JPH0594814U - microscope - Google Patents

Abstract

(57) [Summary] [Purpose] To secure a working space below the revolver of the objective lens. [Structure] The objective lens mounting surface of the revolver 11a is a substrate S.
Is installed so as to face in the opposite direction from the side where the lens is inserted and withdrawn, and to face obliquely rearward when viewed from the front surface of the microscope, that is, the side to which the eyepiece lens 12 is attached.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a microscope, and more particularly to a microscope capable of easily performing a visual inspection of a plate-shaped sample such as a large liquid crystal substrate.

[0002]

[Prior Art]

 In recent years, the display screens of laptop word processors, personal computers, LCD TVs, etc. have become larger and have higher resolutions, and the liquid crystal display substrates that make up the display parts have also become larger and high product accuracy is required. It is like this. For this reason, there is a need for a microscope that can mount and inspect a large plate-shaped sample according to the size of the liquid crystal plate on the stage for use in visual inspection of products. On the other hand, in order to inspect the state of large plate-shaped samples such as wafers and exposure reticles used in the semiconductor manufacturing process, various microscopes have been developed that take sample handling into consideration.

4 to 6 are a plan view and a side view showing a conventional microscope for inspection of this kind. In the figure, reference numeral 50 indicates a base, and a stage 51 is placed on the upper surface of the base 50. The stage 51 can be slid in the directions orthogonal to the X and Y axis directions, and the position of the sample S set on the stage 51 is adjusted for coarse and fine movement.

On the other hand, a gate-shaped arm 53 is installed so as to straddle the stage 51. As shown in FIG. 4, the planar shape is substantially Y-shaped so that the legs are located at the ends of the base 50, and as shown in FIG. 5, a horizontal beam portion 53a having a long horizontal span is formed. The weight of the microscope main body 55 is supported by a gate-like shape composed of diagonal beams 53b located at both ends thereof and a short column portion 53c which is a supporting portion. At this time, the microscope main body 55 is supported in a cantilever state on the arm 53 so that it can be raised and lowered by the focusing raising and lowering mechanism 54, and is moved up and down by driving of the focusing raising and lowering mechanism 54.

As shown in FIG. 5, the microscope main body 55 includes a plurality of objective lenses 56 A, 56 B ... For observing a plate-shaped sample placed on the stage 51, and these objective lenses 56 A, 56 B. An electric revolver unit 57 for rotating and driving a revolver 57R for holding and switching the objective lens by electric operation, and a reflection illuminating device 58 for illuminating the sample surface via an objective lens 56C arranged on the optical path. , An observation mirror positioned above the end of the base 50 by declining the light beam so that the vertical optical axis A1 of the image-forming light beam from the objective lens 56C becomes a horizontal light line oriented in the Y-axis direction of the stage 51. An extension lens barrel 60 for accommodating the relay optical system A2 extending to the position of the cylinder 59, and an observation lens barrel 59 having an eyepiece 61 attached to the tip of the extension relay lens barrel 60. It consists of and.

Therefore, in the microscope body 55, the vertical optical axis A1 from the objective lens 56C is deviated at a right angle by a prism or a reflecting mirror (not shown), is guided to the horizontal optical axis A2 of the relay optical system, and is further guided by a prism (not shown) or It is set so that it is deviated at a right angle upward by a reflecting mirror, and enters the eyepiece lens 61 through the observation lens barrel 59.

At this time, the above-described electric revolver unit 57 is attached to the lower surface of the reflection illumination device 58, and a driving mechanism for finely focusing the revolver 57R having a plurality of objective lenses 56 mounted therein is built therein. There is. The revolver 57R is mounted so that the objective lens mounting surface faces the observer, and the objective lenses 56A, 56B, ... Which are not on the optical path are mounted on the observer side of the objective lens 56C on the optical path. ing. Also, a revolver has been developed with the revolver facing the back of the observer so that the objective lens, which is not used in a general upright microscope, is not located above the substrate surface.

[0008]

[Problems to be solved by the device]

 By the way, in this type of microscope, in order to inspect each part of the substrate S having a large area, it is necessary to freely move the stage in the X and Y axis directions so that the entire surface of the substrate can be observed. At this time, if the unused objective lens is on the observer side of the objective lens 56C on the optical path as described above, the observer should look into the vicinity of the observation field of the microscope from the side where the objective lens is attached. When attempting visual observation, since the unused objective lenses 56A, 56B, ... Are located on the observer side, it is difficult to see the substrate below the objective lens 56C at the optical path position.

In addition, there are cases where the surface of the substrate in the field of view is marked or a part of it is processed while observing the microscope. In this case, the work of inserting a hand or the tip of the work equipment directly under the objective lens. There is also a drawback that sufficient space cannot be secured and sufficient work cannot be done. Further, as shown in FIG. 6, when the stage 51 is pulled out in the X direction and the substrate S is taken out, the unused objective lens on the observer side may damage the substrate.

Therefore, an object of the present invention is to solve the above-mentioned problems of the conventional technique, and to allow the operator to directly observe the substrate or to replace the substrate, the objective lens of the microscope or the operator. The objective is to provide a microscope that prevents the hands of the robot from hitting the substrate and ensures an open space directly below the objective lens.

[0011]

[Means for Solving the Problems]

 In order to achieve the above-mentioned object, the present invention provides a base, a stage movable along a guide surface on the base in an orthogonal direction, and a gate fixed to the base so as to straddle the stage. Microscope for observing a plate-shaped sample mounted on the stage with an objective lens mounted on the revolver The revolver is characterized in that the objective lens mounting surface is installed in the opposite direction from the side in which the plate-like sample is taken in and out, and obliquely rearward when viewed from the front surface on the eyepiece side of the microscope. Is.

[0012]

[Action]

 According to the present invention, the objective lens mounting surface of the revolver is oriented in a direction opposite to the side of loading and unloading the substrate with respect to the vertical optical axis A1 including the objective lens. The objective lens used for observation is designed to face the microscope observer when replacing the substrate or when handling the substrate during inspection, because it is installed so that it is facing diagonally backward from the side where the substrate is taken in and out. The objective lens that is not in use will not be in the way, and the unused objective lens that is mounted adjacent to this object lens will keep a uniform distance from the observer. It is placed so that it is deeper than the objective lens that is being held and used, and it can be performed without problems even when the substrate surface is worked directly under the objective lens.

[0013]

【Example】

 An embodiment of the microscope according to the present invention will be described below with reference to FIGS. FIG. 1 shows a plan view of a microscope according to the present invention. In the figure, reference numeral 1 indicates a base, and the base 1 is installed on the work table T while holding it horizontally. In this embodiment, the work table T is internally provided with a vibration isolation mechanism, and the vibration isolation mechanism can block external vibration. An illumination light source and a stabilizer for the illumination are housed in the base 1, and a reflection illumination device 3 mounted directly above the plurality of objective lenses 2A, 2B ... Of the microscope main body is connected via an optical fiber cable (not shown). Illumination light can be derived. A transmissive illumination device is also provided in the base 1 so that the substrate S can be observed by both illumination systems.

The stage 4 is slidably mounted on guide rails 5 and 6 arranged in two layers in the X and Y axis directions orthogonal to each other, and is moved by a manual handle and a DC motor (not shown).

On the other hand, a gate-shaped arm 7 is installed so as to straddle the stage 4 from the front side on the observer side to the rear side. This gate-shaped arm 7 has a gentle arcuate shape with a large radius from the center of the span to both shoulders along the Y-axis direction of the above-mentioned stage, and also has a side wall 7a as shown in FIG. Has a substantially V shape fixed to both ends of the base 1.

As a member constituting the optical system of the microscope, a plurality of objective lenses 2A, 2B ... For observing the substrate S placed on the stage 4, and those objective lenses 2A, 2B. The lens-switchable electric revolver unit 11, the reflection illuminator 3 for illuminating the sample surface via the objective lens 2A on the optical path, and the vertical optical axis A1 of the image forming light beam from the objective lens 2A are further connected to the end of the base 1. A relay optical system A including an extension relay lens barrel 14 for accommodating a relay optical system A2 extending to the position of the observation lens barrel 13 located above, and an eyepiece lens 12 attached to the tip of the extension relay lens barrel 14. There is an observation lens barrel 13 that accommodates a lens barrel optical system A3 that guides light rays from the lens 2 to the eyepiece lens 12.

Of these, the reflection illumination device 3 and the electric revolution unit 11 connected to the lower surface of the reflection illumination device 3 are suspended from a substantially central position of the arm 7 via a focusing elevating mechanism 15. As shown in FIGS. 1 and 2, the reflection illuminating device 3 is housed in a rectangular parallelepiped housing, and a hanging point is provided at a substantially central position of this housing, which is smooth against the drive of the focusing elevating mechanism 15. It is possible to move up and down. At this time, the reflection illuminator 3 is horizontally installed in a state of being inclined by 45 ° with respect to the X and Y axis directions of the stage 4, as shown in FIG. An electric revolver unit 11 is fixed to the lower surface of the reflective lighting device 3. The electric revolver unit 11 has a built-in rotation drive mechanism for the revolver 11a, and the reflection illuminator 3 has a built-in drive mechanism for finely moving and focusing the electric revolver unit 11.

Further, the revolver 11a is attached so that the mounting surfaces of the objective lenses 2A, 2B, ... Are in the same direction as the longitudinal direction of the reflection illuminating device 3, facing obliquely rearward on the side opposite to the position of the observer. There is. Therefore, the unused objective lenses 2B, 2C ... Are arranged behind the objective lens 2A which is being used when viewed from the observer side. Therefore, even when the observer looks at the microscope and puts his / her hand near the objective lens 2A to perform the work such as marking or partial modification on the substrate surface, the hand hits the objective lens. There is no loss. Also, the magnification can be changed by rotating the revolver 11a by the electric revolver unit 11 while working on the substrate surface.

At this time, as the function of the reflection illumination device 3, the illumination light guided from the light source (not shown) in the base 1 through the optical fiber is provided by a half mirror (not shown) directly above the objective lens 2A. The sample is illuminated toward the objective lens 2A after being reflected toward the objective lens 2A.

The focusing elevating mechanism 15 is composed of an outer cylinder portion fixed to the reflection illumination device 3 side and an inner cylinder portion fixed to the outer cylinder portion and the arm 7 side having a nested structure. The outer cylinder portion 15a can be moved up and down via a drive transmission portion such as a gear train by a DC motor (not shown) housed inside the portion. The lens barrel 16 through which the vertical optical axis A1 of the image forming light beam from the objective lens 2A passes is also nested, and the outer cylinder part moves up and down to freely expand and contract, and the cylinder length can be freely set. At the same time, a ring-shaped blind member is attached to the outer periphery of the inner cylindrical portion 15b so as to block stray light from the outside.

Further, an optical path switchable prism system 20 is provided in the vicinity of the intersection between the lens barrel 16 having the vertical optical axis A1 and the apex position 7b of the arm 7 immediately above. This prism system 20 is a total reflection declination prism 20A that deviates the optical axis toward the observation lens barrel 13, and a straight lens for photography provided at the central position 7b of the arm 7 for the light beam from the objective lens 2A. A half mirror (not shown) that splits the light beam to the light beam 21 and the light beam to the observation lens barrel 13 at a predetermined splitting ratio, and performs repair work on the surface of the liquid crystal substrate installed at the position of the straight tube 21 for photography. It is composed of a cylindrical glass (not shown) for passing the laser light of a laser repairing device (not shown). These optical path dividing member groups are arranged side by side in series in the X direction and can be easily switched by the switching lever 22.

Here, the configuration of the observation optical system in which the optical axis is deviated by the total reflection declination prism 20A of the prism system 20 and observed by the observation lens barrel 13 will be described. The image forming light beam of the objective image from the objective lens 2A passes through a half mirror (not shown) in the reflection illuminating device 3, and is reflected by the first deflection prism 20A corresponding to the total reflection deflection prism of the prism system 20 in FIG. As shown in FIG. 2, the deflection angle is α ° and the depression angle is β °.

As shown in FIG. 2, in the relay optical system, the light beam is deflected by the first deflection angle prism 20A at an acute angle so that the angle formed with the horizontal plane is β ° downward. Along with this, the extension relay barrel 14 is directly attached to the lower surface of the arm 7 while being inclined obliquely along the arch shape. A plurality of relay lens groups are housed inside the extended relay lens barrel 14 that is inclined downward toward the end of the base 1 to form a relay optical system with a predetermined intermediate magnification.

The light beam whose optical path is extended by this relay optical system is further deflected by a second deflection prism 23 arranged at the end of the extension relay barrel 14 so as to make an acute angle vertically upward and for observation. It passes through the lens barrel 13 and reaches the eyepiece lens 12. As a result, the objective image at the objective lens 2A located substantially at the center of the stage 4 can be observed as an enlarged observation image by the eyepiece lens provided at the end position of the arm 7. At this time, as shown in FIG. 2, the optical axis deflection point by the second deflection angle prism 23 is designed to be lower than the first optical axis deflection point. In addition, a mirror may be attached at a predetermined angle in place of the deflection angle prism 23 described above and used as a deflection angle mirror.

FIG. 3 shows a state in which the stage 4 is pulled out in the X direction and the substrate S is exchanged. In this way, the surface of the revolver on which the objective lens is mounted faces obliquely rearward when viewed from the observer, so that the entire surface of the substrate is largely pulled out toward the open space. Therefore, it is possible to prevent the objective lens mounted on the revolver from colliding with the substrate and damaging the substrate at the time of exchanging the substrate.

In the present embodiment, the reflective illumination device 3 is arranged obliquely rearward from the observer in a state of being tilted from the X and Y axes, but may be attached in the Y axis direction. Yes. Further, the direction in which the revolver mounting surface faces is not limited to 45 ° as in the present embodiment, but may be set to an appropriate angle so as to avoid interference with the substrate surface during observation.

[0027]

[Effect of the device]

 As is clear from the above description, according to the present invention, since the unused objective lens is not in the working space, it is possible to secure an open space for performing visual observation and work on the surface of the substrate, and the observation can be performed. Not only is it easy, but there is an effect that the substrate is not damaged when it is replaced.

[Brief description of drawings]

FIG. 1 is a plan view showing an embodiment of a microscope according to the present invention.

FIG. 2 is a side view of the microscope shown in FIG.

FIG. 3 is a plan view showing a state in which a stage is pulled out from the state shown in FIG.

FIG. 4 is a plan view showing an example of a conventional microscope.

5 is a side view of the microscope shown in FIG.

6 is a plan view showing a state in which a stage is pulled out from the state shown in FIG.

[Explanation of symbols]

 1 Base 2 Objective Lens 3 Reflective Illuminator 4 Stages 5 and 6 Guide Rail 7 Arm 12 Eyepiece 13 Observation Lens Tube 14 Extension Relay Lens Tube 15 Focusing Lifting Mechanism A1 Objective Lens Vertical Optical Axis A2 Relay Optical System Optical Axis A3 Mirror Cylindrical optical axis α Optical axis deflection angle β Optical axis depression angle

Claims (1)

[Scope of utility model registration request] 1. A base, a stage movable in a direction orthogonal to a guide surface on the base, a gate-shaped arm fixed to the base so as to straddle the stage, and the arm. A revolver supported so as to be able to move up and down via a focus raising / lowering mechanism, wherein a revolver observes a plate-shaped sample placed on the stage with an objective lens attached to the revolver. A microscope in which a lens mounting surface is installed in a direction opposite to a side where the plate-shaped sample is taken in and out, and is obliquely rearward when viewed from a front surface of an eyepiece side of the microscope.