JPH0593791A - Rail gun of nucleus fusion pellet incidence device - Google Patents
Rail gun of nucleus fusion pellet incidence deviceInfo
- Publication number
- JPH0593791A JPH0593791A JP3255346A JP25534691A JPH0593791A JP H0593791 A JPH0593791 A JP H0593791A JP 3255346 A JP3255346 A JP 3255346A JP 25534691 A JP25534691 A JP 25534691A JP H0593791 A JPH0593791 A JP H0593791A
- Authority
- JP
- Japan
- Prior art keywords
- rail
- plasma
- gas
- rails
- gun
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000004927 fusion Effects 0.000 title claims abstract description 9
- 239000008188 pellet Substances 0.000 title claims abstract description 9
- 239000000463 material Substances 0.000 claims abstract description 18
- 230000008018 melting Effects 0.000 claims description 7
- 238000002844 melting Methods 0.000 claims description 7
- 238000010304 firing Methods 0.000 claims description 4
- 238000002347 injection Methods 0.000 claims 1
- 239000007924 injection Substances 0.000 claims 1
- 150000001768 cations Chemical class 0.000 abstract description 5
- 230000003685 thermal hair damage Effects 0.000 abstract description 4
- 239000007789 gas Substances 0.000 description 17
- 230000006378 damage Effects 0.000 description 6
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 229910052721 tungsten Inorganic materials 0.000 description 5
- 239000010937 tungsten Substances 0.000 description 5
- 238000009835 boiling Methods 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000010437 gem Substances 0.000 description 1
- 229910001751 gemstone Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000011819 refractory material Substances 0.000 description 1
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21B—FUSION REACTORS
- G21B1/00—Thermonuclear fusion reactors
- G21B1/11—Details
- G21B1/15—Particle injectors for producing thermonuclear fusion reactions, e.g. pellet injectors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/10—Nuclear fusion reactors
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Plasma & Fusion (AREA)
- General Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- Plasma Technology (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、核融合ペレツト入射装
置のレールガンに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rail gun for a fusion pellet injector.
【０００２】[0002]
【従来の技術】従来、電磁力により飛翔体を加速するた
めの電磁発射装置（超高速体発射装置）（以下レールガ
ンと称する）では、互いに平行な一対のレール間に形成
した発射孔内に飛翔体を摺動可能に設置した状態で、電
源回路のスイツチを入れ、大電流をプラズマアーマチヤ
に流して、そのときに発生するローレンツ力により飛翔
体を高速で滑走させて、レール間の発射孔から発射させ
るようにしている。2. Description of the Related Art Conventionally, in an electromagnetic launcher (ultra high speed launcher) for accelerating a projectile by an electromagnetic force (hereinafter referred to as a rail gun), a projectile is launched in a launch hole formed between a pair of rails parallel to each other. With the body slidably installed, switch on the power supply circuit is turned on, a large current is applied to the plasma armature, and the Lorentz force generated at that time causes the projectile to glide at high speed, creating a hole between the rails. I'm trying to fire from.
【０００３】上記従来のレールガンでは、エネルギー効
率を良くするために、各レールを例えば銅等の高電気伝
導度の材料により構成している。またプラズマアーマチ
ヤに金属のガスなどを使用している。In the conventional railgun described above, each rail is made of a material having a high electric conductivity such as copper in order to improve energy efficiency. Metallic gas is used for the plasma armature.
【０００４】[0004]
【発明が解決しようとする課題】前記従来のレールガン
には、次の問題があった。即ち、エネルギー効率を良く
するために、各レールを例えば銅等の高電気伝導度の材
料により構成している。しかしレールの表面は、数万度
という高温のプラズマに曝されるので、融点の低い銅等
の材料により構成していると、レールが早期に溶融、蒸
発してしまう。この点は、高融点のタングステン等の金
属材料により構成した場合も同じで、溶融が起き、レー
ルの表面が熱的な損傷を受けて，繰り返しの発射、或い
は連続発射に耐えない。The conventional rail gun described above has the following problems. That is, in order to improve energy efficiency, each rail is made of a material having high electric conductivity such as copper. However, since the surface of the rail is exposed to plasma at a high temperature of tens of thousands of degrees, if the rail is made of a material such as copper having a low melting point, the rail will melt and evaporate at an early stage. This point is the same in the case of using a metal material such as tungsten having a high melting point, and melting occurs, the surface of the rail is thermally damaged, and repeated firing or continuous firing cannot be endured.
【０００５】例えば飛翔体の速度が数ｋｍ／ｓで、駆動
電流が数十〜数百ｋＡのとき（大電流のとき）の、各レ
ールの主な損傷要因は、プラズマの輻射熱と陰極付近で
の陽イオンの衝突であり、これを解決することがレール
ガンの性能向上のために不可欠である。本発明は前記の
問題点に鑑み提案するものであり、その目的とする処
は、レールの熱的な損傷を少なくできる核融合ペレツト
入射装置のレールガンを提供しようとする点にある。For example, when the velocity of the flying object is several km / s and the driving current is several tens to several hundreds kA (when the current is large), the main damage factors of each rail are the radiation heat of plasma and the vicinity of the cathode. It is a collision of positive ions in the field, and solving this is essential for improving the performance of the rail gun. The present invention has been made in view of the above problems, and an object thereof is to provide a rail gun for a fusion pellet injector which can reduce thermal damage to the rail.
【０００６】[0006]
【課題を解決するための手段】上記の目的を達成するた
めに、本発明は、互いに平行なレール間の発射孔内に飛
翔体を摺動可能に設置した状態で、電源回路のスイツチ
を入れ、大電流をプラズマアーマチヤに流して、そのと
きに発生するローレンツ力により飛翔体を高速で滑走さ
せて、レール間の発射孔から発射させる核融合ペレツト
入射装置のレールガンにおいて、高融点、低仕事関数の
材料により構成したレールと、低電離電圧ガスをレール
内へ供給してこのガスをプラズマアーマチヤとするガス
供給系とを具えている。To achieve the above object, the present invention inserts a switch of a power supply circuit in a state where a projectile is slidably installed in a launching hole between rails parallel to each other. , A high current is passed through the plasma armature, and the Lorentz force generated at that time causes the projectile to glide at high speed, which is launched from the launch hole between the rails. A rail gun of a fusion pellet injector has a high melting point and low work. It is equipped with a rail made of functional material and a gas supply system for supplying low ionization voltage gas into the rail to use this gas as a plasma armature.
【０００７】[0007]
【作用】本発明の核融合ペレツト入射装置のレールガン
は前記のように（１）電離電圧の低いガスをプラズマア
ーマチヤとして、プラズマの抵抗を下げ，ジユール熱と
しての温度上昇を抑えて、プラズマの温度を下げる。
（２）またレールのうち、陰極側レールの表面での電圧
降下による陽イオン衝突が陰極側レールを損傷させてい
るので、その対策として陰極側レールを、陰極表面から
の熱電子放出を容易にする低仕事関数の材料により構成
して、レールの熱的な損傷を少なくする。As described above, the rail gun of the fusion pellet injector of the present invention uses (1) a gas having a low ionization voltage as the plasma armature to lower the resistance of the plasma and suppress the temperature rise as the Jewel's heat. Lower the temperature.
(2) Further, among the rails, cation collision due to voltage drop on the surface of the cathode-side rail damages the cathode-side rail. Therefore, as a countermeasure against this, the cathode-side rail can easily emit thermoelectrons from the cathode surface. Low work function material to reduce rail thermal damage.
【０００８】[0008]
【実施例】次に本発明の核融合ペレツト入射装置のレー
ルガンを図１に示す一実施例により説明すると、１がス
イツチをもつ電源回路、３、３が距離を置いて平行に設
置した一対のレール、２がプラズマアーマチヤ、４が飛
翔体、５が大電流、６が上記レール３、３間に形成した
発射孔であり、レール３、３を高融点、低仕事関数の材
料により構成し、低電離電圧ガスをレール内へ供給し
て、このガスをプラズマアーマチヤ２としている。DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, a rail gun of a fusion pellet injector of the present invention will be described with reference to an embodiment shown in FIG. 1. 1 is a power supply circuit having a switch, 3 and 3 are a pair of parallel installed with a distance. Rails 2 are plasma armatures, 4 are projectiles, 5 are large currents, 6 are launch holes formed between the rails 3 and 3, and the rails 3 and 3 are made of a material having a high melting point and a low work function. A low ionization voltage gas is supplied into the rail, and this gas is used as the plasma armature 2.
【０００９】上記図１に示すレールガンでは、レール
３、３間の発射孔６内に飛翔体４を摺動可能に設置した
状態で、電源回路１のスイツチを入れ、大電流５をプラ
ズマアーマチヤ（低電離電圧ガス）２に流して、そのと
きに発生するローレンツ力により飛翔体４を高速で滑走
させて、レール３、３間の発射孔６から発射させるよう
にしている。In the rail gun shown in FIG. 1, with the projectile 4 slidably installed in the firing hole 6 between the rails 3 and 3, the switch of the power supply circuit 1 is turned on and a large current 5 is applied to the plasma armature. The low-ionization voltage gas 2 is caused to flow, and the Lorentz force generated at that time causes the projectile 4 to glide at high speed to be ejected from the emission hole 6 between the rails 3 and 3.
【００１０】飛翔体４の速度が数ｋｍ／ｓで、駆動電流
が数十〜数百ｋＡの場合（大電流の場合）のレール３、
３の主な損傷要因は、プラズマの輻射熱と陰極付近での
陽イオンの衝突であり、これを解決することがレールガ
ンの性能向上のために不可欠である。このため、本発明
では、 （１）先ず電離電圧の低いガスをプラズマアーマチヤ２
として、プラズマの抵抗を下げ，ジユール熱としての温
度上昇を抑えて、プラズマ２の温度を下げる。 （２）またレール３、３のうち、陰極側レール３表面で
の電圧降下による陽イオン衝突が陰極側レール３を損傷
させているので、その対策として陰極表面からの熱電子
放出を容易にする低仕事関数の材料により、陰極側レー
ル３を構成した。The rail 3 when the velocity of the flying body 4 is several km / s and the driving current is several tens to several hundreds kA (in the case of large current),
The main damage factors of No. 3 are radiant heat of plasma and collision of cations in the vicinity of the cathode. Solving this is indispensable for improving the performance of the rail gun. Therefore, in the present invention, (1) first, a gas having a low ionization voltage is supplied to the plasma armature 2;
As a result, the resistance of the plasma is lowered, the temperature rise as the Jewil heat is suppressed, and the temperature of the plasma 2 is lowered. (2) Further, among the rails 3, 3, cation collision due to voltage drop on the surface of the cathode-side rail 3 damages the cathode-side rail 3, so as a countermeasure against this, thermionic emission from the cathode surface is facilitated. The cathode side rail 3 was made of a material having a low work function.
【００１１】その理由は、熱電子放出における電極から
放出される〔電流密度ｊ〕と〔電極表面温度Ｔ、電極の
仕事関数Ｖw 〕との関係をまとめたリチヤードソン・ダ
ツシユマンの式The reason is that the formula of Richardson-Dussieuman summarizing the relation between [current density j] emitted from the electrode in thermionic emission and [electrode surface temperature T, work function Vw of the electrode] is summarized.
【００１２】[0012]
【数１】 によると、仕事関数Ｖw を下げると、指数関数的に電流
密度ｊが増加するという効果があるためである。前記図
１に示すレールガンでは、プラズマアーマチヤ２に低電
離電圧のガスを使用しており、プラズマアーマチヤ温度
が低くても、電離度が高くて、プラズマの抵抗が下が
り、プラズマアーマチヤ２のジユール加熱が抑えられ
て、レール３への熱的影響も少なくなる。[Equation 1] This is because the work density Vw is lowered, and the current density j exponentially increases. In the rail gun shown in FIG. 1, a gas having a low ionization voltage is used for the plasma armature 2. Even if the plasma armature temperature is low, the ionization degree is high and the plasma resistance is lowered. The heating of the jule is suppressed, and the thermal influence on the rail 3 is also reduced.
【００１３】これは、前述の式をまとめた図３により説
明できる。図３の線は、駆動電流とプラズマの長さとに
より計算できる、加速に必要な電流密度を示しており、
この線の下に沸点のある材料は、沸点以上に加熱しない
と、所定の電流密度を得られないので、その材料は、蒸
発してしまう。一方、Ｙ2 Ｏ3 のように低仕事関数のも
のであれば、沸点以下で充分に高い電流密度を得られる
（なお図中にはないが、ＷーＹ2 Ｏ3 は、Ｙ2 Ｏ3 と同
じか、それよりも低い仕事関数を持つと考えられる）。This can be explained with reference to FIG. 3, which summarizes the above equation. The line in FIG. 3 shows the current density required for acceleration, which can be calculated from the driving current and the length of plasma,
A material having a boiling point below this line must be heated above the boiling point to obtain a predetermined current density, and the material will evaporate. On the other hand, if the material has a low work function such as Y 2 O 3 , a sufficiently high current density can be obtained below the boiling point (W-Y 2 O 3 is not represented by Y 2 O 3). Is considered to have a work function equal to or lower than).
【００１４】図２にレールガン内部を静的に模擬した試
験装置（真空容器７を有する試験装置）を示す。７が真
空容器、８がヘリウムガスボンベ、９が電極、１０が圧
力計（レール材のアークテストのガス雰囲気の圧力条件
を設定するための圧力計）、１１が真空ポンプ（真空容
器７内の大気を一度真空引きして，これを耐蝕環境にな
るガスと置換するための真空ポンプ）、１２が分圧器
（レール材のアークテストの電圧を測定するための分圧
器）、１３が電流計（レール材のアークテストの電流を
測定するためのロゴスキー型電流計）、１４がコンデン
サーバンク（レール材のアークテストの電流供給用電
源）である。FIG. 2 shows a test apparatus (test apparatus having the vacuum container 7) that statically simulates the inside of the rail gun. 7 is a vacuum container, 8 is a helium gas cylinder, 9 is an electrode, 10 is a pressure gauge (a pressure gauge for setting the pressure condition of the gas atmosphere of the arc test of the rail material), 11 is a vacuum pump (the atmosphere in the vacuum vessel 7). Is evacuated once and is replaced with a gas that becomes a corrosion resistant environment), 12 is a voltage divider (voltage divider for measuring the voltage of the arc test of the rail material), 13 is an ammeter (rail A Rogowski type ammeter for measuring the current of the arc test of the material), and 14 is a capacitor bank (power supply for the current of the arc test of the rail material).
【００１５】上記図２に示す試験装置を使用して、本発
明のレールガンと従来のレールガンとを試験した。先ず
真空容器７内の雰囲気ガスを電離電圧２４Ｖのヘリウム
ガスまたは１３．５Ｖの水素にし、電極９に銅製のも
の、高融点材料のタングステン製のもの、タングステン
の仕事関数を低くするようにイツトリアを混ぜたＷーＹ
2 Ｏ3 製のものを使用し、プラズマ温度、電極間電圧を
変えて、電極９の表面の様子を観察した。The railgun of the present invention and a conventional railgun were tested using the test apparatus shown in FIG. First, the atmosphere gas in the vacuum vessel 7 is changed to helium gas having an ionization voltage of 24 V or hydrogen of 13.5 V, and the electrode 9 is made of copper, a refractory material made of tungsten, or yttria so as to lower the work function of tungsten. Mixed wy
Using the one made of 2 O 3, the state of the surface of the electrode 9 was observed by changing the plasma temperature and the voltage between the electrodes.
【００１６】その結果、電極９が銅製の場合、損傷が肉
眼で認められたが、タングステンは、タングステン製の
場合、顕微鏡で拡大してみると、部分的に溶融した跡が
確認できる程度に損傷箇所が減少した。またＷーＹ2 Ｏ
3製の場合、タングステンの部分が変化していない。こ
の結果、プラズマアーマチヤ用ガスに水素ガス（低電離
電圧ガス）を用い、レールをＷーＹ2 Ｏ3 により構成し
た場合、レール３の熱的な損傷が少なくなっていること
が判明した。As a result, when the electrode 9 was made of copper, the damage was visually observed, but when the tungsten was made of tungsten, it was damaged to the extent that a trace of partial melting could be confirmed by enlarging with a microscope. The number of places has decreased. Also W-Y 2 O
In the case of 3 , the tungsten part has not changed. As a result, when hydrogen gas (low ionization voltage gas) was used as the plasma armature gas and the rail was made of WY 2 O 3 , it was found that the rail 3 was less thermally damaged.
【００１７】[0017]
【発明の効果】本発明のレールガンは前記のように
（１）電離電圧の低いガスをプラズマアーマチヤとし
て、プラズマの抵抗を下げ，ジユール熱としての温度上
昇を抑えて、プラズマの温度を下げる。（２）またレー
ルのうち、陰極側レールの表面での電圧降下による陽イ
オン衝突が陰極側レールを損傷させているので、その対
策として陰極側レールを、陰極表面からの熱電子放出を
容易にする低仕事関数の材料により、構成して、レール
の熱的な損傷を少なくする。As described above, the rail gun of the present invention uses (1) a gas having a low ionization voltage as a plasma armature to lower the resistance of the plasma and suppress the temperature rise as the jule heat to lower the temperature of the plasma. (2) Further, among the rails, cation collision due to voltage drop on the surface of the cathode-side rail damages the cathode-side rail. Therefore, as a countermeasure against this, the cathode-side rail can easily emit thermoelectrons from the cathode surface. Low work function material to reduce thermal damage to the rail.
【図１】本発明のレールガンの一実施例を示す側面図で
ある。FIG. 1 is a side view showing an embodiment of a rail gun of the present invention.
【図２】本発明のレールガン及び従来のレールガンの試
験装置を示す説明図である。FIG. 2 is an explanatory diagram showing a rail gun of the present invention and a conventional rail gun testing device.
【図３】飛翔体の加速に必要な電流密度とレール材の沸
点との関係を示す説明図である。FIG. 3 is an explanatory diagram showing a relationship between a current density required for accelerating a flying object and a boiling point of a rail material.
１ スイツチをもつ電源回路 ２ プラズマアーマチヤ ３ 一対のレール ４ 飛翔体 ５ 大電流 ６ 発射孔 1 Power supply circuit with switch 2 Plasma armature 3 Pair of rails 4 Flying body 5 Large current 6 Launch hole
Claims (1)
体を摺動可能に設置した状態で、電源回路のスイツチを
入れ、大電流をプラズマアーマチヤに流して、そのとき
に発生するローレンツ力により飛翔体を高速で滑走させ
て、レール間の発射孔から発射させる核融合ペレツト入
射装置のレールガンにおいて、高融点、低仕事関数の材
料により構成したレールと、低電離電圧ガスをレール内
へ供給してこのガスをプラズマアーマチヤとするガス供
給系とを具えていることを特徴とした核融合ペレツト入
射装置のレールガン。1. A Lorentz generated at that time by inserting a switch of a power supply circuit in a state where a projectile is slidably installed in a firing hole between rails parallel to each other and flowing a large current to a plasma armature. In a rail gun of a fusion pellet injection device in which a projectile is slid at high speed by force and is launched from a launch hole between rails, a rail made of a material with a high melting point and a low work function and a low ionization voltage gas are introduced into the rail. A rail gun for a nuclear fusion pellet injector characterized by having a gas supply system for supplying this gas as a plasma armature.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3255346A JP2923100B2 (en) | 1991-10-02 | 1991-10-02 | Railgun for fusion pellet injector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3255346A JP2923100B2 (en) | 1991-10-02 | 1991-10-02 | Railgun for fusion pellet injector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0593791A true JPH0593791A (en) | 1993-04-16 |
| JP2923100B2 JP2923100B2 (en) | 1999-07-26 |
Family
ID=17277515
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3255346A Expired - Lifetime JP2923100B2 (en) | 1991-10-02 | 1991-10-02 | Railgun for fusion pellet injector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2923100B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8742380B2 (en) | 2012-02-27 | 2014-06-03 | Gigaphoton Inc. | Target supply device, extreme ultraviolet light generation apparatus, and method for supplying target |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015145580A1 (en) * | 2014-03-25 | 2015-10-01 | ギガフォトン株式会社 | Target supply apparatus, extreme ultraviolet light generating apparatus, and target supply method |
-
1991
- 1991-10-02 JP JP3255346A patent/JP2923100B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8742380B2 (en) | 2012-02-27 | 2014-06-03 | Gigaphoton Inc. | Target supply device, extreme ultraviolet light generation apparatus, and method for supplying target |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2923100B2 (en) | 1999-07-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 19990406 |