JPH0622201Y2 - Hardness tester - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a hardness tester whose test position can be easily determined.

[Prior Art] A conventional hardness tester that includes an indenter to which a test load is applied by a load mechanism and presses the indenter onto a sample surface to measure hardness is provided with a microscope having a function of determining a test position. The test position can be determined by observing the sample surface with this microscope.

[Problems to be Solved by the Invention] In the above-mentioned conventional hardness tester, the test position where the indentation is made comes to a specific position (for example, the central part) within the field of view of the microscope. There was some deviation depending on the height of the stage, the height of the stage, etc., and as shown in FIGS. 4 (a) and 4 (b), the test position often moved within the visual field depending on the sample.

In this case, since the test position has reproducibility, the test is performed once to make an indentation P on the sample surface, and a person remembers the position in the field of view F, and the test position should be moved to that position from the next time. If you do, you can test the desired location, but remember the specific position in the field of view,
In practice, it is extremely difficult to match the test position with that position, and there has been a problem that the shift of the test position cannot be avoided.

[Means for Solving Problems] In order to solve the above problems, the present invention provides the following hardness tester.

That is, the hardness meter according to the present invention comprises a load mechanism for applying a test load to an indenter, a microscope capable of observing a test position of a sample, a stage for movably mounting the sample in a plane, and the sample. Is a hardness scale equipped with a stage on which a sample is mounted, and a sample stage that rotationally moves the stage on which the sample is mounted between the load mechanism and the microscope, and a test position within a field of view of the microscope. It is characterized by the provision of a position-adjustable moving point that indicates the position.

[Operation] Since a moving point whose position can be adjusted is provided in the field of view of the microscope, a preliminary test is performed once, and this moving point is positioned at the position in the field of sight such as an indentation made on the sample surface. By setting the test position from the next time on this moving point, the moving point becomes the test position.

[Embodiment] FIG. 1 is a sectional view showing the structure of an ultra-fine hardness meter H to which a test position determining device according to the present invention is attached. The load device 1 in the frame 20 is a balanced balance. Indenter 6 at one end of 2
Is attached to the other side, and the electrode coil 3 is attached to the other side of the automatic balance type electronic balance type. That is, a direct current is made to flow from the measurement control device 12 to the electromagnetic coil 3, and a load is added or reduced by the electromagnetic force of the electromagnetic coil 3 depending on the flowing direction thereof, and the load is placed on the stage 9 of the sample stage 8 via the indenter 6. The load on the sample 7 can be increased or decreased. The load device 1 can arbitrarily increase, decrease, or stop the load according to an external signal from the measurement control device 12. A differential transformer type displacement detector 5 is provided above the indenter 6, and detects the displacement (the depth of the depression) on the surface of the sample 7 against which the indenter 6 is pressed while applying a load. The displacement amount detected by the displacement detector 5, that is, the movement amount of the indenter 6 is quantitatively captured by the displacement measuring device (amplifier) 10 and output to the measurement control device 12 as a displacement signal.

In addition to the above, this device includes a microscope as an optical monitor.
15, a sample table 8 is provided. The microscope 15 is provided with an objective lens 17 and an eyepiece lens 16 and is used by the operator to determine the position of the test on the surface of the sample 7 and for the operator to observe the state of the recess formed by the indenter 6. The sample table 8 has a structure capable of moving up and down, a stage 9 that is movable in the XY directions and the rotation direction is detachably provided, and a die for fixing the sample 7 is attached to the upper surface of the stage 9. Operate the sample table 8 to bring the indenter 6 and the sample 7 close to each other,
It can be moved to any test position.

A test position determination device 30 is provided in the eyepiece 16 of the microscope 15.
Is provided. As shown in FIG. 2, the test position determining device 30 is provided with a transparent moving plate 32 on which an X-axis 31 is displayed and a transparent moving plate 34 on which a Y-axis 33 is displayed so as to be movable in directions perpendicular to each other. There is. The bases of the moving plates 32 and 34 are square nuts 36 and 38.
The angle nuts 36 and 38 are respectively fixed to the position adjusting knobs 4 which are rotatably attached to the eyepiece tube portion 40.
The screw shaft portions 43, 45 of 2, 44 are screwed together. On both sides of the square nuts 36, 38, there are guide plates 46, which restrain the rotation of the square nuts.
... is provided. Therefore, position adjustment knobs 42, 4
When 4 is turned, the square nuts 36, 38 slide along the guide plates 46, ... And move the moving plates 32, 34 integrated with them in the axial direction of the screw shaft portion. The screw shaft portions 43 and 45 are provided so as to be orthogonal to each other, and the X axis and the Y axis are drawn at right angles to the moving direction of the moving plate on which they are displayed.

The test with the hardness meter constructed as described above is carried out as follows.

The sample 7 is fixed to the sample table 8 and positioned at the center of the objective lens 17 of the microscope 15. The sample table 8 is moved up and down while looking through the eyepiece 16, the surface of the sample 7 is found, and the position to be tested is determined by operating the stage 9. After moving this test position to the position of the moving point O in the visual field preset by the method described later, the sample 7 is moved to the lower side of the indenter 6 while keeping the same horizontal plane. Since the measurement conditions are predetermined in the measurement control device 12, the test is designed to proceed in a predetermined sequence. A current in the load direction flows through the electromagnetic coil 3 along with the signal to start the test, and the indenter 6 is pushed downward. While there is a space between the tip of the indenter 6 and the surface of the sample 7, the surface is not scratched, but if there is no space,
The tip of the indenter 6 dents and scratches the surface. When it is determined by the appropriate determination means that the space is exhausted, the position of the indenter 6 at that time is set as a zero point, and the distance moved by the indenter 6 from that point is set as the deformation amount of the sample 7. After the zero point is detected, a predetermined test load is applied to obtain information on the amount of deformation of the sample 7. In this case, the amount of deformation is obtained based on the load, but the load at that time can also be known based on the amount of deformation.

When the predetermined test is completed, a current in the unloading direction is passed through the electromagnetic coil 3 to move the indenter 6 upward.

Next, a test position determining method by the test position determining device 30 will be described.

First, an appropriate portion of the sample (a portion that does not affect the portion to be tested) is located in the visual field F of the eyepiece lens 16, and the load test is performed once. When the indentation is formed on the sample surface, the sample table 8 is moved to position the sample under the microscope. Then, while observing the visual field F from the eyepiece, the knobs 42 and 44 of the test position determination device 30 are turned to match the moving point O which is the intersection of the X axis and the Y axis with the position of the indentation. By this operation, the position of the moving point O of the sample under the microscope becomes
It is the position of the indenter 6 when the sample is moved to the load section. Therefore, from the next time onward, the stage 9 may be operated to position the point where the test is actually desired on the moving point O.

In addition, in the illustrated example, the moving point O is configured as an intersection of two lines which are the X axis and the Y axis. However, such a line is not provided and the moving point can be freely moved in the XY directions. Good. When a line is provided as shown in the example,
It is convenient to display a scale on this line to measure the size of the indentation.

[Advantage of Device] As is clear from the above description, since the hardness meter according to the present invention is provided with the movable point for adjusting the test position within the field of view of the microscope, the hardness meter rotates on the sample table. Even when the sample is placed on a movable stage for testing, it is possible to reliably test the desired position on the sample.
It became possible to easily and accurately determine the test position. If this device is applied to, for example, an ultra-fine hardness tester, it becomes possible to test a sample that has been impossible in the past.

[Brief description of drawings]

FIG. 1 is an explanatory diagram showing an example of a material testing apparatus embodying the present invention, FIG. 2 is a front view of the test position determining apparatus, FIG. 3 is a sectional view thereof, and FIGS. b) is an explanatory view of a conventional example. 6 …… Indenter, 7 …… Sample, 8 …… Sample stand 15 …… Microscope, 16 …… Eyepiece, 30 …… Test position determination device, 31 …… X axis, 33 …… Y axis 42,44 …… Position adjustment knob, O …… Movement point

Claims (1)

[Scope of utility model registration request] 1. A load mechanism for applying a test load to an indenter, a microscope capable of observing a test position of a sample, a stage on which a sample is mounted, and a stage on which the sample is mounted are attached to the load mechanism. And a microscope which includes a sample table for moving a stage on which the sample is mounted between the microscope and the microscope, and the position is adjustable to indicate an indentation position on the sample surface during a preliminary test in the field of view of the microscope. Hardness tester characterized by various moving points.