JPH06103162B2 - Fluid pressure cylinder piston rod position detector - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piston rod position detecting device for a fluid pressure cylinder, and more particularly to changing the induction coefficient according to the relative displacement of the piston rod with respect to the winding fixed to the cylinder body side, and in accordance therewith. The present invention relates to an inductive type piston rod position detecting device for obtaining an output signal. More specifically, a relatively good conductor such as copper is provided around the piston rod, and at least the eddy current loss is caused by the action of the conductor. The present invention relates to a piston rod position detecting device capable of obtaining a change in the induction coefficient with the parameter as a parameter.

[0002]

2. Description of the Prior Art U.S. Pat. No. 3,956,973
A ring or spiral groove is provided on the iron or magnetic metal around the piston rod, and a transducer that generates an electrical pulse signal in response to the passage of the piston rod along with the movement of the piston rod is fixed to the cylinder body side. Disclosed is a piston rod position detecting device. 59-
In No. 23609, a plurality of magnetic rings are provided around the piston rod at a predetermined interval, and a plurality of magnetic rings are provided on the cylinder body side.
A secondary winding and a secondary winding are provided, and the primary winding of each phase is individually excited by a plurality of AC signals with a phase shift, and the AC signal phase-shifted according to the position of the piston rod is secondary. Disclosed is a piston rod position detecting device which is provided on the winding side and is capable of absolutely detecting the position of the piston rod by digitally counting the phase shift amount.

In Japanese Utility Model Application Laid-Open No. 59-23610, a stator formed by winding a primary winding and a secondary winding around a plurality of magnetic poles is fixed to the cylinder body side, and a plurality of magnetic bodies are provided around a piston rod. Is provided, and the primary winding of each phase is individually excited by a plurality of AC signals having a phase shift, and the AC signal phase-shifted according to the position of the piston rod is 2
Disclosed is a piston rod position detecting device which is provided on the side of the next winding and in which the position of the piston rod can be detected by absolute counting by digitally counting the amount of phase shift.

[0004]

Since the detection device shown in the above-mentioned U.S. Pat. The configuration must count the pulse signals, which results in a practical incremental pulse generation and counting method. Therefore, there is a problem that the position of the piston rod cannot be detected absolutely. Further, in order to form the groove in the piston rod, a cutting process or the like must be performed, which is a problem that the process is troublesome.

The above two utility model registration applications are of the absolute type, so they do not have the above-mentioned drawbacks.
There is also the problem that it takes time to assemble or process the magnetic ring or projection around the piston rod.

Further, in any of the above-mentioned prior arts, the change in the induction coefficient of the winding is caused only by the presence or absence of the groove or the protrusion of iron or magnetic metal, so that the depth of the groove or the height of the protrusion is increased. There is also a problem in that the detection accuracy cannot be improved unless it is taken sufficiently.

An object of the present invention is to provide a piston rod position detecting device which can solve the above-mentioned various problems.

[0008]

A piston rod position detection device for a fluid pressure cylinder according to the present invention is provided on the opening end side of a cylinder body, and is excited by a primary AC signal and outputs a secondary output. The magnetic resistance of the magnetic circuit passing through the coil portion is provided in a periodic pattern along the linear movement direction of the rod within a predetermined range along the movement direction of the rod on the circumferential surface of the piston rod. And a magnetic body portion that is periodically changed at a predetermined distance according to the linear displacement of the piston rod, and is provided on the circumferential surface of the piston rod and is relatively weaker magnetic or non-magnetic than the magnetic body portion and relatively Made of good conductor,
An eddy current path corresponding to the magnetic flux generated by the coil portion is formed in the good conductor, and the pattern of the magnetic body portion corresponds to a portion where the magnetic resistance of the magnetic circuit passing through the coil portion is relatively increased. And a conductor portion provided in a periodic pattern so that the eddy current loss due to the eddy current path is relatively increased, and the magnetic body portion and the conductor portion The amount of eddy current flowing through the conductor portion changes according to the relative displacement with respect to the coil portion, and the magnetic resistance of the magnetic circuit of the coil portion changes, and a secondary output signal corresponding to the change is obtained in the coil portion. It is characterized by having been made to be.

[0009]

With the periodic pattern of the magnetic material portion on the circumferential surface of the piston rod, the magnetic resistance of the magnetic circuit passing through the coil portion decreases according to the relative linear position of the piston rod with respect to the coil portion (in other words, the magnetic permeability). That is, a part where the permeance increases) and a part where the magnetic resistance increases (the permeance decreases) appear on the contrary. The conductor portions are provided in exactly opposite patterns so that the eddy current loss relatively increases corresponding to the location where the magnetic resistance increases in the pattern of the magnetic material portion.
Therefore, when the conductor part of the piston rod (in other words, the part where the magnetic resistance increases in the pattern of the magnetic part) intrudes into the magnetic field generated by the coil part, eddy current loss occurs at that part, which causes a substantial magnetic resistance. Is further increased.

Thus, not only the magnetic resistance change (permeability change) due to the displacement of the magnetic body portion but also the induction coefficient change using the eddy current loss due to the displacement of the conductor portion as a parameter (the number of coil windings and other conditions are fixed). Therefore, it is substantially equivalent to the change in magnetic resistance). That is, in the range in which the magnetic resistance is relatively reduced by the infiltration of the magnetic body portion of the piston rod into the coil magnetic circuit (the range in which the permeance is relatively increased), the effect of the eddy current loss due to the conductor portion is Therefore, a relatively sufficiently high voltage level can be induced on the secondary side. On the other hand, in the range where the magnetic resistance is relatively increased by the detachment of the magnetic body portion of the piston rod from the coil magnetic circuit, the conductor portion of the rod penetrates into the coil magnetic circuit, causing eddy current loss. Therefore, the relative magnetic resistance increase due to the eddy current loss of the conductor portion is added to the relative magnetic resistance increase due to the detachment of the magnetic body portion, so that the voltage level induced on the secondary side can be further reduced. . In this way, the difference between the high level and the low level of the secondary side induced voltage, that is, the width of change in the secondary output with respect to the displacement can be made sufficiently large, which enables accurate linear displacement detection of the piston rod. You will be able to do it.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described in detail below with reference to the accompanying drawings. In FIG. 1, 11 is a cylinder body, 12 is a piston, and 6 is a piston rod. As is well known, an opening is provided at one end of the cylinder body, and the piston rod 6 passes through this opening. The coil portion 10 is provided on the open end side of the cylinder body 11. The coil portion 10 includes primary coils 1A to 1D and secondary coils 2A to 2D, and the rod 6 is slidably penetrated into the coil space so that the cylindrical space of these coils is concentric with the rod 6. In this state, the cylinder body 11 is fixed to the open end side. The piston rod 6 includes a base material, that is, a center rod 6a, and a conductor portion 6b provided around the center rod 6a in a ring shape.
And a coating 6c covering the entire outer periphery. The width of the conductor portion 6b is P / 2 (where P is an arbitrary number), and the relative linear displacement direction of the rod 6 (direction of arrows L and / L in the figure; "/ L" means "bar L"). A plurality of conductor portions 6b are repeatedly provided at a predetermined interval P / 2. The conductor portion 6b is made of a weakly magnetic or non-magnetic material and is made of a good conductor relatively to the material of the center rod 6a. For example, copper or aluminum or brass or a good conductive material such as brass is used. A mixture or mixture of other substances can be used. The center rod 6a may use either a magnetic substance or a non-magnetic substance, and is made of metal or non-metal (synthetic resin, glass,
Ceramic etc.) In short, a material having a larger electrical specific resistance than that of the conductor portion 6b (having poor conductivity) is used as the center rod 6a. This is to allow more eddy current to flow only in the portion of the conductor portion 6b that is intermittently provided, and to obtain a periodic magnetoresistance change with respect to displacement.

In this embodiment, the coils are arranged to operate in four phases. For the sake of convenience, these phases are distinguished by using the symbols A, B, C, and D. According to the relative position of the ring-shaped conductor portion 6b with respect to the coil, the magnetic resistance generated in each of the phases A to D is shifted by 90 degrees. For example, when the A phase is the cosine phase, the B phase is the sine phase, Arrangement of the coils and the conductor portion 6b so that the C phase is the minus cosine phase and the D phase is the minus sine phase.
Has been determined.

In the example of FIG. 1, the primary coils 1A to 1D and the secondary coils 2A to 2D for the respective phases A to D are wound at the same position, and the coil lengths of the individual coils are the same. It is almost “P / 2”. And the A-phase coils 1A and 2
A and C phase coils 1C and 2C are provided adjacent to each other, and B phase coils 1B and 2B and D phase coils 1D and 2D are provided.
Are also adjacent to each other. The distance between the A and C phase coil groups and the B and D phase coil groups is "P {n ±
(1/4)} ”(n is an arbitrary natural number). Accordingly, the phase of the reluctance change of the magnetic circuit in the B and D phases can be shifted by 90 degrees (1/4 of one pitch P) with respect to the reluctance change of the magnetic circuit in the A and C phases.

A-phase and C-phase coils 1A, 2A, 1C,
2C is housed in a cylindrical case 4 made of a magnetic material such as iron, and has B-phase and D-phase coils 1B, 2B, 1D, 2
D is also stored in the same cylindrical case. These iron cases 4 and 5 are for preventing crosstalk between the coils and for concentrating the magnetic force lines of the coils to enhance the coupling of the magnetic circuit. In the above configuration, the magnetic fluxes from the primary coils 1A to 1D of the respective phases pass through the magnetic body cases 4 and 5 and the piston rod 6, and when the conductor portion 6b enters the magnetic field, it depends on the amount of penetration. Eddy currents flow along the ring of the conductor portion 6b. The more the conductor portion 6b penetrates into the coil (for example, the state corresponding to the phase A in FIG. 1 at maximum), the more eddy current flows. On the contrary, almost no eddy current flows in the state where the conductor portion 6b has not entered the coil at all (for example, the state of phase C in FIG. 1). In this way, an eddy current flows through the conductor portion 6b according to the degree of penetration of the conductor portion 6b into the coil of each phase, and a magnetic resistance change due to this eddy current loss is generated in the magnetic circuit of each phase. An AC signal of a level corresponding to the magnetic resistance is induced in the secondary coils 2A to 2D of each phase.

The coating 6c provided on the outer periphery of the piston rod 6 has a lower conductivity or non-conductivity than the conductor portion 6b, and uses a non-magnetic or weak magnetic substance. For example, chrome plating may be used. In the embodiment of FIG. 1, the coils of each phase are housed in the cylindrical magnetic body cases 4 and 5, and these cases 4 and 5 can form a magnetic path. You may implement without providing a case. In the above embodiment, the piston rod has a structure to be inserted into the space inside the coil, but the structure is not limited to this.
It may be changed appropriately.

FIG. 3 shows a modification of the coil portion 10, and FIG. 4 is a sectional view taken along the line IV-IV. U-shaped magnetic cores 7A to 7D in which primary and secondary coils 1A to 1D and 2A to 2D corresponding to the respective phases A to D are provided for the respective phases, respectively.
It is wound on both legs. Core 7A for each phase A-D
7D has a cycle of magnetoresistance change of 1/4 between adjacent phases.
They are fixed to each other in a predetermined arrangement so as to be offset by cycles (90 degrees). For example, the core 7A between adjacent phases
7D spacing is 3P / 4 (P {1 ± (1/4)} in a broad sense)
It is good). The piston rod 6 is shown in FIG.
The structure is similar to that shown in. Each U-shaped core 7A
The distance between both ends in 7D is the width P / of the conductor portion 6b.
Corresponds to 2 in general, and U-shaped cores 7A to 7 for each phase
A magnetic circuit is formed from one end of D through the rod 6 to the other end. In FIG. 3, the cores 7A to 7D of each phase are aligned in a straight line in the linear displacement direction. Good. In that case, the interval in the linear displacement direction between adjacent phases is not limited to 3P / 4, but is shorter (for example, P
/ 4) can be done. In the example of FIG. 3, the conductor portion 6
The eddy current path generated in b is formed around the magnetic flux path perpendicular to the end of each core 7A to 7D, rather than being formed along the ring shape. Therefore, in this case, the rod 6
The conductor portion 6b does not have to have a ring shape, and has a certain area (to the extent that an eddy current path can be formed) at a portion facing the ends of the cores 7A to 7D, or It only has to form a ring-shaped pattern.

In the embodiment of FIG. 5, the piston rod portion 6
Is formed by providing a conductor portion 14 in a spiral shape around the center rod 6a. The spiral conductor portion 14 is
They are arranged in a pattern of single thread having a pitch width of P. In FIG. 5, the piston rod 6 is shown in a side view. FIG. 6 is a sectional view taken along the line VI-VI of FIG. 5, and as shown in the figure, each phase A is provided around the piston rod 6 at intervals of 90 degrees.
~ D-shaped U-shaped cores 8A to 8D are provided, and each of the cores 8A to 8D has a primary coil 1A to 1D and a secondary coil 2.
A to 2D are wound.

In the embodiment of FIG. 7, the piston rod 6 is
A spiral conductive pair portion 15 is provided around the center rod 6a in a double thread pattern having a pitch of 2P. FIG. 8 is a sectional view taken along the line VIII-VIII of FIG. 7, showing eight cores 8A to 8D at intervals of 45 degrees around the rod 6.
8A'-8D 'are provided. Two cores facing each other at an interval of 180 degrees are in phase with each other, and there are four pairs of cores composed of two cores, and each pair corresponds to phase A to phase D, respectively. The primary coils 1A to 1D and the secondary coils 2A to 2D are wound around the cores 8A to 8D 'of the phases A to D, respectively, as described above. In-phase secondary coil outputs are added together.

5 to 8, the coating 6c is provided on the outer circumference of the rod 6 as in the embodiment of FIG. In the embodiment shown in FIGS. 5 to 8, the eddy current paths in the conductor portions 14 and 15 are formed around the magnetic flux path perpendicular to the ends of the cores 8A to 8D ', as in the embodiment shown in FIG. To be done. Therefore, in this case as well, the conductor portions 14 and 15 of the piston rod 6 do not necessarily have to have a continuous spiral shape, and there is a certain degree at a portion facing the ends of the cores 8A to 8D '. It may have an area or form a ring-shaped pattern.

Conductor portion 6 of piston rod 6
The formation of b, 14, and 15 can be performed by the following procedure as an example. (1) A resin coating having resistance to an etching agent is applied to the entire circumference of the center rod 6a. (2) A predetermined conductive material is attached to the entire circumference of the resin-coated center rod 6a by a predetermined surface processing technique (for example, plating, thermal spraying, baking, painting, etc.). (3) Next, a conductive material in unnecessary portions is removed from the surface of the center rod 6a by a removal technique such as etching,
A pattern of predetermined conductor portions 6a, 14 and 15 is formed. (4) Next, the coating 6c is applied to the entire circumference of the piston rod 6 to protect and smooth the surface thereof.

The step (1) is useful for preventing the removing agent from invading not only the conductive substance but also the material of the center rod 6a in the step (3). If such preventive measures are unnecessary, the step (1) can be omitted. In addition,
When a surface processing technique capable of depositing a conductive substance in a desired pattern is adopted from the beginning, of course, etching or the like is unnecessary.

FIG. 9 shows another embodiment of the piston rod 9, and the coil portion 10 has the same structure as that shown in FIG.

A central portion 9a of the piston rod 9 is made of a magnetic material, and a magnetic material portion 9d protruding in a ring shape around the central portion 9a is linearly displaced (arrows L and / L directions).
Is provided with a predetermined width P / 2 in the magnetic material portion 9
A plurality of d are provided at predetermined intervals P / 2 in the linear displacement direction. The ring-shaped recesses between the magnetic body portions 9d are filled with a plurality of conductor portions 9b in a ring shape. The width of each ring-shaped conductor portion 9b is also P / 2. The central portion 9a and the magnetic material portion 9d are made of a ferromagnetic material such as iron, and the conductive material portion 9b is weaker magnetic or non-magnetic than the magnetic material portion 9d and has a relatively good conductive material (for example, Copper, aluminum, brass, etc., or a mixture of a good conductor material such as these and other materials). The entire outer circumference of the piston rod 9 is provided with a coating 9c by chrome plating or the like as described above. The coating 9c may be a synthetic resin sleeve.

In the above structure, the primary coil 1 of each phase
The magnetic fluxes A to 1D pass through the magnetic material cases 4 and 5 and the central portion 9a of the piston rod 9. Case 4,
The gap between the inner peripheral end of the rod 5 and the protruding magnetic body portion 9d of the rod 9 is equal to the gap between the inner peripheral end and the conductor portion 9 of the rod 9.
It is narrower than the cap between the surface of the central portion 9a of the lower layer of b. In addition, the width P of the magnetic body portion 9d and the conductor portion 9b
/ 2 substantially corresponds to the length of each coil. Therefore, when the rod 9 is linearly displaced relative to the coil portion 10, the magnetic resistance of the magnetic circuit of each phase changes in accordance with the relative position of the magnetic material portion 9d with respect to each phase coil. As is well known, the more the magnetic material portion 9d penetrates into the coil (for example, the state of phase C in FIG. 9 at the maximum), the smaller the magnetic resistance, and therefore the larger the permeance.
As is clear from this, the conductor portion 9b provided between the magnetic body portions 9d is located at a location where the magnetic resistance of the rod 9 is relatively increased (a location where the permeance is relatively reduced). It will be provided correspondingly. Further, the conductor portion 9b has a ring shape with respect to the central portion 9a forming the magnetic path, functions as a so-called short ring, and can form an eddy current path for the magnetic flux. Therefore, the more the conductor portion 9b penetrates into the coil (for example, the maximum state of the phase A in FIG. 9), the more eddy current flows, and the substantial magnetic resistance is increased by the eddy current loss. . on the other hand,
As described above, the magnetic resistance of the conductor portion 9b is relatively increased due to the lack of the magnetic portion 9d. Therefore, the magnetic resistance is synergistically increased and the level of the secondary side induced voltage is synergistically attenuated.

Although the central portion 9a of the rod 9 is made of the same magnetic material as the magnetic portion 9d in the above embodiment, the present invention is not limited to this and may be an appropriate non-magnetic material or the like. An example thereof is shown in FIG. 11, and this piston rod 9 has a mandrel 9a ′ made of a non-conductive and non-magnetic material.
A ring-shaped magnetic material portion 9d and a conductor portion 9b having a width P / 2 are alternately formed around the circumference of the. The mandrel 9a 'may be made of the same magnetic material as the magnetic material portion 9d, in which case it is substantially the same as in FIG. Further, the mandrel 9a 'may be made of a weakly magnetic or non-magnetic material having good conductivity, like the conductor portion 9b.

A coil portion similar to that shown in FIG. 3 can be used for the piston rod 9 shown in FIG. Further, similarly to FIGS. 5 to 8, as shown in FIGS. 12 to 15, the conductor portion 9b and the magnetic portion 9d on the peripheral surface of the piston rod 9 may be provided in a spiral shape.

In the embodiment shown in FIG. 12, the rod portion 9 has an arrangement of single-threaded screws each having a pitch width of P.
d and the conductor portions 9b are alternately provided in a spiral shape.
The thread portion of the screw corresponds to the magnetic material portion 9d, and the conductor portion 9b is provided at the root portion of the screw. In FIG. 12, for convenience of illustration, the thread crests (magnetic material portions 9d) and troughs are shown in a side view, and the conductor portions 9 filled in these troughs are shown in cross section. 13 is a sectional view taken along line III-III in FIG. 12, and the arrangement of the cores 8A to 8D is the same as that in FIG.

In the embodiment shown in FIG. 14, the rod 9 has 1
The magnetic body part 9 is formed by the arrangement of the two-thread screw having the pitch width of 2P.
d and the conductor portions 9b are alternately provided in a spiral shape.
Similar to the above, the thread portion of the screw is the magnetic material portion 9d, and the conductor portion 9b is provided in the valley portion. Similar to FIG. 12, the crests (magnetic material portions 9d) and the valleys are shown in a side view, and the conductor portions 9b are shown in a sectional view. 15 is a sectional view taken along line VV of FIG. 14, and the cores 8A to 8D ′ have the same arrangement as that of FIG. Further, the magnetic material portion 9d and the conductor portion 9b may be provided only at the positions corresponding to the cores 8A to 8D 'of each phase.

An example of the method of forming the conductor portion 9b and the magnetic portion 9d around the piston rod 9 will be described. A ring-shaped member corresponding to the position of the conductor portion 9b is formed on the mandrel of the rod made of a magnetic material. Machine groove or thread groove,
After that, a predetermined conductive material may be attached to the surface of the round bar by plating, thermal spraying, pattern baking, or other suitable surface treatment, and then the surface of the round bar may be polished so that the conductor portion 9b remains only in the groove. Of course, a predetermined conductive material may be attached by a surface processing treatment (for example, thermal spraying or pattern baking) only along a predetermined pattern for forming a conductor portion, in which case the last surface polishing is not necessary. Become.

In each of the above-mentioned embodiments, an output signal corresponding to the linear position of the piston rod can be obtained by the phase shift method. That is, in each of the phases A to D, a periodical magnetic resistance change occurs with the linear displacement amount P of the piston rod as one cycle, and the phase of this magnetic resistance change is deviated by 90 degrees (P / 4) between adjacent phases. . Therefore,
Assuming that the phase angle corresponding to the linear displacement is represented by ψ, the level of the voltage induced in the secondary coils 2A to 2D of the respective phases A to D is approximately A phase according to the linear position of the piston rod (ie, ψ). cos ψ, sin ψ in B phase, − in C phase
The cos φ and the D phase can be represented by an abbreviated formula of −sin φ (where 2π corresponds to P). The A and C phase primary coils 1A and 1C are excited by the sine wave signal sinωt, and the B and D phase primary coils 1B and 1D are excited by the cosine wave signal co.
Excitation is performed by sωt. Then, for A and C relative, the output signals of the secondary coils 2A and 2C are differentially added,
Even in the B and D relative, the outputs of the secondary coils 2B and 2D are differentially added, and the differential output signals of each pair are added and combined to obtain a final output signal Y. Then, the output signal Y can be substantially expressed by the following simplified formula.

Y = sin ωt cos ψ-(-sin ωt
cos ψ) + cos ωt sin ψ- (cos ωt sin
ψ) = 2sin ωtcos ψ + 2cos ωtsin ψ = 2sin (ωt + ψ)

If the coefficient indicated as "2" for convenience in the above equation is replaced with a constant K determined according to various conditions,

It can be expressed as Y = Ksin (ωt + ψ). Since ψ corresponds to the linear position of the piston rod, the piston rod position can be detected by measuring the phase shift ψ of the output signal Y corresponding to the primary AC signal sinωt (or cosωt). .

The means for obtaining the phase shift ψ between the output combined signal Y of the secondary coil and the reference AC signal sinωt (or cosωt) can be appropriately configured. FIG. 16 shows the phase shift ψ
FIG. 7 shows an example of a circuit for obtaining a digital value. Although not shown in the drawing, a reference AC signal sinωt and an output signal Y = Ksin (ωt + ψ) are used by using an integrating circuit.
It is also possible to obtain the phase shift ψ with an analog amount by obtaining the time difference of 0 ° and the phase angle of 0 °.

In FIG. 16, an oscillator 32 is a circuit for generating a reference sine signal sinωt and a cosine signal cosωt,
The phase difference detection circuit 37 is a circuit for measuring the phase shift ψ. The clock pulse CP oscillated from the clock oscillator 33 is counted by the counter 30. The counter 30 is, for example, a modulo M (M is an arbitrary integer),
The count value is given to the register 31. From the 4 / M frequency division output of the counter 30, the clock pulse CP is set to 4
The pulse Pc divided by / M is taken out and applied to the C input of the flip-flop 34 for dividing by 1/2. The pulse Pb output from the Q output of the flip-flop 34 is added to the flip-flop 35, and the pulse Pa output from the / Q output.
Joins the flip-flop 36, and these 35 and 36
Output is low-pass filter 38, 39 and amplifier 40,
41 via cosine signal cos ωt and sine signal sin
ωt is obtained and applied to the primary coils 1A to 1D of the phases A to D. The M count in the counter 30 corresponds to the phase angle of 2π radians of these reference signals cos ωt and sin ωt. That is, one count value of the counter 30 indicates a phase angle of 2π / M radian.

The combined output signal Y of the secondary coils 2A to 2D is applied to a comparator 43 via an amplifier 42, and a square wave signal according to the positive / negative polarity of the signal Y is added to the comparator 4.
It is output from 3. In response to the rise of the output signal of the comparator 43, the rise detection circuit 44 outputs a pulse Ts, and the count value of the counter 30 is loaded into the register 31 according to the pulse Ts. As a result, the digital value Dψ corresponding to the phase shift ψ is loaded into the register 31. In this way, it is possible to obtain the data Dψ that indicates the piston rod position within the predetermined range P as an absolute value.

The signal processing system is not limited to the phase shift system as described above, but like a normal differential transformer, the differential output of the secondary coil is rectified to obtain an analog voltage of a level corresponding to the linear position. You may In that case, the coil portion may have only one of the A and C phases or the B and D phases.

The primary coil and the secondary coil do not necessarily have to be provided separately, and they are common as those shown in Japanese Utility Model Publication No. 58-2621 or Japanese Utility Model Publication No. 58-39507. May be. Further, the patterns of the conductor portions 6b and 9b are not limited to those shown in the figure, and may have any shape as long as they can form an eddy current path.

[0039]

As described above, according to the present invention, since the conductive material may be attached to the peripheral surface of the piston rod in a predetermined pattern, the processing and the formation are easy. Also, even if the conductor part is thin, its function can be sufficiently exhibited, so the structure is simpler than when only the groove is formed in the magnetic body (in this case, the groove needs to be deep enough). Be converted. Further, by combining the protrusion of the magnetic body portion and the conductor portion, it is possible to increase the change width of the secondary output voltage level with respect to the displacement, and it is possible to improve the detection accuracy.

[Brief description of drawings]

FIG. 1 is a vertical sectional view showing an embodiment of a piston rod position detecting device according to the present invention.

FIG. 2 is a sectional view taken along line II-II of FIG.

FIG. 3 is a cross-sectional view showing a modified example of the coil portion in FIG.

4 is a sectional view taken along line IV-IV of FIG.

5 is a partial cross-sectional side view showing a modified example of the coil portion and the piston rod in FIG.

6 is a sectional view taken along line VI-VI of FIG.

7 is a partial cross-sectional side view showing another modification of the coil portion and the piston rod in FIG.

8 is a sectional view taken along line VIII-VIII of FIG.

FIG. 9 is a vertical cross-sectional view showing another embodiment of the piston rod position detecting device according to the present invention.

10 is a sectional view taken along line XX of FIG.

FIG. 11 is a partial cross-sectional side view showing a modified example of the piston rod in FIG.

FIG. 12 is a partial cross-sectional side view showing a modified example of the coil portion and the piston rod in FIG.

13 is a sectional view taken along line III-III of FIG.

14 is a partial cross-sectional side view showing another modified example of the coil portion and the piston rod in FIG.

FIG. 15 is a sectional view taken along line VV of FIG.

FIG. 16 is an electrical block diagram showing an example of a circuit for operating the detection device of the present invention by a phase shift method and measuring an electrical phase shift amount according to a piston rod position.

[Explanation of symbols]

11 ... Cylinder body, 12 ... Piston, 6, 9 ... Piston rod, 6a ... Center rod, 6b, 9b, 14, 15
... conductor part, 6c, 9c ... coating, 9d ... magnetic part, 10 ... coil part, 1A-1D ... primary coil, 2
A to 2D ... secondary coil

Claims (10)

[Claims] 1. A cylinder body is provided on the open end side,
Provided in a periodic pattern along the linear movement direction of the rod within a predetermined range along the movement direction of the rod on the circumferential surface of the piston rod, which is excited by the next AC signal and for extracting the secondary output. A magnetic body portion for periodically changing the magnetic resistance of the magnetic circuit passing through the coil portion at predetermined distances according to the linear displacement of the rod;
It is provided on the peripheral surface of the piston rod, is relatively weakly magnetic or non-magnetic than the magnetic body portion, and is made of a relatively good conductor, and has an eddy current path corresponding to the magnetic flux generated by the coil portion. The eddy current loss due to the eddy current path is relatively increased corresponding to the portion where the magnetic resistance of the magnetic circuit formed in the conductor and passing through the coil portion is relatively increased in the pattern of the magnetic material portion. And a conductor portion provided in a periodic pattern so that the conductor portion is responsive to the relative displacement of the magnetic portion and the conductor portion with respect to the coil portion as the piston rod moves. The amount of eddy current flowing through the coil changes and the magnetic resistance of the magnetic circuit of the coil changes.
A piston rod position detection device for a fluid pressure cylinder, wherein a next output signal is obtained at the coil portion. 2. The conductor portion and the conductor portion each include a ring that is closed around the piston rod, and a plurality of rings of the magnetic portion and the conductor portion are alternately provided. Item 1. A piston rod position detection device according to item 1. 3. The piston rod position detecting device according to claim 1, wherein the piston rod is formed by alternately arranging the magnetic body portions and the conductor portions in a spiral shape. 4. The coil portion includes a magnetic core wound with a coil, and a magnetic pole end of the magnetic core faces a peripheral surface of the piston rod with a gap interposed therebetween. The piston rod position detection device according to any one of 1. 5. The magnetic material portion is formed as a protrusion in a magnetic member that forms a base portion of the piston rod, and the conductor portion is provided in a concave portion of the magnetic material portion. 4. The piston rod position detection device according to any one of 4 above. 6. The conductor portion is surface-treated with a predetermined pattern in a concave portion of the magnetic member, the substance being relatively weakly magnetic or non-magnetic than the magnetic member and made of a relatively good conductor. 6. The adhesive is applied by treatment.
The piston rod position detector described in. 7. The piston rod position detecting device according to claim 1, wherein the entire outer circumference of the piston rod is coated with a predetermined non-magnetic and non-conductive substance. 8. The coil unit has a plurality of primary coils, and each primary coil is separately excited by a plurality of primary AC signals having a phase shift, thereby passing through each primary coil. The piston rod position detecting device according to any one of claims 1 to 7, wherein an induced output signal obtained by phase-shifting the primary AC signal is extracted according to a difference in magnetic resistance of a magnetic circuit. 9. The coil unit is composed of a four-phase coil group having a primary coil and a secondary coil, and the phase of the magnetic resistance change of each phase magnetic circuit according to the linear position of the piston rod is substantially equal. These coils are arranged so that they are displaced by 90 degrees, and the magnetic resistance change is 180
The two phases separated by a sine wave signal are excited to extract the secondary coil output differentially, and the other two phases separated by 180 degrees in the magnetic resistance change are excited by a cosine wave signal to generate the secondary The piston rod position detection according to any one of claims 1 to 7, wherein the coil outputs are taken out differentially, and the relative secondary coil differential output signals are added and combined to obtain a phase-shifted output signal. apparatus. 10. The position detection data corresponding to the relative linear position of the piston rod with respect to the coil portion is obtained by digitally measuring the phase shift amount in the output signal obtained from the coil portion. The piston rod position detecting device according to claim 8 or 9.