JPH06155277A - Groove working device for wire for cutting work - Google Patents

Abstract

PURPOSE:To obtain a groove working device which can correctly carry out the control for the depth of a worked groove, has the simple structure, can sufficiently cool the working part, and permits the high working efficiency, as for the groove working device for forming the groove for storing the abrasive grains particularly on the peripheral surface of a wire. CONSTITUTION:A wire feeding-out unit (a) and a wire taking-up unit (b) for taking up a worked wire 20 are set oppositely so as to be synchrnously revolved around a same axis line P, and feeding-out means 15a and 16a for feeding out the wire 20 which is to be worked to the tool of a wire saw on a revolution axis line P at a constant speed are installed on the wire feeding-out unit (a), and the wire taking-up means 15b and 16b which take up the worked wire 20 with a constant tension from over the revolution axis line P are installed on the wire taking-up unit (b). A grinder disc 31 whose shift stop position is controlled in the direction crossing at right angle with the axis line P is arranged between both the units (a) and (b).

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire manufacturing device for a wire saw used for cutting silicon, crystal, etc., and more particularly to a groove processing device for forming a groove serving as an abrasive grain reservoir on the peripheral surface of the wire. Is.

[0002]

2. Description of the Related Art A wire saw using a wire (wire material) such as a piano wire as a tool is used for cutting and grooving a silicon wafer which is a substrate of an LSI or a crystal oscillator for a timepiece. In particular, a multi-wire saw in which one wire travels in a zigzag manner is characterized by being able to efficiently cut brittle materials with a small cutting margin.

There are two types of wire saws, a fixed-abrasive type using a wire having abrasive grains fixed on the surface and a free-abrasive type using a machining liquid mixed with abrasive grains. However, by forming a groove on the peripheral surface of the wire, the groove serves as an abrasive grain reservoir to promote the supply of the abrasive grain to the processing portion, so that the processing efficiency can be improved.

The applicant of the present application is the Japanese Laid-Open Patent Publication No. 63-260758.
In the publication, there is proposed a method and apparatus for forming a spiral groove or a discontinuous peripheral groove on the peripheral surface of a cutting wire. The grooving device proposed here is a wire feeding device that continuously or intermittently runs at a predetermined speed in its longitudinal direction while applying a predetermined tension to a wire that is a material, and a groove on the circumferential surface of this wire. A cutting tool, a tool turning device for turning the tool around the wire in a state where the tool is in contact with the peripheral surface of the wire, and a wire guide device for contacting the wire with the tool at a predetermined pressure. It is a thing.

As a more specific structure in the above publication, a wire is guided by a wire guide block urged by a weight toward a grindstone, and the outer circumference of a disk grindstone rotating around a vertical axis while running the wire. A device for processing a groove in a wire by pressing the wire is disclosed. The grindstone, the weight, and the guide block are mounted on a rotary table whose axis coincides with the traveling path of the wire. There is disclosed a means for forming a spiral groove by rotating the wire into a spiral shape and a discontinuous peripheral groove by intermittently feeding a wire and rotating a table.

[0006]

However, since the conventional groove machining apparatus uses a weight for controlling the machining pressure and the weight is mounted on the rotary table, the depth of the groove to be machined is Is difficult to control and the groove depth is likely to change due to the influence of centrifugal force and the like. In addition, the processing heat tends to harden the wire and make it brittle, but in the above-mentioned device, the cooling liquid is applied to the wire guide block and rotary table to stain the device and hinder the smooth operation of the device. However, there is a problem that the wire cannot be hardened due to the processing heat because it cannot supply a sufficient cooling liquid.

The present invention has been made in order to solve such a problem of the conventional device, and it is possible to accurately control the depth of the groove processed on the peripheral surface of the wire, and the device structure is improved. An object of the present invention is to obtain a groove processing device that is simple and can sufficiently cool the processed portion, and therefore has high processing efficiency.

[0008]

In the apparatus of the present invention, the wire feeding unit a and the wire winding unit b for winding the processed wire 20 are opposed to each other so as to be synchronously rotatable about the same axis P. In the feeding unit a, feeding means 15a, 16 for feeding the wire 20 to be processed into a wire saw tool onto the rotation axis P at a constant speed.
a is provided, and the wire winding unit b is provided with wire winding means 15b and 16b for winding the processed wire 20 from the rotation axis P thereof at a constant tension. The axis P is provided between the units a and b. A configuration is adopted in which a grinding disc 31 whose movement stop position is controlled is arranged in a direction orthogonal to the above.

The wire feeding unit a has, for example, a wire feeding bobbin 15a and a feeding roller 16a mounted on a table 3a which is rotatably supported around an axis P and a driving device for rotating the feeding roller 16a at a predetermined speed. 6a may be provided.
In this case, the wire feeding position of the feeding roller 16a is aligned with the axis P. The wire feeding unit a needs only to have a structure in which the wire 20 can be rotated around the axis P while feeding the wire 20 onto the rotation axis P of the table 3a at a desired speed, and the feeding speed of the wire 20 is equal to that of the feeding bobbin 15a or another. It may be regulated by a guide roller.

The wire winding unit b is capable of freely rotating to receive the winding bobbin 15b for winding the wire with a predetermined tension on the table 3b which is driven to rotate about the axis P and the wire 20 on the rotation axis P of the table 3b. The same configuration can be achieved by mounting the guide roller 16b.
Wire feeding unit a and wire winding unit b
And are driven to rotate in the same direction by the drive motor 11 at the same speed.

Wire 2 from wire feeding unit a
The supply speed of 0 is set to a desired speed by the speed control motor 6a or the like. The wire pulling force of the wire winding unit b is set by the torque motor 6b or the torque brake.

The grinding disk 31 is driven to rotate by a grinding motor 33, and a tool rest 32 having the grinding disk 31 mounted thereon is attached to the wire 2.
A grinding amount adjusting motor 34 that stops and moves and positions in a direction orthogonal to 0 is provided. The grinding amount adjustment motor 34 is
It is controlled by detecting the output torque of the grinding motor 33 and the moving position of the tool rest 32, and controls the pressing force or cutting amount of the grinding disc 31 against the wire 20.

[0013]

By rotating the wire feeding unit a and the wire winding unit b in synchronization, the wire 20 fed from the wire feeding bobbin 15a and wound on the wire winding bobbin 15b is rotated about the axis P. The feed rate in the axial direction of the wire 20 is
It is set by controlling the drive speed of the feed roller 16a and the feed bobbin 15a, and the lead length of the spiral groove processed on the wire 20 is determined by the ratio of the feed speed of the wire and the rotation speed of the units a and b. It When the wire 20 is sent out and the grinding disc 31 is abutted and separated from the wire 20 intermittently,
It is possible to form a discontinuous circumferential groove on the peripheral surface of the wire 20. The tension setting means such as the torque motor 6b and the torque brake of the winding unit b is a wire 20 stretched between the feeding unit a and the winding unit b.
The tension of the wire according to the wire thickness and processing conditions,
The processing force applied to the wire 20 during processing is received by this tension.

In the device of the present invention, the wire 2 to be processed is
While 0 rotates in the horizontal direction while rotating around the axis P, it is processed by the grinding disk 31 whose movement position is controlled in the direction orthogonal to the wire 20, so that the cooling liquid is supplied to the processing position A. It can be easily performed, and it is possible to easily prevent the supplied cooling liquid from being scattered on the movable part of the device and polluting it. Therefore, it is possible to sufficiently supply the cooling liquid to the processing point, and it is possible to avoid the problem that the work becomes hot due to the processing heat and becomes brittle.

Further, in the above apparatus, the feeding speed of the wire 20 is controlled, the tension applied to the wire 20 at the time of working and the positional relationship between the wire 20 and the grinding disk 31 at the time of working or the working force are accurately controlled by electrical control. Since it can be set to, it becomes possible to easily machine a groove having an accurate shape at high speed, and the apparatus itself becomes compact.

[0016]

EXAMPLE An example shown in the drawings will be described below. In FIG. 1, which conceptually shows the entire apparatus of the first embodiment, a frame 1 is provided with two columns 2a and 2b, and a table 3 which is rotatable around the same axis P on the upper part of this column.
a and 3b are individually pivoted. Tables 3a and 3b
And each of the tables 3a and 3b is provided with a hollow shaft 4 and a column 2 as shown in FIG.
A pulley 5 is fixed to a portion of the shaft 4 which is located outside the columns 2a and 2b (a side opposite to the side where the tables 3a and 3b are fixed). The delivery motor 6a (table 3a side) or the winding motor 6b (table 3b side) is attached to the pulley 5, and the output shafts of the motors 6a and 6b penetrate the hollow hole of the shaft 4 to form the table 3a, It protrudes to the 3b side and is converted into rotation in a direction orthogonal to the shaft 4 by the bevel gear device 7.

A table rotation motor 11 is provided on the frame 1.
The drive shaft 12 driven by the motor 11 and the pulleys 5 of the tables 3a and 3b described above are connected by the timing belt 13, and the tables 3a and 3b are rotationally driven in the same direction at the same speed. Has been done. The feeding motor 6a and the winding motor 6b are used for the tables 3a and 3b.
It will rotate together with these motors 6a, 6b
Power is supplied via a known slip ring or the like.

On the opposite surfaces of the tables 3a and 3b,
The brackets 14a and 14b are fixed to each other, the sending bobbin 15a and the pinch roller device 16a are axially attached to the bracket 14a on the table 3a side, and the winding bobbin 15b and the guide roller 16b are axially attached to the bracket 14b on the table 3b side. Has been done. The wire 20 to be processed into the grooved wire for the wire saw has the delivery bobbin 15
It is pulled out from a, is guided by the pinch roller device 16a and the guide roller 16b, and is wound around the winding bobbin 15b.

Pinch roller device 16a and guide roller 1
6b, the wire 20 stretched between the two is the table 3
The position of the wire 20 is guided so as to be on the axis P that coincides with the rotation center axes of a and 3b. The pinch roller device 16a is connected to the output shaft of the feed motor 6a via the belt electric device 8 shown in FIG. 2 and the bevel gear device 7 described above, and feeds the wire 20 at a constant speed. A speed control motor is used as the feeding motor 6a, and the feeding speed of the wire 20 in the axial direction can be freely set by changing the rotation speed of the motor 6a. The sending bobbin 15a is appropriately provided with a brake device 21 to prevent the wire 20 from loosening between the sending bobbin 15a and the pinch roller device 16a.

The guide roller 16b on the table 3b side is pivotally supported in a freely rotating state. On the other hand, take-up bobbin 15
b is a take-up motor 6 via the bevel gear device 7 described above.
A torque motor is used as the winding motor 6b and is biased with a constant torque in the pulling direction of the wire 20. Therefore, the pinch roller device 16a
The wire 20 between the guide roller 16b and the guide roller 16b is stretched with a tension corresponding to the torque of the winding bobbin 15b set by the winding motor 6b. The tension applied to the wire 20 needs to be adjusted according to the thickness of the wire 20 and the processing force of the grinding disc 31 described later, and this tension is set by the torque setting of the winding motor 6b.

Guide pulley 16b and take-up bobbin 15b
A traverser device 22 shown in FIG. 3 is provided between and. The traverser device 22 includes a cam drum 23 that is connected to the take-up bobbin 15b by a rotation transmission mechanism (not shown) to rotate, and a traverser 25 that reciprocates along a guide 24 that is parallel to the axis of the take-up bobbin 15b. The traverser 25 is reciprocally driven by being guided by the cam groove of the cam drum 23, and the traverser 25 is provided with a roller pair 26 for guiding the wire 20. The roller pair 26 is axially attached to the traverser 25 in a freely rotating state, and the traverser 25 moves by the diameter of the wire 20 for each rotation of the winding bobbin 15b. 23 and winding bobbin 15
This is dealt with by changing the speed reduction ratio of the rotation transmission mechanism connecting with b.

At a position between the columns 2a and 2b of the frame 1, there is provided a tool rest 32 which is movable in a direction orthogonal to the rotation axis P of the tables 3a and 3b.
Grinding disk 3 driven to rotate about an axis parallel to the axis P
1 is installed. The grinding disc 31 is rotationally driven by a grinding motor 33 mounted on a tool rest 32. Turret 3
2 is moved and positioned by a feed screw (not shown) driven by a grinding amount adjusting motor 34.

The current of the grinding motor 33 is detected by a sensor (not shown), the detected value is compared with a set value, and the rotation of the grinding amount adjusting motor 34 is controlled by the difference signal. Specifically, for example, a stepping motor is used as the grinding amount adjusting motor 34, the width of the current change of the grinding motor 33 during grinding is set in advance, and the grinding amount is adjusted when the detection value of the sensor exceeds the set width. Adjustment motor 3
4 is controlled by sending a drive pulse for forward rotation or reverse rotation.

Since the machining load applied to the grinding disc 31 and the current value of the grinding motor 33 are in a proportional relationship, the above control allows the groove to be processed under a constant machining load without using a special detection sensor. The apparatus can be controlled so that the machining is performed, and the depth of the groove to be machined can be easily changed by changing the set value of the setter.

The grinding disc 31, the grinding motor 33 and the transmission device 35 between them are provided with a cover 3 as shown in FIGS.
By providing 6 and 37, it is possible to prevent the cooling liquid supplied to the processing position A from entering. In the apparatus of the illustrated embodiment, the tool rest 32 and the grinding motor 33 are located below the grinding disc 31, but these 32 and 33 are placed on the grinding disc 3
It is also possible to arrange it above 1, and also at the processing position A
Between the table and the tables 3a and 3b, the pinch roller device 16
Since it is also possible to easily provide a partition wall provided with a small hole through which the wire 20 stretched is passed between a and the guide roller 16b, it is possible to supply a sufficient amount of cooling liquid to the processing position A. Therefore, the deterioration of the material of the wire 20 due to the processing heat can be avoided.

In the first embodiment described above, the feeding motor 6a and the winding motor 6b are mounted on the table 3.
Although the structure is such that the motors 6a, 6b are rotated together with the motors 3a, 3b, in the second embodiment shown in FIGS.
b is mounted on the frame 1, and the feed-out bobbin 15a and the take-up bobbin 15b are rotationally driven via a differential gear device, which will be described later, built in the shafts 4 of the tables 3a and 3b. In the second embodiment, the rotation center axes of the delivery bobbin 15a and the winding bobbin 15b are aligned with the axis P of the tables 3a and 3b, and the wire 20 drawn out from the delivery bobbin 15a has an L-shape. Guide rollers 41, 42 pivotally supported by the bracket 14a
The guide roller 1 is sent out from the roller 16a onto the axis P through the roller 16a and is axially attached to the bracket 14b on the table 3b side.
6b, traverse device 22, winding bobbin 15
It is wound up in b.

The traverse device 22 of the second embodiment is shown in FIG. 7, in which the rotation of the bobbin shaft (the output shaft of the differential gear device described later) 55 of the winding bobbin 15b causes the screw gear pair 4 to rotate.
3 is transmitted to the worm shaft 44, and the rotation of the worm shaft 44 is greatly reduced by the worm 45 and the wheel 46 and transmitted to the shaft of the cam drum 23. The cam drum 23 is formed by obliquely cutting a hollow cylinder so that the height difference between the highest part and the lowest part is equal to the width of the winding bobbin 15b. Winding bobbin 15 adjacent to cam drum 23
A traverser 25 is slidably mounted on a guide 24 provided parallel to the axis of b, and a cam follower (not shown) axially mounted on the traverser 25 is pressed against the cut end of the cam drum 23 by a spring 47. There is. A roller pair 26 for guiding the wire 20 is axially attached to the traverser 25, and the traverser 25 moves by the diameter of the wire 20 per one rotation of the winding bobbin 15b to wind the wire passing between the roller pair 26. It is wound up on the take-up bobbin 15b in an orderly manner.

The feed motor 6a and the take-up motor 6b are rotated by the table 3a via the synchronous belt 51.
It is transmitted to the pulley 52 coaxial with the axis of the shaft 4 of 3b. The pulley 52 is fixed to the input shaft 54 of the differential gear device 53 shown in FIG. 8, and the feeding drum 15a and the winding drum 15b are fixed to the output shaft 55. The input shaft 54 and the output shaft 55 are individually rotatably mounted on the shaft center of the shaft 4, and the first sun gear 56 is attached to the input shaft 54.
However, the second sun gears 57 are fixed to the output shafts 55, respectively. A first planetary gear 58 and a second planetary gear 59 are rotatably supported at the eccentric position of the shaft 4 so that the first planetary gear 58 and the first sun gear 56 mesh with each other and the second planetary gear 58 is engaged. The gear 59 and the second sun gear 57 mesh with each other.
Further, a first transmission gear 61 is fixed to the shaft of the first planetary gear 58, and a second transmission gear 62 is fixed to the shaft of the second planetary gear 59. The first transmission gear 61 and the second transmission gear 62 And are in mesh. The first sun gear 56 and the second sun gear 57 have the same number of teeth, the first planetary gear 58 and the second planetary gear 59 have the same number of teeth, and the first transmission gear 61 has the second number of teeth.
It is half the number of teeth of the transmission gear 62.

In the differential gear 53, the input shaft 54
Is fixed and the shaft 4 (that is, the tables 3a and 3b) is rotated at the number of rotations α, the output shaft 55 (hence the bobbin 15
a) is rotationally driven by α. Therefore, when the input shaft 54 is stopped, the table 3a and the delivery bobbin 15a rotate synchronously to stop the delivery of the wire. Input shaft 5
4 is rotated at a rotational speed β in the direction opposite to the shaft 4, the output shaft 55 rotates at α + β / 2, and the delivery bobbin 15a relatively rotates with respect to the table 3a at a rotational speed difference β / 2, and the wire 20 is rotated. Will be driven.

Such a differential gear device 53 is mounted on the shaft 4 to rotate the feed bobbin 15a and the take-up bobbin 15b because the pulley 52 driven by the feed motor 6a and the take-up motor 6b is used. When the structure is directly connected to the delivery bobbin 15a and the winding bobbin 15b, it is necessary to use a motor having a high rotation speed as the motors 6a and 6b, the motors 6a and 6b become large, and the motor 6a during acceleration / deceleration, Due to the difference in acceleration characteristics and deceleration characteristics between the 6b, a large rotation difference occurs between the delivery bobbin 15a and the winding bobbin 15b, and there is a risk that the wire may loosen and come off the guide roller, or the wire may become entangled. is there.

In the above description of the embodiment, the depth of the groove to be machined is controlled by detecting the drive current value of the grinding motor. However, a torque detecting device is provided on the output shaft of the grinding motor 33 to provide a grinding disc. The processing reaction force acting on 31 can be directly detected by the axial torque, and a backup member 38 (see FIG. 1) for preventing escape of the wire 20 is provided to control the groove depth by controlling the position of the tool rest 32. It is also possible. It is also possible to carry out wet processing by rotating the grinding disc 31 half-immersed in the light oil pad to keep the grinding disc 31 always wet.

[0032]

According to the apparatus of the present invention described above,
It is possible to more accurately control the shape of the groove machined on the peripheral surface of the tool wire and prevent deterioration of the material of the wire due to machining heat. Further, since the processing heat can be sufficiently dissipated by the cooling liquid, the processing can be performed at higher speed and the structure of the apparatus can be simplified.

[Brief description of drawings]

FIG. 1 is an overall perspective view of a first embodiment.

FIG. 2 is a sectional view of the wire feeding unit of the first embodiment.

FIG. 3 is a perspective view of the wire winding unit according to the first embodiment.

FIG. 4 is a plan view of the turret.

FIG. 5: Side view of the turret

FIG. 6 is an overall perspective view of a second embodiment.

FIG. 7 is a perspective view of a wire winding unit according to a second embodiment.

FIG. 8 is a perspective view showing a differential drive unit according to a second embodiment.

[Explanation of symbols]

 P axis a Wire feeding unit b Wire winding unit 3a Table 3b Table 6a Speed control motor 6b Torque motor 15a Wire feeding bobbin 15b Winding bobbin 16a Pinch roller device 16b Guide roller 20 Wire 31 Grinding disk

Claims (2)

[Claims] 1. A wire feeding unit (a) and a wire winding unit (b) for winding the processed wire (20) face each other about the same axis (P) so as to be rotatable synchronously.
The wire feeding unit (a) is provided with a feeding means (15a, 16a) for feeding the wire (20) to be processed into the tool of the wire saw onto the rotating axis (P) at a constant speed, and the wire winding unit (b) is Wire winding means (15) that winds the processed wire (20) from the rotation axis (P) with a constant tension.
b, 16b) is provided, and a grinding disk (31) whose movement stop position is controlled is arranged between the units (a), (b) in a direction orthogonal to the axis (P), and the cutting process is performed. Wire groove processing equipment. 2. One of the tables is provided with two tables (3a) and (3b) which are synchronously driven facing each other about the same axis (P).
Wire feed bobbin (15a) and feed roller (3a)
(16a) and a speed control motor (6a) for driving the feed roller (16a), and the other side (3b) of the table is a winding bobbin (15b) for winding the wire with a predetermined tension. ) And wire (20) to table (3b)
Freely rotatable guide rollers received on the rotation axis (P) of
(16b) and a torque motor (6b) or a torque brake for rotating and energizing the winding bobbin (15b) are provided.