5は測定管
1の両側にそれぞれ設けられた変位検出センサである。
2. Description of the Related Art FIG. 6 is an explanatory view of the configuration of a conventional example that has been generally used in the past. It is an example used in a Coriolis mass flowmeter, for example, US Pat. PATH CORIOLIS MASSFLOW RATE METER
No. 3, filed Nov. 3, 1982, and filed on Jan. 1, 1985. In the figure, reference numeral 1 is a U-shaped measuring pipe having both ends attached to a pipe A. Reference numeral 2 is a mounting flange of the measuring pipe 1 to the pipe line A. Reference numeral 3 is a vibrator provided at the tip of the U-shaped measuring tube 1. Reference numerals 4 and 5 are displacement detection sensors provided on both sides of the measuring tube 1.

【0003】以上の構成において、測定管1に測定流体
が流され、振動子3が駆動される。振動子3の振動方向
の角速度『ω』、測定流体の流速『V』(以下『』で囲
まれた記号はベクトル量を表す。)とすると、 Fc=―2m『ω』×『V』 のコリオリ力が働く、コリオリ力に比例した振動の振幅
を測定すれば、質量流量が測定出来る。しかし、一般に
は、コリオリ力に比例した振動の振幅は、加振による振
動の振幅より極めて小さく、コリオリ力に比例した振動
の振幅を直接検出することが出来ない。
In the above structure, the measuring fluid is flown through the measuring tube 1 to drive the vibrator 3. Assuming that the angular velocity “ω” in the vibration direction of the vibrator 3 and the flow velocity “V” of the measured fluid (hereinafter, the symbol enclosed in “” represents a vector amount), Fc = −2 m “ω” × “V” The mass flow rate can be measured by measuring the amplitude of vibration that is proportional to the Coriolis force acting on the Coriolis force. However, in general, the amplitude of vibration proportional to the Coriolis force is much smaller than the amplitude of vibration due to excitation, and the amplitude of vibration proportional to the Coriolis force cannot be directly detected.

【0004】今、図6のZ視の方向から見ると、振動子
3の加振により、振動方向をα、βに別けて考えると、
流速『V』の向きによって、図7、図8に示す如く、コ
リオリ力の方向が異なるので、逆相となり、測定管1が
捩れながら振動する。これを変位検出センサ4,5、例
えば磁気センサで変位を検出し、変位検出センサ4,5
の変位の位相差が、(コリオリ力に比例した振動の振
幅)/(加振による振動の振幅)に比例するので質量流
量を求める事ができる。位相差は波形がゼロをクロスす
る時間の差Δtとして測定出来るので、結果としてコリ
オリ力が測定出来る。
Now, when viewed from the Z direction in FIG. 6, considering the vibration directions of α and β by vibrating the vibrator 3,
As shown in FIGS. 7 and 8, the direction of the Coriolis force is different depending on the direction of the flow velocity “V”, so that the phases are opposite to each other and the measuring tube 1 vibrates while being twisted. This is detected by the displacement detection sensors 4, 5, for example, magnetic sensors, and the displacement detection sensors 4, 5 are detected.
Since the phase difference of the displacement of is proportional to (amplitude of vibration proportional to Coriolis force) / (amplitude of vibration due to excitation), the mass flow rate can be obtained. Since the phase difference can be measured as the time difference Δt at which the waveform crosses zero, the Coriolis force can be measured as a result.

【0005】図9は従来より一般に使用されている他の
従来例の構成説明図である。本従来例では、更に、ノイ
ズを低減し、信号を大きくとるために、測定管1を、2
管式にし、ノイズを打消すようにしたものである。
FIG. 9 is a diagram for explaining the structure of another conventional example which is generally used in the past. In this conventional example, in order to further reduce noise and increase the signal, the measuring tube 1 is set to 2
It is a tube type that cancels noise.

【0006】[0006]

【発明が解決しようとする課題】しかしながら、この様
な装置においては、コリオリ力による変位は、駆動によ
る変位に比較し、約1/1000程度と小さい。外乱振
動が加わると、コリオリ力による変位と重なり、出力が
大きく乱れる。本発明は、この問題点を解決するもので
ある。本発明の目的は、コリオリ力による変位を大きく
することで、SN比の高いコリオリ質量流量計を提供す
るにある。
However, in such a device, the displacement due to the Coriolis force is about 1/1000 smaller than the displacement due to driving. When disturbance vibration is applied, it is overlapped with the displacement due to the Coriolis force, and the output is greatly disturbed. The present invention solves this problem. An object of the present invention is to provide a Coriolis mass flowmeter having a high S / N ratio by increasing displacement due to Coriolis force.

【0007】[0007]

【課題を解決するための手段】この目的を達成するため
に、本発明は、振動する測定管内に測定流体を流し、そ
の流れと測定管の角振動によって生じるコリオリ力によ
り、測定管を変形振動させるコリオリ質量流量計におい
て、前記測定管の駆動モ―ドの節となる箇所を弾性材を
介して拘束し、駆動モ―ドの固有振動数と、コリオリ振
動モ―ドの固有振動数とをほぼ一致させるようにした事
を特徴とするコリオリ質量流量計を構成したものであ
る。
In order to achieve this object, the present invention allows a measuring fluid to flow in an oscillating measuring tube, and the Coriolis force generated by the flow and the angular vibration of the measuring tube causes the measuring tube to deform and vibrate. In the Coriolis mass flowmeter to be operated, the node of the drive mode of the measuring tube is constrained via an elastic material, and the natural frequency of the drive mode and the natural frequency of the Coriolis vibration mode are This is a Coriolis mass flowmeter which is characterized in that they are made to substantially coincide with each other.

【0008】[0008]

【作用】以上の構成において、測定管の駆動モ―ドの節
となる箇所を弾性材を介して拘束し、駆動モ―ドの固有
振動数と、コリオリ振動モ―ドの固有振動数とをほぼ一
致させるようにしたので、コリオリ力による振動モ―ド
が共振状態に近くなり、大きな信号振幅が得られる。以
下、実施例に基づき詳細に説明する。
[Operation] In the above configuration, the node of the driving mode of the measuring tube is restrained by the elastic material, and the natural frequency of the driving mode and the natural frequency of the Coriolis vibration mode are determined. Since they are made to substantially coincide with each other, the vibration mode due to the Coriolis force becomes close to the resonance state, and a large signal amplitude can be obtained. Hereinafter, detailed description will be given based on examples.

【0009】[0009]

【実施例】図1は、本発明の一実施例の要部構成説明
図、図2は図1の側面図である。図において、図6と同
一記号の構成は同一機能を表わす。以下、図6と相違部
分のみ説明する。11は一対の振動子で、互いに逆位相
の力を発生し、この場合は、捩じれモ―ドで測定管1が
共振するように働く。12は、ベ―ス13と測定管1と
を結ぶばねである。ばね12は、測定管1の曲げモ―ド
の固有振動数と捩じれモ―ドの固有振動数とが、ほぼ一
致するようなばね定数を有する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is an explanatory view of the essential structure of an embodiment of the present invention, and FIG. 2 is a side view of FIG. In the figure, the same symbols as those in FIG. 6 represent the same functions. Only parts different from FIG. 6 will be described below. Reference numeral 11 denotes a pair of oscillators, which generate forces having mutually opposite phases, and in this case, the measuring tube 1 acts so as to resonate in a twist mode. Reference numeral 12 is a spring that connects the base 13 and the measuring tube 1. The spring 12 has a spring constant such that the natural frequency of the bending mode of the measuring tube 1 and the natural frequency of the twisting mode of the measuring tube 1 substantially match.

【0010】以上の構成において、図3に示す如く、振
動子11により、捩じれモ―ドの固有振動数で振動して
いる測定管1内を、測定流体が流れると、コリオリ力が
働く。コリオリ力は、図4に示す如く分布するので、測
定管1の振動は、図5に示す如く、曲げモ―ドの波形と
なる。ばね12により、測定管1の曲げモ―ドの固有振
動数と捩じれモ―ドの固有振動数とが大体一致している
ので、コリオリ力による変位振動である曲げモ―ドの振
動も、共振状態に近くなり、大きな信号振幅が得られ
る。
In the above structure, as shown in FIG. 3, when the measuring fluid flows in the measuring tube 1 vibrating at the natural frequency of the twist mode by the vibrator 11, Coriolis force acts. Since the Coriolis force is distributed as shown in FIG. 4, the vibration of the measuring pipe 1 has a bending mode waveform as shown in FIG. Since the natural frequency of the bending mode of the measuring tube 1 and the natural frequency of the twisting mode of the measuring tube 1 are substantially matched by the spring 12, the vibration of the bending mode which is the displacement vibration due to the Coriolis force also resonates. It is close to the state and a large signal amplitude is obtained.

【0011】この結果、コリオリ力による変位も、ほ
ぼ、共振状態となり、大きな変位が得られるので、外乱
振動に対するSN比が良好なものが得られる。
As a result, the displacement due to the Coriolis force is almost in resonance, and a large displacement is obtained, so that the SN ratio to the disturbance vibration is excellent.

【0012】なお、前述の実施例においては、測定管1
は、U字状のものについて説明したが、これに限ること
はなく、例えば、任意の曲り管、直管でもよく、要する
に、コリオリ力が検出できるものであれば良い。また、
測定管1は2本の平行管で構成してもよい。また、振動
子11は、駆動モ―ドの節の点に1個配置したが、駆動
モ―ドの節の対称な点2箇所に設置しても良い。
In the above embodiment, the measuring tube 1
The U-shaped one has been described above, but the present invention is not limited to this, and may be, for example, an arbitrary bent pipe or a straight pipe, as long as the Coriolis force can be detected. Also,
The measuring tube 1 may be composed of two parallel tubes. Further, although one oscillator 11 is arranged at the node of the drive mode, it may be installed at two symmetrical points of the node of the drive mode.

【0013】[0013]

【発明の効果】以上説明したように、本発明は、振動す
る測定管内に測定流体を流し、その流れと測定管の角振
動によって生じるコリオリ力により、測定管を変形振動
させるコリオリ質量流量計において、前記測定管の駆動
モ―ドの節となる箇所を弾性材を介して拘束し、駆動モ
―ドの固有振動数と、コリオリ振動モ―ドの固有振動数
とをほぼ一致させるようにした事を特徴とするコリオリ
質量流量計を構成した。
As described above, the present invention provides a Coriolis mass flowmeter which causes a measuring fluid to flow in an oscillating measuring tube and which causes the measuring tube to deform and vibrate by the Coriolis force generated by the flow and the angular vibration of the measuring tube. , The position of the driving tube of the measuring tube is restrained through an elastic material so that the natural frequency of the driving mode and the natural frequency of the Coriolis vibration mode are substantially equal to each other. A Coriolis mass flowmeter was constructed that was characterized.

【0014】この結果、コリオリ力による変位も、ほ
ぼ、共振状態となり、大きな変位が得られるので、外乱
振動に対するSN比が良好なものが得られる。
As a result, the displacement due to the Coriolis force is almost in the resonance state and a large displacement is obtained, so that the SN ratio to the disturbance vibration is excellent.

【0015】従って、本発明によれば、コリオリ力によ
る変位を大きくすることで、SN比の高いコリオリ質量
流量計を実現することが出来る。
Therefore, according to the present invention, it is possible to realize a Coriolis mass flowmeter having a high SN ratio by increasing the displacement due to the Coriolis force.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例の要部構成説明図である。FIG. 1 is an explanatory diagram of a main part configuration of an embodiment of the present invention.

【図2】図1の側面図である。FIG. 2 is a side view of FIG.

【図3】捩じれモ―ドの固有振動数で振動している測定
管の動作説明図である。
FIG. 3 is an operation explanatory view of the measuring tube vibrating at the natural frequency of the twist mode.

【図4】測定管へのコリオリ力の作用説明図である。FIG. 4 is an explanatory view of the action of Coriolis force on a measuring tube.

【図5】測定管の動作説明図である。FIG. 5 is an operation explanatory view of a measuring tube.

【図6】従来より一般に使用されている従来例の構成説
明図である。
FIG. 6 is an explanatory diagram of a configuration of a conventional example that is generally used in the past.

【図7】図6の動作説明図である。FIG. 7 is an operation explanatory diagram of FIG. 6;

【図8】図6の動作説明図である。8 is an explanatory diagram of the operation of FIG.

【図9】従来より一般に使用されている他の従来例の構
成説明図である。
FIG. 9 is a configuration explanatory view of another conventional example that is generally used conventionally.

【符号の説明】[Explanation of symbols]

1…測定管 4…変位検出センサ 11…振動子 12…ばね 13…ベ―ス DESCRIPTION OF SYMBOLS 1 ... Measuring tube 4 ... Displacement detection sensor 11 ... Oscillator 12 ... Spring 13 ... Base

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】振動する測定管内に測定流体を流し、その
流れと測定管の角振動によって生じるコリオリ力によ
り、測定管を変形振動させるコリオリ質量流量計におい
て、 前記測定管の駆動モ―ドの節となる箇所を弾性材を介し
て拘束し、駆動モ―ドの固有振動数と、コリオリ振動モ
―ドの固有振動数とをほぼ一致させるようにした事を特
徴とするコリオリ質量流量計。
1. A Coriolis mass flowmeter for deforming and vibrating a measuring tube by virtue of a Coriolis force generated by flowing a measuring fluid into an oscillating measuring tube and causing angular flow of the measuring tube and the vibration of the measuring tube. A Coriolis mass flowmeter characterized in that the natural frequency of the drive mode and the natural frequency of the Coriolis vibration mode are made to substantially coincide with each other by constraining the nodes as nodes through an elastic material.
JP3172473A 1991-07-12 1991-07-12 Coriolis mass flow meter Pending JPH0593640A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3172473A JPH0593640A (en) 1991-07-12 1991-07-12 Coriolis mass flow meter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3172473A JPH0593640A (en) 1991-07-12 1991-07-12 Coriolis mass flow meter

Publications (1)

Publication Number Publication Date
JPH0593640A true JPH0593640A (en) 1993-04-16

Family

ID=15942643

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3172473A Pending JPH0593640A (en) 1991-07-12 1991-07-12 Coriolis mass flow meter

Country Status (1)

Country Link
JP (1) JPH0593640A (en)

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