JPH061324Y2 - Electroformed thin blade grindstone - Google Patents

Description

[Detailed Description of the Invention] "Industrial field of application" The present invention relates to an electroformed thin blade grindstone used for highly accurate cutting and grooving of a work material such as silicon or ferrite.

"Prior Art" As a grindstone for ultra-precision machining of this kind, an electroformed thin blade grindstone as shown in Fig. 3 has been conventionally used.

In the figure, reference numeral 1 is a thin annular plate having a thickness of several tens μm to several hundreds μm formed by dispersing superabrasive grains such as diamond or CBN in a metal plating phase made of Ni, Co or their alloys. It is a thin electroformed grindstone. And this electroformed thin blade grindstone 1
It is sandwiched between a pair of mounting flanges 2 and 2 arranged on both side surfaces, and is tightened and fixed by a nut 3 to a grindstone shaft 4 which is rotated around its axis for use.

"Problems to be solved by the invention" However, in such an electroformed thin blade grindstone 1, since the metal plating phase is densely formed, the coefficient of friction with the material to be cut is large and the cutting resistance is large. Therefore, there is a problem that the grindstone is easily overheated by the frictional heat generated during cutting.

Also, because the superabrasive grains are firmly held by the metal plating phase and are unlikely to fall off, the protrusion of the superabrasive grains, which should be newly involved in cutting, is slow, and the so-called superabrasive grain self-sharpening action is insufficient, resulting in chipping. Is big. Similarly, since chip pockets are less likely to be formed on the surface of the grindstone, there is a problem in that chip discharge performance and cooling performance are poor.

Further, in such an electroformed thin blade grindstone 1, stress is accumulated in the plating phase in the process of depositing the metal plating phase, so that the electroformed thin blade grindstone has a drawback that warpage is likely to occur.

In addition, when the grinding machine has poor spindle accuracy or poor rotation accuracy, it is unavoidable that bending stress is repeatedly applied to the electroformed thin blade grindstone during cutting. Is easily accumulated, and the life until cracking and grinding wheel breakage is short.

"Purpose of the present invention" The present invention has a long life until the wheel breaks even if the grinding machine has poor spindle accuracy or rotational accuracy, and metal fatigue does not easily accumulate in the metal plating phase. It is an object of the present invention to provide an electroformed thin blade grindstone which has excellent self-sharpening effect of abrasive grains, can obtain good sharpness, can prevent chipping, and is less likely to cause warping.

"Means for Solving Problems" The electroformed thin blade grindstone of the present invention has a thickness of several tens of which is obtained by dispersing lubricating particles made of hexagonal boron nitride and superabrasive particles in the metal plating phase. A disc-shaped electroformed thin blade grindstone of several hundred μm, wherein the average particle diameter of the lubricating particles is 1 to 10 μm and smaller than the average particle diameter of the superabrasive particles, and the content ratio of the lubricating particles is 5 It is characterized by being ˜40 vol%.

[Example] Hereinafter, an example of the present invention will be described in detail with reference to the drawings.

FIG. 1 is a cross-sectional view showing an electroformed thin blade grindstone according to an embodiment of the present invention. This electroformed thin blade grindstone contains diamond or CBN in a metal plating phase 10 selected from Ni, Co and their alloys. And the like, and the lubricating particles 12 are dispersed in a thin disk shape, and the metal plating phase 10 has substantially no pores as shown in FIG. Is.

The lubricating particles 12 are hexagonal boron nitride particles. Hexagonal boron nitride has a high effect of relaxing the bending stress generated in the electroformed thin blade grindstone at the time of cutting by interfacial sliding, and
Since the specific gravity of the superabrasive grains is closer to that of other types of lubricious materials, it has a characteristic that it is easy to uniformly mix with the superabrasive grains during the production of the electroformed thin blade grindstone.

The dispersion amount of the lubricating particles 12 is 5 to 40 vol of the whole grindstone.
%. If this ratio is less than 5 vol%, the effect of relieving the stress of the metal plating phase 10 and the lubrication effect will be insufficient. The average particle size of the lubricating particles 12 is set to 1 to 10 μm. According to the experiments conducted by the present inventors, if the average particle size is less than 1 μm, the stress relaxation effect and the lubrication effect are insufficient, and if it exceeds 10 μm, the stress relaxation effect decreases. Further, the average particle size of the lubricating particles 12 is set smaller than the average particle size of the superabrasive particles 11. If the lubricating particles 12 are larger than the superabrasive grains 11, the superabrasive grains 11 may hinder the bite of the work material.

Next, a method of manufacturing such an electroformed thin blade grindstone will be described with reference to FIG.

The figure is a vertical cross-sectional view of the manufacturing apparatus. Reference numeral 20 denotes a plating tank, and the plating tank 20 is filled with a plating solution M containing metal ions such as Ni and Co. In addition, a stirrer such as an ultrasonic stirrer (not shown) is arranged in the plating tank 20 to stir the plating solution M.

A non-conductive pedestal 21 is horizontally arranged in the plating tank 20, and a stainless steel flat substrate 22 is placed on the pedestal 21. Masking is performed on the upper surface of the flat substrate 22 while leaving a portion of the prototype of the grindstone to be manufactured. An anode plate 23 is arranged above the plane substrate 22 in parallel with the plane substrate 22 and connected to an anode of a power source (not shown).

When manufacturing an electroformed thin blade grindstone, first, superabrasive grains and a predetermined amount of lubricating particles are added to the plating solution M in the plating tank 20 and uniformly dispersed in the plating solution M by a stirrer. Next, the flat substrate 22 is connected to the cathode of the power source, and an electric current is applied between the flat substrate 22 and the anode plate 23 to form a metal plating phase 24 on the surface of the flat substrate 22. The particles are uniformly dispersed and incorporated.

Eventually, when the metal plating phase 24 reaches a predetermined wall thickness, the energization is stopped, the flat substrate 22 is taken out of the plating tank 20 and washed with water. Then, the metal plating phase 24 is peeled off from the flat substrate 22 and shaped into a predetermined shape to obtain an electroformed thin blade grindstone.

According to the electroformed thin blade grindstone having such a configuration, the lubricating particles 12 exposed on the surface of the metal plating phase 10 cause
The coefficient of friction with the material to be cut can be reduced and the cutting resistance can be reduced. Therefore, it is possible to reduce frictional heat generated during cutting and prevent overheating of the grindstone.

Further, by dispersing the lubricating particles 12 in the metal plating phase 10, the holding force of the superabrasive grains 11 by the metal plating phase 10 can be appropriately reduced, and the grindstone can be softened. Therefore, the self-developing action of the superabrasive grains 11 can be promoted, the sharpness of the grindstone can be improved, chipping can be reduced, and the smoothness of the cutting surface can be improved.

Further, since chip pockets are easily formed on the surface of the grindstone, there is an advantage that chip discharging property and cooling property can be improved.

In addition, in this electroformed thin blade grindstone, since the lubricating particles dispersed in the plating phase 10 can alleviate the stress generated in the plating phase 10 in the process of precipitating the plating phase 10, warping of the grindstone Unlikely to occur.

Further, even when stress such as bending stress is repeatedly applied to the electroformed thin blade grindstone, a part of this stress is absorbed and relaxed by the interface slip between the lubricating particles 12 and the metal plating phase 10,
Metal fatigue is less likely to accumulate in the metal plating phase 10, and the life of the grindstone until fracture can be greatly extended.

"Example" Next, the effect of the electroformed thin blade grindstone of the present invention will be clarified by giving an example.

First, a disk-shaped electroformed thin blade grindstone having the following composition was manufactured. The size is the same for each electroformed thin blade grindstone, and the outer diameter is 76.2 mm.
φ, inner diameter 40.0 mmφ, and wall thickness 200 μm. Further, the metal plating phase is all Ni, the superabrasive grains are all diamond abrasive grains having an average particle diameter of 25 μm, and the dispersion amount of the superabrasive grains is 15 vol%
Unified.

(Experimental Example 1) In addition to the above metal plating phase and superabrasive grains, the following lubricous particles were added.

Types of Lubricating Particles; Hexagonal Boron Nitride Average Particle Size of Lubricating Particles; 2 μm Dispersion Amount of Lubricating Particles; 25 vol% (Comparative Example 1) From the metal plating phase and superabrasive particles, containing no lubricating particles. Become.

Next, for the above two electroformed thin blade grindstones,
A cutting test was performed under the following cutting conditions (wet type).

 Cutting conditions: Work material: Quartz glass Peripheral speed: 1500 m / min. Feed rate: 100 mm / min. Depth of cut: 2.0 mm / min. The results are shown in Table 1.

As is clear from the above table, in Experimental Example 1, cutting resistance and chipping were reduced as compared with Comparative Example 1.

Next, using the same manufacturing method as in Experimental Example 1, hexagonal boron nitride was used as the lubricating particles to prepare electroformed thin blade grindstones in Experimental Examples 2 to 5 and Comparative Examples 3 to 6. Further, an electroformed thin blade grindstone of Comparative Example 2 was prepared by the same method as that of Comparative Example 1.

Fix these electroformed thin blade grindstones on the spindle so that the rotation axis of the grindstone is tilted at 11 ° with respect to the rotation axis of the spindle of the grinder, and perform a cutting test by repeatedly bending stress on the electroformed thin blade grindstone. The fatigue resistance of the electroformed thin blade grindstone was evaluated. The experimental conditions are as follows.

Grinding stone: Outer diameter 101 mm Inner diameter 40 mm Wall thickness 300 μm Diamond grain size 40/60 μm Diamond content 15 vol% Work material: Al ₂ O ₃ · TiC 50 mm × 50 mm × Thickness 4 mm Cutting conditions: Peripheral speed 1800 m / min Feed rate 15 mm / min Depth of cut 3.5 mm Cutting edge amount 5 mm The evaluation standard was the number of cutting lines until the grindstone broke due to metal fatigue. In addition, Al ₂ O ₃ · Ti
Every time one line of C was cut, the general grindstone (WA220) was cut by 15 mm for sharpening.

The results are shown in Table 2 and FIG. In Table 2, "particle size" and "content" are values for the lubricating particles.

As is clear from these results, the average particle size is 1 to 10
In the case of containing 5 to 40 vol% of spherical lubricating particles of
The life of the grindstone was remarkably extended as compared with each comparative example.

In Comparative Example 5 in which the average particle size of the lubricating particles exceeds 10 μm, the life of the grindstone is significantly reduced as compared with the case of 1 to 10 μm. Also, in Comparative Example 3 in which the average particle size of the lubricating particles is less than 1 μm, the stress relaxation effect is significantly reduced as compared with the case of 1 to 10 μm. Furthermore, the content of the lubricating particles is 5 vo
If it is less than 1% or more than 40 vol%, the life of the grindstone becomes shorter than that of the examples.

Next, Experimental Examples 6 to 8 are prepared in the same manner as the above Experimental Examples, while Comparative Examples 7 and 8 are prepared in the same manner as Comparative Example 1, and these electroformed thin blade grindstones are used for other I investigated the effect. The experimental conditions are as follows.

Grindstone: Outer diameter 101 mm Inner diameter 40 mm Wall thickness 0.25 mm Diamond grain size 20/30 μm Work material: Soda glass 100 × 100 × 10 mm Cutting conditions: Peripheral speed 1800 m / min Feed rate 50 mm / min Cutting depth 5 mm Cutting edge amount 6.5 mm Cutting distance 20 m The results are shown in Table 3. In the table, “total wear amount” indicates the radius wear amount of the grindstone after the cutting of 20 m is completed. The "variation of wear rate" is the radius wear rate (μm / m) obtained by measuring the radius wear amount of the grindstone for each 1m of cutting distance.
Of these, the maximum radial wear rate is divided by the minimum radial wear rate, which indicates the stability of sharpness. "Bending of the groove"
Is a value indicating the amount of deviation between the vertical line descended from the center of the opening width of the groove and the center of the bottom width.

As is clear from Table 3, in the electroformed thin blade grindstones of Experimental Examples 6 to 8, the variation in sharpness was reduced, and the surface roughness and chipping of the cut surface were improved as compared with Comparative Examples 6 and 7.

"Effect of the Invention" The electroformed thin blade grindstone of the present invention is a disk having a thickness of several tens to several hundreds of μm in which lubricating particles made of hexagonal boron nitride and superabrasive particles are dispersed in a metal plating phase. -Shaped electroformed thin grindstone, wherein the average particle size of the lubricating particles is 1 to 10 μm and smaller than the average particle size of the superabrasive particles, and the content ratio of the lubricating particles is 5 to 40 vol%. Therefore, the following excellent effects can be obtained.

The lubricating particles exposed on the surface of the metal plating phase can reduce the coefficient of friction with the material to be cut and reduce the cutting resistance. At the same time, it is possible to reduce frictional heat generated during cutting and prevent overheating of the grindstone.

By dispersing the lubricating particles in the metal plating phase, the holding force of the superabrasive grains is appropriately reduced, the grindstone is softened, and the self-sharpening action of the superabrasive grains is promoted. This improves the sharpness of the grindstone, reduces chipping, and improves the flatness of the cutting surface. At the same time, since chip pockets are easily formed on the surface of the grindstone, it is possible to enhance the chip discharge performance and improve the cooling efficiency of the cooling water.

The stress generated in the plating phase in the process of depositing the plating phase can be relaxed by the lubricating particles dispersed in the metal plating phase, and the stress can be prevented from being generated in the grindstone. Therefore, the whetstone is unlikely to be warped.

Even when stress such as bending stress is repeatedly applied to the electroformed thin blade grindstone, a part of this stress is absorbed by the interface slip between the lubricating particles and the metal plating phase and alleviated. Is less likely to accumulate, and the life of the grindstone until fracture can be greatly extended.

[Brief description of drawings]

FIG. 1 is a partial sectional view of an electroformed thin blade grindstone according to an embodiment of the present invention, FIG. 2 is a vertical sectional view showing a manufacturing apparatus for manufacturing the grindstone, and FIG. 3 is a conventional electroformed thin blade grindstone. FIG. 4 is a vertical side view showing the state of being fixed to the grindstone shaft, and FIG. 4 is a graph showing the results of the experimental example of the present invention. 10 ... Metal plating phase 11 ... Super abrasive grain 12 ... Lubricating particle

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Takeshi Katayama 1925 Shimoishi Togami, Kitamoto City, Saitama 3 Inside Diamond Tool Mfg. Co., Ltd. (56) Reference JP-A-61-65776 (JP, A) Special Public Sho 50-13995 (JP, B1)

Claims (1)

[Scope of utility model registration request] 1. A disc-shaped electroformed thin blade grindstone having a thickness of several tens to several hundreds of μm in which lubricating particles made of hexagonal boron nitride and superabrasive grains are dispersed in a metal plating phase. The average particle size of the lubricating particles is 1 to 10 μm and smaller than the average particle size of the superabrasive particles, and the content ratio of the lubricating particles is 5 to 40.
An electroformed thin blade grindstone characterized by being vol%.