JPH0612825Y2 - 蒸発器 - Google Patents
蒸発器Info
- Publication number
- JPH0612825Y2 JPH0612825Y2 JP1989022550U JP2255089U JPH0612825Y2 JP H0612825 Y2 JPH0612825 Y2 JP H0612825Y2 JP 1989022550 U JP1989022550 U JP 1989022550U JP 2255089 U JP2255089 U JP 2255089U JP H0612825 Y2 JPH0612825 Y2 JP H0612825Y2
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- sealed chamber
- liquid
- liquid raw
- vaporized
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989022550U JPH0612825Y2 (ja) | 1989-02-28 | 1989-02-28 | 蒸発器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989022550U JPH0612825Y2 (ja) | 1989-02-28 | 1989-02-28 | 蒸発器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02112328U JPH02112328U (th) | 1990-09-07 |
| JPH0612825Y2 true JPH0612825Y2 (ja) | 1994-04-06 |
Family
ID=31240770
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989022550U Expired - Lifetime JPH0612825Y2 (ja) | 1989-02-28 | 1989-02-28 | 蒸発器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0612825Y2 (th) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3415862B2 (ja) * | 1992-07-06 | 2003-06-09 | 株式会社フジクラ | Cvd原料気化装置 |
| JP2872891B2 (ja) * | 1993-08-06 | 1999-03-24 | 株式会社東芝 | 気化装置 |
-
1989
- 1989-02-28 JP JP1989022550U patent/JPH0612825Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02112328U (th) | 1990-09-07 |
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