JPH0597223A - Parts carrier - Google Patents

Parts carrier

Info

Publication number
JPH0597223A
JPH0597223A JP29088191A JP29088191A JPH0597223A JP H0597223 A JPH0597223 A JP H0597223A JP 29088191 A JP29088191 A JP 29088191A JP 29088191 A JP29088191 A JP 29088191A JP H0597223 A JPH0597223 A JP H0597223A
Authority
JP
Japan
Prior art keywords
plate
component
carrier plate
parts
notch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP29088191A
Other languages
Japanese (ja)
Inventor
Nobuo Ueda
信雄 植田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP29088191A priority Critical patent/JPH0597223A/en
Publication of JPH0597223A publication Critical patent/JPH0597223A/en
Pending legal-status Critical Current

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Abstract

(57)【要約】 【目的】 部品の停止位置が若干ずれても搬送に支障が
生じることがなく、しかも高速化を可能とする。 【構成】 一定のピッチで部品を搬送する部品搬送装置
において、搬送される部品300 の長さ寸法cより十分に
大きな切欠111 が一定のピッチで形成されている前搬送
板110 と、この前搬送板110 と同形で、かつ対向して設
けられる後搬送板120 と、これらの両搬送板110 、120
を部品300 が載置された搬送レール200 に沿って移動さ
せる駆動部とを有し、一定のピッチの移動が完了した時
点で、部品300 が前搬送板の切欠111 の前縁部と、後搬
送板120 の切欠121 の後縁部との間に僅かの隙間を有し
て挟まれるべく、前搬送板111 の移動距離が後搬送板12
1 の移動距離より短く設定されている。
(57) [Summary] [Purpose] Even if the stop position of a part is slightly displaced, there is no hindrance to conveyance, and speeding up is possible. In a parts conveying device for conveying parts at a constant pitch, a front conveyor plate 110 having notches 111 sufficiently larger than a length dimension c of a conveyed part 300 at a constant pitch, and a front conveyor plate 110 A rear carrier plate 120 having the same shape as the plate 110 and facing each other, and both of these carrier plates 110, 120.
And a drive unit for moving the component 300 along the transport rail 200 on which the component 300 is placed, and when the movement at a constant pitch is completed, the component 300 is moved to the front edge of the notch 111 of the front transport plate and the rear edge. In order to be sandwiched with a slight gap between the rear edge of the notch 121 of the carrier plate 120, the moving distance of the front carrier plate 111 is set to the rear carrier plate 12.
It is set shorter than the travel distance of 1.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、部品を一定のピッチで
搬送する部品搬送装置、特に半導体集積回路の製造工程
の1つであるマーク捺印工程や、外観検査工程等におい
て半導体集積回路を一定のピッチで搬送する部品搬送装
置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a component transporting device for transporting components at a constant pitch, and in particular, a semiconductor integrated circuit is fixed in a mark marking step, which is one of the manufacturing steps of a semiconductor integrated circuit, and an appearance inspection step. The present invention relates to a component transfer device that transfers at a pitch of.

【0002】[0002]

【従来の技術】従来のこの種の部品搬送装置について図
6〜図9を参照しつつ説明する。この種の部品搬送装置
では、部品300 は、搬送レール200の上を滑りながら一
定のピッチをもって搬送される。このために、搬送レー
ル200 の上方に設けられた搬送板400 は、図6に矢印A
方向〜矢印D方向で示した矢印のように移動させられ
る。すなわち、搬送板400 は、矢印A方向の方向に下降
し、切欠410 に部品300 を収める。この状態で、搬送板
400 は矢印B方向に一定ピッチに相当する距離だけ移動
して部品300 を搬送する。部品300 の搬送が完了した
ら、搬送板400は矢印C方向に上昇し、部品300 から離
れる。そして、当該搬送板400 は矢印D方向に移動し、
初期状態に復帰する。この動作を繰り返すことによっ
て、部品300 は一定のピッチずつ矢印B方向に搬送され
るのである。
2. Description of the Related Art A conventional component conveying apparatus of this type will be described with reference to FIGS. In this type of component transport device, the components 300 are transported at a constant pitch while sliding on the transport rail 200. For this purpose, the carrier plate 400 provided above the carrier rail 200 is indicated by an arrow A in FIG.
The arrow is moved in the direction of arrow D. That is, the carrier plate 400 descends in the direction of arrow A, and the component 300 is placed in the notch 410. In this state, the carrier plate
400 moves in the direction of arrow B by a distance corresponding to a certain pitch and conveys the component 300. When the transportation of the component 300 is completed, the transport plate 400 rises in the direction of arrow C and separates from the component 300. Then, the carrier plate 400 moves in the direction of arrow D,
Return to the initial state. By repeating this operation, the component 300 is conveyed in the direction of arrow B at a constant pitch.

【0003】[0003]

【発明が解決しようとする課題】しかしながら、上述し
た従来のこの種の部品搬送装置には以下のような問題点
がある。すなわち、搬送板400 に形成されている切欠41
0 の寸法aは、部品300 の停止位置の誤差を極力小さく
するため、部品300 の長さ寸法cより僅かに大きく設定
されている。従って、部品300 が搬送レール200 の上
で、振動或いは風圧等の外力によって僅かでもその停止
位置がずれると、次の搬送動作において、搬送板400 の
切欠410 の中に部品300 がうまく収まらないことにな
る。また、同様の理由から切欠410 は高精度に形成する
必要がある。
However, the above-described conventional component transfer apparatus of this type has the following problems. That is, the notch 41 formed in the carrier plate 400.
The dimension a of 0 is set to be slightly larger than the length dimension c of the component 300 in order to minimize the error in the stop position of the component 300. Therefore, if the stop position of the component 300 shifts slightly on the transport rail 200 due to external force such as vibration or wind pressure, the component 300 may not fit in the notch 410 of the transport plate 400 in the next transport operation. become. Further, the notch 410 needs to be formed with high precision for the same reason.

【0004】また、このような問題を解消するために、
図7に示すように、搬送板500 の切欠510 の寸法bを部
品300 の長さ寸法cより十分に大きく設定したものがあ
る。しかし、このような搬送板500 では、部品300 が何
らかの外力によりその停止位置が僅かにずれた場合で
も、切欠510 に部品300 を収めることはできるが、部品
300 の搬送速度を高くすると、搬送板500 が停止した後
でも、部品300 に対して慣性力が働くため、部品300 は
切欠510 内のどの位置で停止するか判らない (図8参
照) 。このため、搬送板500 の移動速度を低くし、移動
完了後において切欠510 の後縁部が部品300 に接するよ
うにしている。しかし、これでは高速化が図れないとい
う問題点を有している。
Further, in order to solve such a problem,
As shown in FIG. 7, in some cases, the dimension b of the notch 510 of the carrier plate 500 is set to be sufficiently larger than the length dimension c of the component 300. However, with such a carrier plate 500, even if the stop position of the component 300 is slightly displaced by some external force, the component 300 can be accommodated in the notch 510, but
When the transport speed of 300 is increased, even after the transport plate 500 is stopped, inertial force acts on the component 300, so it is not known where the component 300 stops in the notch 510 (see FIG. 8). For this reason, the moving speed of the carrier plate 500 is reduced so that the rear edge of the notch 510 contacts the component 300 after the completion of the movement. However, this has a problem that the speed cannot be increased.

【0005】本発明は上記事情に鑑みて創案されたもの
で、部品の停止位置が若干ずれても搬送に支障が生じる
ことがなく、しかも高速化が可能な部品搬送装置を提供
することを目的としている。
The present invention was devised in view of the above circumstances, and an object of the present invention is to provide a parts conveying apparatus which does not hinder the conveyance even if the stop position of the parts is slightly deviated and is capable of speeding up. I am trying.

【0006】[0006]

【課題を解決するための手段】本発明に係る部品搬送装
置は、一定のピッチで部品を搬送する部品搬送装置にお
いて、搬送される部品の長さより十分に大きな切欠が一
定のピッチで形成されている前搬送板と、この前搬送板
と同形で、かつ対向して設けられる後搬送板と、これら
の両搬送板を部品が載置された搬送レールに沿って移動
させる駆動部とを備えており、一定のピッチの移動が完
了した時点で、部品が前搬送板の切欠の前縁部と、後搬
送板の切欠の後縁部との間に僅かの隙間を有して挟まれ
るべく、前搬送板の移動距離が後搬送板の移動距離より
短く設定されている。
According to the present invention, there is provided a component transporting apparatus for transporting components at a constant pitch, wherein a notch sufficiently larger than the length of the transported component is formed at a constant pitch. A front carrier plate, a rear carrier plate having the same shape as the front carrier plate and facing each other, and a drive unit for moving these both carrier plates along a carrier rail on which parts are placed. In order to be sandwiched with a slight gap between the front edge portion of the notch of the front carrier plate and the rear edge portion of the notch of the rear carrier plate, when the movement of the constant pitch is completed, The moving distance of the front carrier plate is set shorter than the moving distance of the rear carrier plate.

【0007】[0007]

【実施例】図1は本発明の一実施例に係る部品搬送装置
を示す概略的斜視図、図2〜図5はこの部品搬送装置に
よる搬送手順を示す図面であって、図2は初期状態を示
す説明図、図3は搬送板の切欠に部品が収まった状態を
示す説明図、図4は搬送板が部品を搬送する状態を示す
説明図、図5は部品の搬送が完了した状態を示す説明図
である。なお、従来のものと略同一の部品等には同一の
符号を付して説明を行う。
1 is a schematic perspective view showing a parts conveying apparatus according to an embodiment of the present invention, FIGS. 2 to 5 are drawings showing a conveying procedure by the parts conveying apparatus, and FIG. 2 is an initial state. FIG. 3 is an explanatory view showing a state where the parts are accommodated in the cutouts of the conveying plate, FIG. 4 is an explanatory view showing a state where the conveying plates convey the parts, and FIG. 5 is a state where the parts are completely conveyed. FIG. It should be noted that parts that are substantially the same as those of the related art will be denoted by the same reference numerals in the following description.

【0008】本実施例に係る部品搬送装置は、一定のピ
ッチで部品を搬送する部品搬送装置において、搬送され
る部品300 の長さ寸法cより十分に大きな切欠111 が一
定のピッチで形成されている前搬送板110 と、この前搬
送板110 と同形で、かつ対向して設けられる後搬送板12
0 と、これらの両搬送板110 、120 を部品300 が載置さ
れた搬送レール200 に沿って移動させる駆動部 (図示省
略) とを有している。
The component transporting apparatus according to the present embodiment is a component transporting apparatus for transporting components at a constant pitch, in which notches 111 that are sufficiently larger than the length c of the transported component 300 are formed at a constant pitch. Front transport plate 110 and a rear transport plate 12 that has the same shape as the front transport plate 110 and is provided to face each other.
0, and a drive unit (not shown) that moves both of the transport plates 110 and 120 along the transport rail 200 on which the component 300 is placed.

【0009】搬送レール200 は、中央に部品300 の幅寸
法に対応した凹溝210 が形成されている。部品300 は、
この凹溝210 にガイドされて搬送される。なお、図面で
は、部品300 が単に直方体状に描かれているが、実際に
はリードが突出した半導体集積回路を部品300 として搬
送するので、凹溝210 の脇には前記リードが収まる溝が
設けられている。
A concave groove 210 corresponding to the width dimension of the component 300 is formed in the center of the transport rail 200. The part 300 is
The paper is conveyed while being guided by the concave groove 210. In the drawings, the component 300 is simply drawn in a rectangular parallelepiped shape, but since a semiconductor integrated circuit with leads protruding is actually conveyed as the component 300, a groove for accommodating the leads is provided beside the recessed groove 210. Has been.

【0010】一方、前搬送板110 は、所定のピッチで切
欠111が形成されている。この切欠111 は、部品300 の
長さ寸法cより十分大きく設定されている。また、後搬
送板120 は形状的にはまったく前搬送板110 と同様であ
る。
On the other hand, the front carrier plate 110 has notches 111 formed at a predetermined pitch. The notch 111 is set to be sufficiently larger than the length c of the component 300. Further, the rear transport plate 120 is completely similar in shape to the front transport plate 110.

【0011】この前搬送板110 及び後搬送板120 は、搬
送レール200 の上方に対向した状態で設けられており、
図外の駆動部によって、図1で示す矢印A方向〜矢印D
方向に移動されるように構成されている。ただし、前搬
送板110 と後搬送板120 とでは、矢印B方向及び矢印D
方向の移動距離が異なる。
The front transport plate 110 and the rear transport plate 120 are provided above the transport rail 200 so as to face each other.
By a drive unit (not shown), arrow A direction to arrow D shown in FIG.
Is configured to be moved in the direction. However, in the front transport plate 110 and the rear transport plate 120, the arrow B direction and the arrow D
The moving distance in the direction is different.

【0012】次に、このように構成された部品搬送装置
の作動を説明する。なお、以下では、前搬送板110 及び
後搬送板120 は、それぞれ2つの切欠111a、111b及び12
1a、121bを有しており、それぞれが部品300a、300bに対
応するとして説明を行う。また、図示の都合上、前搬送
板110 より後搬送板120 の方を背高に示すが、実際には
同一に形成されているものとする。
Next, the operation of the component carrying device thus constructed will be described. In the following, the front transport plate 110 and the rear transport plate 120 are respectively provided with the two notches 111a, 111b and 12 respectively.
It has 1a and 121b, and it demonstrates that each corresponds to the components 300a and 300b. Further, for convenience of illustration, the rear transport plate 120 is shown to be taller than the front transport plate 110, but it is assumed that they are actually formed the same.

【0013】まず、図2に示すように、前搬送板110 と
後搬送板120 とが初期状態にセットされる。ここで、初
期状態とは、前搬送板110 及び後搬送板120 の切欠を一
致させて部品の上方に位置する状態をいい、図面で示す
と、前搬送板110 の切欠111aと後搬送板120 の切欠121a
とが一致して部品300aの上方に、前搬送板110 の切欠11
1bと後搬送板120 の切欠121bとが一致して部品300bの上
方にそれぞれ位置する状態をいう。
First, as shown in FIG. 2, the front carrier plate 110 and the rear carrier plate 120 are set to the initial state. Here, the initial state means a state in which the cutouts of the front transport plate 110 and the rear transport plate 120 are aligned with each other and are positioned above the components. In the drawing, the cutout 111a of the front transport plate 110 and the rear transport plate 120 are shown. Notch 121a
And the notch 11 of the front carrier plate 110 above the part 300a.
The state in which 1b and the notch 121b of the rear transport plate 120 are aligned with each other and located above the component 300b, respectively.

【0014】この初期状態から、前搬送板110 及び後搬
送板120 を下方 (図1に示す矢印A方向) に移動させ
て、切欠111a、121a内に部品300aを、切欠111b、121b内
に部品300bをそれぞれ収める (図3参照) 。なお、以下
の説明を簡略化するために、各部品300a、300bは、それ
ぞれ切欠111a(121a)、切欠111b(121b)の中央に収めるも
のとする。
From this initial state, the front carrier plate 110 and the rear carrier plate 120 are moved downward (in the direction of arrow A in FIG. 1) to place the parts 300a in the notches 111a and 121a and the parts 300a in the notches 111b and 121b. Store 300b each (see Figure 3). Note that, in order to simplify the following description, each of the components 300a and 300b is set in the center of the cutout 111a (121a) and the cutout 111b (121b), respectively.

【0015】次に、前搬送板110 及び後搬送板120 を図
1に示す矢印B方向に移動させる。この移動は、以下の
ように設定されている。すなわち、前搬送板110 の移動
量をX、後搬送板120 の移動量をY、部品300 の移動量
をZ、部品300 の長さ寸法をc、切欠の寸法をdとする
と、X<Y、c<dの関係が成立する。また、Y=Z+
1/2(d−c)、X=Z−1/2(d−c)の関係が成立す
る。
Next, the front carrier plate 110 and the rear carrier plate 120 are moved in the direction of arrow B shown in FIG. This movement is set as follows. That is, if the movement amount of the front conveyance plate 110 is X, the movement amount of the rear conveyance plate 120 is Y, the movement amount of the component 300 is Z, the length dimension of the component 300 is c, and the notch dimension is d, then X <Y , C <d holds. Also, Y = Z +
The relationship of 1/2 (dc) and X = Z-1 / 2 (dc) is established.

【0016】従って、前搬送板110 及び後搬送板120 の
移動が完了した時点では、図4に示すように、前搬送板
110 の切欠111a、111bの前縁部が部品300a、300bの前縁
部に、後搬送板120 の切欠111b、121bの後縁部が部品30
0a、300bの後縁部にそれぞれほぼ接触するようになる。
すなわち、図4に示すように、部品300aは切欠111aと切
欠121aとで、部品300bは切欠111bと切欠121bとでそれぞ
れほぼ挟持された状態で移動を完了するのである。
Therefore, when the movement of the front transport plate 110 and the rear transport plate 120 is completed, as shown in FIG.
The front edges of the notches 111a and 111b of the 110 are the front edges of the parts 300a and 300b, and the rear edges of the notches 111b and 121b of the rear carrier plate 120 are the parts 30.
It comes into contact with the rear edges of 0a and 300b.
That is, as shown in FIG. 4, the component 300a is completely sandwiched between the notch 111a and the notch 121a, and the component 300b is almost sandwiched between the notch 111b and the notch 121b.

【0017】この移動が完了すると、前搬送板110 及び
後搬送板120 はそのままの状態で上方 (図1に示す矢印
C方向) に移動する (図5参照) 。そして、前搬送板11
0 及び後搬送板120 は、図1に示す矢印D方向に移動し
て初期状態に復帰する。なお、この矢印D方向への移動
が終了すると、図2に示す初期状態に復帰するように前
搬送板110 より後搬送板120 の方がより多く、d−cだ
け多く移動する。
When this movement is completed, the front carrier plate 110 and the rear carrier plate 120 move upward (in the direction of arrow C shown in FIG. 1) in the same state (see FIG. 5). And the front carrier plate 11
0 and the rear transport plate 120 move in the direction of arrow D shown in FIG. 1 and return to the initial state. When the movement in the direction of the arrow D is completed, the rear transport plate 120 is moved more than the front transport plate 110 and is moved by d−c so as to return to the initial state shown in FIG.

【0018】[0018]

【発明の効果】本発明に係る部品搬送装置は、一定のピ
ッチで部品を搬送する部品搬送装置において、搬送され
る部品の長さより十分に大きな切欠が一定のピッチで形
成されている前搬送板と、この前搬送板と同形で、かつ
対向して設けられる後搬送板と、これらの両搬送板を部
品が載置された搬送レールに沿って移動させる駆動部と
を具備しており、一定のピッチの移動が完了した時点
で、部品が前搬送板の切欠の前縁部と、後搬送板の切欠
の後縁部との間に僅かの隙間を有して挟まれるべく、前
搬送板の移動距離が後搬送板の移動距離より短く設定さ
れている。従って、部品の停止位置が若干ずれても搬送
に支障が生じることがなく、しかも高速化が可能とな
る。
As described above, the component conveying device according to the present invention is a component conveying device which conveys components at a constant pitch. In the component conveying device, notches sufficiently larger than the length of the components to be conveyed are formed at a constant pitch. And a rear carrier plate having the same shape as the front carrier plate and facing each other, and a drive unit for moving these both carrier plates along the carrier rails on which the parts are placed. When the movement of the pitch of the front carrier plate is completed, the front carrier plate is placed so that the parts are sandwiched with a slight gap between the front edge part of the notch of the front carrier plate and the rear edge part of the notch of the rear carrier plate. Is set to be shorter than the moving distance of the rear transport plate. Therefore, even if the stop position of the component is slightly deviated, there is no hindrance to the conveyance, and the speed can be increased.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例に係る部品搬送装置を示す概
略的斜視図である。
FIG. 1 is a schematic perspective view showing a component carrying device according to an embodiment of the present invention.

【図2】この部品搬送装置による搬送手順を示す図面で
あって、初期状態を示す説明図である。
FIG. 2 is a drawing showing a carrying procedure by the component carrying device and is an explanatory view showing an initial state.

【図3】この部品搬送装置による搬送手順を示す図面で
あって、搬送板の切欠に部品が収まった状態を示す説明
図である。
FIG. 3 is a diagram showing a transportation procedure by the component transportation device, and is an explanatory view showing a state where the components are accommodated in the notches of the transportation plate.

【図4】この部品搬送装置による搬送手順を示す図面で
あって、搬送板が部品を搬送する状態を示す説明図であ
る。
FIG. 4 is a diagram showing a transportation procedure by the component transportation device, and is an explanatory view showing a state in which a transportation plate transports a component.

【図5】この部品搬送装置による搬送手順を示す図面で
あって、部品の搬送が完了した状態を示す説明図であ
る。
FIG. 5 is a drawing showing a carrying procedure by the parts carrying device and is an explanatory view showing a state where the carrying of the parts is completed.

【図6】従来の部品搬送装置の一例を示す概略的斜視図
である。
FIG. 6 is a schematic perspective view showing an example of a conventional component transfer device.

【図7】従来の部品搬送装置の他の例を示す概略的斜視
図である。
FIG. 7 is a schematic perspective view showing another example of a conventional component transfer device.

【図8】図7に示す部品搬送装置の問題点を示す説明図
である。
8 is an explanatory diagram showing a problem of the component carrying device shown in FIG. 7. FIG.

【図9】図8に示す問題点を解消した状態を示す説明図
である。
9 is an explanatory diagram showing a state in which the problem shown in FIG. 8 has been solved.

【符号の説明】[Explanation of symbols]

110 前搬送板 111 (前搬送板の) 切欠 120 後搬送板 121 (後搬送板の) 切欠 200 搬送レール 300 部品 c 部品の長さ寸法 110 Front carrier plate 111 (For front carrier plate) Notch 120 Rear carrier plate 121 (For rear carrier plate) Notch 200 Carrier rail 300 Parts c Parts length dimension

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 一定のピッチで部品を搬送する部品搬送
装置において、搬送される部品の長さより十分に大きな
切欠が一定のピッチで形成されている前搬送板と、この
前搬送板と同形で、かつ対向して設けられる後搬送板
と、これらの両搬送板を部品が載置された搬送レールに
沿って移動させる駆動部とを具備しており、一定のピッ
チの移動が完了した時点で、部品が前搬送板の切欠の前
縁部と、後搬送板の切欠の後縁部との間に僅かの隙間を
有して挟まれるべく、前搬送板の移動距離が後搬送板の
移動距離より短く設定されていることを特徴とする部品
搬送装置。
1. A parts conveying device for conveying parts at a constant pitch, a front conveyor plate having notches sufficiently larger than the length of the conveyed parts at a constant pitch, and the same shape as the front conveyor plate. , And a rear transport plate provided opposite to each other, and a drive unit for moving both of these transport plates along the transport rail on which the parts are placed. , The moving distance of the front carrier plate is such that the parts are sandwiched with a slight gap between the front edge of the notch of the front carrier plate and the rear edge of the notch of the rear carrier plate. A parts conveying device characterized by being set shorter than the distance.
JP29088191A 1991-10-08 1991-10-08 Parts carrier Pending JPH0597223A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29088191A JPH0597223A (en) 1991-10-08 1991-10-08 Parts carrier

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29088191A JPH0597223A (en) 1991-10-08 1991-10-08 Parts carrier

Publications (1)

Publication Number Publication Date
JPH0597223A true JPH0597223A (en) 1993-04-20

Family

ID=17761720

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29088191A Pending JPH0597223A (en) 1991-10-08 1991-10-08 Parts carrier

Country Status (1)

Country Link
JP (1) JPH0597223A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008153316A (en) * 2006-12-15 2008-07-03 Hitachi High-Tech Instruments Co Ltd Individual piece conveyor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008153316A (en) * 2006-12-15 2008-07-03 Hitachi High-Tech Instruments Co Ltd Individual piece conveyor

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