JPH06137978A - Low temperature pressure measuring device - Google Patents
Low temperature pressure measuring deviceInfo
- Publication number
- JPH06137978A JPH06137978A JP31128392A JP31128392A JPH06137978A JP H06137978 A JPH06137978 A JP H06137978A JP 31128392 A JP31128392 A JP 31128392A JP 31128392 A JP31128392 A JP 31128392A JP H06137978 A JPH06137978 A JP H06137978A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- low temperature
- strain
- sensor
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007789 gas Substances 0.000 claims abstract description 30
- 239000012528 membrane Substances 0.000 claims abstract description 10
- 239000011261 inert gas Substances 0.000 claims abstract description 4
- 239000001307 helium Substances 0.000 description 10
- 229910052734 helium Inorganic materials 0.000 description 10
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 10
- 239000007788 liquid Substances 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 238000001816 cooling Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000012360 testing method Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009510 drug design Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、低温圧力測定装置に関
する。FIELD OF THE INVENTION The present invention relates to a cryogenic pressure measuring device.
【０００２】[0002]
【従来の技術】動的な圧力を測定する手段として、従
来、ひずみゲージや圧電素子を用いた圧力センサーなど
がよく利用されている。しかしながら、この種の圧力セ
ンサーは、低温ガス又は低温液の圧力を測定する場合、
（ａ）常温からの温度変化によるセンサーの電気的物性
の変化、（ｂ）センサー素子を含む構造体の熱ひずみ、
（ｃ）素子周辺の圧力変化などにより測定誤差が大きく
なる。例えば、ひずみゲージ式センサーでは、温度変化
があると、ゲージの抵抗が変化する。この変化は一般に
２ゲージ法又は４ゲージ法などの結線方法により温度補
償されるが、この手段は個々のゲージの温度変化のバラ
ツキまでは補償することができない。また、センサー素
子周辺の圧力は、周辺温度が低下すると、センサー素子
が密閉構造体内にある場合には圧力が低下し、測定すべ
き圧力のほかこの圧力変化が測定値に影響を及ぼす。し
たがって素子周辺の圧力を一定にするため、密閉構造の
センサーでは雰囲気を真空としたり、非密閉型のセンサ
ーでは外気と連結される配管を設けるなどして素子周辺
の圧力を常時一定に保つ工夫がなされている。しかし、
密閉型ではその真空を長時間保持するにはセンサー構造
やメンテナンスに大きな制約がかかり、また外気と連結
する方式では、Ｈ2 Ｏ，ＣＯ2 ，Ｏ2などのガスが低温
でセンサー内で固化又は液化してドリフトを生じさせた
り、センサーを劣化する原因となる。2. Description of the Related Art Conventionally, a pressure sensor using a strain gauge or a piezoelectric element has been often used as a means for measuring a dynamic pressure. However, this kind of pressure sensor, when measuring the pressure of a cryogenic gas or cryogenic liquid,
(A) changes in electrical properties of the sensor due to temperature changes from room temperature, (b) thermal strain of the structure including the sensor element,
(C) A measurement error increases due to a change in pressure around the element. For example, in a strain gauge type sensor, when the temperature changes, the resistance of the gauge changes. This change is generally temperature-compensated by a wire connection method such as a 2-gauge method or a 4-gauge method, but this means cannot compensate for variations in the temperature change of individual gauges. Further, the pressure around the sensor element decreases when the ambient temperature decreases, and the pressure decreases when the sensor element is in the closed structure, and this pressure change influences the measured value in addition to the pressure to be measured. Therefore, in order to keep the pressure around the element constant, it is necessary to keep the pressure around the element constant by using a vacuum atmosphere in a sensor with a closed structure or by providing a pipe connected to the outside air in a non-sealed sensor. Has been done. But,
In the closed type, holding the vacuum for a long time imposes great restrictions on the sensor structure and maintenance, and in the method of connecting with the outside air, gases such as H 2 O, CO 2 , and O 2 solidify in the sensor at low temperature or Liquefaction may cause drift or deteriorate the sensor.
【０００３】[0003]
【発明が解決しようとする課題】このように従来の圧力
センサーでは低温雰囲気で使用する場合、センサー素子
の温度低下による電気的性質の変化，素子雰囲気の圧力
保持，センサー構造の熱変形などにより誤差が大きくな
って微小な圧力変化を精度良く測定することができなか
ったのである。As described above, when the conventional pressure sensor is used in a low temperature atmosphere, an error may occur due to a change in the electrical property of the sensor element due to a temperature decrease, pressure retention in the element atmosphere, thermal deformation of the sensor structure, and the like. It became impossible to measure a minute pressure change with high accuracy.
【０００４】本発明はこのような事情に鑑みて提案され
たもので、圧力センサー及びその周辺の関係部材の温度
変化による影響を受けずに高精度で測定することのでき
る低温圧力測定装置を提供することを目的とする。The present invention has been proposed in view of the above circumstances, and provides a low-temperature pressure measuring device capable of highly accurate measurement without being affected by temperature changes of the pressure sensor and related members around the pressure sensor. The purpose is to do.
【０００５】[0005]
【課題を解決するための手段】そのために本発明は、一
端開口が受圧メンブレンにより気密に閉塞され、他端の
一側に低温ガス入口管が突設されるとともに、他側に低
温ガス出口管が突設された密閉容器と、同密閉容器の内
部に配設され上記受圧メンブレンのひずみに基づいて変
形する起歪板に貼着されたひずみゲージとを具え、上記
ガス入口管及び出口管を経て上記密閉容器の内部に一定
温度，一定圧力の低温不活性ガスを常時供給するように
したことを特徴とする。Therefore, according to the present invention, an opening at one end is airtightly closed by a pressure receiving membrane, a low temperature gas inlet pipe is projectingly provided at one side of the other end, and a low temperature gas outlet pipe is provided at the other side. A protruding closed container, and a strain gauge attached to a strain-flexing plate that is disposed inside the closed container and deforms based on the strain of the pressure-receiving membrane, the gas inlet pipe and the outlet pipe After that, a low temperature inert gas having a constant temperature and a constant pressure is constantly supplied to the inside of the closed container.
【０００６】[0006]
【作用】このような構成によれば、ガス供給口より、一
定温度，一定圧力のガスをセンサー内部に供給するの
で、センサー素子の温度を常時一定に保持することによ
り、温度変化による誤差の発生を防止できる。また、ガ
スとして被測定雰囲気温度より十分低い沸点のガスを使
用することで、センサー内部での空気中のガスの液化や
固着により発生する誤差や、劣化の発生を防止できる。
さらに、センサー構造がほぼ一定の温度となるため、セ
ンサー構造体の熱ひずみによる誤差の発生を抑制するこ
とができる。According to this structure, since the gas having the constant temperature and the constant pressure is supplied to the inside of the sensor through the gas supply port, the temperature of the sensor element is always kept constant, so that the error caused by the temperature change occurs. Can be prevented. Further, by using as the gas a gas having a boiling point sufficiently lower than the measured ambient temperature, it is possible to prevent an error caused by the liquefaction or sticking of the gas in the air inside the sensor and the occurrence of deterioration.
Furthermore, since the temperature of the sensor structure becomes substantially constant, it is possible to suppress the occurrence of an error due to thermal strain of the sensor structure.
【０００７】[0007]
【実施例】本発明の一実施例を図面について説明する
と、図１はその縦断面図、図２は図１の装置を低温液の
低温圧力測定に適用した全体系統図である。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a longitudinal sectional view thereof, and FIG. 2 is an overall system diagram in which the apparatus of FIG. 1 is applied to low temperature pressure measurement of low temperature liquid.
【０００８】まず、センサー部を説明すると、図１にお
いて、一端開口がメンブレン２によって閉塞された密閉
容器９に測定圧がかかると、水平受圧面１と垂直力伝達
棒３を介して水平起歪板４のひずみの変化が発生する。
このひずみを起歪板４の上下面にそれぞれ貼着されたひ
ずみゲージ５により検出すれば、これを電気信号に変換
することにより圧力と比例する信号が得られる。ここで
ガス入口管６から一定温度，一定圧力すなわち一定流量
のヘリウムを常時流入し、これをガス出口管７を経て外
部へ流すことによりひずみゲージ５の温度は一定に保持
することができ、熱出力（温度変化によるみかけのひず
み）の発生が防止される。First, the sensor portion will be described. In FIG. 1, when a measurement pressure is applied to the closed container 9 whose one end opening is closed by the membrane 2, horizontal strain is generated via the horizontal pressure receiving surface 1 and the vertical force transmission rod 3. A change in strain of the plate 4 occurs.
When this strain is detected by the strain gauges 5 attached to the upper and lower surfaces of the strain-flexing plate 4, a signal proportional to the pressure can be obtained by converting this into an electric signal. Here, helium at a constant temperature and a constant pressure, that is, a constant flow rate, is constantly flown in from the gas inlet pipe 6 and is made to flow to the outside through the gas outlet pipe 7, so that the temperature of the strain gauge 5 can be kept constant. Output (apparent strain due to temperature change) is prevented from occurring.
【０００９】次に、図１のセンサー部をタンクの動揺に
伴い発生する内壁面圧の測定に適用した場合を図２につ
いて説明する。同図において、ヘリウム（４°Ｋ）容器
内の液体ヘリウム１１は保冷管１２を通り、冷却管１３
でＬＮ2 よりなる冷媒１４により一定温度に昇温してヘ
リウムはガス化する。このヘリウムガスはバッファータ
ンク１５に一時貯蔵され、同時にこのバッファータンク
１５の圧力は圧力を一定とする圧力調整装置１６とその
制御信号により調整される圧力調整バルブ１７により一
定に保持する。一定温度のヘリウムガスはバッファータ
ンク１５と接続される圧力センサー部１８にそのガス入
口管７を経て導入されたのち、ガス出口管７を経て排出
される。Next, a case where the sensor section of FIG. 1 is applied to the measurement of the inner wall surface pressure generated due to the shaking of the tank will be described with reference to FIG. In the figure, liquid helium 11 in a helium (4 ° K) container passes through a cold insulation pipe 12 and a cooling pipe 13
Then, the temperature is raised to a constant temperature by the refrigerant 14 made of LN 2 and helium is gasified. The helium gas is temporarily stored in the buffer tank 15, and at the same time, the pressure in the buffer tank 15 is kept constant by the pressure adjusting device 16 for keeping the pressure constant and the pressure adjusting valve 17 adjusted by the control signal thereof. Helium gas at a constant temperature is introduced into the pressure sensor portion 18 connected to the buffer tank 15 via the gas inlet pipe 7, and then discharged via the gas outlet pipe 7.
【００１０】このような装置によれば、圧力センサー部
１８は一定圧力に保持されるので、内部が冷却されたこ
とによるセンサー内部１８の圧力降下は発生しない。ま
た、センサー部内部は常時ヘリウムガスで充填されるの
で、大気中の水分やＣＯ2 ，Ｏ2 などのガスの液化や固
化はセンサー１８内部で発生しない。さらに、センサー
内部が常に一定の温度となるので、受圧面１に試験タン
ク１９内の液がかかってもセンサー構造の衝撃熱ひずみ
の発生による起歪板４の変形を小さくすることができ
る。ちなみに、このような実施例において、ＬＮ2 を充
填した試験タンク１９内で発生する圧力変動を測定した
ところ±３ｍｍＡｇの精度で圧力を測定する好結果を得
ることができた。According to such a device, since the pressure sensor section 18 is maintained at a constant pressure, the pressure drop in the sensor inside 18 due to the cooling inside does not occur. Further, since the inside of the sensor unit is always filled with helium gas, liquefaction or solidification of moisture in the atmosphere or gases such as CO 2 and O 2 does not occur inside the sensor 18. Further, since the temperature inside the sensor is always constant, the deformation of the strain plate 4 due to the impact thermal strain of the sensor structure can be reduced even if the liquid in the test tank 19 is applied to the pressure receiving surface 1. By the way, in such an example, when the pressure fluctuation generated in the test tank 19 filled with LN 2 was measured, good results of measuring the pressure with an accuracy of ± 3 mmAg could be obtained.
【００１１】[0011]
【発明の効果】このような装置によれば、従来低温であ
るために測定できなかった低温液化ガス容器内の圧力変
動を高い測定精度で測定可能となり、ＬＮＧ，液化水
素，液化ヘリウムなどの貯蔵容器内での地震時の圧力変
動や、これらの液化ガスの運搬船タンク内の船体の動揺
による圧力変動を実測可能となった。その結果、これら
容器の設計や運用時の監視など、合理的設計や安全性の
向上を図ることができるようになった。According to such an apparatus, the pressure fluctuation in the low temperature liquefied gas container, which could not be measured due to the low temperature in the related art, can be measured with high measurement accuracy, and LNG, liquefied hydrogen, liquefied helium, etc. can be stored. It became possible to measure the pressure fluctuation due to an earthquake in the container and the pressure fluctuation due to the shaking of the hull in the carrier tank of these liquefied gases. As a result, it has become possible to improve the rational design and safety such as the design of these containers and monitoring during operation.
【００１２】要するに、本発明によれば、一端開口が受
圧メンブレンにより気密に閉塞され、他端の一側に低温
ガス入口管が突設されるとともに、他側に低温ガス出口
管が突設された密閉容器と、同密閉容器の内部に配設さ
れ上記受圧メンブレンのひずみに基づいて変形する起歪
板に貼着されたひずみゲージとを具え、上記ガス入口管
及び出口管を経て上記密閉容器の内部に一定温度，一定
圧力の低温不活性ガスを常時供給するようにしたことに
より、圧力センサー及びその周辺の関係部材の温度変化
による影響を受けずに高精度で測定することのできる低
温圧力測定装置を得るから、本発明は産業上極めて有益
なものである。In short, according to the present invention, the opening at one end is airtightly closed by the pressure receiving membrane, the low temperature gas inlet pipe is projected on one side of the other end, and the low temperature gas outlet pipe is projected on the other side. A closed container, and a strain gauge attached to a strain-flexing plate disposed inside the closed container and deformed based on the strain of the pressure-receiving membrane, the closed container through the gas inlet pipe and the outlet pipe. Since a low temperature inert gas with a constant temperature and a constant pressure is constantly supplied to the inside of the chamber, the low temperature pressure can be measured with high accuracy without being affected by the temperature change of the pressure sensor and related members around it. The present invention is extremely useful industrially because a measuring device is obtained.
【図１】本発明の一実施例を示す縦断面図である。FIG. 1 is a vertical sectional view showing an embodiment of the present invention.
【図２】図１の低温圧力測定装置を液化ヘリウムタンク
の動揺に伴い発生する壁面の面圧の測定に適用した場合
の全体系統図である。FIG. 2 is an overall system diagram in the case where the low temperature pressure measuring device of FIG. 1 is applied to the measurement of the surface pressure of the wall surface generated due to the shaking of the liquefied helium tank.
１ 受圧面 ２ メンブレン ３ 力伝達棒 ４ 起歪板 ５ ひずみゲージ ６ ガス入口管 ７ ガス出口管 ８ ケーブル ９ 密閉容器 １１ 液体ヘリウム １２ 保冷管 １３ 冷却管 １４ 低温冷媒 １５ バッファータンク １６ 圧力調整装置 １７ 圧力調整バルブ １８ 圧力センサー部 １９ 試験タンク ２０ 低温液 1 Pressure receiving surface 2 Membrane 3 Force transmission rod 4 Strain plate 5 Strain gauge 6 Gas inlet pipe 7 Gas outlet pipe 8 Cable 9 Airtight container 11 Liquid helium 12 Cooling pipe 13 Cooling pipe 14 Low temperature refrigerant 15 Buffer tank 16 Pressure adjusting device 17 Pressure Adjustment valve 18 Pressure sensor 19 Test tank 20 Low temperature liquid
Claims (1)
閉塞され、他端の一側に低温ガス入口管が突設されると
ともに、他側に低温ガス出口管が突設された密閉容器
と、同密閉容器の内部に配設され上記受圧メンブレンの
ひずみに基づいて変形する起歪板に貼着されたひずみゲ
ージとを具え、上記ガス入口管及び出口管を経て上記密
閉容器の内部に一定温度，一定圧力の低温不活性ガスを
常時供給するようにしたことを特徴とする低温圧力測定
装置。1. A hermetically sealed container in which an opening at one end is airtightly closed by a pressure-receiving membrane, a low temperature gas inlet pipe is projected on one side of the other end, and a low temperature gas outlet pipe is projected on the other side. With a strain gauge attached to a strain-flexing plate that is disposed inside the closed container and deforms based on the strain of the pressure receiving membrane, a constant temperature inside the closed container through the gas inlet pipe and the outlet pipe, A low temperature pressure measuring device characterized in that a low temperature inert gas having a constant pressure is constantly supplied.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31128392A JPH06137978A (en) | 1992-10-27 | 1992-10-27 | Low temperature pressure measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31128392A JPH06137978A (en) | 1992-10-27 | 1992-10-27 | Low temperature pressure measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06137978A true JPH06137978A (en) | 1994-05-20 |
Family
ID=18015275
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31128392A Pending JPH06137978A (en) | 1992-10-27 | 1992-10-27 | Low temperature pressure measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06137978A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100919122B1 (en) * | 2007-11-28 | 2009-09-25 | 한국표준과학연구원 | Pressure measuring device of sealed parts and measuring method thereof |
| JP2011080998A (en) * | 2009-10-07 | 2011-04-21 | Wika Alexander Wiegand Se & Co Kg | Measuring instrument of tube part |
| KR20140077105A (en) * | 2012-12-13 | 2014-06-23 | 사파스고교 가부시키가이샤 | Amplifier-embedded pressure sensor |
| CN116734721A (en) * | 2023-06-28 | 2023-09-12 | 珠海格力电器股份有限公司 | Testing methods for heat output of strain gauges, correction methods for high temperature strain measurement results and stress testing equipment |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4102025B2 (en) * | 1998-06-30 | 2008-06-18 | スミス アンド ネフュー インコーポレーテッド | Intramedullary nail insertion instrument |
-
1992
- 1992-10-27 JP JP31128392A patent/JPH06137978A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4102025B2 (en) * | 1998-06-30 | 2008-06-18 | スミス アンド ネフュー インコーポレーテッド | Intramedullary nail insertion instrument |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100919122B1 (en) * | 2007-11-28 | 2009-09-25 | 한국표준과학연구원 | Pressure measuring device of sealed parts and measuring method thereof |
| JP2011080998A (en) * | 2009-10-07 | 2011-04-21 | Wika Alexander Wiegand Se & Co Kg | Measuring instrument of tube part |
| KR20140077105A (en) * | 2012-12-13 | 2014-06-23 | 사파스고교 가부시키가이샤 | Amplifier-embedded pressure sensor |
| CN116734721A (en) * | 2023-06-28 | 2023-09-12 | 珠海格力电器股份有限公司 | Testing methods for heat output of strain gauges, correction methods for high temperature strain measurement results and stress testing equipment |
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