JPH0618585Y2 - Light irradiator - Google Patents

Light irradiator

Info

Publication number
JPH0618585Y2
JPH0618585Y2 JP1989088071U JP8807189U JPH0618585Y2 JP H0618585 Y2 JPH0618585 Y2 JP H0618585Y2 JP 1989088071 U JP1989088071 U JP 1989088071U JP 8807189 U JP8807189 U JP 8807189U JP H0618585 Y2 JPH0618585 Y2 JP H0618585Y2
Authority
JP
Japan
Prior art keywords
shaped
mirror
light
long plate
lamp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989088071U
Other languages
Japanese (ja)
Other versions
JPH0332942U (en
Inventor
高尚 上野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Priority to JP1989088071U priority Critical patent/JPH0618585Y2/en
Publication of JPH0332942U publication Critical patent/JPH0332942U/ja
Application granted granted Critical
Publication of JPH0618585Y2 publication Critical patent/JPH0618585Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Coating Apparatus (AREA)
  • Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Description

【考案の詳細な説明】 [産業上の利用分野] この考案は、例えばフォトレジスト,光硬化型のペイン
ト,インク,バインダ等の被処理物を主として紫外線を
中心とした光によって処理するために用いられる光照射
器に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention is used for treating an object to be treated such as a photoresist, a photo-curable paint, an ink, a binder, etc., mainly with light mainly including ultraviolet rays. The present invention relates to a light irradiator.

[従来の技術] 高圧水銀灯等のランプから発生する紫外線を中心とした
光を利用して、フォトレジスト,光硬化型のペイント,
インク,バインダ等の被処理物を光処理する装置におい
て、光処理に必要な波長の光(主として紫外線)を被処
理物に照射することが最近、ますます重要になってきて
いる。
[Prior Art] Photoresist, photo-curable paint, using mainly ultraviolet rays generated from a lamp such as a high pressure mercury lamp,
In an apparatus that optically processes an object to be processed such as ink and binder, it has recently become more and more important to irradiate the object to be processed with light having a wavelength required for the optical processing (mainly ultraviolet light).

これら光処理を行う装置の中で、光照射のためのスペー
スは限られたものであるので、光照射器の構造をコンパ
クトにする試みが従来からなされている。
Since the space for irradiating light is limited in the devices that perform these light treatments, attempts have conventionally been made to make the structure of the light irradiator compact.

第3図(イ),(ロ),(ハ),(ニ)は従来の光照射器の主要部の概
略構成を示す図で、いずれもシャッタ機構を工夫して光
照射器をコンパクトにしたものである。
3 (a), (b), (c), and (d) are diagrams showing the schematic configuration of the main part of the conventional light irradiator, and in each case, the light irradiator is made compact by devising the shutter mechanism. It is a thing.

第3図において、1は棒状のランプ、2′aはブライン
ド式のシャッタ、2′bは扉式のシャッタ、2′cは樋
状のミラー兼用のシャッタ、2′dは反射鏡回転式のシ
ャッタ、3′は樋状のミラー、4は排気ダスト、5は光
照射処理される被照射物のパスラインである。
In FIG. 3, 1 is a rod-shaped lamp, 2'a is a blind type shutter, 2'b is a door type shutter, 2'c is a gutter-shaped shutter also serving as a mirror, and 2'd is a reflecting mirror rotating type. A shutter 3'is a trough-shaped mirror, 4 is exhaust dust, and 5 is a path line of an object to be irradiated with light.

第3図(イ),(ロ),(ハ),(ニ)において、パスライン5上の被
照射物に対して、ランプ1からの光を照射したり、遮断
したりするために、同図(イ)ではブラインド式のシャッ
タ2′aを開閉することにより行い、同図(ロ)では扉式
のシャッタ2′bを開閉することにより行い、同図(ハ)
では樋状のミラー兼用のシャッタ2′cを180°に回転
させることにより行い、同図(ニ)では平面鏡よりなる回
転式のシャッタ2′dを矢印の方向に90°回転させるこ
とにより行うものである。
3 (a), (b), (c), and (d), in order to irradiate or block the light from the lamp 1 with respect to the irradiation target on the pass line 5, In Fig. 1 (a), the blind type shutter 2'a is opened and closed, and in Fig. 2 (b), the door type shutter 2'b is opened and closed.
In this case, the shutter 2'c also used as a gutter-shaped mirror is rotated by 180 °. In the same figure (d), the rotary shutter 2'd made of a plane mirror is rotated by 90 ° in the direction of the arrow. Is.

上記の従来の光照射器はいずれも小型化という点で、次
の各理由から必ずしも満足すべきものではない。例え
ば、第3図(イ),(ロ)の光照射器はブラインド式のシャッ
タまたは扉式のシャッタの部分に、余分なスペースをと
られるので空間の節約にはならず、光照射器と被照射物
との距離が長くなってしまう。その上、ブラインド式の
シャッタの場合、シャッタが開いた時点でも光を一部遮
断または反射することになるので光損失がある。また、
第3図(ニ)の光照射器は反射鏡回転式のシャッタ部分に
余分なスペースをとられるので、光照射器と被照射物と
の距離が長くなってしまう。さらに第3図(ハ)の光照射
器は光照射器と被照射物との距離が長く、ミラー2′c
が180°回転するためのスペースが必要で、同様にあま
り省スペース化できない。
The above conventional light irradiators are not necessarily satisfactory in terms of downsizing for the following reasons. For example, the light irradiator shown in FIGS. 3 (a) and 3 (b) does not save space because it requires extra space in the blind shutter or the door shutter, so that the light irradiator and the shutter are not covered. The distance to the illuminated object becomes longer. In addition, in the case of a blind shutter, some light is blocked or reflected even when the shutter is opened, resulting in light loss. Also,
In the light irradiator shown in FIG. 3D, an extra space is provided in the shutter part of the rotating mirror, so that the distance between the light irradiator and the object to be irradiated becomes long. Further, in the light irradiator shown in FIG. 3C, the distance between the light irradiator and the object to be irradiated is long, and the mirror 2'c
Needs space to rotate 180 degrees, but it can't save much space as well.

そこで、本願出願人と同一の出願人に係る特願昭63-228
835号などによって、樋状ミラーを2枚の長板状ミラー
で構成し、各々の長板状ミラーをランプ長手方向を軸と
して揺動可能にし、シャッタ機能を持たせることで小型
化する技術が開示されている。
Therefore, Japanese Patent Application No. 63-228 relating to the same applicant as the applicant of the present application
According to No. 835, a technology for downsizing a gutter-shaped mirror with two long plate-shaped mirrors and making each long plate-shaped mirror swingable around the lamp longitudinal direction and having a shutter function was proposed. It is disclosed.

[考案が解決しようとする課題] 本願の考案は、上記出願に開示された技術の改良に係
り、2枚の長板状ミラーの揺動により小型化を図りつ
つ、閉時の光漏れが少なく、かつ開時には光の利用効率
の良い光照射器の提供を目的とする。
[Problems to be Solved by the Invention] The invention of the present application relates to an improvement of the technology disclosed in the above-mentioned application, and achieves miniaturization by swinging two long plate-shaped mirrors while reducing light leakage when closed. In addition, it is an object of the present invention to provide a light irradiator with high light utilization efficiency when opened.

[課題を解決するための手段] 上記の目的を達成するために、この考案の光照射器は、
断面楕円樋状集光鏡と、この断面楕円樋状集光鏡の第1
焦点の位置に配置される棒状のランプと、これらを収め
た灯体とよりなる光照射器において、前記断面楕円樋状
集光鏡は、ランプ長手方向に長いスリットを残して配置
される2枚の長板状ミラーからなり、これら長板状ミラ
ーには、ランプ長手方向を軸にして揺動させることによ
り前記ランプからの光が灯体外に出射するのを遮断する
揺動駆動機構が設けられ、かつ各長板状ミラーの光出射
側の端部には、樋状表面に対して傾斜または段差を有し
ていて、長板状ミラーが断面楕円集光鏡として機能した
際は、この楕円集光鏡の第2焦点と有効反射面の最下点
とを結ぶ直線と前記長板状ミラーがランプを包囲する領
域に進入せず、長板状ミラーが遮光手段として機能した
際は、各長板状ミラーが相手側と接触あるいは重なり合
う遮光体を設けて、前記第2焦点に所定の照度を得るよ
う構成したものである。
[Means for Solving the Problems] In order to achieve the above object, the light irradiator of the present invention comprises:
The elliptical gutter-shaped converging mirror in section and the first
In a light irradiator including a rod-shaped lamp arranged at a focal point and a lamp body containing these, the elliptic gutter-shaped cross-section focusing mirror has two slits arranged with a long slit in the lamp longitudinal direction. These long plate-shaped mirrors are provided with a rocking drive mechanism that blocks the light from the lamp from going out of the lamp body by rocking the long plate mirrors around the longitudinal axis of the lamp. In addition, the end of each long plate-shaped mirror on the light emitting side has an inclination or a step with respect to the gutter-shaped surface, and when the long plate-shaped mirror functions as an elliptical cross-section condensing mirror, When the long plate mirror does not enter the area surrounding the lamp and the straight line connecting the second focus of the condenser mirror and the lowest point of the effective reflection surface and the long plate mirror functions as the light shielding means, Providing a light shield that allows the long plate-shaped mirror to contact or overlap the other side Those configured to obtain a predetermined illumination intensity to the second focal point.

[作用] 本考案は、上記の構成を有することにより小型で、その
上、光の利用効率は高く光漏れの少ない構造である。
[Operation] The present invention is a structure having the above-described configuration, which is small in size, and has high light utilization efficiency and low light leakage.

[実施例] 第1図(イ),(ロ),(ハ)はこの考案の一実施例である光照射
器における主要構成の概略を示す図で、同図(イ)は2枚
のシャッタ兼用の長板状ミラーが開いた状態を示した断
面図、同図(ロ)は前記シャッタ兼用の長板状ミラーが閉
じた状態を示した断面図、同図(ハ)は一方の長板状ミラ
ーの詳細を示す斜視図である。
[Embodiment] FIGS. 1 (a), (b) and (c) are diagrams showing the outline of the main configuration of a light irradiator according to an embodiment of the present invention. FIG. 1 (a) shows two shutters. Sectional view showing a state in which the long plate mirror for combined use is opened, the same figure (b) is a sectional view showing a state in which the long plate mirror for combined use with the shutter is closed, and the same figure (c) is one long plate It is a perspective view which shows the detail of a circular mirror.

第1図(イ),(ロ),(ハ)において、10は灯体、11はこの
灯体10の底部に設けられた光照射口、12は灯体10
内をランプ1を収めた部分と不図示のブロアに連通する
風洞19とに仕切る仕切板、12a,12bはこの仕切
板に設けられたそれぞれスリット状の通風孔、13,1
4はランプ1の管壁に一定の風を流すための吸引片、1
5,16は長板状ミラーで、また、この長板状ミラー1
5,16はシャッタを兼用しており、15a,16aは
これら長板状ミラー15,16がシャッタの機能を果し
たとき、ランプ1の光が漏れないようにした遮光体、1
7は長板状ミラー15を揺動させるためのアクチュエー
タで、18はのシャフトである。また、15b,16b
は各長板状ミラー15,16の最下端に設けられた遮光
体である。
In FIGS. 1 (a), (b), and (c), 10 is a lamp body, 11 is a light irradiation opening provided at the bottom of the lamp body 12, and 12 is the lamp body 10.
A partition plate for partitioning the inside into a portion accommodating the lamp 1 and a wind tunnel 19 communicating with a blower (not shown), and 12a and 12b are slit-like ventilation holes provided in the partition plate, and 13 and 1, respectively.
Reference numeral 4 is a suction piece for flowing a constant wind on the tube wall of the lamp 1.
Reference numerals 5 and 16 are long-plate mirrors, and this long-plate mirror 1
Reference numerals 5 and 16 also serve as shutters, and 15a and 16a are light shields for preventing the light of the lamp 1 from leaking when the long plate-shaped mirrors 15 and 16 function as shutters.
Reference numeral 7 is an actuator for swinging the long plate-shaped mirror 15, and reference numeral 18 is a shaft. Also, 15b, 16b
Is a light shield provided at the lowermost end of each of the long plate mirrors 15 and 16.

第1図の光照射器において、シャッタ兼用の2枚の長板
状ミラー15,16が開いた同図(イ)のような状態のと
き、この長板状ミラー15,16は楕円集光鏡としての
働きをして、光源であるランプ1の光芒の中心はこれら
長板状ミラー15,16からなる楕円集光鏡の第1焦点
に配置されている。
In the light irradiator shown in FIG. 1, when the two long plate-shaped mirrors 15 and 16 that also serve as shutters are opened as shown in FIG. 1B, the long plate-shaped mirrors 15 and 16 are elliptical focusing mirrors. The center of the light beam of the lamp 1 serving as the light source is located at the first focal point of the elliptical focusing mirror composed of the long plate mirrors 15 and 16.

また、この光照射器は狭いスペース内での取付けを余儀
なくされているので、2枚の長板状ミラー15,16は
各々別個に揺動駆動機構を有しており、例えば、長板状
ミラー15は第1図(ハ)に示すよう、アクチュエータ1
7によってシャフト18を介して図中点線のように揺動
されて、第1図(イ)のシャッタ開の状態から同図(ロ)のシ
ャッタ閉の状態、また逆に同図(ロ)の閉状態から同図(イ)
の開状態になる。第1図(ハ)には一方の長板状ミラー1
5のみの揺動駆動機構を示しているが、他方の長板状ミ
ラー16も同様は動作をして、第1図(イ)から同図(ロ)、
あるいは同図(ロ)から同図(イ)の動作をして、2枚の長板
状ミラー15,16によって楕円集光鏡(第1図(イ))
及びシャッタ(第1図(ロ))の2つの役割を果たしてい
る。
Further, since this light irradiator is obliged to be installed in a narrow space, the two long plate-shaped mirrors 15 and 16 each have a swing drive mechanism, for example, a long plate-shaped mirror. 15 is an actuator 1 as shown in FIG.
7 is oscillated through the shaft 18 as shown by the dotted line in the figure, and from the shutter open state in FIG. 1 (a) to the shutter closed state in FIG. 1 (b), and vice versa. From the closed state (a)
Will be in the open state. One long plate-shaped mirror 1 is shown in FIG.
Although only the rocking drive mechanism 5 is shown, the other long plate-shaped mirror 16 operates in the same manner, and FIG. 1 (a) to FIG.
Alternatively, the operation shown in (b) to (a) of FIG. 1 is performed, and the elliptical focusing mirror (FIG. 1 (a)) is formed by the two long plate-shaped mirrors 15 and 16.
And a shutter (Fig. 1 (b)).

第2図は遮光体の設け方についての説明図である。本実
施例にように、断面楕円樋状集光鏡により棒状のランプ
1からの光を集光させる場合は、断面楕円樋状集光鏡の
第1焦点fの位置にランプ1の光芒中心を配置し、他
方、第2焦点fの位置にワーク搬送ラインが位置する
よう構成される。搬送ライン上を搬送されるワークがど
のくらいの光量の光を受けるかは、通常第2焦点f
の照度は高いことが望ましい。ここで、第2焦点f
おける照度は、ランプ1の電力が一定の場合、断面楕円
樋状集光鏡の有効に光を反射・集光し得る面(有効反射
面という)の面積に依存する。従って、第2図によって
説明すれば、照射距離(即ち、焦点距離)及びランプの
電力が一定の場合には、高さhを高くすれば、第2焦点
における照度を高めることができる。
FIG. 2 is an illustration of how to provide a light shield. As in this embodiment, when the light from the rod-shaped lamp 1 is condensed by the elliptical cross-section condensing mirror, the light beam center of the lamp 1 is located at the position of the first focus f 1 of the elliptical cross-section condensing mirror. On the other hand, while the work transfer line is positioned at the position of the second focus f 2 . It is generally desirable that the illuminance at the second focal point f 2 is high to determine how much light the work conveyed on the conveyance line receives. Here, the illuminance at the second focal point f 2 depends on the area of the surface (referred to as an effective reflection surface) of the elliptic cross-section condenser mirror that can effectively reflect and condense light when the power of the lamp 1 is constant. To do. Therefore, referring to FIG. 2, when the irradiation distance (that is, the focal length) and the power of the lamp are constant, the illuminance at the second focus f 2 can be increased by increasing the height h.

しかし一方、本実施例のように、断面楕円樋状集光鏡を
2枚の長板状ミラー15,16により構成し、揺動駆動
機構により揺動させてシャッタ兼用させる場合には、上
記第2図の高さhを高くしてしまうと、それだけ揺動の
ためのスペースが必要となり、光照射器の小型化が達成
できなくなる。それ故、有効反射面の高さhは、必要な
照度と必要な小型化の度合との兼ねあいで適宜決定され
る。
On the other hand, in the case where the elliptical gutter-shaped converging mirror having the cross section is composed of two long plate-shaped mirrors 15 and 16 as in the present embodiment and is made to swing by the swing drive mechanism so as to be used also as the shutter, If the height h in FIG. 2 is increased, a space for swinging is required, and the size reduction of the light irradiator cannot be achieved. Therefore, the height h of the effective reflection surface is appropriately determined in consideration of the required illuminance and the required degree of miniaturization.

この場合、断面楕円樋状集光鏡の有効反射面rと、有効
反射面の最下点T,T′と第2焦点fとを結ぶ直線と
によって囲まれる領域は、第2焦点fでの照度に寄与
する光線が通過する領域(以下、有効光線領域という)
であり、この有効光線領域内には何の遮蔽物もないこと
が望ましい。従って、第1図(ロ)に示す閉時の状態にお
いて光漏れ防止に必要な遮光体15a,16aも、この
有効光線領域外に配置されることが望ましい。具体的に
は、第2図に示すAのようでなく、Bのように配置する
ことが望ましい。ただ、第1図(ロ)に示す閉時の遮光性
や揺動のためのスペースを極力小さくするという要請か
ら、本実施例では傾斜面15b,16bが前記最下点
T,T′と第2焦点fとを結んだ直線上に配置される
ように構成される。従って、実用新案登録請求の範囲に
いう「所定の角度」とは、第2図に示す直線TfとB
のように設けられる遮光体15a,傾斜面15b(第1
図に図示)とのなす角4を指す。
In this case, a region surrounded by the effective reflection surface r of the elliptical converging mirror having a cross section and the straight line connecting the lowest points T, T ′ of the effective reflection surface and the second focus f 2 is the second focus f 2 The area through which the rays that contribute to the illuminance pass (hereinafter referred to as the effective ray area)
It is desirable that there is no shield in this effective ray area. Therefore, it is desirable that the light shields 15a and 16a necessary for preventing light leakage in the closed state shown in FIG. Specifically, it is desirable to dispose not as A shown in FIG. 2 but as B. However, in the present embodiment, the inclined surfaces 15b and 16b are located at the lowest points T and T'and the first point T and T ', respectively, in order to minimize the light shielding property at the time of closing shown in FIG. The two focal points f 2 are arranged on a straight line. Therefore, the "predetermined angle" referred to in the claims for utility model registration means the straight line Tf 1 and B shown in FIG.
And the inclined surface 15b (first
(Shown in the figure).

このような傾斜面15b,16bを有する遮光体15
a,16aは、長板状ミラーと一体成型により設けられ
ている。ネジ止め等により設けることも可能であるが、
熱膨張による変形が生じたり、長時間の開閉動作の繰り
返しによって、ネジが弛んで被照射処理物中に落下して
被照射処理物を損うこともないので好適である。
Light-shielding body 15 having such inclined surfaces 15b and 16b
The a and 16a are integrally formed with the long plate mirror. It can be installed by screwing, etc.,
This is preferable because deformation due to thermal expansion does not occur, and screws do not loosen and fall into the object to be irradiated due to repeated opening / closing operations, which damages the object to be irradiated.

[考案の効果] 以上説明したとおり、この考案の光照射器の断面楕円樋
状集光鏡と、この断面楕円樋状集光鏡の第1焦点の位置
に配置される棒状のランプと、これらを収めた灯体とよ
りなる光照射器において、前記断面楕円樋状集光鏡は、
ランプ長手方向に長いスリットを残して配置される2枚
の長板状ミラーからなり、これら長板状ミラーには、ラ
ンプ長手方向を軸にして揺動させることにより前記ラン
プからの光が灯体外に出射するのを遮断する揺動駆動機
構に設けられ、かつ各長板状ミラーの光出射側の端部に
は、樋状表面に対して傾斜または段差を有していて、長
板状ミラーが断面楕円集光鏡として機能した際は、この
楕円集光の第2焦点と有効反射面の最下点とを結ぶ直線
と前記長板状ミラーがランプを包囲する領域に進入せ
ず、長板状ミラーが遮光手段として機能した際は、各長
板状ミラーが相手側と接触あるいは重なり合う遮光体を
設けて、前記第2焦点に所定の照度を得るように構成し
たので、光の利用効率を最大にして遮光効果に優れ、そ
の上、狭いスペースでの使用が可能になった。
[Effect of the Invention] As described above, the ellipse-shaped gutter-shaped converging mirror of the light irradiator of the present invention, the rod-shaped lamp arranged at the position of the first focal point of the elliptic-shaped gutter-shaped collecting mirror of the cross-section, In the light irradiator consisting of a lamp body containing the
It consists of two long plate-shaped mirrors arranged with a long slit left in the lamp longitudinal direction, and these long plate-shaped mirrors are oscillated about the lamp longitudinal direction so that the light from the lamp is outside the lamp body. The long plate-shaped mirrors are provided in a swing drive mechanism that blocks light from being emitted to the long plate-shaped mirrors, and the end of each long plate-shaped mirror on the light emission side has an inclination or step with respect to the gutter-shaped surface. Function as a cross-section elliptical focusing mirror, the straight line connecting the second focus of this elliptical focusing and the lowest point of the effective reflection surface and the long plate-shaped mirror do not enter the area surrounding the lamp, When the plate-shaped mirrors function as the light-shielding means, each long-plate-shaped mirror is provided with a light-shielding member that comes into contact with or overlaps with the other side so as to obtain a predetermined illuminance at the second focal point. To maximize the light-shielding effect, and also in a narrow space The use of has become possible.

【図面の簡単な説明】[Brief description of drawings]

第1図(イ),(ロ),(ハ)はの考案の一実施例である光照射器
における主要構成の概略を示す図で、同図(イ)は2枚の
シャッタ兼用の長板状ミラーが開いた状態を示した断面
図、同図(ロ)は前記シャッタ兼用の長板状ミラーが閉じ
た状態を示した断面図、同図(ハ)は前記シャッタ兼用の
長板状ミラーの詳細を示す斜視図、第2図は遮光体の設
け方についての説明図、第3図(イ),(ロ),(ハ),(ニ)は従来
の光照射器の主要部の概略構成を示す図である。 図中. 1:ランプ、10:灯体 11:光照射口、12:仕切板 13,14:吸引片 15,16:長板状ミラー 15a,16a:遮光体 15b,16b:傾斜面 17:アクチュエータ 18:シャフト
FIGS. 1 (a), (b), and (c) are diagrams showing the outline of the main configuration of a light irradiator according to an embodiment of the invention, and FIG. 1 (a) shows a long plate that also serves as two shutters. -Shaped mirror showing the opened state, the same figure (b) is a sectional view showing the state where the long plate mirror also serving as the shutter is closed, the same figure (c) is the long plate mirror also serving as the shutter Fig. 2 is a perspective view showing the details of Fig. 2, Fig. 2 is an explanatory diagram of how to provide a light shield, and Figs. It is a figure which shows a structure. In the figure. 1: Lamp, 10: Light body 11: Light irradiation port, 12: Partition plate 13, 14: Suction piece 15, 16: Long plate mirror 15a, 16a: Light-shielding body 15b, 16b: Inclined surface 17: Actuator 18: Shaft

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.5 識別記号 庁内整理番号 FI 技術表示箇所 H01L 21/027 ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 5 Identification code Office reference number FI technical display location H01L 21/027

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 【請求項1】断面楕円樋状集光鏡と、 この断面楕円樋状集光鏡の第1焦点の位置に配置される
棒状のランプと、 これらを収めた灯体とよりなる光照射器において、前記
断面楕円樋状集光鏡は、ランプ長手方向に長いスリット
を残して配置される2枚の長板状ミラーからなり、 これら長板状ミラーには、ランプ長手方向を軸にして揺
動させることにより前記ランプからの光が灯体外に出射
するのを遮断する揺動駆動機構が設けられ、 かつ各長板状ミラーの光出射側の端部には、樋状表面に
対して傾斜または段差を有していて、 長板状ミラーが断面楕円集光鏡として機能した際は、こ
の楕円集光鏡の第2焦点と有効反射面の最下点とを結ぶ
直線 と前記長板状ミラーがランプを包囲する領域に進入せ
ず、 長板状ミラーが遮光手段として機能した際は、各長板状
ミラーが相手側と、 接触あるいは重なり合う遮光体を設けて、 前記第2焦点に所定の照度を得るよう構成したことを特
徴とする光照射器。
1. A light irradiator comprising an elliptical gutter-shaped converging mirror having a cross section, a rod-shaped lamp arranged at a first focal point of the elliptical gutter-shaped converging mirror having a cross section, and a lamp body containing these. The elliptical gutter-shaped condenser mirror in section is composed of two long plate-shaped mirrors arranged with a long slit left in the lamp longitudinal direction, and these long plate-shaped mirrors swing about the lamp longitudinal direction. By so doing, a swing drive mechanism is provided to block the light from the lamp from going out of the lamp body, and the end of each long plate mirror on the light exit side is inclined or inclined with respect to the gutter-shaped surface. When the long plate-shaped mirror has a step and functions as an elliptical focusing mirror in cross section, the straight plate connecting the second focal point of the elliptical focusing mirror and the lowest point of the effective reflection surface and the long plate-shaped mirror. Did not enter the area surrounding the lamp, and the long plate-shaped mirror functioned as a light blocking means. In this case, the light irradiator is characterized in that each of the long plate-shaped mirrors is provided with a light-shielding member that comes into contact with or overlaps with the other side so as to obtain a predetermined illuminance at the second focus.
JP1989088071U 1989-07-28 1989-07-28 Light irradiator Expired - Lifetime JPH0618585Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989088071U JPH0618585Y2 (en) 1989-07-28 1989-07-28 Light irradiator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989088071U JPH0618585Y2 (en) 1989-07-28 1989-07-28 Light irradiator

Publications (2)

Publication Number Publication Date
JPH0332942U JPH0332942U (en) 1991-03-29
JPH0618585Y2 true JPH0618585Y2 (en) 1994-05-18

Family

ID=31637704

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989088071U Expired - Lifetime JPH0618585Y2 (en) 1989-07-28 1989-07-28 Light irradiator

Country Status (1)

Country Link
JP (1) JPH0618585Y2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09206653A (en) * 1996-02-07 1997-08-12 Japan Storage Battery Co Ltd UV irradiation device
JPH1097213A (en) * 1996-09-25 1998-04-14 Matsushita Electric Works Ltd Flash type calling chime
JP3584649B2 (en) * 1996-12-24 2004-11-04 松下電工株式会社 Call indicator light, flash call chime and flash call system.
GB2464508B (en) * 2008-10-17 2012-04-25 Buhler Sortex Ltd Light guide and illumination assembly incorporating the same
JP6783571B2 (en) * 2016-07-13 2020-11-11 日本碍子株式会社 Radiation equipment and processing equipment using radiation equipment
JP7281363B2 (en) * 2019-08-10 2023-05-25 Hoya株式会社 Light irradiation device

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS584585B2 (en) * 1978-02-02 1983-01-27 ロンシール工業株式会社 UV irradiator
JPS54152506A (en) * 1978-05-19 1979-11-30 Wareesu Naito Ltd Device for treating sheet with radiation
JPS5953881U (en) * 1982-09-30 1984-04-09 ウシオ電機株式会社 UV curing paint drying equipment
JPS61137299U (en) * 1985-02-14 1986-08-26

Also Published As

Publication number Publication date
JPH0332942U (en) 1991-03-29

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