JPH0596258A - Ultrasonic cleaning device and its muffler - Google Patents
Ultrasonic cleaning device and its mufflerInfo
- Publication number
- JPH0596258A JPH0596258A JP21660691A JP21660691A JPH0596258A JP H0596258 A JPH0596258 A JP H0596258A JP 21660691 A JP21660691 A JP 21660691A JP 21660691 A JP21660691 A JP 21660691A JP H0596258 A JPH0596258 A JP H0596258A
- Authority
- JP
- Japan
- Prior art keywords
- ultrasonic
- cleaning
- noise
- cleaning tank
- ultrasonic cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Abstract
(57)【要約】
【目的】 超音波洗浄装置の超音波洗浄中の金属性ノイ
ズを消滅させる。
【構成】 洗浄槽１の超音波振動子２，３が取付けられ
た駆動面の少なくとも一方の内側に、平板形金網５また
は多数の貫通孔を有する金属板を備えた。
【効果】 金属性ノイズが完全に消滅するので使用者の
不快感が著しく軽減される。
(57) [Abstract] [Purpose] To eliminate metallic noise during ultrasonic cleaning of ultrasonic cleaning equipment. [Structure] A flat wire mesh 5 or a metal plate having a large number of through holes is provided inside at least one of the driving surfaces of the cleaning tank 1 to which the ultrasonic transducers 2 and 3 are attached. [Effect] Since the metallic noise is completely extinguished, the discomfort of the user is significantly reduced.
Description
【０００１】[0001]
【産業上の利用分野】本発明は、超音波洗浄装置及び超
音波洗浄装置に用いられ超音波洗浄中に発生する金属性
ノイズを消す消音具に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic cleaning device and a muffler used in the ultrasonic cleaning device to eliminate metallic noise generated during ultrasonic cleaning.
【０００２】[0002]
【従来の技術】超音波洗浄は洗浄液中に音響エネルギを
伝達させ、音圧変化によって発生するキャビテーション
によって異物等の汚れを被洗浄物の表面から剥離する洗
浄方法であるが、このキャビテーション（気泡の消滅）
によって種々のノイズが発生し、洗浄装置の使用者に不
快感を与えているのが実情である。2. Description of the Related Art Ultrasonic cleaning is a cleaning method in which acoustic energy is transmitted into a cleaning liquid and contaminants such as foreign substances are separated from the surface of an object to be cleaned by cavitation generated by a change in sound pressure. Disappeared)
As a result, various noises are generated, which is unpleasant for the user of the cleaning device.
【０００３】このノイズには主として次のものが挙げら
れる。 （１） キャビテーションノイズ このノイズは、周波数帯域はその発生する超音波の周波
数の１／２（サブ・ハーモニックス）から数１００ｋＨ
ｚまでにわたり、またレベルが不規則に変化し、非常に
特定し難く、再現性の悪い物理量であって電子工学の分
野で「ホワイト・ノイズ」と呼ばれているものにもたと
えられる。敢えて言葉で表現すれば「シャー」と書き表
せられる。このキャビテーションノイズの音の大きさの
レベルは５０〜６０ホン程度のものが多く、工場内では
あまり耳障りでなく、大きな問題とはされない場合が多
い。 （２） 金属性ノイズ 俗称「金属音」とも呼ばれキャビテーションの発生によ
って生ずるが、キャビテーションノイズとははっきり異
なる。これも敢えて言葉で表現すれば「キーン」であ
り、ノイズの性質としては１〜３ｋＨｚ程度でほぼ正弦
波状の澄んだ音（高調波はほとんどない）であり、人の
耳には最も敏感に聞きとれ、７５〜９５ホンとレベルも
高く、非常に耳障りで耐えられない程度になる場合が多
い。The noise mainly includes the following. (1) Cavitation noise This noise has a frequency band of 1/2 (sub-harmonics) of the frequency of the generated ultrasonic wave to several 100 kHz.
It can be likened to what is called "white noise" in the field of electronics, which is a physical quantity that is extremely difficult to specify and has a reproducible level that changes irregularly up to z. If you dare to express it in words, you can write it as "Shah". The level of loudness of the cavitation noise is often about 50 to 60 phons, which is not annoying in the factory and is not a serious problem in many cases. (2) Metallic noise It is also called “metal sound” and is caused by the occurrence of cavitation, but it is distinct from cavitation noise. This is also “Kean” if expressed darely, and the nature of noise is a clear sound with almost sinusoidal waveform (almost no harmonics) at about 1 to 3 kHz, and it is most sensitive to the human ear. In addition, the level is as high as 75 to 95 phons, and in many cases it is very harsh and unbearable.
【０００４】この金属性ノイズの発生の真の原因は今の
ところ不明であるが、発生しやすい条件としては次の要
因が挙げられる。 洗浄槽が深いこと（２５〜３０cm以上） 洗浄液が循環する等動いている場合に顕著で、被洗
浄物の「出し入れ」で発生 しやすい、洗浄液が静止の
時でも発生するがややノイズのレベルが低い。 水及び水溶性の洗浄液の場合に発生しやすく、有機
溶剤では発生が軽微である。 電源スイッチオンから発生するまでには若干の時間
を要し（０．１秒オーダ）、 超音波が間欠発振やリッ
プル（脈流）のある発振ではこのノイズは発生しない
。 洗浄槽の形状，寸法，材質及び超音波の周波数等に
は無関係に１〜３ｋＨｚ程度のほぼ正弦波状のノイズで
ある。Although the true cause of the metallic noise is not known so far, the following factors are mentioned as the conditions under which the metallic noise is likely to occur. The cleaning tank is deep (25 to 30 cm or more) This is remarkable when the cleaning solution is circulating, and is likely to occur when the object to be cleaned is taken in and out. Even when the cleaning solution is stationary, the noise level is a little Low. It is easily generated in the case of water and water-soluble cleaning liquid, and is slightly generated in organic solvents. It takes some time (on the order of 0.1 second) from generation of the power switch to turn on, and this noise does not occur when the ultrasonic wave has intermittent oscillation or ripple (pulsation) oscillation. The noise is approximately sinusoidal at about 1 to 3 kHz regardless of the shape, size, material, ultrasonic frequency, etc. of the cleaning tank.
【０００５】これらの今までに得られている発生する要
因から推察してこの金属性ノイズの発生する原因を次の
ように仮定する。 （イ） 金属音の周波数と波形がほぼ一定しているのは
洗浄液のキャビテーションの特性に起因するためであ
る。 （ロ） 発生した気泡がある程度消滅せず（目視可
能）、互いに衝突し干渉して発生する。The cause of occurrence of this metallic noise is assumed as follows by inferring from the factors thus far obtained. (A) The reason that the frequency and waveform of the metallic sound are almost constant is because of the cavitation characteristics of the cleaning liquid. (B) The generated bubbles do not disappear to some extent (visible), but they collide with each other and interfere with each other.
【０００６】[0006]
【発明が解決しようとする課題】超音波洗浄槽としての
金属性ノイズ発生の音響的条件は、超音波放射面の対面
が反射面としての効果が高いこと、即ち反射率が高く音
を吸収しないこと（材質によって決まる）、乱反射しな
いこと（平たい板状であること）である。通常超音波洗
浄槽の材質はステンレス等硬い金属が多く、また樹脂で
もＰＶｄＦ（ポリフッ化ビリニデン），ＰＶＣ（硬質塩
化ビニール）等でも音の反射率が高い。また被洗浄物の
材質としては金属，ガラス，プラスチック等，硬く音の
反射率の高いものが多く、繊維，ゴム，紙等やわらかい
材質のものは不向きである。また洗浄液面（空気との境
界面）は洗浄液と空気との音響インピーダンスが大きく
異なり約１００〜９９％の成分が反射する。このように
超音波洗浄槽は音響的に「閉空間」を構成することによ
って成り立っており、洗浄槽の壁面や洗浄液面，被洗浄
物のほとんどすべてが反射面として構成されているため
に、金属性ノイズが発生した場合減衰が少なく、超音波
励振が続く限り持続する。本発明の目的は、上記洗浄中
の雑音のうち金属性ノイズを消滅させる消音具と、その
消音具によって金属性ノイズを消滅させた超音波洗浄装
置を提供することにある。The acoustic condition for generating metallic noise as an ultrasonic cleaning tank is that the opposite surface of the ultrasonic wave emitting surface has a high effect as a reflecting surface, that is, the reflectance is high and the sound is not absorbed. That is (depending on the material), there is no irregular reflection (a flat plate). Usually, most ultrasonic cleaning tanks are made of hard metal such as stainless steel, and resin, PVdF (polyvinylidene fluoride), PVC (hard vinyl chloride), etc. have high sound reflectance. In addition, as the material of the object to be cleaned, there are many materials such as metal, glass, and plastic which are hard and have high sound reflectance, and soft materials such as fiber, rubber and paper are not suitable. The cleaning liquid surface (boundary surface with air) has a large difference in acoustic impedance between the cleaning liquid and air, and about 100 to 99% of the component is reflected. As described above, the ultrasonic cleaning tank is acoustically constructed by forming a "closed space", and since the wall surface of the cleaning tank, the surface of the cleaning liquid, and almost all the objects to be cleaned are formed as reflecting surfaces, If there is sexual noise, the attenuation is small and it lasts as long as ultrasonic excitation continues. An object of the present invention is to provide a silencer that eliminates metallic noise among the noises during cleaning, and an ultrasonic cleaning device that eliminates metallic noise by the silencer.
【０００７】[0007]
【課題を解決するための手段】本発明の消音具は、超音
波洗浄装置の洗浄槽内の洗浄液中で発生する金属性ノイ
ズを消滅させるために、前記洗浄槽の側面または底面の
外側に超音波振動子が配置された少なくとも１つの駆動
面の内側に該駆動面と並行して配置できる平板形状で、
かつ、網目の大きさまたは格子の間隔が０．５cm〜１０
cmの金網または金属製格子板によって形成されたことを
特徴とするものである。また、本発明の超音波洗浄装置
は、上記消音具を洗浄槽の少なくとも一つの駆動面の内
側に備えたことを特徴とするものである。The noise eliminator according to the present invention is provided with a supersonic filter on the outside of the side surface or the bottom surface of the cleaning tank in order to eliminate metallic noise generated in the cleaning liquid in the cleaning tank of the ultrasonic cleaning device. A flat plate shape that can be arranged in parallel with at least one driving surface on which the sound wave transducer is arranged,
Moreover, the size of the mesh or the spacing of the grid is 0.5 cm to 10
It is characterized by being formed by a metal mesh plate of cm or a metal lattice plate. Further, the ultrasonic cleaning apparatus of the present invention is characterized in that the above-mentioned muffler is provided inside at least one drive surface of the cleaning tank.
【０００８】上記本発明の手段の作用を説明する。洗浄
槽内で発生する金属性ノイズの周波数は低い（１ｋＨｚ
〜３ｋＨｚ）ので波長が長く（５０〜１５０cm）、一方
利用する超音波の周波数は高い（２０ｋＨｚ〜１００ｋ
Ｈｚ）ので波長は短い（１．５cm〜７．５cm）。本発明
の金網を遮音板として洗浄槽内に設けることにより、金
属性ノイズのみ選択的に「遮断」しノイズの発生を妨げ
ることが可能となる。網目の大きさを０．５cm〜１０cm
程度の範囲に選ぶことにより、超音波周波数（２０ｋＨ
ｚ〜１００ｋＨｚ）に対してはほぼ１００％透過するた
めキャビテーションの発生や洗浄に対して何ら妨げるこ
とがない。この網の目の範囲内であれば、網の代りにパ
ンチングメタルや棒を格子状に組み立てた構造のもので
も良い。The operation of the means of the present invention will be described. The frequency of metallic noise generated in the cleaning tank is low (1 kHz
~ 3kHz), so the wavelength is long (50-150cm), while the frequency of ultrasonic waves used is high (20kHz-100k).
Therefore, the wavelength is short (1.5 cm to 7.5 cm). By providing the wire mesh of the present invention as a sound insulating plate in the cleaning tank, it is possible to selectively "block" only metallic noise and prevent the generation of noise. The size of the mesh is 0.5cm-10cm
Ultrasonic frequency (20kHz
(Z to 100 kHz) transmits almost 100%, so that it does not hinder the occurrence of cavitation or cleaning. As long as it is within the range of the mesh, a structure in which punching metal or rods are assembled in a lattice shape may be used instead of the mesh.
【０００９】[0009]
【実施例】図１，図２，図３は本発明の第１の実施例を
示す平面図，正面縦断面図，側面縦断面図である。図に
おいて、１は洗浄槽、２，３は超音波振動子、４は洗浄
液、５は消音具、６は消音具を洗浄槽に取り付けるため
のフックである。これらの図では超音波振動子２，３の
駆動源である超音波発振器は省略した。1, 2 and 3 are a plan view, a front vertical sectional view and a side vertical sectional view showing a first embodiment of the present invention. In the figure, 1 is a cleaning tank, 2 and 3 are ultrasonic transducers, 4 is a cleaning liquid, 5 is a silencer, and 6 is a hook for attaching the silencer to the cleaning tank. In these figures, the ultrasonic oscillator, which is the drive source of the ultrasonic transducers 2 and 3, is omitted.
【００１０】図１〜図３に示す洗浄槽１の寸法は、幅９
９cm、奥行き４０cm、深さ１２５cm（容積４９５リット
ル）、材質はステンレス（ＳＵＳ３０４）、超音波の周
波数は２６ｋＨｚ、放射面（駆動面）の面積８９cm×９
０cmが２面、パワー９．６ｋＷ（２面）、超音波強度
（０．６ｗ／cm2 ）、洗浄液は市水，温度２０℃であ
り、消音具の網の条件が２メッシュ、線径０．１２１c
m、目の開き１．１４９cm、空間率８１．７％、線の材
質はステンレスのものを図３のうよに放射面１面のみに
設けた場合の金属性ノイズの消去の効果は次の通りであ
った。 （イ）金網を設けない場合、 （金属性ノイズ）＋（キャビテーションノイズ） ９７ホン キャビテーションノイズのみ ６０ホン （ロ）金網を設けた場合 （金属性ノイズ）＋（キャビテーションノイズ） ６０ホン （金属性ノイズは認められず）The cleaning tank 1 shown in FIGS. 1 to 3 has a width of 9
9 cm, depth 40 cm, depth 125 cm (volume 495 liters), material is stainless steel (SUS304), ultrasonic frequency is 26 kHz, radiation surface (driving surface) area 89 cm x 9
0 cm is 2 sides, power is 9.6 kW (2 sides), ultrasonic intensity (0.6 w / cm 2 ), cleaning liquid is city water, temperature is 20 ° C., the condition of the silencer mesh is 2 mesh, wire diameter 0 .121c
m, opening of 1.149 cm, porosity of 81.7%, wire material made of stainless steel as shown in FIG. It was on the street. (A) Without wire mesh, (Metal noise) + (cavitation noise) 97 phones Only cavitation noise 60 phones (b) With wire mesh (metal noise) + (cavitation noise) 60 phones (metal noise Is not recognized)
【００１１】このようにキャビテーションノイズに対し
ては波長が超音波の周波数より短いためノイズを軽減す
る効果がないが金属性ノイズは全く発生しない。またこ
の網は金属性ノイズを遮断する目的で設けるため、超音
波放射面（駆動面）が２面の場合でも、その１面のみに
設けるだけでかなりの効果が得られる。また網の取付け
は洗浄に支障がないように駆動面に近い方が良く、駆動
面に被洗浄物がぶつかったときの損傷を防ぐ「保護網」
の役目も兼ねることができる。図４は図１〜図３の超音
波洗浄装置に用いた本発明の消音具５の第１の実施例を
示す正面図であり、７は金網、８はその枠、６は洗浄槽
に取付けるためのフックである。図５は本発明の作用を
説明する側面縦断面図である。図において、黒細矢印は
金属性ノイズが金網７によって遮断されることを示し、
白太矢印は超音波振動が金網７を透過することを示して
いる。図６は本発明の超音波洗浄装置の第２の実施例を
示す正面縦断面図であり、洗浄槽１の底面に超音波振動
子２が取付けられ、その駆動面に消音具として金属格子
板１０が設けられている。図７は本発明の消音具の第２
の実施例としての金属格子板１０の平面図であり、金属
の角棒または丸棒を格子状に組立てた「すのこ」であ
る。図８は本発明の消音具の第３の実施例を示す平面図
であり、金属板に多数の貫通孔を設けたパンチングメタ
ルである。これらの構造の場合でも同様の効果が得られ
る。As described above, since the wavelength of cavitation noise is shorter than the frequency of ultrasonic waves, there is no effect of reducing noise, but metallic noise does not occur at all. Further, since this net is provided for the purpose of blocking metallic noise, even if the ultrasonic wave emitting surface (driving surface) is two, a considerable effect can be obtained by providing it only on one surface. In addition, it is better to install the mesh closer to the drive surface so as not to interfere with cleaning, and a "protection mesh" to prevent damage when the object to be cleaned hits the drive surface.
Can also serve as the. FIG. 4 is a front view showing a first embodiment of the silencer 5 of the present invention used in the ultrasonic cleaning apparatus of FIGS. 1 to 3, 7 being a wire mesh, 8 its frame, and 6 attached to a cleaning tank. It is a hook for. FIG. 5 is a side vertical sectional view for explaining the operation of the present invention. In the figure, a black thin arrow indicates that metallic noise is blocked by the wire net 7,
The thick white arrow indicates that the ultrasonic vibration penetrates the wire net 7. FIG. 6 is a front vertical cross-sectional view showing a second embodiment of the ultrasonic cleaning apparatus of the present invention, in which the ultrasonic vibrator 2 is attached to the bottom surface of the cleaning tank 1, and the driving surface thereof has a metal grid plate as a muffler. 10 are provided. FIG. 7 shows a second silencer of the present invention.
FIG. 7 is a plan view of the metal grid plate 10 as an example of the above, which is a “slat” formed by assembling metal square bars or round bars in a grid shape. FIG. 8 is a plan view showing a third embodiment of the sound deadening tool of the present invention, which is a punching metal in which a large number of through holes are provided in a metal plate. Similar effects can be obtained with these structures.
【００１２】[0012]
【発明の効果】以上詳細に説明したように、本発明を実
施することにより従来の超音波洗浄装置の洗浄中に発生
し不快感を与えていた金属性ノイズを消滅させることが
できるため使用者に不快感を与えることがなく作業性を
著しく改善することができる。As described in detail above, by carrying out the present invention, it is possible to eliminate the metallic noise that has been generated during the cleaning of the conventional ultrasonic cleaning device and is uncomfortable. Workability can be significantly improved without giving discomfort to the user.
【図１】本発明の装置の第１の実施例を示す平面図であ
る。FIG. 1 is a plan view showing a first embodiment of the device of the present invention.
【図２】本発明の装置の第１の実施例を示す正面縦断面
図である。FIG. 2 is a front vertical sectional view showing a first embodiment of the device of the present invention.
【図３】本発明の装置の第１の実施例を示す側面縦断面
図である。FIG. 3 is a side vertical sectional view showing a first embodiment of the device of the present invention.
【図４】本発明の消音具の第１の実施例を示す構造図で
ある。FIG. 4 is a structural diagram showing a first embodiment of the silencer of the present invention.
【図５】本発明の作用を説明する側面縦断面図である。FIG. 5 is a side vertical cross-sectional view illustrating the operation of the present invention.
【図６】本発明の装置の第２の実施例を示す正面縦断面
図である。FIG. 6 is a front vertical sectional view showing a second embodiment of the device of the present invention.
【図７】本発明の消音具の第２の実施例の一構造図であ
る。FIG. 7 is a structural diagram of a second embodiment of the silencer of the present invention.
【図８】本発明の消音具の第３の実施例の一構造図であ
る。FIG. 8 is a structural diagram of a silencer according to a third embodiment of the present invention.
１ 洗浄槽 ２，３ 超音波振動子 ４ 洗浄液 ５ 消音具 ６ フック ７ 金網 ８ 枠 １０ 金属格子板 １１ パンチングメタル 1 Cleaning Tank 2, 3 Ultrasonic Transducer 4 Cleaning Liquid 5 Silencer 6 Hook 7 Wire Mesh 8 Frame 10 Metal Lattice Plate 11 Punching Metal
Claims (2)
発生する金属性ノイズを消滅させるために、 前記洗浄槽の側面または底面の外側に超音波振動子が配
置された少なくとも１つの駆動面の内側に該駆動面と並
行して配置できる平板状で、かつ、網目の大きさまたは
格子の間隔が０．５〜１０cmの金網または金属格子板に
よって構成された消音具。1. At least one drive in which an ultrasonic transducer is arranged outside a side surface or a bottom surface of the cleaning tank in order to eliminate metallic noise generated in the cleaning liquid in the cleaning tank of the ultrasonic cleaning apparatus. A silencer that is a flat plate that can be arranged inside the surface in parallel with the drive surface, and that is composed of a wire mesh or a metal grid plate having a mesh size or a grid interval of 0.5 to 10 cm.
振動子が配置された駆動面を有する超音波洗浄装置にお
いて、 前記洗浄槽内の洗浄液中で発生する金属性ノイズを消滅
させるために、 前記駆動面の少なくとも１つの面の内側に、平板状で、
かつ、網目の大きさまたは格子の間隔が０．５〜１０cm
の金網または金属格子板によって構成された消音具が前
記駆動面と並行して配置されたことを特徴とする超音波
洗浄装置。2. An ultrasonic cleaning device having a driving surface in which an ultrasonic transducer is arranged outside a side surface or a bottom surface of a cleaning tank, in order to eliminate metallic noise generated in the cleaning liquid in the cleaning tank. A flat plate shape inside at least one of the drive surfaces,
And the size of the mesh or the spacing of the grid is 0.5-10 cm
An ultrasonic cleaning device, characterized in that the silencer composed of the wire mesh or the metal grid plate is arranged in parallel with the drive surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21660691A JPH0596258A (en) | 1991-08-02 | 1991-08-02 | Ultrasonic cleaning device and its muffler |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21660691A JPH0596258A (en) | 1991-08-02 | 1991-08-02 | Ultrasonic cleaning device and its muffler |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0596258A true JPH0596258A (en) | 1993-04-20 |
Family
ID=16691064
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21660691A Pending JPH0596258A (en) | 1991-08-02 | 1991-08-02 | Ultrasonic cleaning device and its muffler |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0596258A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102615064A (en) * | 2012-04-19 | 2012-08-01 | 天润曲轴股份有限公司 | Workpeice cleaning box |
| WO2017183586A1 (en) * | 2016-04-19 | 2017-10-26 | 正明 坂口 | Ultrasonic treatment device and ultrasonic treatment method |
| JP2020136537A (en) * | 2019-02-21 | 2020-08-31 | キオクシア株式会社 | Substrate processing equipment |
| KR102517525B1 (en) * | 2022-09-23 | 2023-04-05 | (주)시냅시스 | Howling reduction cleaning net for ultrasonic cleaner and ultrasonic cleaning device including it |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS607821U (en) * | 1983-06-24 | 1985-01-19 | オ−ジ−技研株式会社 | Feedback device for support cane |
-
1991
- 1991-08-02 JP JP21660691A patent/JPH0596258A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS607821U (en) * | 1983-06-24 | 1985-01-19 | オ−ジ−技研株式会社 | Feedback device for support cane |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102615064A (en) * | 2012-04-19 | 2012-08-01 | 天润曲轴股份有限公司 | Workpeice cleaning box |
| WO2017183586A1 (en) * | 2016-04-19 | 2017-10-26 | 正明 坂口 | Ultrasonic treatment device and ultrasonic treatment method |
| JP2020136537A (en) * | 2019-02-21 | 2020-08-31 | キオクシア株式会社 | Substrate processing equipment |
| KR102517525B1 (en) * | 2022-09-23 | 2023-04-05 | (주)시냅시스 | Howling reduction cleaning net for ultrasonic cleaner and ultrasonic cleaning device including it |
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