JPH059773U - Laser light shaping mechanism - Google Patents

Abstract

(57) [Abstract] [Purpose] The present invention relates to a laser beam shaping means in a micro-drilling device using a laser beam, and when a destabilized state occurs in the laser beam transmitted from an oscillator, which adversely affects the drilling process, The purpose is to remove surplus light of the transmitted laser light and send the laser light to a condenser lens in a state close to a perfect circle to enable highly accurate processing. [Structure] A plurality of aperture plates (apertures) 5 are arranged in front of a laser beam 1 oscillated from an oscillator and transmitted through an optical path having a bend mirror 3 to reach a condenser lens 2. When the thermal equilibrium state of the oscillator collapses, the beam mode changes over time as a characteristic of the laser itself such as the set output condition, and the deformed transmission laser light generated at the time of instability occurs during processing, the surplus light 4 is removed. It is removed by the aperture plate 5 arranged in front of the condenser lens 2. Considering the case where the projected light 6 is generated by the aperture plate 5, the aperture plate 5 having the same size and shape is arranged in the next stage,
Escape light 6 is excluded. By disposing a plurality of aperture plates and transmitting high-quality laser light in a state close to a perfect circle to the condenser lens 2, highly precise and stable fine hole machining is performed.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a laser beam shaping means in a fine hole drilling apparatus using a laser beam.

[0002]

[Prior Art]

 As shown in FIG. 3 (a), the conventional micro-drilling process transmits the laser beam 1 which is oscillated and is in the process of being transmitted, by collimating and transmitting the laser beam 1 through the optical path having the bend mirror 3 and the like. A method is generally used in which the condenser lens 2 is guided to reach the condenser lens 2, and the condenser lens 2 having a long focal point or the like is used to condense it to perform the drilling process. Note that FIG. 3B is a cross-sectional view taken along the line AA ′ of FIG.

[0003]

[Problems to be solved by the device]

 By the way, when processing is performed with the conventional fine hole drilling device using the laser light 1 as described above, even though the beam spot with high circularity is set and the processing is performed, a hole having the same diameter as the beam spot diameter is used. Deformation such as elliptical shape may occur during light processing or hole diameter processing close to the beam spot diameter.

It is considered that this is due to the deterioration of the thermal equilibrium state of the oscillator and the change over time of the beam mode due to the influence of the pulse width etc. when using a pulsed laser with a high peak output. There are difficulties in laser drilling.

An object of the present invention is to solve the above-mentioned problems of the prior art and to provide a new laser light shaping mechanism that enables highly accurate processing.

[0006]

[Means for Solving the Problems]

 In order to achieve the above-mentioned object, the laser beam shaping mechanism of the present invention is provided in a laser beam micro-drilling device, in front of a condenser lens for collecting the laser beam oscillated from an oscillator and transmitted through an optical path. It is characterized by arranging a plurality of aperture plates (apertures) that shape the beam in the process so that machining dimensional error can be reduced.

[0007]

[Action]

 According to the laser beam shaping mechanism of the present invention, the laser beam including the unstable mode accompanied by the temporal change that is oscillated from the oscillator and transmitted through the optical path provided by the bend mirror or the like is provided in front of the condenser lens. The extra light of the transmitted laser light that has an ellipse or a deformed portion that adversely affects hole processing is provided by the aperture plate (aperture) that has the same size as the diameter of the laser light of the transmission distance set in advance in a sound state. By removing the light and bringing it to a condenser lens in a state close to a perfect circle, it contributes to fine drilling processing after light collection to achieve high-precision processing and stabilization of processing.

[0008]

【Example】

 An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 (a) is a schematic explanatory view of the present invention, (b) is a view taken along the line AA 'of (a), and (c) is of (a). 2B is a front view and a side view showing the configuration of a specific example of the aperture plate.

In FIG. 1, in the transmitted laser light 1 obtained by collimating and collimating the laser light 1 oscillated from an oscillator (not shown) in the process of transmission, the thermal equilibrium state of the oscillator is disturbed, set output conditions, etc. When the deformed transmission laser light 1 generated during the time change and instability of the beam mode as a characteristic of the laser itself is generated during processing, the surplus light 4 as shown in FIG. It is removed by the aperture plate (aperture) 5 arranged in the front. In consideration of the case where the projected light 6 shown in FIG. 1A is generated by this aperture plate (aperture) 5, an aperture plate (aperture) 5 of the same size and shape is arranged in the next stage. Eliminate 6.

It is possible to remove most of the surplus light 4 by these two series of aperture plates (apertures) 5. However, in consideration of the case where the parallelization of the laser light 1 occurs during the transmission process, it is possible to avoid By disposing a single aperture plate (aperture) 5, high-quality laser light in a state close to a perfect circle is transmitted to the condenser lens 2. By converging the transmitted laser light and processing it, it is possible to perform highly accurate and stable fine hole processing.

Further, the aperture plate (aperture) 5 used for this, as shown in FIGS. 2 (a), (b), (c), and (d), depends on the output conditions to be used, the required processing accuracy, and the like. The size and shape can be selected.

As described above, in the laser beam shaping mechanism of the present invention, in the state of the beam spot condensed by the condenser lens 2, the destabilization due to the temporal change of the beam mode which adversely affects the drilling process is caused. If it occurs, place an aperture plate (aperture) 5 with an opening of the same size as the diameter of the laser beam 1 in the transmission process, which was set in advance in a sound state, before the focusing process, that is, in front of the focusing lens 2. The excess portion 4 of the transmitted laser light 1 having a size and shape larger than the setting caused by the destabilization of the mode is thereby removed. When the transmitted laser beam 1 is collimated, the aperture plate 5 may be eclipsed at the time of passing through the opening and lose its parallelism due to the edge shape of the opening. By combining a plurality of sheets and sequentially eliminating the excess light 4 and collimating and rounding it to reach the light condensing process, it is possible to contribute to the improvement and stabilization of the precision of the fine hole drilling process.

[0013]

[Effect of the device]

 As described above, according to the laser beam shaping mechanism of the present invention, the excess portion of the transmitted laser beam that has abnormally changed in the transmission process from the oscillator is removed by the aperture plate (aperture) arranged in front of the condenser lens. By doing so, it is possible to shape and perform stable and fine drilling with less dimensional error.

[Brief description of drawings]

FIG. 1 shows an apparatus according to one embodiment of the present invention, in which (a) is a schematic configuration diagram, (b) is a sectional view taken along the line AA ′ of (a), and (c) is the sectional view taken along the line BB ′. It is a perspective view.

2 (a) to 2 (d) are a front view and a side view showing a specific example of an aperture plate in the present invention.

FIG. 3 shows a conventional device, (a) is a schematic configuration diagram, (b).
FIG. 7A is a sectional view taken along the line AA ′ in FIG.

[Explanation of symbols]

 1 Laser Light 2 Condensing Lens 3 Bend Mirror 4 Excessive Light 5 Aperture Plate 6 Aperture Light

Claims (1)

[Claims for utility model registration] 1. In a micro-drilling apparatus using a laser beam, the laser beam is being transmitted before a condenser lens for condensing the laser beam oscillated from the oscillator and transmitted through the optical path. A laser beam shaping mechanism comprising a plurality of aperture plates (apertures) for shaping a beam.