JPH06194129A - Optical scanning type displacement sensor and amplification factor switching method thereof - Google Patents
Optical scanning type displacement sensor and amplification factor switching method thereofInfo
- Publication number
- JPH06194129A JPH06194129A JP34225792A JP34225792A JPH06194129A JP H06194129 A JPH06194129 A JP H06194129A JP 34225792 A JP34225792 A JP 34225792A JP 34225792 A JP34225792 A JP 34225792A JP H06194129 A JPH06194129 A JP H06194129A
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- Japan
- Prior art keywords
- light
- scanning
- measured
- amplification factor
- light beam
- Prior art date
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Links
- 230000003321 amplification Effects 0.000 title claims abstract description 62
- 238000003199 nucleic acid amplification method Methods 0.000 title claims abstract description 62
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 14
- 238000000034 method Methods 0.000 title claims abstract description 7
- 230000003287 optical effect Effects 0.000 title claims description 26
- 238000001514 detection method Methods 0.000 claims description 17
- 238000005070 sampling Methods 0.000 abstract description 2
- 238000012935 Averaging Methods 0.000 abstract 1
- 238000006243 chemical reaction Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、光走査型変位センサの
増幅率切換方法及び光走査型変位センサに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an amplification factor switching method for an optical scanning displacement sensor and an optical scanning displacement sensor.
【０００２】[0002]
【従来の技術】従来のこの種の光走査型変位センサとし
ては、特開平１−２４５１０３号に示されたものがあ
る。この従来例は被測定物体の表面に光ビームを投光す
る投光手段と、上記光ビームを被測定物体の表面で走査
させる偏向手段と、被測定物体による光ビームの反射光
を集光する受光用光学系と、受光用光学系の集光面に配
設され、被測定物体までの距離に応じて集光面内で移動
する集光スポットの位置に対応した出力が得られる位置
検出手段と、位置検出手段の出力に基づいて被測定物体
までの距離を演算する第２の演算手段とを備え、偏向手
段から得られる距離データの差分を取り、差分が同符号
であれば加算し、その加算値の絶対値が最大のときに第
２の演算手段から得られる走査位置を段差点と判定する
ものである。2. Description of the Related Art A conventional optical scanning displacement sensor of this type is disclosed in Japanese Patent Laid-Open No. 1-245103. In this conventional example, a light projecting means for projecting a light beam on the surface of the object to be measured, a deflecting means for scanning the light beam on the surface of the object to be measured, and a reflected light of the light beam by the object to be measured are condensed. A light receiving optical system and a position detecting means arranged on the light collecting surface of the light receiving optical system and capable of obtaining an output corresponding to the position of a light collecting spot that moves within the light collecting surface according to the distance to the object to be measured. And a second calculation means for calculating the distance to the object to be measured based on the output of the position detection means, the difference of the distance data obtained from the deflection means is taken, and if the difference has the same sign, the addition is made, When the absolute value of the added value is the maximum, the scanning position obtained from the second calculation means is determined as the step point.
【０００３】[0003]
【発明が解決しようとする課題】ところで上述の従来例
では位置検出手段の受光信号を増幅する増幅回路の増幅
率は固定又は手動により変更するようになっていたた
め、被測定物体の反射状態が変化すると、測定不可能の
場合や、精度が悪くなる場合があった。本発明は、上述
の問題点に鑑みて為されたもので、その目的とするとこ
ろは被測定物体の反射状態に応じて最適の増幅率を選択
し、変位が精度良く求められる光走査型変位センサの増
幅率切換方法及び光走査型変位センサを提供するにあ
る。By the way, in the above-mentioned conventional example, since the amplification factor of the amplification circuit for amplifying the received light signal of the position detecting means is fixed or manually changed, the reflection state of the object to be measured changes. Then, there are cases where measurement is impossible or accuracy is deteriorated. The present invention has been made in view of the above-mentioned problems, and its object is to select an optimum amplification factor according to the reflection state of the object to be measured, and the optical scanning type displacement in which the displacement is accurately obtained. An object is to provide a method of switching the amplification factor of a sensor and an optical scanning type displacement sensor.
【０００４】[0004]
【課題を解決するための手段】上述の目的を達成するた
めに、請求項１は、被測定物体の表面に光ビームを投光
する投光手段と、上記光ビームを被測定物体の表面で走
査させる偏向手段と、被測定物体による光ビームの反射
光を集光する受光用光学系と、受光用光学系の集光面に
配設され、被測定物体までの距離に応じて集光面内で移
動する集光スポットの位置に対応した出力が得られる位
置検出手段と、位置検出手段の出力に基づいて被測定物
体までの距離を演算する第１の演算手段と、光ビームの
走査位置を演算する第２の演算手段とを備え、偏向手段
による光ビームの走査に応じて第１の演算手段から得ら
れる距離データの差分を取り、差分が同符号であれば加
算し、その加算値の絶対値が最大のときに第２の演算手
段から得られる走査位置を段差点と判定する光走査型変
位センサに用いられ、上記位置検出手段の検出信号を増
幅する増幅回路の増幅率を前走査の受光量のデータの全
部又は一部の平均値の比較により決定して、この決定し
た増幅率に次の走査時の増幅回路の増幅率を設定するこ
とを特徴とする。In order to achieve the above object, the first aspect of the present invention is to provide a light projecting means for projecting a light beam on the surface of the object to be measured, and the light beam on the surface of the object to be measured. Deflection means for scanning, light-receiving optical system that collects the reflected light of the light beam from the object to be measured, and a light-collecting surface of the light-receiving optical system that is arranged according to the distance to the object to be measured. Position detecting means for obtaining an output corresponding to the position of a focused spot moving inside, first calculating means for calculating the distance to the object to be measured based on the output of the position detecting means, and the scanning position of the light beam And a second calculation means for calculating, and a difference of the distance data obtained from the first calculation means in response to the scanning of the light beam by the deflecting means is calculated. The run obtained from the second computing means when the absolute value of Used in an optical scanning displacement sensor that determines a position as a step point, the amplification factor of an amplification circuit that amplifies the detection signal of the position detection means is compared by comparing the average value of all or part of the data of the amount of light received in the previous scan. The determination is made, and the amplification factor of the amplification circuit at the time of the next scanning is set to the determined amplification factor.
【０００５】請求項２は、被測定物体の表面に光ビーム
を投光する投光手段と、上記光ビームを被測定物体の表
面で走査させる偏向手段と、被測定物体による光ビーム
の反射光を集光する受光用光学系と、受光用光学系の集
光面に配設され、被測定物体までの距離に応じて集光面
内で移動する集光スポットの位置に対応した出力が得ら
れる位置検出手段と、位置検出手段の出力に基づいて被
測定物体までの距離を演算する第１の演算手段と、光ビ
ームの走査位置を演算する第２の演算手段とを備え、偏
向手段による光ビームの走査に応じて第１の演算手段か
ら得られる距離データの差分を取り、差分が同符号であ
れば加算し、その加算値の絶対値が最大のときに第２の
演算手段から得られる走査位置を段差点と判定する光走
査型変位センサにおいて、上記位置検出手段の検出信号
を増幅する増幅回路の増幅率を前走査の受光量データの
全部又は一部の平均値の比較により決定して、この決定
した増幅率に次の走査時の増幅回路の増幅率を設定する
自動ゲイン手段を有するものである。According to a second aspect of the present invention, light projecting means for projecting a light beam on the surface of the object to be measured, deflecting means for scanning the light beam on the surface of the object to be measured, and reflected light of the light beam by the object to be measured. It is arranged on the light receiving optical system that collects the light and the light collecting surface of the light receiving optical system, and the output corresponding to the position of the light collecting spot that moves within the light collecting surface according to the distance to the object to be measured is obtained. The position detecting means, the first calculating means for calculating the distance to the object to be measured based on the output of the position detecting means, and the second calculating means for calculating the scanning position of the light beam. The difference between the distance data obtained from the first calculating means in accordance with the scanning of the light beam is calculated, and if the difference is the same sign, the difference is added. When the absolute value of the added value is maximum, the difference is obtained from the second calculating means. Optical displacement sensor that determines the scanning position to be detected as a step point Then, the amplification factor of the amplification circuit for amplifying the detection signal of the position detection means is determined by comparing the average value of all or a part of the received light amount data of the previous scanning, and the determined amplification factor is used for the next scanning. It has an automatic gain means for setting the amplification factor of the amplifier circuit.
【０００６】[0006]
【作用】本発明によれば、位置検出手段の検出信号を増
幅する増幅回路の増幅率を前走査の受光量データの全部
又は一部の平均値の比較により決定して、この決定した
増幅率に次の走査時の増幅回路の増幅率を設定するの
で、受光量が平均的に増幅率切換の閾値内に入ることに
なり、受光状態を安定に保つことができる。According to the present invention, the amplification factor of the amplification circuit for amplifying the detection signal of the position detecting means is determined by comparing the average value of all or a part of the received light amount data of the previous scan, and the determined amplification factor is determined. Since the amplification factor of the amplification circuit at the time of the next scanning is set to, the amount of received light is on average within the threshold value for switching the amplification factor, and the light receiving state can be kept stable.
【０００７】[0007]
【実施例】以下本発明を実施例により説明する。図１は
実施例の回路構成を示しており、第２図は機構上の構成
を示しており、図１において、投光手段１は投光タイミ
ングを設定するクロックパルスを発生する発振回路１０
と、発振回路１０からのクロックパルスに応じて変調信
号を発生する変調回路１１と、変調回路１１からの変調
信号に応じて半導体レーザ１３のような投光用発光素子
を駆動するレーザ駆動回路１２及び凸レンズよりなる投
光用光学系１４から構成され、半導体レーザ１３から発
せられる光を投光用光学系１４にて細かく絞って光ビー
ムとして投光するようになっている。この光ビームは走
査ミラー７０とその駆動回路７１よりなる偏向手段７に
より、被測定物体２の上でＸ軸方向に走査される。EXAMPLES The present invention will be described below with reference to examples. 1 shows a circuit configuration of the embodiment, and FIG. 2 shows a mechanical configuration. In FIG. 1, the light projecting means 1 generates an oscillation circuit 10 for generating a clock pulse for setting a light projecting timing.
A modulation circuit 11 for generating a modulation signal in response to a clock pulse from the oscillation circuit 10; and a laser drive circuit 12 for driving a light emitting element for projecting light such as a semiconductor laser 13 in response to the modulation signal from the modulation circuit 11. And a projection optical system 14 composed of a convex lens, and the light emitted from the semiconductor laser 13 is finely focused by the projection optical system 14 and projected as a light beam. The light beam is scanned in the X-axis direction on the object to be measured 2 by the deflecting means 7 including the scanning mirror 70 and the drive circuit 71 thereof.
【０００８】光ビームの一部はビームスプリッタ６によ
り位置検出手段４Ｘに導かれ、Ｘ軸方向の走査位置が検
知される。この位置検出手段４Ｘはその受光面に光ビー
ムが照射された位置に対応して相反する位置信号Ｉ1 ，
Ｉ2 を出力する。この位置信号Ｉ1 ，Ｉ2 はＸ軸方向の
演算手段５Ｘに入力されて、走査位置信号Ｘに変換され
る。A part of the light beam is guided to the position detecting means 4X by the beam splitter 6, and the scanning position in the X-axis direction is detected. The position detecting means 4X has position signals I 1 , which are opposite to each other corresponding to the position where the light beam is irradiated on the light receiving surface.
Output I 2 . The position signals I 1 and I 2 are input to the calculation means 5X in the X-axis direction and converted into scanning position signals X.
【０００９】またビームスプリッタ６を通過した光ビー
ムは、被測定物体２に照射され、被測定物体２の表面で
拡散反射された反射光は受光用光学系３にて集光され
る。その集光面に配された位置検出手段４Ｚは集光スポ
ットの位置に対応した相反する位置信号Ｉ3 、Ｉ4 を出
力し、演算手段５Ｚにて演算処理することにより、Ｚ軸
方向についての測距信号（距離データ）Ｚを得ることが
できる。これら測距信号Ｚと走査位置信号Ｘとをプロセ
ッサ１５で処理して、被測定物体２の表面における走査
線上の２次元形状を検出することができるものである。The light beam that has passed through the beam splitter 6 is applied to the object 2 to be measured, and the reflected light diffusely reflected on the surface of the object 2 to be measured is condensed by the light receiving optical system 3. The position detecting means 4Z arranged on the condensing surface outputs the reciprocal position signals I 3 and I 4 corresponding to the position of the converging spot, and the arithmetic means 5Z performs arithmetic processing to obtain the Z axis direction. A distance measurement signal (distance data) Z can be obtained. The distance measuring signal Z and the scanning position signal X are processed by the processor 15 to detect the two-dimensional shape on the scanning line on the surface of the measured object 2.
【００１０】演算算手段５Ｘは位置検出手段４Ｘから出
力される位置信号（相反する電流信号Ｉ1 ，Ｉ2 ）を電
圧信号に変換するＩ／Ｖ変換回路４１ａ，４１ｂと、Ｉ
／Ｖ変換回路４１ａ，４１ｂの出力から変調された高周
波成分を取り出すハイパスフィルタ４２ａ，４２ｂと、
ハイパスフィルタ４２ａ，４２ｂの出力レベルを発振回
路１０の出力に基づいてチェックする（クロックパルス
に同期してレベルを判定）する検波回路４３ａ，４３ｂ
と、検波回路４３ａ，４３ｂの出力が低周波成分を取り
出すローパスフィルタ４４ａ，４４ｂと、ローパスフィ
ルタ４４ａ，４４ｂの出力（位置信号Ｉ1 ，Ｉ2 のレベ
ルに対応するので、以下において、Ｉ1，Ｉ2 と称す
る）の減算を行う減算回路４５Ｘと、ローパスフィルタ
４４ａ，４４ｂの出力Ｉ1 ，Ｉ2 の加算を行う加算回路
４６Ｘと、減算回路４５Ｘから出力される第１の信号
（Ｉ1 −Ｉ2 ）と加算回路４６Ｘから出力される第２の
信号（Ｉ1 ＋Ｉ2 ）との比率を演算する演算回路４７ｘ
と、演算回路４７Ｘから得られるアナログ信号を出力を
デジタル信号に変換するＡ／Ｄ変換回路４８Ｘとから構
成されており、Ａ／Ｄ変換回路４８Ｘから走査位置信号
（Ｉ1 −Ｉ2 ）／（Ｉ1＋Ｉ2 ）＝Ｘが出力されるよう
になっている。The arithmetic operation means 5X converts the position signals (reciprocal current signals I 1 and I 2 ) output from the position detection means 4X into voltage signals, and I / V conversion circuits 41a and 41b.
High-pass filters 42a and 42b for extracting modulated high-frequency components from the outputs of the V / V conversion circuits 41a and 41b,
Detection circuits 43a and 43b for checking the output levels of the high-pass filters 42a and 42b based on the output of the oscillation circuit 10 (determining the levels in synchronization with clock pulses).
If, the low pass filter 44a detection circuit 43a, the output of 43b is a low frequency component obtained, and 44b, low-pass filter 44a, the output of 44b (position signals I 1, it corresponds to the level of I 2, below, I 1, a subtraction circuit 45X which performs subtraction of the I 2 hereinafter), a low-pass filter 44a, an adder circuit 46X for adding the output I 1, I 2 of 44b, a first signal output from the subtracting circuit 45X (I 1 - I 2) and calculates the ratio of the second signal output (I 1 + I 2) from the addition circuit 46X arithmetic circuit 47x
And an A / D conversion circuit 48X which converts an analog signal obtained from the arithmetic circuit 47X into a digital signal, and the scanning position signal (I 1 -I 2 ) / (from the A / D conversion circuit 48X. I 1 + I 2 ) = X is output.
【００１１】一方Ｚ軸方向についての位置検出手段４Ｚ
から出力される位置信号Ｉ3 ，Ｉ4に対する演算手段５
Ｚは演算手段５Ｘとは基本的に同様な構成であって、Ａ
／Ｄ変換回路４８Ｚからは測距信号（Ｉ3 −Ｉ4 ）／
（Ｉ3 ＋Ｉ4 ）が得られるようになっている。尚第１の
演算手段５Ｚ、第２の演算手段５Ｘのデータを用いてプ
ロセッサ１５によって段差検知を行う手法は特開平１−
２４５１０３号と同様な方式で行うため、その処理につ
いての説明は省略する。On the other hand, the position detecting means 4Z in the Z-axis direction
Operation means 5 for position signals I 3 and I 4 output from
Z has basically the same configuration as the computing means 5X, and A
/ D conversion circuit from 48Z ranging signals (I 3 -I 4) /
(I 3 + I 4 ) can be obtained. A method for detecting a step difference by the processor 15 using the data of the first calculation means 5Z and the second calculation means 5X is disclosed in Japanese Patent Laid-Open No.
Since the method is the same as that of No. 245103, the description of the processing is omitted.
【００１２】ところでＺ軸軸方向の受光量（Ｉ3 ＋
Ｉ4 ）は走査範囲の間一定ではなく、被測定物体２の表
面の状態によって異なり、従って最適な受光状態を保つ
ことが難しく、そのため走査毎に設定することが望まれ
る。図３（ａ）はプロセッサ１５からの出力を示してお
り、同図（ｂ）はその受光量受光量（Ｉ3 ＋Ｉ4 ）の変
化の一例を示している。By the way, the amount of light received in the Z-axis direction (I 3 +
I 4 ) is not constant during the scanning range and varies depending on the state of the surface of the object 2 to be measured, and thus it is difficult to maintain the optimum light receiving state, and therefore it is desirable to set it for each scan. FIG. 3A shows the output from the processor 15, and FIG. 3B shows an example of the change in the amount of received light (I 3 + I 4 ).
【００１３】そこで本実施例では、Ｉ／Ｖ変換回路４１
ｃ，４１ｄとハイパスフィルタ４２ａ，４２ｂとの間に
Ｉ／Ｖ変換回路４１ｃ，４１ｄの出力信号を増幅する増
幅回路４９ｃ，４９ｄを設け、これらの増幅回路４９
ｃ、４９ｄの増幅率をプロセッサ１５から出力される増
幅率切換信号Ａにより切り換えられるようになってい
る。この切り換えによって設定される増幅率は加算回路
４６Ｚで得られる値、つまり受光量の総和（Ｉ3 ＋
Ｉ4 ）に基づいてプロセッサ１５で演算して決定され
る。Ａ／Ｄ変換回路５０は加算回路４６Ｚの出力をＡ／
Ｄ変換してプロセッサ１５に与えるためのものである。Therefore, in this embodiment, the I / V conversion circuit 41 is used.
Amplification circuits 49c and 49d for amplifying the output signals of the I / V conversion circuits 41c and 41d are provided between the c and 41d and the high-pass filters 42a and 42b.
The amplification factors c and 49d can be switched by the amplification factor switching signal A output from the processor 15. The amplification factor set by this switching is the value obtained by the adder circuit 46Z, that is, the sum of the received light amounts (I 3 +
It is determined by calculation in the processor 15 based on I 4 ). The A / D conversion circuit 50 outputs the output of the addition circuit 46Z to A / D.
This is for D-converting and giving to the processor 15.
【００１４】増幅率の切換えのためのプロセッサ１５の
処理は図４に示すフローチャートに基づいて行われるよ
うになっており、まずＡ／Ｄ変換回路５０を介して加算
回路４６Ｚの出力、つまり受光量の総和（Ｉ3 ＋Ｉ4 ）
により操作サンプリング全点又は一部の平均計算を行っ
て平均値（Ｉ3 ’＋Ｉ4 ’）を求め、この求めた値（Ｉ
3 ’＋Ｉ4 ’）が増幅率切換閾値のローレベルＳL より
小さいかどうかの判定を行ない、図３（ｃ）のようにロ
ーレベルＳL より小さければ、次の走査で増幅率を１段
階上げる増幅率切換信号Ａを増幅回路４９ｃ，４９ｄに
出力する。The processing of the processor 15 for switching the amplification factor is performed based on the flow chart shown in FIG. 4. First, the output of the adder circuit 46Z, that is, the amount of received light is passed through the A / D conversion circuit 50. Sum of (I 3 + I 4 )
The average value (I 3 '+ I 4 ') is calculated by performing the average calculation of all points or a part of the operation sampling according to, and the calculated value (I
3 ′ + I 4 ′) is smaller than the low level S L of the amplification factor switching threshold value. If it is smaller than the low level S L as shown in FIG. The increased amplification factor switching signal A is output to the amplification circuits 49c and 49d.
【００１５】ローレベルＳL 以上の場合には、次に増幅
率切換閾値のハイレベルＳH を越えているのかどうかの
判定を行ない、図３（ｄ）のように越えている場合には
次の走査で増幅率を１段下げる増幅率切換信号Ａを増幅
回路４９ｃ，４９ｄに出力する。図３（ｂ）のように平
均値（Ｉ3 ’＋Ｉ4 ’）が増幅率切換閾値のハイレベル
ＳH を越えていなければ、増幅率を現在のままとするた
め増幅率切換信号Ａを出力しない。If it is above the low level S L , it is next judged whether or not it exceeds the high level S H of the amplification factor switching threshold value. If it exceeds as shown in FIG. The amplification factor switching signal A that lowers the amplification factor by one step is output to the amplification circuits 49c and 49d. If the average value (I 3 '+ I 4 ') does not exceed the high level S H of the amplification factor switching threshold as shown in FIG. 3B, the amplification factor switching signal A is output to keep the amplification factor as it is. do not do.
【００１６】このようにして受光量は平均的に増幅回路
４９ｃ，４９ｄの増幅率の切換閾値内に入ることにな
り、受光状態を安定に保つことができる。尚上記ハイレ
ベルＳH 、ローレベルＳL は実施例では例えば最大受光
量を１００％とした場合において、ＳL ＝２５％、ＳH
＝５０％に設定している。勿論この値に限定されるもの
でない。また増幅回路４９ｃ，４９ｄの増幅切換は例え
ば図５に示すように増幅素子４９の増幅率を決める抵抗
値を０から複数段設定し、これらの抵抗値をアナログス
イッチ等のスイッチ手段Ｓ1 …を増幅率切換信号Ａによ
り切換駆動することにより行う。Ｒ1 〜Ｒ4 は抵抗値を
設定するための抵抗であり、図示する例では０を含めて
５段階に増幅率を切り換えることができるようになって
いる。勿論図示する回路以外の回路を用いても良い。In this way, the amount of light received falls on average within the amplification factor switching threshold of the amplifier circuits 49c, 49d, and the light receiving state can be kept stable. In the embodiment, the high level S H and the low level S L are, for example, S L = 25%, S H when the maximum received light amount is 100%.
= 50%. Of course, it is not limited to this value. Further, for switching the amplification of the amplifier circuits 49c and 49d, for example, as shown in FIG. 5, a resistance value that determines the amplification factor of the amplification element 49 is set from 0 to a plurality of stages, and these resistance values are set by a switch means S 1 ... This is performed by switching and driving with the amplification factor switching signal A. R 1 to R 4 are resistors for setting a resistance value, and in the illustrated example, the amplification factor can be switched in five stages including 0. Of course, a circuit other than the illustrated circuit may be used.
【００１７】[0017]
【発明の効果】本発明は上述のように構成してあるの
で、受光量が平均的に増幅率切換の閾値内に入ることに
なり、受光状態を安定に保つことができるという効果が
ある。Since the present invention is constructed as described above, the amount of received light is on average within the threshold value for switching the amplification factor, and the light receiving state can be kept stable.
【図１】本発明の一実施例を示す回路ブロック図であ
る。FIG. 1 is a circuit block diagram showing an embodiment of the present invention.
【図２】同上の機構の構成図である。FIG. 2 is a configuration diagram of the same mechanism.
【図３】同上の増幅率切換の動作説明用グラフである。FIG. 3 is a graph for explaining the operation of switching the amplification factor of the above.
【図４】同上の増幅率切換の動作説明用のフローチャー
トであつ。FIG. 4 is a flow chart for explaining the operation of switching the amplification factor of the above.
【図５】同上の増幅回路の一例を示す回路図である。FIG. 5 is a circuit diagram showing an example of an amplifier circuit of the above.
１ 投光手段 ２ 被測定物体 ３ 受光用光学系 ４Ｘ 位置検出手段 ４Ｚ 位置検出手段 ５Ｘ 演算手段 ５Ｚ 演算手段 １５ プロセッサ ４６Ｚ 加算回路 ４９ｃ 増幅回路 ４９ｄ 増幅回路 ５０ Ａ／Ｄ変換回路 Ａ 増幅率切換信号 DESCRIPTION OF SYMBOLS 1 Projection means 2 Object to be measured 3 Optical system for light reception 4X Position detection means 4Z Position detection means 5X Calculation means 5Z Calculation means 15 Processor 46Z Adder circuit 49c Amplification circuit 49d Amplification circuit 50 A / D conversion circuit A Amplification factor switching signal
Claims (2)
光手段と、上記光ビームを被測定物体の表面で走査させ
る偏向手段と、被測定物体による光ビームの反射光を集
光する受光用光学系と、受光用光学系の集光面に配設さ
れ、被測定物体までの距離に応じて集光面内で移動する
集光スポットの位置に対応した出力が得られる位置検出
手段と、位置検出手段の出力に基づいて被測定物体まで
の距離を演算する第１の演算手段と、光ビームの走査位
置を演算する第２の演算手段とを備え、偏向手段による
光ビームの走査に応じて第１の演算手段から得られる距
離データの差分を取り、差分が同符号であれば加算し、
その加算値の絶対値が最大のときに第２の演算手段から
得られる走査位置を段差点と判定する光走査型変位セン
サに用いられ、上記位置検出手段の検出信号を増幅する
増幅回路の増幅率を前走査の受光量のデータの全部又は
一部の平均値の比較により決定して、この決定した増幅
率に次の走査時の増幅回路の増幅率を設定することを特
徴とする光走査型変位センサの増幅率切換方法。1. A light projecting means for projecting a light beam onto the surface of an object to be measured, a deflecting means for scanning the surface of the object to be measured with the light beam, and a light beam reflected by the object to be measured. Position detection that is provided on the light receiving optical system and the light collecting surface of the light receiving optical system, and obtains an output corresponding to the position of the light collecting spot that moves within the light collecting surface according to the distance to the object to be measured. Means, first calculating means for calculating the distance to the object to be measured based on the output of the position detecting means, and second calculating means for calculating the scanning position of the light beam. The difference of the distance data obtained from the first calculation means is taken according to the scanning, and if the difference has the same sign, the difference is added,
Amplification of an amplifier circuit used for an optical scanning displacement sensor that determines the scanning position obtained from the second calculation means as a step point when the absolute value of the added value is the maximum, and amplifies the detection signal of the position detection means. The optical scanning is characterized in that the rate is determined by comparing the average value of all or part of the data of the amount of received light of the previous scan, and the determined amplification rate is set to the amplification rate of the amplification circuit at the next scanning. Type displacement sensor amplification factor switching method.
光手段と、上記光ビームを被測定物体の表面で走査させ
る偏向手段と、被測定物体による光ビームの反射光を集
光する受光用光学系と、受光用光学系の集光面に配設さ
れ、被測定物体までの距離に応じて集光面内で移動する
集光スポットの位置に対応した出力が得られる位置検出
手段と、位置検出手段の出力に基づいて被測定物体まで
の距離を演算する第１の演算手段と、光ビームの走査位
置を演算する第２の演算手段とを備え、偏向手段による
光ビームの走査に応じて第１の演算手段から得られる距
離データの差分を取り、差分が同符号であれば加算し、
その加算値の絶対値が最大のときに第２の演算手段から
得られる走査位置を段差点と判定する光走査型変位セン
サにおいて、上記位置検出手段の検出信号を増幅する増
幅回路の増幅率を前走査の受光量のデータの全部又は一
部の平均値の比較により決定して、この決定した増幅率
に次の走査時の増幅回路の増幅率を設定する自動ゲイン
手段を有することを特徴とする光走査型変位センサ。2. A light projecting means for projecting a light beam onto the surface of the object to be measured, a deflecting means for scanning the surface of the object to be measured with the light beam, and a light beam reflected by the object to be measured is condensed. Position detection that is provided on the light receiving optical system and the light collecting surface of the light receiving optical system, and obtains an output corresponding to the position of the light collecting spot that moves within the light collecting surface according to the distance to the object to be measured. Means, first calculating means for calculating the distance to the object to be measured based on the output of the position detecting means, and second calculating means for calculating the scanning position of the light beam. The difference of the distance data obtained from the first calculation means is taken according to the scanning, and if the difference has the same sign, the difference is added,
In the optical scanning displacement sensor that determines the scanning position obtained from the second calculation means as the step point when the absolute value of the added value is maximum, the amplification factor of the amplification circuit for amplifying the detection signal of the position detection means is set. It is characterized by further comprising automatic gain means which is determined by comparing an average value of all or a part of the data of the amount of received light in the previous scan and sets the determined amplification factor to the amplification factor of the amplifier circuit at the next scanning. Optical scanning displacement sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34225792A JPH06194129A (en) | 1992-12-22 | 1992-12-22 | Optical scanning type displacement sensor and amplification factor switching method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34225792A JPH06194129A (en) | 1992-12-22 | 1992-12-22 | Optical scanning type displacement sensor and amplification factor switching method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06194129A true JPH06194129A (en) | 1994-07-15 |
Family
ID=18352323
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP34225792A Pending JPH06194129A (en) | 1992-12-22 | 1992-12-22 | Optical scanning type displacement sensor and amplification factor switching method thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06194129A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012030315A (en) * | 2010-07-30 | 2012-02-16 | Hitachi Koki Co Ltd | Drilling tool |
-
1992
- 1992-12-22 JP JP34225792A patent/JPH06194129A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012030315A (en) * | 2010-07-30 | 2012-02-16 | Hitachi Koki Co Ltd | Drilling tool |
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