JPH0593B2 - - Google Patents
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- Publication number
- JPH0593B2 JPH0593B2 JP58186102A JP18610283A JPH0593B2 JP H0593 B2 JPH0593 B2 JP H0593B2 JP 58186102 A JP58186102 A JP 58186102A JP 18610283 A JP18610283 A JP 18610283A JP H0593 B2 JPH0593 B2 JP H0593B2
- Authority
- JP
- Japan
- Prior art keywords
- cbn
- hbn
- boron nitride
- alkaline earth
- earth metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
【発明の詳細な説明】
本発明は六方晶窒化ほう素より立方晶窒化ほう
素を合成する方法に関し、さらに詳しくは、不純
な六方晶窒化ほう素を用いて良質の立方晶窒化ほ
う素を合成する方法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for synthesizing cubic boron nitride from hexagonal boron nitride, and more specifically, a method for synthesizing high-quality cubic boron nitride using impure hexagonal boron nitride. Regarding how to.
立方晶窒化ほう素(以下CBNという)はダイ
ヤモンド類似型結晶構造を持つ高硬度物質である
ことは知られている。硬度の点ではダイヤモンド
に劣るが、一方熱的、化学的性質はダイヤモンド
のそれより優れているので、焼入鋼、特殊鋼、セ
ラミツク等の新しい研磨、切削材としての用途が
開発されている。また適当な元素をその結晶格子
内にドープすることにより、P型N型両性半導体
の製造が可能で、その優れた熱伝導率を生かして
電子材料としての応用への期待も大きい。このよ
うな観点から所望の粒径ならびに結晶形態をもつ
高純度、高品質のCBNの単結晶が要望されてい
る。 It is known that cubic boron nitride (hereinafter referred to as CBN) is a highly hard material with a diamond-like crystal structure. Although it is inferior to diamond in terms of hardness, its thermal and chemical properties are superior to those of diamond, so its use as a new polishing and cutting material for hardened steel, special steel, ceramics, etc. is being developed. Furthermore, by doping an appropriate element into its crystal lattice, it is possible to manufacture a P-type and N-type amphoteric semiconductor, and there are great expectations for its application as an electronic material by taking advantage of its excellent thermal conductivity. From this point of view, there is a demand for high-purity, high-quality CBN single crystals with desired grain size and crystal morphology.
従来、立方晶窒化ほう素は六方晶窒化ほう素
(以下HBNという)に触媒物質を用いて変換さ
せる製造法が知られている。 Conventionally, a manufacturing method is known in which cubic boron nitride is converted into hexagonal boron nitride (hereinafter referred to as HBN) using a catalyst substance.
その触媒物質としては、元素周期律表における
a、a、族元素と、それらの窒化物あるいは
合金が主として用いられていた。他に錫、鉛、ア
ンチモンの単体又は合金、尿素、アンモニウム塩
等も知られている。しかしながら、前記の金属触
媒を使用すると、不安定ほう化物、遊離ほう素が
副生され、得られるCBNの結晶中に、ほう素が
混入され結晶は黒色、不透明で、その粒子強度も
著しく小さくなる欠点がある。また窒化物を使用
すると未反応窒化物が残留し、得られるCBN結
晶中にも窒化物がとじ込められ、高品質のものが
得られなかつた。 The catalytic materials mainly used are group a, a, and group elements in the periodic table of elements, and nitrides or alloys thereof. In addition, tin, lead, antimony alone or alloys, urea, ammonium salts, etc. are also known. However, when the above-mentioned metal catalyst is used, unstable borides and free boron are produced as by-products, and boron is mixed into the resulting CBN crystals, making the crystals black and opaque, and their particle strength significantly reduced. There are drawbacks. Furthermore, when nitride is used, unreacted nitride remains and the nitride is trapped in the resulting CBN crystal, making it impossible to obtain a high quality product.
一方、尿素またはアンモニウム塩を使用する
と、得られるCBNの粒子径は0.1〜0.5ミクロンと
極めて小さいものしか得られず加えてこれらの触
媒でHBNからCBNへの変換する機構が未た解明
されず、所望の結晶を得る条件の設定が困難であ
つた。 On the other hand, when urea or ammonium salts are used, the particle size of the CBN obtained is extremely small, 0.1 to 0.5 microns, and in addition, the mechanism by which these catalysts convert HBN to CBN has not yet been elucidated. It was difficult to set the conditions to obtain the desired crystals.
本発明者らは、さきにHBNに触媒として窒化
ほう素ストロンチウム(Sr3B2N4)または窒化ほ
う素バリウム(Ba3B2N4)を添加することによ
り、反応条件の温度、圧力領域の許容範囲が広
く、結晶粒成長速度の制御が容易であり、そのた
め、大粒で高純度良質のCBNの単結晶を容易に
製造出来る方法を発明した。 The present inventors first added strontium boron nitride (Sr 3 B 2 N 4 ) or barium boron nitride (Ba 3 B 2 N 4 ) to HBN as a catalyst, thereby changing the temperature and pressure range of the reaction conditions. We have invented a method that allows easy production of large, high-purity, and high-quality single crystals of CBN, which has a wide tolerance range and easy control of grain growth rate.
しかし上記方法は、原料のHBNの不純物がや
や多いと、これが結晶内に巻込まれ良質のCBN
が得られず、原料HBNとして高純度のものを必
要とする難点があつた。 However, in the above method, if the raw material HBN has a slightly large amount of impurities, these will be rolled up in the crystal and produce high-quality CBN.
However, there was a problem in that high purity HBN was required as a raw material.
本発明者らは、上記の事情を考慮して、不純物
を含有したHBNを原料として良質のCBNを合成
する方法について鋭意研究した結果、LiH、
NaH、KH、CaH2、MgH2、SrH2等のアルカリ
金属又はアルカリ土類金属の水素化物が、原料
HBNの含有不純物に対して浄化作用を有するこ
とを発見した。 Taking the above circumstances into consideration, the present inventors conducted intensive research on a method for synthesizing high-quality CBN using HBN containing impurities as a raw material.
Alkali metal or alkaline earth metal hydrides such as NaH, KH, CaH 2 , MgH 2 , SrH 2 are used as raw materials.
It was discovered that HBN has a purifying effect on impurities contained in it.
本発明は上記の発見に基づいてなされたもの
で、その要旨は、HBNより高温、高圧下でCBN
を合成する方法において、触媒としてX3B2N4
(但しXは、アルカリ土類金属)にアルカリ金属
又はアルカリ土類金属の水素化物を添加したもの
を用いることを特徴とするCBNの合成法にある。 The present invention was made based on the above discovery, and its gist is that CBN can be used at higher temperatures and under higher pressure than HBN.
In the method for synthesizing X 3 B 2 N 4 as a catalyst
(where X is an alkaline earth metal) is a CBN synthesis method characterized by using an alkali metal or an alkaline earth metal hydride added thereto.
以下本発明の方法を説明する。 The method of the present invention will be explained below.
本発明において触媒として使用するX3B2N4の
製法は、例えばXがSrの場合、金属ストロンチ
ウムまたは窒化ストロンチウムとHBNとをスト
ロンチウム対ほう素のモル比3:2の割合で混合
し、N2気流中で950〜1200℃で2時間以上加熱す
ることによつて得られる。その他のX3B2N4もSr
に代えてBe、Mg、Ca、Baを用いることによつ
て同様にして得られる。 The method for producing X 3 B 2 N 4 used as a catalyst in the present invention is, for example, when X is Sr, by mixing metal strontium or strontium nitride and HBN at a molar ratio of strontium to boron of 3:2, 2 Obtained by heating at 950-1200°C in a stream of air for 2 hours or more. Other X 3 B 2 N 4 are also Sr
It can be obtained in the same manner by using Be, Mg, Ca, and Ba instead of.
本発明の方法によつてCBNを合成するには、
X3B2N4、HBN、およびLiH、NaH、KH、
CaH2、MgH2、SrH2等、アルカリ金属またはア
ルカリ土類金属の水素化物の微粉末を所定の割合
で混合し、面圧1.5〜2.0t/cm2の圧力によつて圧粉
成形して所定寸法の成形体とする。これをダイヤ
モンド合成に使用される周知の高圧高温反応器に
装填し、CBN安定域である40〜60Kbar、1300〜
1600℃に所定時間保持してHBNをCBNに変換せ
しめる。或いは、HBNの粉末或いは、X3B2N4
粉末にアルカリ又はアルカリ土類金属の水素化物
微の粉末を添加し、これらをそれぞれ薄円板状に
圧粉成形し、上記成分が所定の割合となるように
上記薄板を積層しこれを高圧高温反応器に装填し
てもよい。またHBNは上記X3B2N4の合成の際
過剰に使用し、過剰分のHBNを含有せしめたも
のを使用してもよい。 To synthesize CBN by the method of the present invention,
X 3 B 2 N 4 , HBN, and LiH, NaH, KH,
Fine powders of alkali metal or alkaline earth metal hydrides such as CaH 2 , MgH 2 , SrH 2 , etc. are mixed in a predetermined ratio and compacted under a surface pressure of 1.5 to 2.0 t/cm 2 . A molded body of predetermined dimensions is formed. This was loaded into a well-known high-pressure, high-temperature reactor used for diamond synthesis, and the CBN stability range was 40-60Kbar, 1300-
It is held at 1600°C for a predetermined time to convert HBN to CBN. Or HBN powder or X 3 B 2 N 4
A fine powder of alkali or alkaline earth metal hydride is added to the powder, each of these is compacted into a thin disk shape, the thin plates are stacked so that the above ingredients are in a predetermined ratio, and this is heated under high pressure and high temperature. It may be loaded into the reactor. Alternatively, HBN may be used in excess during the synthesis of X 3 B 2 N 4 , and a product containing an excess amount of HBN may be used.
上記触媒X3B2N4と原料HBNの混合割合は、
X3B2N4/HBNが5〜50重量%が好ましい。ま
たアルカリ金属又はアルカリ土類金属の、水素化
物は、水素化物/HBN0.1〜10重量%の範囲がよ
い。0.1重量%以下では浄化作用の効果があまり
なく10重量%より多いとCBNの収率が低下する。 The mixing ratio of the above catalyst X 3 B 2 N 4 and raw material HBN is:
X 3 B 2 N 4 /HBN is preferably 5 to 50% by weight. Further, the hydride of alkali metal or alkaline earth metal is preferably in a range of 0.1 to 10% by weight of hydride/HBN. If it is less than 0.1% by weight, the purifying effect will not be very effective, and if it is more than 10% by weight, the yield of CBN will decrease.
次に実施例、比較例により本発明の作用効果を
示す。 Next, the effects of the present invention will be illustrated by Examples and Comparative Examples.
実施例 1
不純物として酸素0.8重量%、アルカリ、アル
カリ土類金属を除く金属不純物0.2重量%を含有
するHBNとSr3B2N4およびNaHをそれぞれ150
メツシユ以下の粒度に粉砕し、これらを重量比
で、10:1:0.15の割合で混合し、成形圧1.5t/
cm2で26mmφ×32mmHの圧粉成形体とした。これを
高圧高温反応装置に装填し、圧力:50Kbar、温
度:1450℃の条件で10分間処理し、CBNを合成
した。生成したCBNは緻密で、透明性がよく、
自形粒の良質なもので、CBNへの変換率は42%
であつた。Example 1 HBN containing 0.8% by weight of oxygen and 0.2% by weight of metal impurities excluding alkali and alkaline earth metals, Sr 3 B 2 N 4 and NaH at 150% each
Pulverized to a particle size of mesh or smaller, these were mixed at a weight ratio of 10:1:0.15, and a molding pressure of 1.5t/
It was made into a powder compact of 26 mmφ×32 mmH in cm 2 . This was loaded into a high-pressure, high-temperature reactor and treated for 10 minutes at a pressure of 50 Kbar and a temperature of 1450°C to synthesize CBN. The produced CBN is dense and has good transparency.
Good quality euhedral grains, conversion rate to CBN is 42%
It was hot.
実施例 2
触媒としてSr2B2N4の代りにBa3B2N4、NaH
の代りにCaH2を用い、HBN:Ba3B2N4:CaH2
の重量比を10:1.5:0.1とした外は、実施例1と
同じにしてCBNを合成した。生成したCBNは、
実施例1と同様良質なもので、CBNへの変換率
は37%であつた。Example 2 Ba 3 B 2 N 4 and NaH instead of Sr 2 B 2 N 4 as catalysts
Using CaH2 instead of HBN : Ba3B2N4 : CaH2
CBN was synthesized in the same manner as in Example 1, except that the weight ratio was 10:1.5:0.1. The generated CBN is
It was of good quality as in Example 1, and the conversion rate to CBN was 37%.
比較例 1
NaHを使用せずHBN:Sr3B2N4の重量比を
10:1とした外は、実施例1と同じにしてCBN
を合成した。生成したCBNは、内部に巣を有し
不透明で、強度が弱く、崩壊し易いものであつ
た。また、CBNへの変換率は43%であつた。Comparative example 1 The weight ratio of HBN:Sr 3 B 2 N 4 was changed without using NaH.
CBN was made the same as in Example 1 except that it was set to 10:1.
was synthesized. The CBN produced was opaque, had cavities inside, had low strength, and was easily disintegrated. The conversion rate to CBN was 43%.
比較例 2
CaH2を使用せず、HBN:Ba3B2N4の重量比
を10:1.5とした外は実施例2と同じにしてCBN
を合成した。生成したCBNは、比較例1と同様
良質でなく、CBNへの変換率は39%であつた。Comparative Example 2 CBN was produced in the same manner as in Example 2 except that CaH 2 was not used and the weight ratio of HBN:Ba 3 B 2 N 4 was 10:1.5.
was synthesized. The produced CBN was not of good quality as in Comparative Example 1, and the conversion rate to CBN was 39%.
比較例 3
HBC:Sr3B2N4:NaHの重量比を10:0.8:1.2
とした外は実施例1と同じようにしてCBNを合
成した。生成したCBNは良質なものであつたが
CBNへの変換率は21%であつた。Comparative Example 3 The weight ratio of HBC : Sr3B2N4 :NaH is 10:0.8:1.2
CBN was synthesized in the same manner as in Example 1, except that Although the CBN produced was of good quality,
The conversion rate to CBN was 21%.
以上のようにアルカリ金属或いはアルカリ土類
金属の水素化物は原料HBN中の不純物を浄化す
るため、多少不純物を含有するHBNを用いても
良質のCBNを製造することが出来るのでHBNの
CBN原料としての選択の自由度が大幅に広くな
り、その経済的効果は極めて大きい。 As mentioned above, alkali metal or alkaline earth metal hydrides purify the impurities in the raw material HBN, so high quality CBN can be produced even if HBN contains some impurities.
The degree of freedom in selecting CBN as a raw material has been greatly expanded, and its economic effects are extremely large.
Claims (1)
窒化ほう素を合成する方法において、触媒として
X3B2N4(但しXは、アルカリ土類金属)にアル
カリ金属又はアルカリ土類金属の水素化物を添加
したものを用いることを特徴とする立方晶窒化ほ
う素の合成方法。1. As a catalyst in the method of synthesizing cubic boron nitride at higher temperature and pressure than hexagonal boron nitride.
A method for synthesizing cubic boron nitride, characterized in that X 3 B 2 N 4 (where X is an alkaline earth metal) is added with an alkali metal or an alkaline earth metal hydride.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18610283A JPS6077110A (en) | 1983-10-05 | 1983-10-05 | Synthesis of cubic boron nitride |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18610283A JPS6077110A (en) | 1983-10-05 | 1983-10-05 | Synthesis of cubic boron nitride |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6077110A JPS6077110A (en) | 1985-05-01 |
| JPH0593B2 true JPH0593B2 (en) | 1993-01-05 |
Family
ID=16182394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18610283A Granted JPS6077110A (en) | 1983-10-05 | 1983-10-05 | Synthesis of cubic boron nitride |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6077110A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62108717A (en) * | 1985-11-07 | 1987-05-20 | Denki Kagaku Kogyo Kk | Production of cubic boron nitride |
| KR20030052421A (en) * | 2001-12-21 | 2003-06-27 | 재단법인 포항산업과학연구원 | Supplementary equipment for measurement and improvement of strip flatness in skin pass mill |
| ZA200506207B (en) * | 2003-02-03 | 2006-10-25 | Showa Denko Kk | Cubic boron nitride, catalyst for synthesizing cubic boron nitride, and process for producing cubic boron nitride |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56140014A (en) * | 1980-03-31 | 1981-11-02 | Showa Denko Kk | Synthesizing method for cubic system boron nitride |
| JPS5848483B2 (en) * | 1980-03-31 | 1983-10-28 | 昭和電工株式会社 | Synthesis method of cubic boron titanide |
| JPS5815012A (en) * | 1981-07-22 | 1983-01-28 | Ishizuka Kenkyusho:Kk | Manufacture of cubic system boron nitride |
-
1983
- 1983-10-05 JP JP18610283A patent/JPS6077110A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6077110A (en) | 1985-05-01 |
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