JPH06118429A - Liquid crystal display device and manufacturing method thereof - Google Patents
Liquid crystal display device and manufacturing method thereofInfo
- Publication number
- JPH06118429A JPH06118429A JP28663292A JP28663292A JPH06118429A JP H06118429 A JPH06118429 A JP H06118429A JP 28663292 A JP28663292 A JP 28663292A JP 28663292 A JP28663292 A JP 28663292A JP H06118429 A JPH06118429 A JP H06118429A
- Authority
- JP
- Japan
- Prior art keywords
- alignment film
- liquid crystal
- crystal display
- metal wiring
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Liquid Crystal (AREA)
Abstract
(57)【要約】
【目的】 チップオングラス方式の液晶表示装置におけ
る金属配線部の短絡を防止する。
【構成】 液晶表示部9の配向膜6よりも厚い配線保護
膜13を配向膜6と同一の材料を用いて金属配線部11
の上に形成した。
【効果】 十分な厚さの配線保護膜によって工程中にお
ける傷や異物付着、Agペーストの付着等による金属配
線部の短絡発生が防止され、製造歩留りが向上する。
(57) [Abstract] [Purpose] To prevent short-circuiting of metal wiring in a chip-on-glass liquid crystal display device. The wiring protection film 13 thicker than the alignment film 6 of the liquid crystal display unit 9 is made of the same material as the alignment film 6, and the metal wiring unit 11 is used.
Formed on. [Effect] With the wiring protection film having a sufficient thickness, the occurrence of a short circuit in the metal wiring portion due to scratches, foreign matter adhesion, Ag paste adhesion, etc. during the process is prevented, and the manufacturing yield is improved.
Description
【0001】[0001]
【産業上の利用分野】この発明は、チップオングラス
(以下、COGと記す)方式の液晶表示装置における金属
配線部の保護と、保護膜の形成方法に関する。BACKGROUND OF THE INVENTION This invention is a chip-on-glass.
The present invention relates to protection of a metal wiring portion and a method of forming a protective film in a liquid crystal display device of a (hereinafter, referred to as COG) system.
【0002】[0002]
【従来の技術】COG方式の液晶表示装置においては、
液晶表示素子の基板上に入出力信号用の金属配線部が設
けられてLSIなどの駆動用回路素子が実装される。こ
の金属配線部は、例えばITOからなる液晶表示部の電
極を駆動用回路素子が実装される部分まで所定のパター
ンで延長形成し、この上にCrやAl等を積層した多層
構造となっているが、層の厚みが薄く、また隣接する回
路パターン間が狭いために、製造工程中に生ずる傷や異
物の付着などによって短絡などを起こす可能性が高い。
また、液晶セルの製作工程中にはスクリーン印刷でトラ
ンスファ用のAgペーストを印刷する工程があるが、ス
クリーンのピンホールによってAgペーストが金属配線
部に付着し、これが短絡の原因になることもある。2. Description of the Related Art In a COG type liquid crystal display device,
A metal wiring portion for input / output signals is provided on the substrate of the liquid crystal display element to mount a driving circuit element such as an LSI. The metal wiring portion has a multi-layer structure in which electrodes of a liquid crystal display portion made of, for example, ITO are extended and formed in a predetermined pattern up to a portion where a driving circuit element is mounted, and Cr, Al or the like is laminated thereon. However, since the layers are thin and the distance between the adjacent circuit patterns is narrow, there is a high possibility that a short circuit or the like will occur due to scratches or foreign matter adhered during the manufacturing process.
Further, during the manufacturing process of the liquid crystal cell, there is a process of printing the Ag paste for transfer by screen printing, but the Ag paste adheres to the metal wiring portion due to the pinhole of the screen, which may cause a short circuit. .
【0003】基板の回路パターン上に保護被膜を設ける
こと自体は、例えば特公平2−61428号公報に開示
されているが膜厚についての言及がなく、これは酸化防
止や半田流出防止が目的で極めて薄いと考えられるため
に、上記の傷や異物、Agペースト等による短絡防止の
効果はあまり期待できない。また、特公平2−5729
2号公報には配向膜と同じ材料からなる薄膜を基板上に
形成することが開示されているが、この薄膜は基板の貼
り合わせの際に対向する基板上に導電ペーストが付着す
ることを防止するもので金属配線部に保護被膜を設けた
ものではなく、目的が異なっている。Providing a protective coating on the circuit pattern of the substrate itself is disclosed in, for example, Japanese Patent Publication No. 2-61428, but there is no mention of the film thickness for the purpose of preventing oxidation and solder outflow. Since it is considered to be extremely thin, the effect of preventing the short circuit due to the above scratches, foreign matter, Ag paste, etc. cannot be expected so much. In addition, Japanese Patent Publication No. 2-5729
No. 2 discloses forming a thin film made of the same material as the alignment film on the substrate, but this thin film prevents the conductive paste from adhering to the opposing substrates when the substrates are bonded together. However, it does not have a protective coating provided on the metal wiring portion, and has a different purpose.
【0004】[0004]
【発明が解決しようとする課題】この発明は上述の点に
着目し、配線保護膜を設けて金属配線部を確実に保護す
ることを課題としてなされたものである。SUMMARY OF THE INVENTION The present invention has been made in view of the above points, and has an object to surely protect a metal wiring portion by providing a wiring protection film.
【0005】[0005]
【課題を解決するための手段】上述の課題を解決するた
めに、この発明の液晶表示装置では、チップオングラス
方式の構造を備えた液晶表示装置において、液晶表示部
の配向膜と同一の材料からなる配線保護膜を駆動用回路
素子を接続するために基板に設けられている金属配線部
の上に形成しており、配線保護膜はその膜厚が配向膜よ
りも厚く、望ましくは2000Å乃至10000Åに選
定される。また、この発明の液晶表示装置の製造方法で
は、駆動用回路素子を接続するための金属配線部を設け
た側の基板への配向膜形成時に、配向膜が形成されるべ
き領域に対応する部分の凸部占有率が上記金属配線部に
対応する部分の凸部占有率よりも大きい単一の光感光性
樹脂版を用い、配向膜が形成されるべき領域と金属配線
部の両方に配向膜材料を同一工程で印刷することによ
り、液晶表示部の配向膜を形成すると共にこの配向膜の
膜厚よりも厚い配線保護膜を金属配線部の上に形成して
いる。In order to solve the above problems, in the liquid crystal display device of the present invention, the same material as the alignment film of the liquid crystal display portion is used in the liquid crystal display device having the structure of the chip-on-glass system. Is formed on the metal wiring portion provided on the substrate for connecting the driving circuit element, and the wiring protection film has a thickness larger than that of the alignment film, preferably 2000 Å or more. Selected as 10000Å. Further, in the method for manufacturing a liquid crystal display device of the present invention, when the alignment film is formed on the substrate on the side where the metal wiring portion for connecting the driving circuit element is formed, a portion corresponding to a region where the alignment film is to be formed is formed. The projection film occupancy rate is higher than that of the portion corresponding to the metal wiring part, and a single photosensitive resin plate is used. By printing the material in the same step, the alignment film of the liquid crystal display portion is formed, and the wiring protection film thicker than the thickness of the alignment film is formed on the metal wiring portion.
【0006】[0006]
【作用】配向膜よりも厚い配線保護膜が形成されている
ため、傷や異物、Agペースト等による短絡発生の可能
性が低減され、製造歩留りが向上する。この場合、配線
保護膜が2000Åより薄くなると異物の貫通等による
膜の破壊が生じやすくなり、また10000Åより厚い
と印刷時に印刷むらや周辺部への流出などが生じやすく
なるので、2000Å乃至10000Åの厚さとした時
に配線保護膜として十分な性能が得られる。また、配向
膜の形成領域に対応する部分の凸部占有率を金属配線部
に対応する部分のそれよりも大きくすることにより、印
刷による配向膜材料の付着量が配向膜側で小さく、金属
配線部側で大きくなるので、単一の光感光性樹脂版で印
刷することにより、工程を増やさないで配向膜の膜厚よ
りも厚い配線保護膜を金属配線部の上に形成することが
できる。Since the wiring protection film thicker than the alignment film is formed, the possibility of short circuit due to scratches, foreign matters, Ag paste, etc. is reduced, and the manufacturing yield is improved. In this case, if the wiring protection film is thinner than 2000Å, the film is likely to be broken due to penetration of foreign matter, and if it is thicker than 10000Å, uneven printing or outflow to the peripheral portion is likely to occur at the time of printing. When the thickness is set, sufficient performance as a wiring protection film can be obtained. Further, by making the projection occupancy rate of the portion corresponding to the formation region of the alignment film larger than that of the portion corresponding to the metal wiring part, the amount of the alignment film material deposited by printing is small on the alignment film side, and the metal wiring Since the size becomes larger on the part side, by printing with a single photosensitive resin plate, a wiring protective film thicker than the thickness of the alignment film can be formed on the metal wiring part without increasing the number of steps.
【0007】[0007]
【実施例】次に、図示の一実施例について説明する。図
1において、1,2は所定の間隔で配置されたガラス基
板、3,4はガラス基板1,2上にITOによってそれ
ぞれ形成された電極、5,6は電極3,4上にそれぞれ
形成された配向膜、7は液晶、8はシール材であり、こ
れらによって液晶表示部9が形成されている。2aは一
方のガラス基板2を液晶表示部9の外側まで延長して形
成した回路形成部であり、電極4がこの回路形成部2a
にまで延長され、その上にCr、Al等の金属層10が
積層されて金属配線部11が形成されている。12は回
路形成部2aに実装されたLSIなどの駆動用回路素子
であり、金属配線部11に接続されている。EXAMPLE Next, one example shown in the figure will be described. In FIG. 1, 1 and 2 are glass substrates arranged at a predetermined interval, 3 and 4 are electrodes formed of ITO on the glass substrates 1 and 2, and 5 and 6 are formed on electrodes 3 and 4, respectively. The alignment film 7, the liquid crystal 7 and the seal material 8 form the liquid crystal display portion 9. Reference numeral 2a denotes a circuit forming portion formed by extending one glass substrate 2 to the outside of the liquid crystal display portion 9, and the electrode 4 has the circuit forming portion 2a.
And a metal layer 10 made of Cr, Al or the like is laminated thereon to form a metal wiring portion 11. Reference numeral 12 denotes a driving circuit element such as an LSI mounted on the circuit forming portion 2 a, which is connected to the metal wiring portion 11.
【0008】以上の構成は従来から知られている液晶表
示装置と同様であるが、実施例では配線保護膜13が金
属配線部11の上にワイヤボンディングを行うパッド部
分などを除いて設けられている点が異なっている。この
配線保護膜13はガラス基板2に配向膜6を形成する時
に、配向膜6と同一の材料を同時に印刷して形成された
ものであり、その膜厚は配向膜6よりも厚くしてある。The above structure is similar to that of the conventionally known liquid crystal display device, but in the embodiment, the wiring protective film 13 is provided on the metal wiring portion 11 except for the pad portion for wire bonding. The difference is that The wiring protection film 13 is formed by printing the same material as the alignment film 6 at the same time when the alignment film 6 is formed on the glass substrate 2, and the thickness thereof is larger than that of the alignment film 6. .
【0009】周知のように、オフセット印刷またはフレ
キソ印刷は印刷版に無数に形成されている細かい凸部の
間に保持されたインクを被印刷物に転写するものであ
り、インク保持量は版の全面積に対する凸部の占有率が
小さくなると増加し、大きくなると減少する。図2はこ
の実施例において配線保護膜13と配向膜6の同時形成
に使用される光感光性樹脂版15の凸版構造を示したも
のである。16はガラス基板2に配向膜6を形成するた
めの配向膜印刷部、17は金属配線部11の上に配線保
護膜13を形成するための保護膜印刷部であり、図の円
内はそれぞれ配向膜印刷部16と保護膜印刷部17の凸
版構造を拡大して示した図である。すなわち、配向膜印
刷部16では凸部16aが太く、保護膜印刷部17では
凸部17aが細くなっており、全面積に対する凸部占有
率が配向膜印刷部16では大きく、保護膜印刷部17で
は小さくなっている。As is well known, offset printing or flexographic printing transfers ink held between a large number of fine projections formed on a printing plate to a printing material, and the ink holding amount is the entire printing plate. It increases as the occupation ratio of the convex portion to the area decreases, and decreases as it increases. FIG. 2 shows a relief structure of a photosensitive resin plate 15 used for simultaneously forming the wiring protective film 13 and the alignment film 6 in this embodiment. Reference numeral 16 is an alignment film printing portion for forming the alignment film 6 on the glass substrate 2, 17 is a protective film printing portion for forming the wiring protective film 13 on the metal wiring portion 11, and the circles in the figure respectively. It is the figure which expanded and showed the relief structure of the alignment film printing part 16 and the protective film printing part 17. That is, the convex portion 16a is thick in the alignment film printing portion 16 and the convex portion 17a is thin in the protective film printing portion 17, so that the convex portion occupying ratio to the entire area is large in the alignment film printing portion 16, and the protective film printing portion 17 is large. Is getting smaller.
【0010】従って、このような印刷版15を用いてポ
リイミド液をガラス基板2の電極4と金属配線部11の
上に印刷すると、ポリイミド液の保持量が電極4の部分
では小さく、金属配線部11の部分では大きいために、
薄い配向膜6と厚い配線保護膜13が同時に印刷される
のであり、この印刷の後、約300℃のオーブン中で数
時間の焼成を行って配向膜6と配線保護膜13が形成さ
れる。なお、配向膜6の厚みは従来と同様であるが、配
線保護膜13は2000Å乃至10000Å程度に選定
される。これは、この範囲であれば十分な配線保護作用
が得られるのに対して、2000Åより薄くなると異物
の貫通等による膜の破壊が生じやすくなり、10000
Åより厚いと印刷時に印刷むらや周辺部への流出などが
生じやすくなるからである。Therefore, when the polyimide solution is printed on the electrode 4 and the metal wiring portion 11 of the glass substrate 2 using such a printing plate 15, the amount of the polyimide solution held is small in the electrode 4 portion, and the metal wiring portion Because it is large in the 11th part,
The thin alignment film 6 and the thick wiring protection film 13 are printed at the same time, and after this printing, the alignment film 6 and the wiring protection film 13 are formed by baking in an oven at about 300 ° C. for several hours. The thickness of the alignment film 6 is the same as the conventional one, but the wiring protection film 13 is selected to be about 2000 Å to 10000 Å. This is because a sufficient wiring protection effect can be obtained within this range, whereas when the thickness is less than 2000 Å, the film is apt to be broken due to penetration of foreign matter or the like.
If it is thicker than Å, uneven printing or outflow to the peripheral area is likely to occur during printing.
【0011】なお、図2では光感光性樹脂版15の凸部
16a,17aが円筒状のものを示しているが、この凸
部は他の形状であっても差し支えない。また、図では凸
部16a,17aの太さを変えてその面積率を変化させ
ているが、例えば凸部の間の溝の深さを変えることで凸
部占有率を変化させることも可能である。また、図2で
は保護膜印刷部17を長方形に描いてあるが、実際には
配線保護膜13は駆動用回路素子12が取り付けられる
部分や接続に使用される部分を除いて形成される。Although the protrusions 16a and 17a of the photosensitive resin plate 15 are shown in FIG. 2 as having a cylindrical shape, the protrusions may have other shapes. Further, in the figure, the area ratio is changed by changing the thickness of the convex portions 16a and 17a, but it is also possible to change the convex portion occupation ratio by changing the depth of the groove between the convex portions. is there. Although the protective film printing portion 17 is drawn in a rectangular shape in FIG. 2, the wiring protective film 13 is actually formed except for the portion where the driving circuit element 12 is attached and the portion used for connection.
【0012】[0012]
【発明の効果】上述の実施例から明らかなように、この
発明の液晶表示装置は、液晶表示部の配向膜よりも厚い
配線保護膜を配向膜と同一の材料を用いて金属配線部の
上に形成したものである。従って、十分な厚さの配線保
護膜によって工程中における傷や異物付着、トランスフ
ァ用のAgペーストの付着等による金属配線部の短絡発
生を防止することができ、製造歩留りを向上することが
可能となる。また、この発明の液晶表示装置の製造方法
は、配向膜の形成領域に対応する部分の凸部占有率を金
属配線部に対応する部分のそれよりも大きくした光感光
性樹脂版を用いて、配向膜と配線保護膜を同時に形成す
るようにしたものであり、工程を増やさないで配向膜の
膜厚よりも厚い配線保護膜を金属配線部の上に形成でき
るので、製造コストを上げないで歩留りを向上すること
ができる。As is apparent from the above-described embodiments, in the liquid crystal display device of the present invention, the wiring protection film thicker than the alignment film of the liquid crystal display section is formed on the metal wiring section by using the same material as the alignment film. It was formed in. Therefore, the wiring protection film having a sufficient thickness can prevent the occurrence of short-circuiting of the metal wiring portion due to scratches and foreign matter adhesion in the process, adhesion of Ag paste for transfer, and the like, and the manufacturing yield can be improved. Become. Further, the method for manufacturing a liquid crystal display device of the present invention uses a photosensitive resin plate in which the projection occupancy of the portion corresponding to the formation region of the alignment film is larger than that of the portion corresponding to the metal wiring portion, Since the alignment film and the wiring protection film are formed at the same time, a wiring protection film that is thicker than the thickness of the alignment film can be formed on the metal wiring portion without increasing the number of steps. The yield can be improved.
【図1】この発明の一実施例の要部の概略断面図であ
る。FIG. 1 is a schematic sectional view of a main part of an embodiment of the present invention.
【図2】同実施例で使用される光感光性樹脂版の斜視図
である。FIG. 2 is a perspective view of a photosensitive resin plate used in the same example.
1,2 ガラス基板 5,6 配向膜 9 液晶表示部 11 金属配線部 12 駆動用回路素子 13 配線保護膜 15 光感光性樹脂版 16 配向膜印刷部 17 保護膜印刷部 16a,17a 凸部 1, 2 Glass substrate 5, 6 Alignment film 9 Liquid crystal display part 11 Metal wiring part 12 Driving circuit element 13 Wiring protective film 15 Photosensitive resin plate 16 Alignment film printing part 17 Protective film printing part 16a, 17a Convex part
Claims (2)
晶表示装置において、駆動用回路素子を接続するために
基板に設けられている金属配線部の上に、液晶表示部の
配向膜と同一の材料からなり、且つ配向膜よりも厚い配
線保護膜を形成したことを特徴とする液晶表示装置。1. In a liquid crystal display device having a chip-on-glass structure, the same alignment film as that of the liquid crystal display unit is formed on a metal wiring part provided on a substrate for connecting a driving circuit element. A liquid crystal display device comprising a wiring protective film made of a material and thicker than an alignment film.
晶表示装置の製造工程において、駆動用回路素子を接続
するための金属配線部を設けた側の基板への配向膜形成
時に、配向膜が形成されるべき領域に対応する部分の凸
部占有率が上記金属配線部に対応する部分の凸部占有率
よりも大きい単一の光感光性樹脂版を用い、配向膜が形
成されるべき領域と金属配線部の両方に配向膜材料を同
一工程で印刷することにより、液晶表示部の配向膜を形
成すると共にこの配向膜よりも厚い配線保護膜を金属配
線部の上に形成することを特徴とする液晶表示装置の製
造方法。2. In the manufacturing process of a liquid crystal display device having a chip-on-glass system structure, an alignment film is formed when the alignment film is formed on a substrate on which a metal wiring portion for connecting a driving circuit element is provided. Area where the alignment film is formed by using a single photosensitive resin plate in which the occupancy ratio of the convex portion of the portion corresponding to the region to be formed is higher than the occupancy ratio of the convex portion of the portion corresponding to the metal wiring portion. By printing the alignment film material on both the metal wiring part and the metal wiring part in the same process, the alignment film of the liquid crystal display part is formed and the wiring protection film thicker than this alignment film is formed on the metal wiring part. A method for manufacturing a liquid crystal display device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28663292A JPH06118429A (en) | 1992-09-30 | 1992-09-30 | Liquid crystal display device and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28663292A JPH06118429A (en) | 1992-09-30 | 1992-09-30 | Liquid crystal display device and manufacturing method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06118429A true JPH06118429A (en) | 1994-04-28 |
Family
ID=17706931
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28663292A Pending JPH06118429A (en) | 1992-09-30 | 1992-09-30 | Liquid crystal display device and manufacturing method thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06118429A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001255553A (en) * | 2001-02-08 | 2001-09-21 | Seiko Epson Corp | Liquid crystal devices and electronic equipment |
| KR100834166B1 (en) * | 2002-06-10 | 2008-06-02 | 엘지디스플레이 주식회사 | LCD panel and manufacturing method thereof |
-
1992
- 1992-09-30 JP JP28663292A patent/JPH06118429A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001255553A (en) * | 2001-02-08 | 2001-09-21 | Seiko Epson Corp | Liquid crystal devices and electronic equipment |
| KR100834166B1 (en) * | 2002-06-10 | 2008-06-02 | 엘지디스플레이 주식회사 | LCD panel and manufacturing method thereof |
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