JPH061248Y2 - Spark coating device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a spark coating apparatus suitable for coating an abrasion-resistant, heat-resistant, heat-insulating film, particularly an amorphous alloy film.

[Conventional technology]

Conventionally, a coating device that forms a wear-resistant, heat-resistant, and heat-insulating film uses an electron beam, a laser beam, a plasma beam, an ion beam, gas heat, etc. as an energy source, and the energy generator equipment is expensive. Moreover, since the coating area and the film thickness are small, even if it is not suitable for a large-area coating apparatus, there is a problem that the efficiency is low in the field work.

[Problems to be solved by the invention]

The present invention has been proposed in view of such circumstances,
An object of the present invention is to provide a spark coating apparatus capable of efficiently coating a large area and improving the adhesion strength of the coating layer to improve the quality even though the apparatus cost is low. And

[Means for solving problems]

To this end, the present invention comprises a pair of sliding members each having a coating substance on the surface thereof, and a spark powder generating device for sliding friction of the coating substances to generate high-temperature and high-speed spark powder, and the spark powder to a higher temperature. A coating fine particle generator for heating to form fine vapor particles,
A coating substrate supporting device for colliding the coating particles with a three-dimensionally movable coating substrate surface, and a vacuum or inert gas atmosphere containing the spark powder generating device, the coating particle generating device and the coating substrate supporting device. It is characterized by having a room and.

[Action]

With the above configuration, the device cost is low,
It is possible to obtain a spark coating device capable of efficiently coating a large area and improving the adhesion strength of the coating layer to improve the quality.

〔Example〕

An embodiment of the spark coating device of the present invention will be described with reference to the drawings. FIG. 1 is a schematic view thereof.

In the above figure, inside the vacuum chamber 1 which can be controlled to a constant pressure by a vacuum pump 2, a sliding plate 3 and a rotating plate 4 which is in contact with the sliding plate 3 at a constant surface pressure and rotates at a high speed are slid against each other. When installed to fit, the sliding plate 3
A coating material 5 such as powder or solid metal, non-metal or ceramics is attached to the contact sliding surface of the rotary plate 4 by adhesion or bonding. When the sliding plate 3 is reciprocated at a high speed by the sliding plate driving device 6 and the rotating plate 4 is rotated at a high speed by the rotating device 7, the speed control is performed by the rotation control device 8.

In front of the combination of the sliding plate 3 and the rotary plate 4, a quartz tube 10 around which a high frequency induction heating coil 9 is wound is arranged in the vacuum chamber 1, and the high frequency induction heating coil 9 is connected to a high frequency heating device 11. Has been done. Further, in front of the quartz tube 10, in the vacuum chamber 1, a coating substrate 12 is mounted and supported on a movable carriage 13 which can be moved back and forth, left and right, and up and down. The movable carriage 13 has a carriage drive control for NC control. Device 14 is connected. Further, the rotation control device 8, the high frequency heating device 11 and the carriage drive control device 14 are all connected to a main computer 15.

In such a device, when the vacuum chamber 1 is maintained at a high vacuum by the vacuum pump 2 and the sliding plate 3 is reciprocated, the rotary plate 4 is rotated at a high speed in the direction of the arrow. 3 and the coating material 5 on the surface of the rotating plate 4 are slid and worn at high speed, and high-temperature and high-speed spark powder 16 is generated to fly forward.

However, the high-temperature and high-speed spark powder 16 instantly becomes a vapor of even higher temperature while passing through the quartz tube 10 around which the high-frequency induction heating coil 9 is wound during flight, and its particle size becomes finer.

The coating particles 17 that have become high-temperature and high-speed and have been atomized in the quartz tube 10 are movable carriages 1 driven by NC control on x, y, z bearings.
It collides with the surface of the coating substrate 12 on 3 and forms a coating layer 18.

The area and the film thickness of the coating layer 18 are the moving speed and moving stroke of the moving carriage 13, the sliding plate 3 and the rotating plate 4.
And the heating temperature of the high-frequency induction heating coil 9, and these controls are controlled by the main computer 15 by the rotation control device 8 and the high-frequency heating device 11.
And the carriage drive control device 14 is sequence-controlled.

Although the above embodiment was carried out in the vacuum chamber 1, it may be carried out in a processing chamber having an inert gas atmosphere.

According to such a device, the following effects can be obtained.

(1) Coating of a single component or multiple components is possible, and the device cost is low because sparks due to sliding friction are used as the energy source.

(2) High-frequency induction heating of the generated spark powder causes it to collide with the coating substrate at high speed as fine particles activated in a high-temperature vapor state, improving the adhesion strength of the coating layer and improving the quality. .

(3) It is possible to efficiently coat a large area and coat a large structure.

[Effect of device]

In short, according to the present invention, a spark powder generating device comprising a pair of sliding members each having a coating material on the surface thereof to generate friction powder at high temperature and high speed by sliding friction between the coating materials, and the spark powder at a higher temperature. Coating fine particle generator for heating to fine powder particles in a vapor state, a coating substrate supporting device for colliding the coating fine particles with a three-dimensionally movable coating substrate surface, the spark powder generating device, coating fine particle generating device Also, by providing a vacuum or inert gas atmosphere chamber for accommodating the coating substrate supporting device, the cost of the device is low, and it is possible to efficiently coat a large area and to coat the coating layer. Because we obtain a spark coating device that can improve adhesion strength and quality The present invention are those on the very profitable industry.

[Brief description of drawings]

FIG. 1 is a schematic view showing an embodiment of the spark coating device of the present invention. 1 ... Vacuum chamber, 2 ... Vacuum pump, 3 ... Sliding plate, 4 ...
・ Rotating plate, 5 ・ ・ Coating substance, 6 ・ ・ Sliding plate driving device, 7 ・ ・ Rotating device, 8 ・ ・ Rotation control device, 9 ・ ・ High frequency induction heating coil, 10 ・ ・ Quartz tube, 11 ・ ・ High frequency Heating device, 12 ... Coating substrate, 13 ... Mobile cart, 14 ...
・ Truck drive control device, 15 ・ ・ Main computer, 16 ・
・ Spark powder, 17 ・ ・ Coating fine particles, 18 ・ ・ Coating layer.

Claims (1)

[Scope of utility model registration request] 1. A spark powder generating device comprising a pair of sliding members each having a coating substance on the surface thereof to generate friction powder at high temperature and high speed by sliding friction between the coating substances, and the spark powder is heated to a higher temperature. Coating fine particle generator for producing fine vapor-like powder particles, a coating substrate supporting device for colliding the coating fine particles with a three-dimensionally movable coating substrate surface, the spark powder generating device, coating fine particle generating device and coating A spark coating apparatus comprising: a vacuum or an inert gas atmosphere chamber accommodating a substrate supporting device.