JPH0613533A - Multi-chip module - Google Patents

Multi-chip module

Info

Publication number
JPH0613533A
JPH0613533A JP4165944A JP16594492A JPH0613533A JP H0613533 A JPH0613533 A JP H0613533A JP 4165944 A JP4165944 A JP 4165944A JP 16594492 A JP16594492 A JP 16594492A JP H0613533 A JPH0613533 A JP H0613533A
Authority
JP
Japan
Prior art keywords
multilayer wiring
wiring board
seal ring
ceramic multilayer
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4165944A
Other languages
Japanese (ja)
Other versions
JP3162485B2 (en
Inventor
Minoru Futai
稔 二井
Yoshitaka Fukuoka
義孝 福岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP16594492A priority Critical patent/JP3162485B2/en
Publication of JPH0613533A publication Critical patent/JPH0613533A/en
Application granted granted Critical
Publication of JP3162485B2 publication Critical patent/JP3162485B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/14Structural association of two or more printed circuits
    • H05K1/144Stacked arrangements of planar printed circuit boards
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/18Printed circuits structurally associated with non-printed electric components
    • H05K1/181Printed circuits structurally associated with non-printed electric components associated with surface mounted components
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/751Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
    • H10W90/754Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked insulating package substrate, interposer or RDL

Landscapes

  • Coupling Device And Connection With Printed Circuit (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

(57)【要約】 (修正有) 【目的】 マルチチップモジュールの入出力接続に要す
る領域面を低減する一方、プリント配線基板への脱着・
交換も容易になし得る構成とする。 【構成】 セラミック多層配線板1と、前記セラミック
多層配線板1の一主面の周辺部に一体的に設けられたシ
ールリング8と、前記シールリング8に囲繞された領域
内の多層配線板1面上に形成された薄膜多層配線部2
と、薄膜多層配線部2面上に搭載・接続された複数個の
半導体チップ3と、シールリング8面に開口部5aが気密
に封着され、薄膜多層配線部2領域を内封する封止体5
と、多層配線板1のシールリング1面の外側領域面もし
くは他主面(裏面)に配設されて薄膜多層配線部2に電
気的に接続する入出力パッド10と、それに電気的に接続
してセラミック多層配線板1に一体的に配設された表面
実装型コネクタ11とを具備する。
(57) [Summary] (Modified) [Purpose] While reducing the area required for I / O connection of a multi-chip module, attaching / detaching to / from a printed wiring board
The configuration will allow easy replacement. A ceramic multilayer wiring board 1, a seal ring 8 integrally provided on a peripheral portion of one main surface of the ceramic multilayer wiring board 1, and a multilayer wiring board 1 in a region surrounded by the seal ring 8. Thin film multilayer wiring part 2 formed on the surface
And a plurality of semiconductor chips 3 mounted and connected on the surface of the thin-film multilayer wiring section 2 and the opening 5a on the surface of the seal ring 8 in an airtight manner to seal the area of the thin-film multilayer wiring section 2 Body 5
And an input / output pad 10 electrically connected to the thin film multilayer wiring section 2 which is disposed on the outer region surface of the seal ring 1 surface of the multilayer wiring board 1 or on the other main surface (back surface) and is electrically connected to it. And a surface mount type connector 11 which is integrally arranged on the ceramic multilayer wiring board 1.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明はマルチチップモジュール
に係り、特にコンパクト化を図った入出力端子数の多い
マルチチップモジュールに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a multi-chip module, and more particularly to a multi-chip module which is compact and has a large number of input / output terminals.

【0002】[0002]

【従来の技術】たとえば大型電子計算機や画像処理装置
用など、高速な動作が要求される半導体チップを搭載し
て成るマルチチップモジュールは、一般に図3に要部を
断面的に、また図4に平面的にそれぞれ示すような構成
を採っている。すなわち、セラミック多層配線板1と、
前記セラミック多層配線板1の所定領域面上に一体的に
形成された、たとえばポリイミド樹脂系の絶縁層および
導体パターン層を交互に積層して成る薄膜多層配線部2
と、前記薄膜配線部2面上に設けられたダイボンディン
グパッド(図示せず)上に、たとえば導電性エポキシ樹
脂を介して搭載・実装された高速に動作する複数個の半
導体素子(半導体チップ)3と、前記半導体素子3およ
び薄膜多層配線部2を電気的に接続するボンディンワイ
ヤ4と、前記ボンディングワイヤ4を含め薄膜多層配線
部2および半導体素子3などを、一体的に気密封止する
ようにセラミック多層配線板1面上に配設された封止体
5、たとえばメタルキャップと、前記薄膜多層配線部2
などに電気的に接続するセラミック多層配線板1から2.
54mm程度のピッチで導出された 400本程度の入出力端子
(I/O リード)6と、セラミック多層配線板1の裏面側
に接着剤を介して一体的に配設された放熱フィン7とを
具備した構成を成している。しかして、前記封止体5と
してのメタルキャップは、その開口端縁部5aを、セラミ
ック多層配線板1面に設けられたシールリング(ウエル
ドリング)8面にロー付けないし溶接されて気密な封止
を構成している。
2. Description of the Related Art A multi-chip module for mounting a semiconductor chip which is required to operate at high speed, such as for a large-scale computer or an image processing apparatus, is generally shown in FIG. The configuration shown in the plan view is adopted. That is, the ceramic multilayer wiring board 1
A thin film multi-layer wiring section 2 integrally formed on the surface of a predetermined area of the ceramic multi-layer wiring board 1 and formed by alternately laminating insulating layers and conductor pattern layers of, for example, polyimide resin.
And a plurality of high-speed semiconductor elements (semiconductor chips) mounted / mounted on a die bonding pad (not shown) provided on the surface of the thin film wiring portion 2 via, for example, a conductive epoxy resin. 3, the bonding wire 4 for electrically connecting the semiconductor element 3 and the thin film multilayer wiring section 2, the thin film multilayer wiring section 2 including the bonding wire 4, the semiconductor element 3 and the like are integrally hermetically sealed. Thus, the sealing body 5, for example, a metal cap disposed on the surface of the ceramic multilayer wiring board 1 and the thin film multilayer wiring section 2
Ceramic multilayer wiring board 1 to 2.
Approximately 400 input / output terminals (I / O leads) 6 led out at a pitch of about 54 mm, and a radiation fin 7 integrally arranged on the back surface side of the ceramic multilayer wiring board 1 with an adhesive. It is equipped with the configuration. In the metal cap as the sealing body 5, the opening edge 5a is brazed or welded to the surface of the seal ring (weld ring) 8 provided on the surface of the ceramic multilayer wiring board 1 to hermetically seal it. It constitutes a stop.

【0003】[0003]

【発明が解決しようとする課題】しかしながら、上記構
成のマルチチップモジュールにおいては、次のような不
都合な問題が認められる。すなわち、セラミック多層配
線板1から導出される入出力端子6の数が 400本程度と
多く、かつ形成・配置されるピッチも2.54mm程度である
ため、セラミック多層配線板1に占める入出力端子6の
導出領域面が必然的に増大し、マルチチップモジュール
の大形化を招来することになる。このマルチチップモジ
ュールの大形化を回避する手段として、前記入出力端子
6の導出・配置のピッチを狭めることも試みられている
が、この入出力端子6の狭ピッチ化は、プリント配線基
板への実装段階で新たな問題を提起する。すなわち、前
記入出力端子6の狭ピッチ化に対応して、プリント配線
基板に挿入用のスルホールを狭ピッチで形設する必要が
あるばかりでなく、狭ピッチで形設したスルホールに入
出力端子6を挿入・半田付けすることも困難であり、構
成する実装回路装置の歩留まりや信頼性に問題がある。
However, in the multi-chip module having the above structure, the following inconvenient problems are recognized. That is, since the number of input / output terminals 6 led out from the ceramic multilayer wiring board 1 is as large as about 400 and the pitch formed / arranged is about 2.54 mm, the input / output terminals 6 occupying the ceramic multilayer wiring board 1 Inevitably, the surface area for deriving the multi-chip module will increase, leading to an increase in the size of the multi-chip module. As a means for avoiding the increase in the size of the multi-chip module, it has been attempted to narrow the lead-out / arrangement pitch of the input / output terminals 6. Raise new issues during the implementation stage of. That is, in order to cope with the narrowing of the pitch of the input / output terminals 6, it is not only necessary to form through holes for insertion on the printed wiring board at a narrow pitch, but also the input / output terminals 6 are formed on the through holes formed at a narrow pitch. It is also difficult to insert and solder, and there is a problem in the yield and reliability of the mounted circuit device that constitutes it.

【0004】また、この種のマルチチップモジュールに
ついては、プリント配線基板に実装して構成する実装回
路装置(システム)のメンテナンス性の上で、プリント
配線基板への脱着・交換がより容易であることが望まし
い。このような要請に対して、ソケットを介してプリン
ト配線基板にマルチチップモジュールを実装することも
知られているが、前記のように入出力端子6の数が 400
本程度と多ピン化し、かつ狭ピッチ化してくると、ソケ
ットの機構ないし構造が複雑化するとともに、占有面積
も増大するので、結果的に構成する実装回路装置(シス
テム)の大形化を招来するという問題がある。
Further, with respect to this type of multi-chip module, it is easier to attach / detach to / from the printed wiring board in terms of maintainability of the mounted circuit device (system) which is mounted on the printed wiring board. Is desirable. In response to such a demand, it is known to mount a multi-chip module on a printed wiring board via a socket, but as described above, the number of input / output terminals 6 is 400.
If the number of pins is increased to about this number and the pitch is narrowed, the mechanism or structure of the socket becomes complicated and the occupied area also increases, resulting in a large-sized mounted circuit device (system). There is a problem of doing.

【0005】本発明は上記事情に対処してなされたもの
で、マルチチップモジュールの入出力接続に要する領域
面を低減する一方、プリント配線基板への脱着・交換も
容易になし得る構成としたマルチチップモジュールの提
供を目的とする。
The present invention has been made in consideration of the above circumstances and has a structure in which the area required for input / output connection of a multi-chip module is reduced, and at the same time, it can be easily attached / detached to / from a printed wiring board. The purpose is to provide a chip module.

【0006】[0006]

【課題を解決するための手段】本発明に係るマルチチッ
プモジュールは、セラミック多層配線板と、前記セラミ
ック多層配線板の一主面の周辺部に一体的に設けられた
シールリングと、前記シールリングに囲繞された領域内
のセラミック多層配線板面上に形成された薄膜多層配線
部と、前記薄膜多層配線部面上に搭載・接続された複数
個の半導体チップと、前記シールリング面に開口部が気
密に封着され、半導体チップを搭載・接続した薄膜多層
配線部領域を内封する封止体と、前記セラミック多層配
線板のシールリング面の外側領域面もしくは他主面に配
設されて薄膜多層配線部に電気的に接続する入出力パッ
ドと、前記入出力パッドに電気的に接続してセラミック
多層配線板に一体的に配設された表面実装型コネクタと
を具備して成ることを特徴とする。
A multi-chip module according to the present invention includes a ceramic multilayer wiring board, a seal ring integrally provided on a peripheral portion of one main surface of the ceramic multilayer wiring board, and the seal ring. A thin film multilayer wiring part formed on the surface of the ceramic multilayer wiring board in a region surrounded by, a plurality of semiconductor chips mounted and connected on the surface of the thin film multilayer wiring part, and an opening on the seal ring surface. Is hermetically sealed, and is provided on the outer surface of the sealing ring surface of the ceramic multilayer wiring board or on the other main surface, with a sealing body for sealing the thin film multilayer wiring part area on which the semiconductor chip is mounted and connected. An input / output pad electrically connected to the thin-film multilayer wiring portion; and a surface mount type connector electrically connected to the input / output pad and integrally disposed on the ceramic multilayer wiring board. The features.

【0007】[0007]

【作用】本発明に係るマルチチップモジュールにおいて
は、セラミック多層配線板のシールリング面(封止領
域)の外側領域面もしくは他主面(裏面)に導出・配設
された入出力パッドに、電気的に接続した形で表面実装
型コネクタをセラミック多層配線板に一体的に装着した
構成を採っている。すなわち、複雑ないし繁雑な構成あ
るいは大形の構成を採ることなく、また 400本程度と多
ピン型で、かつ狭ピッチ配置された入出力端子6でも、
前記一体的に配設・装着された表面実装型コネクタによ
って、セラミック多層配線板面への脱着・交換も可能と
なる。
In the multi-chip module according to the present invention, the input / output pads led out and arranged on the outer area surface of the seal ring surface (sealing area) or the other main surface (back surface) of the ceramic multilayer wiring board are electrically connected to each other. The surface mount type connector is integrally attached to the ceramic multi-layer wiring board in a form that is electrically connected. That is, without using a complicated or complicated structure or a large-sized structure, and even with a multi-pin type with about 400 pins and an input / output terminal 6 arranged at a narrow pitch,
By the surface mount type connector which is integrally arranged and mounted, it is possible to attach and detach to and from the surface of the ceramic multilayer wiring board.

【0008】[0008]

【実施例】以下図1および図2を参照して本発明の実施
例を説明する。
Embodiments of the present invention will be described below with reference to FIGS.

【0009】図1は本発明に係るマルチチップモジュー
ルの構成例の要部を断面的に、また図2は平面的にそれ
ぞれ示したものである。そして、1はセラミック多層配
線板、8は前記セラミック多層配線板1の一主面の周辺
部に一体的に設けられたシールリング、2は前記シール
リング8に囲繞された領域内のセラミック多層配線板1
面上に形成されたたとえばポリイミド樹脂系絶縁層−導
体パターン層系の薄膜多層配線部である。また、3は前
記薄膜多層配線部2面上に搭載・接続された複数個の半
導体チップ、5は前記シールリング8面に開口部5aが気
密に封着され、半導体チップ3を搭載・接続した薄膜多
層配線部2領域を内封する封止体、たとえばメタルキャ
ップ、10は前記セラミック多層配線板1のシールリング
8面の外側領域面(もしくは他主面…裏面)に配設され
て、前記薄膜多層配線部2に電気的に接続する入出力パ
ッド、11は前記入出力パッド10に電気的に接続して、前
記セラミック多層配線板1に、たとえばネジ止めにより
一体的に配設された表面実装型コネクタである。ここ
で、前記入出力パッド10は、たとえばフォトリソグラフ
ィにより所定の寸法公差を維持して形成できる。つま
り、リードピッチが 0.6mm程度の表面実装型コネクタ11
を半田付けなどによって、一体的に配設・装着し得る。
FIG. 1 is a cross-sectional view of a main part of a structural example of a multichip module according to the present invention, and FIG. 2 is a plan view thereof. Further, 1 is a ceramic multilayer wiring board, 8 is a seal ring integrally provided on a peripheral portion of one main surface of the ceramic multilayer wiring board 1, and 2 is a ceramic multilayer wiring in a region surrounded by the seal ring 8. Board 1
It is a thin film multi-layer wiring portion of, for example, a polyimide resin insulating layer-conductor pattern layer system formed on the surface. Further, 3 is a plurality of semiconductor chips mounted and connected on the surface of the thin film multilayer wiring part 5, and 5 is an airtight seal of the opening 5a on the surface of the seal ring 8, and the semiconductor chip 3 is mounted and connected. A sealing body for enclosing the thin film multilayer wiring portion 2 region, for example, a metal cap, 10 is provided on the outer region surface (or other main surface ... back surface) of the seal ring 8 surface of the ceramic multilayer wiring board 1, An input / output pad electrically connected to the thin film multilayer wiring section 2, and a surface 11 electrically connected to the input / output pad 10 and integrally provided on the ceramic multilayer wiring board 1 by screwing, for example. It is a mountable connector. Here, the input / output pad 10 can be formed, for example, by photolithography while maintaining a predetermined dimensional tolerance. In other words, surface mount connector 11 with a lead pitch of about 0.6 mm.
Can be integrally arranged and mounted by soldering or the like.

【0010】図1において、4は前記薄膜多層配線部2
面上に搭載・接続された複数個の半導体チップ3を薄膜
多層配線部2に電気的に接続するボンディングワイヤ、
7は前記セラミック多層配線板1の他主面(裏面)側
に、たとえばロー付けもしくは高熱伝導グリースや高熱
伝導エポキシ樹脂を介在させたボルト締め付けなどによ
り、一体的に配設させた放熱フィンである。
In FIG. 1, 4 is the thin-film multilayer wiring section 2
Bonding wires for electrically connecting a plurality of semiconductor chips 3 mounted / connected on the surface to the thin film multilayer wiring section 2,
Reference numeral 7 denotes a radiation fin integrally arranged on the other main surface (rear surface) side of the ceramic multilayer wiring board 1 by brazing or bolt tightening with high heat conductive grease or high heat conductive epoxy resin interposed. .

【0011】なお、上記ではセラミック多層配線板1の
シールリング8面の外側領域面に入出力パッド10を配設
し、かつこれに表面実装型コネクタ11を半田付けなどに
より、一体化した構成を例示したが、セラミック多層配
線板1の他主面…裏面に、出力パッド10を配設し、表面
実装型コネクタ11を半田付けなどして一体化した構成と
してもよい。また、このマルチチップモジュールをプリ
ント配線基板に、搭載・実装するに当たって、プリント
配線基板の所要領域面に、そのマルチチップモジュール
が具備している表面実装型コネクタ11に対応する嵌合型
のコネクタを配置・装着しておくと、プリント配線基板
に対するマルチチップモジュールの脱着・交換を容易に
行い得る。
In the above description, the input / output pad 10 is provided on the outer surface of the seal ring 8 of the ceramic multilayer wiring board 1 and the surface mount type connector 11 is integrated with the pad 10 by soldering or the like. Although illustrated, the output pad 10 may be provided on the other main surface ... Back surface of the ceramic multilayer wiring board 1 and the surface mount type connector 11 may be integrated by soldering or the like. When mounting and mounting this multi-chip module on a printed wiring board, a mating type connector corresponding to the surface-mounted connector 11 included in the multi-chip module is mounted on the required area surface of the printed wiring board. By placing and mounting the multi-chip module, it is possible to easily attach and detach the multi-chip module to and from the printed wiring board.

【0012】[0012]

【発明の効果】上記説明から分かるように、本発明に係
るマルチチップモジュールの構成によれば、入出力パッ
ド(入出力端子)を形成するに要する領域面の低減を図
り得るので、マルチチップモジュールの大形化、および
実装・構成する実装回路装置のの大形化を回避し得る。
また、前記多数でかつ狭ピッチの入出力パッドも、表面
実装型コネクタを介してプリント配線基板に接続・実装
されるため、その実装・接続作業も簡略化されるととも
に、脱着・交換も容易でシステムのメンテナス性の大幅
な向上に寄与する。そして、前記表面実装型コネクタに
よる脱着・交換の容易さ、脱着機構の簡素化などはプリ
ント配線基板上での脱着に要するスペースの低減、ひい
ては実装用プリント配線基板の小形化を可能にする。
As can be seen from the above description, according to the structure of the multi-chip module of the present invention, it is possible to reduce the area required for forming the input / output pads (input / output terminals). It is possible to avoid an increase in the size of a mounted circuit device and a size of a mounted circuit device to be mounted / configured.
Further, since the large number of narrow-pitch input / output pads are also connected / mounted to the printed wiring board via the surface mount type connector, the mounting / connecting work is simplified, and the detachment / replacement is easy. Contributes to a significant improvement in system maintainability. Further, the ease of attachment / detachment / replacement by the surface mount type connector, simplification of the attachment / detachment mechanism, and the like enable reduction of the space required for attachment / detachment on the printed wiring board, and eventually downsizing of the mounting printed wiring board.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係るマルチチップモジュールの要部構
成例を示す断面図。
FIG. 1 is a cross-sectional view showing a configuration example of a main part of a multi-chip module according to the present invention.

【図2】本発明に係るマルチチップモジュールの要部構
成例を示す平面図。
FIG. 2 is a plan view showing a configuration example of a main part of a multi-chip module according to the present invention.

【図3】従来のマルチチップモジュールの要部構成を示
す断面図。
FIG. 3 is a cross-sectional view showing a configuration of a main part of a conventional multi-chip module.

【図4】従来のマルチチップモジュールの要部構成を示
す平面図。
FIG. 4 is a plan view showing the main configuration of a conventional multi-chip module.

【符号の説明】[Explanation of symbols]

1…セラミック多層配線基板 2…薄膜多層配線部
3…半導体チップ 4…ボンディンワイヤ 5…封止体(メタルキャッ
プ) 5a…封止体(メタルキャップ)の開口端縁部
6…入出力端子(I/O リード) 7…放熱フィン
8…シールリング(ウエルドリング) 10…入出力
パッド 11…表面実装型コネクタ
1 ... Ceramic multilayer wiring board 2 ... Thin film multilayer wiring section
3 ... Semiconductor chip 4 ... Bonding wire 5 ... Sealing body (metal cap) 5a ... Opening edge of sealing body (metal cap)
6 ... Input / output terminal (I / O lead) 7 ... Radiating fin
8 ... Seal ring (weld ring) 10 ... Input / output pad 11 ... Surface mount type connector

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 セラミック多層配線板と、前記セラミッ
ク多層配線板の一主面の周辺部に一体的に設けられたシ
ールリングと、前記シールリングに囲繞された領域内の
セラミック多層配線板面上に形成された薄膜多層配線部
と、前記薄膜多層配線部面上に搭載・接続された複数個
の半導体チップと、前記シールリング面に開口部が気密
に封着され、半導体チップを搭載・接続した薄膜多層配
線部領域を内封する封止体と、前記セラミック多層配線
板のシールリング面の外側領域面もしくは他主面に配設
されて薄膜多層配線部に電気的に接続する入出力パッド
と、前記入出力パッドに電気的に接続してセラミック多
層配線板に一体的に配設された表面実装型コネクタとを
具備して成ることを特徴とするマルチチップモジュー
ル。
1. A ceramic multilayer wiring board, a seal ring integrally provided on a peripheral portion of one main surface of the ceramic multilayer wiring board, and a ceramic multilayer wiring board surface in a region surrounded by the seal ring. The thin film multi-layer wiring part formed in, the plurality of semiconductor chips mounted and connected on the surface of the thin film multi-layer wiring part, and the opening is hermetically sealed on the seal ring surface to mount and connect the semiconductor chip. And a sealing body for enclosing the thin film multilayer wiring portion area, and an input / output pad disposed on the outside area surface or other main surface of the seal ring surface of the ceramic multilayer wiring board and electrically connected to the thin film multilayer wiring portion. And a surface mount type connector that is electrically connected to the input / output pad and integrally disposed on a ceramic multilayer wiring board.
JP16594492A 1992-06-24 1992-06-24 Multi-chip module Expired - Fee Related JP3162485B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16594492A JP3162485B2 (en) 1992-06-24 1992-06-24 Multi-chip module

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16594492A JP3162485B2 (en) 1992-06-24 1992-06-24 Multi-chip module

Publications (2)

Publication Number Publication Date
JPH0613533A true JPH0613533A (en) 1994-01-21
JP3162485B2 JP3162485B2 (en) 2001-04-25

Family

ID=15821988

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16594492A Expired - Fee Related JP3162485B2 (en) 1992-06-24 1992-06-24 Multi-chip module

Country Status (1)

Country Link
JP (1) JP3162485B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5633620A (en) * 1995-12-27 1997-05-27 Microelectronic Modules Corporation Arc containment system for lightning surge resistor networks
US7507307B2 (en) 2002-06-10 2009-03-24 Jfe Steel Corporation Method for producing cold rolled steel plate of super high strength
WO2010047225A1 (en) * 2008-10-24 2010-04-29 日本圧着端子製造株式会社 Connector

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63111697A (en) * 1986-10-30 1988-05-16 株式会社東芝 Wiring board and manufacture of the same
JPS64794A (en) * 1987-02-26 1989-01-05 Nec Corp Multilayer interconnection board
JPH01118494U (en) * 1988-02-03 1989-08-10
JPH03227045A (en) * 1990-02-01 1991-10-08 Fuji Electric Co Ltd Power module
JPH05211257A (en) * 1991-11-13 1993-08-20 Nec Corp Mounting method of semiconductor integrated circuit
JPH05326776A (en) * 1992-05-14 1993-12-10 Nippon Telegr & Teleph Corp <Ntt> Electronic device mounting structure

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63111697A (en) * 1986-10-30 1988-05-16 株式会社東芝 Wiring board and manufacture of the same
JPS64794A (en) * 1987-02-26 1989-01-05 Nec Corp Multilayer interconnection board
JPH01118494U (en) * 1988-02-03 1989-08-10
JPH03227045A (en) * 1990-02-01 1991-10-08 Fuji Electric Co Ltd Power module
JPH05211257A (en) * 1991-11-13 1993-08-20 Nec Corp Mounting method of semiconductor integrated circuit
JPH05326776A (en) * 1992-05-14 1993-12-10 Nippon Telegr & Teleph Corp <Ntt> Electronic device mounting structure

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5633620A (en) * 1995-12-27 1997-05-27 Microelectronic Modules Corporation Arc containment system for lightning surge resistor networks
US7507307B2 (en) 2002-06-10 2009-03-24 Jfe Steel Corporation Method for producing cold rolled steel plate of super high strength
WO2010047225A1 (en) * 2008-10-24 2010-04-29 日本圧着端子製造株式会社 Connector

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