JPH0620125Y2 - Microscope observation jig for industrial materials - Google Patents
Microscope observation jig for industrial materialsInfo
- Publication number
- JPH0620125Y2 JPH0620125Y2 JP1986140152U JP14015286U JPH0620125Y2 JP H0620125 Y2 JPH0620125 Y2 JP H0620125Y2 JP 1986140152 U JP1986140152 U JP 1986140152U JP 14015286 U JP14015286 U JP 14015286U JP H0620125 Y2 JPH0620125 Y2 JP H0620125Y2
- Authority
- JP
- Japan
- Prior art keywords
- curvature
- thin
- sample
- micro sample
- jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Sampling And Sample Adjustment (AREA)
Description
【考案の詳細な説明】 〔産業上の利用分野〕 本考案は工業材料の顕微鏡観察用治具に関するものであ
る。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a microscope observing jig for industrial materials.
〔従来の技術とその問題点〕 アルマイト等の各種被膜や層の加工においては、被膜や
層が目標の生成状態や膜厚・層厚となっているかを厳し
く管理する必要があり、その手段として、被膜や層を施
した薄板などから微小な試料を採取し、顕微鏡で膜厚や
断面を観察、測定することが行われている。[Prior art and its problems] When processing various coatings and layers such as alumite, it is necessary to strictly control whether the coatings or layers have the target generation state or the film thickness / layer thickness. It is practiced to collect a minute sample from a coating or a thin plate having a layer, and observe and measure the film thickness and cross section with a microscope.
この顕微鏡観察の精度を得るためには、被膜や層を観察
面に対し正確に直角にセットすることが不可欠である。
そこで、透明な合成樹脂に前記試料を埋込み固定する方
法がとられているが、被膜や層は一般にミクロンオーダ
ーときわめて薄く、母材側も薄肉で剛性に乏しいため、
直角状の起立とその保持が困難で、固定用樹脂が硬化す
るまでの間わずかな振動や衝撃が作用するだけで変位し
てしまい、第5図のように観察面Aに対し微小試料1′
が傾斜状に埋込まれることが多かった。そのため作業性
が悪く、多大の手間と時間を要するばかりでなく、膜厚
測定結果に大きな誤差(実際より大きな値を示す)が生
じ、この誤差が実加工に反映して目標値より厚い製品と
なり、良品歩留りが低下するなどの問題を生じさせてい
た。In order to obtain the precision of this microscopic observation, it is indispensable to set the film or layer at right angles to the observation surface.
Therefore, a method of embedding and fixing the sample in a transparent synthetic resin has been adopted, but the coating or layer is generally extremely thin on the order of microns, and the base material side is also thin and poor in rigidity,
It is difficult to stand upright at right angles and hold it, and it is displaced by slight vibration or impact until the fixing resin is hardened, so that the minute sample 1 ′ with respect to the observation surface A as shown in FIG.
Were often buried in a slope. As a result, the workability is poor, and not only does it take a lot of time and effort, but a large error (indicating a larger value than the actual value) occurs in the film thickness measurement result, and this error is reflected in actual processing, resulting in a product thicker than the target value. However, the yield of non-defective products was reduced.
特開昭60−233530号公報にはプラスチックレン
ズや光磁気ディスクなどのブロック状試料の顕微鏡観察
に関し、トリミングしたブロック状試料の背面に長方形
に切った厚紙を両面テープで貼り付け、厚紙ともども包
埋器具内に挿入して固定することが提案されているが、
作業性が悪い点、試料を観察面に対し直角にセットする
ことが容易でない点、さらに合成樹脂で固定しようとし
た場合、溶融樹脂の熱で装着が解除されて斜めに傾いた
り、溶けた接着剤や台紙としての紙が試料に付着し、顕
微鏡観察条件を悪化させる点に問題があった。Japanese Patent Application Laid-Open No. 60-233530 relates to a microscope observation of a block-shaped sample such as a plastic lens or a magneto-optical disk, and a cardboard cut into a rectangle is attached to the back surface of the trimmed block-shaped sample with a double-sided tape to embed the cardboard together. Although it is proposed to insert and fix it in the device,
Workability is poor, it is not easy to set the sample at a right angle to the observation surface, and if you try to fix it with synthetic resin, the heat of the molten resin will release the mounting and tilt it obliquely or melt it There is a problem in that the agent and the paper as the backing paper adhere to the sample and deteriorate the microscope observation conditions.
また、実開昭55−78936号公報には包埋用の成形
型が提案されているが、この先行技術は特定の径のピン
や棒などの試料の包埋には適しているが、腰がなく厚さ
のマチマチな薄肉面状微小試料を正確に直角に起立させ
たり保持することは難しく、しかも型構造が複雑で、成
形後カット工程を加えたりしなければならないためコス
トが高くなるという問題があった。Further, Japanese Utility Model Laid-Open No. 55-78936 proposes a molding die for embedding. This prior art is suitable for embedding a sample such as a pin or a rod having a specific diameter. It is difficult to raise or hold a thin thin surface micro sample that has no thickness and is accurate at a right angle, and the mold structure is complicated, and it requires a cutting process after molding, resulting in high cost. There was a problem.
なお、X線回析のための試料保持具に関し、実公昭49
−35353号公報が提案されているが、この先行技術
は試料を薄板の穴に遊め、その薄板を基体の穴に嵌合す
るといった複雑な構造と作業を必要とし、さらに試料支
持台に基体を当接する段部を形成したり、板ばねの一端
を試料支持台に固定しなければならないため治具構造が
複雑で操作が非常に面倒であるという問題があった。Regarding the sample holder for X-ray diffraction, see
However, this prior art requires a complicated structure and work in which a sample is loosened in a hole of a thin plate and the thin plate is fitted into a hole of a base body. There is a problem in that the jig structure is complicated and the operation is very troublesome because it is necessary to form a step portion that abuts against each other and fix one end of the leaf spring to the sample support base.
本考案は前記のような問題点を解消し、顕微鏡観察用微
小試料を正確な直立状態で樹脂中に埋込み固定すること
のできる構造簡単なこの種治具を提供しようとするもの
で、その特徴とするところは、皮膜部材などの薄肉面状
微小試料を顕微鏡観察するため合成樹脂に薄肉面状微小
試料ともども埋め込まれる治具であって、前記治具が、
幅方向端面をもって基面に対し直角状に立ち上がる帯状
片からなり、該帯状片が薄肉面状微小試料を挟む開口を
得るように内曲した一対の曲率挟み壁を有するととも
に、この一対の曲率挟み壁が前記開口を常時閉じ方向に
付勢する曲率連結部で結ばれている構成としたことにあ
る。The present invention solves the above-mentioned problems and aims to provide a jig of this kind with a simple structure capable of embedding and fixing a microscopic sample for microscopic observation in resin in an upright state. The place is a jig that is embedded in a synthetic resin together with a thin-walled micro sample for microscopically observing a thin-walled micro sample such as a coating member.
A strip-shaped piece that has a widthwise end face and rises at a right angle to the base surface, and the strip-shaped piece has a pair of curvature sandwiching walls that are inwardly curved to obtain an opening for sandwiching a thin-walled micro sample, and the pair of curvature sandwiching walls. The structure is such that the walls are connected by a curvature connecting portion that constantly urges the opening in the closing direction.
以下本考案の実施例を添付図面に基いて説明する。 An embodiment of the present invention will be described below with reference to the accompanying drawings.
第1図ないし第3図は本考案に係る工業材料の顕微鏡観
察用治具の実施例を示すもので、1は薄肉面状微小試料
(以下単に微小試料と称す)であり、図示するものでは
アルミニウム板10にアルマイト膜などの被膜11を施
した工業材料を切取ってなる。1 to 3 show an embodiment of a microscope observing jig for industrial materials according to the present invention, in which 1 is a thin surface micro sample (hereinafter simply referred to as "micro sample"). The aluminum plate 10 is cut out of an industrial material having a coating 11 such as an alumite film.
2は本考案に係る治具であり、耐食性がよく腰のある材
質たとえばステンレススチールあるいは合成樹脂の帯状
片からなっている。該帯状片は幅方向端面をもって基面
に対し直角状に立上り、自由端側が板厚方向に内曲され
ることにより、前記微小試料1を挟む開口3を中央部に
得るように一対の曲率挟み壁4,4が形成されており、
この一対の曲率挟み壁4,4は前記開口3を常時同じ方
向に付勢する曲率連結部5で結ばれている。Reference numeral 2 denotes a jig according to the present invention, which is made of a band material made of a material having good corrosion resistance and good elasticity such as stainless steel or synthetic resin. The strip has a widthwise end face which rises at a right angle to the base face, and the free end side is inwardly bent in the plate thickness direction to sandwich a pair of curvatures so as to obtain an opening 3 for sandwiching the micro sample 1 in the central portion. Walls 4 and 4 are formed,
The pair of curvature sandwiching walls 4 and 4 are connected by a curvature connecting portion 5 that constantly biases the opening 3 in the same direction.
前記曲率挟み壁4,4は常態において第1図のように接
触しあっており、曲率挟み壁4,4の端部は曲率連結部
5に沿って巻回可能な延長曲成部40,40となってい
て、微小試料1のかなりの範囲の厚さにも対応できるよ
うになっている。In the normal state, the curvature sandwiching walls 4, 4 are in contact with each other as shown in FIG. 1, and the ends of the curvature sandwiching walls 4, 4 are extendable bent portions 40, 40 that can be wound along the curvature connecting portion 5. Therefore, it is possible to cope with the thickness of the minute sample 1 in a considerable range.
7は固定用の樹脂であり、透明な熱可塑性樹脂などが用
いられる。7 is a fixing resin, and a transparent thermoplastic resin or the like is used.
本考案は上記のような構成からなるので、微小試料1の
膜厚を測定するにあたっては、本案品をテーブル等の水
平面に配し、一対の曲率挟み壁4,4の間に微小試料1
を差込み、あるいは開口3を開いて微小試料1を装入
し、これの端面を水平面に接するように調整し、次いで
受皿等に本案品を配し、溶融した樹脂を流し込み固化さ
せればよい。一対の曲率挟み壁4,4が延長曲成部4
0,40が曲率連結壁5に沿ってわん曲しているため、
微小試料1を差込めば自然に延長曲成部40,40が巻
き移動して開口3が形成される。また開口3を予め作っ
て微小試料1を挟む場合も、一対の曲率挟み壁4,4の
中空部に指先などを挿入して左右に拡開することによっ
て簡単に行える。Since the present invention is configured as described above, when measuring the film thickness of the micro sample 1, the present sample is placed on a horizontal plane such as a table and the micro sample 1 is placed between the pair of curvature sandwiching walls 4 and 4.
Or the opening 3 is opened to insert the micro sample 1 and the end surface of the micro sample 1 is adjusted so as to be in contact with the horizontal surface. Then, the product of the present invention is placed in a pan or the like, and the molten resin is poured and solidified. A pair of curvature sandwiching walls 4 and 4 are extended bent portions 4
Since 0 and 40 are curved along the curvature connecting wall 5,
When the micro sample 1 is inserted, the extension bent portions 40, 40 are naturally wound and moved to form the opening 3. Also, when the opening 3 is made in advance and the micro sample 1 is sandwiched, it can be easily carried out by inserting a fingertip or the like into the hollow portions of the pair of curvature sandwiching walls 4 and 4 and expanding it to the left and right.
本考案では曲率連結部5で一対の曲率挟み壁4,4を閉
じ側に付勢し、かつ一対の曲率挟み壁4,4が内曲して
いることでそれ自体でも良好なばね性が有しているた
め、微小試料1が薄く腰がなくても幅方向全長にわたり
しっかりと挟持され、微小試料1の厚みが変われば延長
曲成部40,40が曲率連結壁5に沿って巻かれるた
め、厚さの変化に自在に対応することができる。また、
挟み壁4,4が丸まっており、三角クリップのような開
口部の尖りがないため、微小試料1の挟み時に微小試料
1が接触してもこれに傷をつけず、またエッジで局部的
に挟圧しないため微小試料1を不当に圧迫して損傷する
こともない。In the present invention, the curvature connecting portion 5 urges the pair of curvature sandwiching walls 4 and 4 toward the closing side, and the pair of curvature sandwiching walls 4 and 4 is internally curved, so that the spring itself has a good spring property. Therefore, even if the micro sample 1 is thin and is not stiff, the micro sample 1 is firmly clamped over the entire length in the width direction, and if the thickness of the micro sample 1 changes, the extended bent portions 40, 40 are wound along the curvature connecting wall 5. It is possible to freely respond to changes in thickness. Also,
Since the sandwiching walls 4 and 4 are rounded and there is no sharpness of the opening like a triangular clip, even if the micro sample 1 comes into contact when the micro sample 1 is sandwiched, it is not scratched and the edge is locally localized. Since no pressure is applied, the micro sample 1 is not unduly pressed and damaged.
そして、一対の曲率挟み壁4,4とこれらを結ぶ曲率連
結部5の端面によって構成される載置面積は広く、水平
面から直角状に安定して起立しているため、固定用樹脂
7が固化するまでの間も微小試料1は観察面Aに対し正
確に直角状態を保たれ、そのまま固定される。Further, the mounting area constituted by the pair of curvature sandwiching walls 4, 4 and the end faces of the curvature connecting portion 5 connecting them is wide, and the fixing resin 7 is solidified because it is stably erected at a right angle from the horizontal plane. Until then, the micro sample 1 is kept at a right angle to the observation surface A and is fixed as it is.
微小試料1は全体を固定用樹脂7に埋込んでもよいし、
所要範囲だけを埋込んでもよい。本案治具2は帯状片か
らなっていて幅方向をもって立上っているため、固定用
樹脂7の流動がさまたげられない。The whole micro sample 1 may be embedded in the fixing resin 7,
You may embed only the required range. Since the jig 2 of the present invention is composed of a strip and rises in the width direction, the flow of the fixing resin 7 cannot be obstructed.
あとは従来と同様、固定用樹脂7で埋込んだ全体Bを第
4図のように顕微鏡8の載置台またはステージ9に配し
接眼レンズ12により観察、測定を行えばよく、この場
合、微小試料1が観察面Aに正確に直立されているた
め、被膜11の厚さを精度よく測定できる。測定後は樹
脂を加熱することで簡単に本案品を取出し、再使用する
ことができる。After that, as in the conventional case, the whole B embedded with the fixing resin 7 may be placed on the stage of the microscope 8 or the stage 9 as shown in FIG. 4 and observed and measured by the eyepiece lens 12. In this case, Since the sample 1 is accurately erected on the observation surface A, the thickness of the coating film 11 can be accurately measured. After measurement, the product can be easily taken out by heating the resin and reused.
なお、本案品を微小試料と色みの異なる合成樹脂で作っ
たときには、色味の違いにより膜等が浮き立つため、厚
さ等をはっきりと観察、測定することができる。When the product of the present invention is made of a synthetic resin having a color different from that of the micro sample, the film and the like stand out due to the difference in tint, so that the thickness and the like can be clearly observed and measured.
以上説明した本考案によるときには、皮膜部材などの薄
肉面状微小試料を顕微鏡観察するため合成樹脂に薄肉面
状微小試料ともども埋め込まれる治具において、前記治
具が幅方向端面をもって基面に対し直角状に立ち上がる
帯状片からなり、該帯状片が薄肉面状微小試料1を挟む
開口3を得るように内曲した一対の曲率挟み壁4,4を
有するとともに、この一対の曲率挟み壁4,4が前記開
口3を常時閉じ方向に付勢する曲率連結部5で結ばれて
いるので、薄く腰がない種々の厚さの面状微小試料を傷
をつけずに保持し、埋設用の合成樹脂の流れを妨げず、
合成樹脂が固化するまで振動等が作用しても基面に対し
正確に安定した直角状態を保持させて埋め込むことがで
き、薄肉面状微小試料の精度の高い厚さ測定などを行う
ことができる。しかも、構造が簡単で開口3と曲率連結
部5の距離を短くできるためコンパクトなものとするこ
とができ、製造上もプレス加工を要さずに作ることがで
きるため安価に作ることができるなどのすぐれた効果が
得られる。According to the present invention described above, in the case of a jig which is embedded in a synthetic resin together with a thin-walled surface micro sample for microscopic observation of a thin-walled surface micro sample such as a coating member, the jig has a widthwise end face at a right angle to the base surface. And a pair of curvature sandwiching walls 4 and 4 inwardly curved so as to obtain an opening 3 for sandwiching the thin surface micro sample 1, and the pair of curvature sandwiching walls 4 and 4 are formed. Are connected by a curvature connecting portion 5 that always urges the opening 3 in the closing direction, so that a thin, thin, flat sheet of various thicknesses can be held without being scratched, and a synthetic resin for embedding can be held. Without disturbing the flow of
Even when vibration is applied until the synthetic resin is solidified, it can be embedded while holding a stable and right-angled state accurately to the base surface, and it is possible to perform highly accurate thickness measurement of thin-walled microsamples. . Moreover, since the structure is simple and the distance between the opening 3 and the curvature connecting portion 5 can be shortened, the structure can be made compact, and the manufacturing process can be performed without pressing, so that the manufacturing cost can be reduced. The excellent effect of is obtained.
第1図は本考案による工業材料顕微鏡観察用治具の実施
例を示す拡大傾斜図、第2図は使用状態を示す縦断面
図、第3図は同じくその横断面図、第4図は顕微鏡配置
状態の側面図、第5図は従来の試料固定状態を示す断面
図である。 1…薄肉面状微小試料(微小試料)、3…開口、4,4
…曲率挟み壁、5…曲率連結部FIG. 1 is an enlarged perspective view showing an embodiment of a jig for observing an industrial material microscope according to the present invention, FIG. 2 is a longitudinal sectional view showing a use state, FIG. 3 is a transverse sectional view of the same, and FIG. 4 is a microscope. FIG. 5 is a side view of the arranged state, and FIG. 5 is a sectional view showing a conventional sample fixed state. 1 ... Thin-walled micro sample (micro sample), 3 ... Opening, 4, 4
… Curvature sandwiching wall, 5… Curvature connecting part
Claims (1)
観察するため合成樹脂に薄肉面状微小試料ともども埋め
込まれる治具であって、前記治具が、幅方向端面をもっ
て基面に対し直角状に立ち上がる帯状片からなり、該帯
状片が薄肉面状微小試料1を挟む開口3を得るように内
曲した一対の曲率挟み壁4,4を有するとともに、この
一対の曲率挟み壁4,4が前記開口3を常時閉じ方向に
付勢する曲率連結部5で結ばれていることを特徴とする
工業材料の顕微鏡観察用治具。1. A jig which is embedded in a synthetic resin together with a thin-walled microsample for microscopically observing a thin-walled microsample such as a film member, wherein the jig has a widthwise end face at a right angle to a base surface. And a pair of curvature sandwiching walls 4 and 4 inwardly curved so as to obtain an opening 3 for sandwiching the thin surface micro sample 1, and the pair of curvature sandwiching walls 4 and 4 are formed. Is connected by a curvature connecting portion 5 that constantly urges the opening 3 in the closing direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986140152U JPH0620125Y2 (en) | 1986-09-12 | 1986-09-12 | Microscope observation jig for industrial materials |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986140152U JPH0620125Y2 (en) | 1986-09-12 | 1986-09-12 | Microscope observation jig for industrial materials |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6347256U JPS6347256U (en) | 1988-03-30 |
| JPH0620125Y2 true JPH0620125Y2 (en) | 1994-05-25 |
Family
ID=31046731
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986140152U Expired - Lifetime JPH0620125Y2 (en) | 1986-09-12 | 1986-09-12 | Microscope observation jig for industrial materials |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0620125Y2 (en) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5139852Y2 (en) * | 1972-06-29 | 1976-09-29 | ||
| JPS5819472Y2 (en) * | 1978-11-27 | 1983-04-21 | 昭和電線電纜株式会社 | Sample molding device |
| JPS6015043U (en) * | 1983-07-11 | 1985-02-01 | 日産自動車株式会社 | Seat belt retractor lock prevention device |
| JPS60233530A (en) * | 1984-05-02 | 1985-11-20 | Seiko Epson Corp | Embedding method of sample for observing and analyzing with electron microscope |
-
1986
- 1986-09-12 JP JP1986140152U patent/JPH0620125Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6347256U (en) | 1988-03-30 |
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