JPH06187609A - Magnetic head and its production - Google Patents

Abstract

(57) [Abstract] [Purpose] To prevent the reaction between the mold glass of the magnetic head and the magnetic metal nitride thin film having a high saturation magnetic flux density and eliminate the bubbles generated. [Structure] A magnetic metal thin film 12 having a high saturation magnetic flux density Bs is provided at one end of the magnetic gap 2 of the core chip 3, and a magnetic metal thin film 13 is provided at the other end. C on both sides in the depth direction of the gap portion of the track portion that determines the recording width of the signal of the core chip 3
The reaction with the mold glass 6 is prevented by forming non-magnetic protective films 14a and 14b of r or SiO _{2 on} both side surfaces of the core chip 3 by sputtering.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head used in a hard disk type magnetic recording device and a method for manufacturing the same.

[0002]

2. Description of the Related Art FIG. 1 shows a perspective view of a ceramic slider body and a core chip in a composite type magnetic head for explaining the present invention and a conventional example, in which a pair of metal oxide magnetic bodies I type core 1a and C type core 1b are used for magnetic The core chip 3 in which the gap 2 is formed has two rails 4a and 4b.
Is fused to the ceramic slider body 5 having a mold glass 6. Further, on the rail 4b side of the ceramic slider body 5, there is provided a coil wire winding window 7 for generating a magnetomotive force necessary for recording / reproducing a signal on / from a magnetic recording medium in the magnetic gap 2 of the core chip 3. Has been.

Next, details of the vicinity 8 of the magnetic gap 2 will be described with reference to an enlarged view of the magnetic gap portion shown in FIG. The magnetic gap 2 is formed by a pair of metal oxide magnetic substance I-type cores 1a and C-type 1b, and 9 indicates a track width that determines a signal width to be recorded on the magnetic recording medium. Furthermore, this track part is molded glass 6
And is fused to the ceramic slider body 5. In order to improve the recording / reproducing characteristics of the magnetic head at both ends 10a, 10b of the magnetic gap 2, the saturation magnetic flux density Bs is set to 9000
The structure is such that a Gaussian magnetic metal thin film is formed.

However, in recent years, as the capacity and density of hard disk drives have further increased, the coercive force Hc of the disks used has changed from the conventional 1200 to 1400 Oersted to 1600 to 2000 Oersted. There is. If the coercive force of the disk is increased in this way, recording / reproduction on the high coercive force disk cannot be sufficiently performed with the above-mentioned configuration having the magnetic metal thin films at both ends 10a and 10b of the magnetic gap 2.

Therefore, compared to conventional magnetic metal thin films,
The magnetic metal nitride thin film having a higher saturation magnetic flux density (Bs; about 15,000 gauss) is formed on both ends 10a, 10b of the magnetic gap 2.
Alternatively, the problem was solved by forming it at one end (the trailing edge side with respect to the running direction of the disc). FIG. 5B shows a conventional example in which a magnetic metal thin film is formed on one end 10a of the magnetic gap 2 and the above-mentioned magnetic metal nitride thin film is formed on the other end 10b. Due to the structure of this magnetic gap, a high coercive force medium (Hc; 1600 to 2000)
Recording / playback to (Oersted) is possible.

[0006]

However, as shown in FIG.
Although the recording / reproducing characteristics were certainly improved in the magnetic head having the magnetic nitride metal thin film at one end 10b shown in (b), this magnetic magnetic metal nitride thin film is a mold glass for fusing the core chip 3 to the ceramic slider body 5. 6 easily reacts with 6 to generate bubbles. Further, under certain conditions, the metal thin film may dissolve in the mold glass 6. As described above, in manufacturing the magnetic head, there is a problem that the dissolution of the bubbles and the metal film significantly lowers the non-defective product rate.

The present invention solves such a problem and reacts with a mold glass with which a magnetic metal nitride thin film is in contact,
It is an object of the present invention to provide a magnetic head which can be completely prevented from elution and can completely prevent generation of bubbles due to a reaction, and a manufacturing method thereof.

[0008]

According to the present invention, a track portion which determines a signal recording width of a core chip having a magnetic gap formed by a pair of metal oxide magnetic cores is provided on both sides in a gap depth direction of a track portion. With the magnetic protective film formed, the ceramic slider body is fused with the mold glass, and the core chip is fixed to the ceramic slider body.

[0009]

According to the present invention, since the non-magnetic protective film is formed on both side surfaces of the core chip, the high saturation magnetic flux density Bs is high.
It is possible to form a magnetic metal nitride thin film for a high coercive force medium having one end or both ends of the magnetic gap, and the protective film can prevent the reaction with the mold glass.

[0010]

EXAMPLE An example of the present invention will be described by taking a composite type magnetic head as an example.

FIG. 2 shows an enlarged perspective view of the core chip 3 embodying the present invention in the core chip 3 of the composite type magnetic head shown in FIG. The magnetic gap 2 is formed by a pair of metal oxide magnetic material I-type cores 1a and C-type cores 1b, and one end of the magnetic gap (on the trailing edge side with respect to the running direction of the disk, corresponding to the end portion 10a side in FIG. ) Has a high saturation magnetic flux density B
The magnetic metal nitride thin film 12 having s is provided with a conventional magnetic metal thin film 13 at one end (corresponding to the end 10b side in FIG. 5). Furthermore, a protective film is formed on both side surfaces in the depth direction of the track portion that determines the recording width of the signal on the magnetic recording medium (not shown).
As 14a and 14b, Cr is deposited by a sputtering method.

Next, FIG. 3 is an enlarged front view of a portion where the core chip is fused to the ceramic slider body 5 with the mold glass 6. A pair of metal magnetic bodies I-type core 1a and C-type core 1b form a magnetic gap 2, one end of the magnetic gap 2 is a nitrided magnetic metal thin film 12 having a high saturation magnetic flux density Bs, and the other end is a conventional magnetic metal. A thin film 13 is formed.

Reference numerals 14a and 14b denote protective films using Cr according to the first embodiment of the present invention. Further, the core chip 3 is fused to the ceramic slider body 5 by the mold glass 6.

As a second embodiment, SiO ₂ may be used instead of Cr for the protective films 14a and 14b. In this case, unlike the first embodiment, the conditions of the sputtering method are important.
This is because if the target having the composition of SiO ₂ is sputtered as it is, the film composition becomes SiO and the effect as a protective film cannot be obtained because it is structurally fragile. Therefore, in order to increase the film density, the O ₂ in the Ar gas at the time of sputtering is controlled with a partial pressure of 20 to 60% so that the film composition becomes SiO _2, and the power is increased to further increase the film formation rate. 20 ~
By controlling at 100 nm / min, the SiO ₂ film structure is made more precise and the effect as a protective film is fully brought out.

Next, FIG. 4 shows a process diagram of an actual manufacturing method. As shown in FIG. 4 (a), the above-described Cr or SiO ₂ film is formed on both side surfaces of the completed core chip 3 by a sputtering method, and as shown in FIG. In advance, the track width processing 17 is performed in a comb shape, and in that state, the above-described Cr or SiO ₂ sputtering is performed. After that, it is cut into the shape of the core chip 3 which is the final dimension, and is fused to the final ceramic slider body 5 with the mold glass 6.

In the first manufacturing method shown in FIG. 4 (a), when the shape of the core chip becomes small, it seems that the workability and the processing capacity are limited, but the first manufacturing method shown in FIG. 4 (b). The manufacturing method of No. 2 has excellent mass productivity and can be easily carried out without requiring major modification of the sputtering apparatus or the like.

[0017]

As described above, according to the present invention, since the non-magnetic protective films are formed on both side surfaces of the core chip, the magnetic metal nitride thin film having a high saturation magnetic flux density Bs is formed on at least one end of the magnetic gap. In the magnetic head having the structure described in 1., the nitrided magnetic metal thin film does not react with the mold glass in contact therewith and is not eluted, and generation of bubbles due to the reaction can be completely prevented. In addition, a good product rate can be secured in the magnetic head manufacturing method.

[Brief description of drawings]

FIG. 1 is a perspective view of a ceramic slider body and a core chip in a composite type magnetic head for explaining the present invention and a conventional example.

FIG. 2 is an enlarged perspective view of the core chip of FIG. 1 according to the present invention.

FIG. 3 is an enlarged front view of the core chip of FIG. 2 fused to a ceramic slider body with mold glass.

FIG. 4 is a first manufacturing process diagram and a second manufacturing process diagram in the embodiment of the present invention.

FIG. 5 is an enlarged front view of a conventional magnetic gap portion.

[Explanation of symbols]

2 ... Magnetic gap, 3 ... Core chip, 5 ... Ceramic slider body, 6 ... Mold glass 12 ... Magnetic metal nitride thin film, 13 ... Magnetic metal thin film, 14a, 14b ... Protective film.

Claims (2)

[Claims] 1. A magnetic head in which a core chip, in which a magnetic gap for recording / reproducing a signal to / from a magnetic recording medium is formed by a pair of metal oxide magnetic cores, is fused to a ceramic slider body having two rails with a mold glass. In the above, the ceramic slider body is fusion-bonded with mold glass in a state where protective films of a non-magnetic material are formed on both side surfaces in the gap depth direction of the track portion that determines the recording width of the signal of the core chip. A magnetic head with a core chip fixed to the rider body. 2. The protective film of non-magnetic material is made of Cr or SiO.
_{2. A} method of manufacturing a magnetic head, which comprises depositing ₂ by a sputtering method.