JPH06200948A - Rolling bearing - Google Patents
Rolling bearingInfo
- Publication number
- JPH06200948A JPH06200948A JP202893A JP202893A JPH06200948A JP H06200948 A JPH06200948 A JP H06200948A JP 202893 A JP202893 A JP 202893A JP 202893 A JP202893 A JP 202893A JP H06200948 A JPH06200948 A JP H06200948A
- Authority
- JP
- Japan
- Prior art keywords
- cage
- bearing
- rolling
- tantalum
- titanium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005096 rolling process Methods 0.000 title claims abstract description 36
- 230000007797 corrosion Effects 0.000 claims abstract description 24
- 238000005260 corrosion Methods 0.000 claims abstract description 24
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims abstract description 14
- 229910052715 tantalum Inorganic materials 0.000 claims abstract description 14
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims abstract description 14
- 239000010936 titanium Substances 0.000 claims abstract description 14
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 14
- 239000000463 material Substances 0.000 claims abstract description 13
- 239000010955 niobium Substances 0.000 claims abstract description 13
- 229910052758 niobium Inorganic materials 0.000 claims abstract description 13
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims abstract description 13
- 229910010293 ceramic material Inorganic materials 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 239000000919 ceramic Substances 0.000 abstract 2
- 239000000428 dust Substances 0.000 description 11
- 230000000052 comparative effect Effects 0.000 description 7
- 229910001220 stainless steel Inorganic materials 0.000 description 4
- 239000010935 stainless steel Substances 0.000 description 4
- 239000007769 metal material Substances 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 238000002788 crimping Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910001257 Nb alloy Inorganic materials 0.000 description 1
- 101150065537 SUS4 gene Proteins 0.000 description 1
- 229910001362 Ta alloys Inorganic materials 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 229910001105 martensitic stainless steel Inorganic materials 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/30—Parts of ball or roller bearings
- F16C33/38—Ball cages
- F16C33/44—Selection of substances
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/30—Parts of ball or roller bearings
- F16C33/38—Ball cages
- F16C33/42—Ball cages made from wire or sheet metal strips
- F16C33/422—Ball cages made from wire or sheet metal strips made from sheet metal
- F16C33/427—Ball cages made from wire or sheet metal strips made from sheet metal from two parts, e.g. ribbon cages with two corrugated annular parts
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Rolling Contact Bearings (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、とくに超高真空、高温
条件下、腐蝕性ガス雰囲気中において使用される、耐熱
性、耐蝕性等にすぐれた転がり軸受に関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rolling bearing excellent in heat resistance, corrosion resistance and the like, which is particularly used in a corrosive gas atmosphere under ultrahigh vacuum and high temperature conditions.
【０００２】[0002]
【従来の技術と発明が解決しようとする課題】従来、半
導体製造装置のチャンバ内など、超高真空、高温条件
（約２００℃以上）下、腐蝕性ガス雰囲気中において使
用される転がり軸受としては、Si3 Ｎ4等のセラミック
材料からなる転動体を、同じくセラミック材料やあるい
は耐蝕性の金属材料等で形成した軌道輪と組み合わせ
た、オイルやグリースを用いない無潤滑仕様のものが使
用される。2. Description of the Related Art Conventionally, as a rolling bearing used in a corrosive gas atmosphere under ultrahigh vacuum and high temperature conditions (about 200 ° C. or higher) such as in a chamber of a semiconductor manufacturing apparatus. A non-lubricating type that does not use oil or grease is used in which a rolling element made of a ceramic material such as Si 3 N 4 is combined with a bearing ring that is also made of a ceramic material or a corrosion-resistant metal material. .
【０００３】保持器は通常、ステンレス鋼のうちＳＵＳ
３０４で製造されるが、このＳＵＳ３０４製の保持器は
耐熱性、耐蝕性が低いため、上記のような過酷な条件下
で使用される転がり軸受には使用できない。そこで、ス
テンレス鋼の中でも耐熱性、耐蝕性にすぐれたＳＵＳ４
４０Ｃで保持器を製造することか考えられるが、このＳ
ＵＳ４４０ＣはＳＵＳ３０４のようにプレス加工ができ
ないため、保持器を製造するには切削加工等が必要で、
量産化が難しいという問題がある。The cage is usually made of stainless steel such as SUS.
However, since the cage made of SUS304 has low heat resistance and corrosion resistance, it cannot be used for the rolling bearing used under the severe conditions as described above. Therefore, among stainless steel, SUS4 has excellent heat resistance and corrosion resistance.
It may be possible to manufacture the cage at 40C, but this S
Since US440C cannot be pressed like SUS304, it is necessary to perform cutting to manufacture the cage.
There is a problem that mass production is difficult.
【０００４】本発明は以上の事情に鑑みてなされたもの
であって、耐熱性、耐蝕性等にすぐれ、しかも量産化が
容易な転がり軸受を提供することを目的としている。The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a rolling bearing which is excellent in heat resistance, corrosion resistance and the like and can be easily mass-produced.
【０００５】[0005]
【課題を解決するための手段】上記課題を解決するため
の本発明の転がり軸受は、耐蝕性の材料で形成された一
対の軌道輪と、両軌道輪間に配置される複数の転動体
と、当該転動体を保持する保持器とを備えた転がり軸受
において、上記転動体がセラミック材料で形成されてい
るとともに、保持器がタンタル、チタンまたはニオブで
形成されていることを特徴とする。A rolling bearing of the present invention for solving the above-mentioned problems includes a pair of bearing rings formed of a corrosion-resistant material, and a plurality of rolling elements arranged between the bearing rings. A rolling bearing provided with a cage for holding the rolling element is characterized in that the rolling element is made of a ceramic material and the cage is made of tantalum, titanium or niobium.
【０００６】[0006]
【作用】上記構成からなる本発明の転がり軸受は、軌道
輪が耐蝕性の材料で形成され、かつ転動体がやはり耐蝕
性のセラミック材料で形成されているとともに、保持器
が、ＳＵＳ３０４より耐熱性、耐蝕性にすぐれたタンタ
ル、チタンまたはニオブで形成されているため、とくに
超高真空、高温条件下、腐蝕性ガス雰囲気中で使用する
際の耐熱性、耐蝕性にすぐれている。In the rolling bearing of the present invention having the above structure, the race is made of a corrosion resistant material, the rolling elements are also made of a corrosion resistant ceramic material, and the cage is more heat resistant than SUS304. Since it is formed of tantalum, titanium, or niobium, which has excellent corrosion resistance, it has excellent heat resistance and corrosion resistance especially when used in a corrosive gas atmosphere under ultra-high vacuum and high temperature conditions.
【０００７】また上記タンタル、チタンまたはニオブは
ＳＵＳ３０４とほぼ同等の機械特性を持ち加工性にすぐ
れるため、当該材料からなる保持器は、従来どおりプレ
ス加工によって製造することができ、量産化が容易であ
る。Further, since the above-mentioned tantalum, titanium or niobium has substantially the same mechanical characteristics as SUS304 and is excellent in workability, the cage made of the material can be manufactured by press working as usual, and mass production is easy. Is.
【０００８】[0008]
【実施例】以下に本発明の転がり軸受を、実施例を示す
図面を参照しつつ説明する。本実施例の転がり軸受は、
図１に示すように、内外一対の軌道輪１，２の間に転動
体３を介在し、この転動体３を保持器４によって保持し
たものである。内外の軌道輪１，２は、ＳＵＳ４４０
Ｃ、ＳＵＳ６３０等のマルテンサイト系のステンレス鋼
など、硬質でかつ耐熱性、耐蝕性の金属材料、あるいは
Si3 Ｎ4等のセラミック材料等、耐蝕性を有する種々の
材料から製造できるが、とくに高温条件下で使用するこ
とを考慮すると、セラミック材料で製造するのが好まし
い。また転動体３は、Si3 Ｎ4 等のセラミック材料で形
成される。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A rolling bearing of the present invention will be described below with reference to the drawings showing an embodiment. The rolling bearing of this embodiment is
As shown in FIG. 1, a rolling element 3 is interposed between a pair of inner and outer races 1 and 2, and the rolling element 3 is held by a cage 4. Inner and outer races 1 and 2 are SUS440
C, SUS630 or other martensitic stainless steel, hard, heat-resistant, corrosion-resistant metallic material, or
Although it can be manufactured from various materials having corrosion resistance such as a ceramic material such as Si 3 N 4 , it is preferably manufactured from a ceramic material in consideration of use under high temperature conditions. The rolling element 3 is made of a ceramic material such as Si 3 N 4 .
【０００９】保持器４は、タンタル、チタンまたはニオ
ブによって形成されるもので、図２に示すように実施例
の保持器４は、２枚の環状部材４０を重ね合わせて、複
数のリベットｒで固定した、いわゆる波型保持器であ
る。環状部材４０は、２枚を重ね合わせた際に、転動体
３を保持するためのポケットＰを構成する複数の凹部４
０ａが、環状の板材上に等間隔で形成されたもので、タ
ンタル、チタンまたはニオブの板材から、プレス加工に
より、打抜きと同時に１工程で製造される。The cage 4 is made of tantalum, titanium, or niobium. As shown in FIG. 2, the cage 4 of the embodiment has two annular members 40 superposed on each other and a plurality of rivets r. It is a fixed, so-called corrugated cage. The annular member 40 has a plurality of recesses 4 that form pockets P for holding the rolling elements 3 when the two members are stacked.
0a is formed on a ring-shaped plate material at equal intervals, and is manufactured from a tantalum, titanium or niobium plate material by press working in one step simultaneously with punching.
【００１０】保持器４を構成する材料としては、上記タ
ンタル、チタンまたはニオブ単独が最も好ましいが、耐
熱性、耐蝕性、加工性等の改善のために、種々の金属材
料を配合したタンタル合金、チタン合金またはニオブ合
金を使用することもできる。また、耐蝕性のさらなる向
上のため、製造された保持器４の表面に酸化、窒化等の
処理を施してもよい。なおとくにチタン製の保持器４
は、セラミック材料製の転動体と組み合わせて全くのオ
イルレス状態で使用しても、ステンレス鋼製の保持器と
同等もしくはそれ以上の低発塵性を有するため、使用に
耐える固体潤滑剤が少ない過酷な条件下における、オイ
ルレス状態での使用に適している。The above-mentioned tantalum, titanium, or niobium alone is most preferable as a material for the cage 4, but a tantalum alloy containing various metal materials is added in order to improve heat resistance, corrosion resistance, workability, and the like. It is also possible to use titanium alloys or niobium alloys. Further, in order to further improve the corrosion resistance, the surface of the manufactured cage 4 may be subjected to a treatment such as oxidation or nitriding. In addition, the cage 4 made of titanium
Has low dust generation equivalent to or better than stainless steel cage even when used in a completely oilless state in combination with a ceramic material rolling element, so there are few solid lubricants that can withstand use. Suitable for use in oilless condition under severe conditions.
【００１１】なお、以上で説明した図１の実施例はラジ
アル玉軸受であったが、本発明の構成は、上記ラジアル
玉軸受以外の、従来公知の種々の形式の転がり軸受に適
用することができる。また、保持器の形式は図２に示し
たリベットかしめタイプの波型保持器に限定されず、リ
ベットかしめに代えてつめ付などの波型保持器や冠型や
Ｓ型など、種々の形式の打抜き保持器を使用することが
できる。 〈具体例〉試料の作製 具体例１ タンタルの板材（０．１５mm厚）よりプレス加工で製造
した２枚の環状部材４０から、図２に示す形状の波型保
持器４を作製した。Although the embodiment of FIG. 1 described above is a radial ball bearing, the configuration of the present invention can be applied to various conventionally known rolling bearings other than the radial ball bearing. it can. Further, the type of the cage is not limited to the rivet crimping type corrugated cage shown in FIG. 2, and various types such as a corrugated cage with a pawl instead of the rivet crimping type, a crown type or an S type can be used. A punch retainer can be used. <Specific Example> Preparation of Sample Specific Example 1 A corrugated cage 4 having a shape shown in FIG. 2 was manufactured from two annular members 40 manufactured by pressing a tantalum plate material (thickness: 0.15 mm).
【００１２】そしてこの波型保持器４を、Si3 Ｎ4 製の
転動体３（直径１．５８８mm）およびＳＵＳ４４０Ｃ製
の内外軌道輪１，２（外輪：外径１２mm×幅３mm、内
輪：内径６mm×幅３mm）と組み合わせて、図１に示すラ
ジアル玉軸受を作製した。具体例２ 波型保持器４を同厚のチタンの板材で製造したこと以外
は、上記具体例１と同様にして、図１に示すラジアル玉
軸受を作製した。The corrugated cage 4 is formed by rolling the rolling element 3 made of Si 3 N 4 (diameter 1.588 mm) and the inner and outer race rings 1, 2 made of SUS440C (outer ring: outer diameter 12 mm × width 3 mm, inner ring: inner diameter). 6 mm × width 3 mm) to produce the radial ball bearing shown in FIG. Example 2 The radial ball bearing shown in FIG. 1 was produced in the same manner as in Example 1 except that the corrugated cage 4 was made of a titanium plate material having the same thickness.
【００１３】具体例３ 波型保持器４を同厚のニオブの板材で製造したこと以外
は、上記具体例１と同様にして、図１に示すラジアル玉
軸受を作製した。比較例１ 波型保持器４をステンレス鋼ＳＵＳ３０４で製造したこ
と以外は、上記具体例１と同様にして、図１に示すラジ
アル玉軸受を作製した。 Concrete Example 3 The radial ball bearing shown in FIG. 1 was manufactured in the same manner as in Concrete Example 1 except that the corrugated cage 4 was manufactured from a niobium plate having the same thickness. Comparative Example 1 A radial ball bearing shown in FIG. 1 was produced in the same manner as in Specific Example 1 except that the corrugated cage 4 was made of stainless steel SUS304.
【００１４】発塵性試験 上記具体例、比較例のラジアル玉軸受をそれぞれ２個ず
つ、大気中、クラス１０のクリーンベンチ内で、回転数
２００r.p.m.、ラジアル荷重２．９Ｎの条件で回転させ
た際の６分間毎の発塵量を、当該ラジアル玉軸受の下方
に配置したパーティクルカウンタで計数した。試験時間
２０時間当りの、粒子径０．３μｍ以上のパーティクル
の全発塵量を集計したグラフを図３に示す。 Dust generation test Two radial ball bearings of each of the above specific examples and comparative examples were rotated in the atmosphere in a clean bench of class 10 under the conditions of a rotation speed of 200 rpm and a radial load of 2.9 N. The amount of dust generated every 6 minutes at that time was counted by a particle counter arranged below the radial ball bearing. FIG. 3 shows a graph in which the total dust generation amount of particles having a particle diameter of 0.3 μm or more per test time of 20 hours is tabulated.
【００１５】図３の結果より、大気中では、とくにチタ
ン製の保持器を使用した具体例２の軸受が、全くのオイ
ルレス状態で使用した際の低発塵性に著しくすぐれてい
ることが確認された。なお後述する腐蝕雰囲気下放置試
験と同条件の腐蝕雰囲気下で同様の試験を行ったとこ
ろ、ＳＵＳ３０４製の保持器を使用した比較例１の軸受
は全発塵量が９００万個前後まで急増したが、具体例１
〜３の軸受はいずれも、大気中での測定値に比べて発塵
量が殆ど増加しなかった。From the results shown in FIG. 3, it can be seen that, in the atmosphere, the bearing of Example 2 in which the cage made of titanium, in particular, is used is remarkably excellent in low dust generation when used in a completely oilless state. confirmed. When a similar test was conducted under a corrosive atmosphere under the same conditions as the later-described corrosive atmosphere leaving test, the bearing of Comparative Example 1 using the cage made of SUS304 rapidly increased the total dust generation amount to around 9 million. However, specific example 1
In all of the bearings No. 3 to No. 3, the amount of dust generation hardly increased as compared with the measured value in the atmosphere.
【００１６】このことから、大気中でも発塵量が少なか
った具体例２は、保持器の耐蝕性ゆえに、腐蝕雰囲気下
でも低発塵性に著しくすぐれていることがわかった。ま
たタンタル製の保持器を使用した具体例１の軸受、なら
びにニオブ製の保持器を使用した具体例３の軸受は、同
様に保持器の耐蝕性ゆえ、腐蝕雰囲気下ではＳＵＳ３０
４製の保持器を使用した比較例１の軸受と同様またはそ
れ以上の低発塵性を発揮することもわかった。From the above, it was found that the concrete example 2 which produced a small amount of dust even in the atmosphere was excellent in low dust generation even in a corrosive atmosphere due to the corrosion resistance of the cage. Further, the bearing of Example 1 using the cage made of tantalum and the bearing of Example 3 using the cage made of niobium similarly have SUS30 in a corrosive atmosphere due to the corrosion resistance of the cage.
It was also found that the bearing of Comparative Example 1 using the cage made of No. 4 exhibited the same or higher low dust generation.
【００１７】腐蝕雰囲気下放置試験 上記各具体例、比較例のラジアル玉軸受を密閉容器内に
収容し、当該容器内にＨBrガスを封入して１４時間放置
した。容器内の雰囲気条件は以下のとおりである。 雰囲気圧力：大気圧 雰囲気温度：２４±１℃ ＨBr濃度：１００ppm Ｈ2 Ｏ濃度：２５０ppm この時の保持器の重量変化を図４に示す。Storage test in corrosive atmosphere The radial ball bearings of the above specific examples and comparative examples were housed in a hermetically sealed container, and HBr gas was sealed in the container and left for 14 hours. The atmospheric conditions in the container are as follows. Atmospheric pressure: atmospheric pressure Atmospheric temperature: 24 ± 1 ° C. HBr concentration: 100 ppm H 2 O concentration: 250 ppm The weight change of the cage at this time is shown in FIG.
【００１８】図４にみるように、ＳＵＳ３０４製の保持
器を使用した比較例１の軸受は重量が著しく減少したの
に対し、本発明の構成であるタンタル、チタンおよびニ
オブ製の保持器を使用した具体例１，２および３の軸受
はいずれも、全く重量が変化しなかった。また軸受を取
り出して観察したところ、比較例１の軸受はＳＵＳ３０
４製の保持器の全面に腐蝕が見られたのに対し、上記具
体例１，２および３の軸受は、いずれの保持器部材にも
全く腐蝕は観察されなかった。As shown in FIG. 4, the weight of the bearing of Comparative Example 1 using the cage made of SUS304 was remarkably reduced, while the cage made of tantalum, titanium and niobium, which is the constitution of the present invention, was used. The weights of the bearings of Examples 1, 2, and 3 did not change at all. When the bearing was taken out and observed, the bearing of Comparative Example 1 was SUS30.
Corrosion was observed on the entire surface of the cage made of No. 4, whereas no corrosion was observed on any of the cage members in the bearings of Examples 1, 2 and 3 above.
【００１９】[0019]
【発明の効果】以上詳述したように、本発明の転がり軸
受は、軌道輪、転動体が耐蝕性の材料で形成されている
とともに、保持器が耐熱性、耐蝕性にすぐれたタンタ
ル、チタンまたはニオブで形成されているため、半導体
製造装置のチャンバ内など、とくに過酷な条件下で使用
する際の耐熱性、耐蝕性にすぐれている。As described in detail above, in the rolling bearing of the present invention, the races and rolling elements are made of a corrosion resistant material, and the cage is made of tantalum or titanium which is excellent in heat resistance and corrosion resistance. Alternatively, since it is formed of niobium, it has excellent heat resistance and corrosion resistance when used under particularly severe conditions such as in a chamber of a semiconductor manufacturing apparatus.
【００２０】また上記タンタル、チタンおよびニオブは
いずれもプレス加工が可能であるため、本発明の転がり
軸受は、従来のＳＵＳ３０４製の保持器を有するものと
同様に、量産化が容易である。Since tantalum, titanium, and niobium can be pressed, the rolling bearing of the present invention can be easily mass-produced like the conventional bearing having a cage made of SUS304.
【図１】本発明の実施例に係る転がり軸受の断面図であ
る。FIG. 1 is a sectional view of a rolling bearing according to an embodiment of the present invention.
【図２】図１の実施例に使用する保持器の一例を示す斜
視図である。FIG. 2 is a perspective view showing an example of a retainer used in the embodiment of FIG.
【図３】発塵性試験の結果を示すグラフである。FIG. 3 is a graph showing the results of a dust generation test.
【図４】腐蝕雰囲気下放置試験の結果を示すグラフであ
る。FIG. 4 is a graph showing the results of a standing test in a corrosive atmosphere.
１ 軌道輪 ２ 軌道輪 ３ 転動体 ４ 保持器 1 orbital ring 2 orbital ring 3 rolling element 4 cage
Claims (1)
と、両軌道輪間に配置される複数の転動体と、当該転動
体を保持する保持器とを備えた転がり軸受において、上
記転動体がセラミック材料で形成されているとともに、
保持器がタンタル、チタンまたはニオブで形成されてい
ることを特徴とする転がり軸受。1. A rolling bearing comprising a pair of bearing rings formed of a corrosion-resistant material, a plurality of rolling elements arranged between the two bearing rings, and a retainer for holding the rolling elements. While the rolling elements are made of ceramic material,
A rolling bearing characterized in that the cage is made of tantalum, titanium or niobium.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP202893A JPH06200948A (en) | 1993-01-08 | 1993-01-08 | Rolling bearing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP202893A JPH06200948A (en) | 1993-01-08 | 1993-01-08 | Rolling bearing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06200948A true JPH06200948A (en) | 1994-07-19 |
Family
ID=11517885
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP202893A Pending JPH06200948A (en) | 1993-01-08 | 1993-01-08 | Rolling bearing |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06200948A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10255374A1 (en) * | 2002-11-27 | 2004-06-24 | Siemens Ag | Storage system for fans and electrical machines |
| JP2018128182A (en) * | 2017-02-07 | 2018-08-16 | 中国電力株式会社 | Fire damper |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05187445A (en) * | 1992-01-10 | 1993-07-27 | Nippon Seiko Kk | Roll supporting device in hot dip zinc bath |
-
1993
- 1993-01-08 JP JP202893A patent/JPH06200948A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05187445A (en) * | 1992-01-10 | 1993-07-27 | Nippon Seiko Kk | Roll supporting device in hot dip zinc bath |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10255374A1 (en) * | 2002-11-27 | 2004-06-24 | Siemens Ag | Storage system for fans and electrical machines |
| JP2018128182A (en) * | 2017-02-07 | 2018-08-16 | 中国電力株式会社 | Fire damper |
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