JPH0622962Y2 - Magnetic fluid manufacturing equipment - Google Patents
Magnetic fluid manufacturing equipmentInfo
- Publication number
- JPH0622962Y2 JPH0622962Y2 JP8128988U JP8128988U JPH0622962Y2 JP H0622962 Y2 JPH0622962 Y2 JP H0622962Y2 JP 8128988 U JP8128988 U JP 8128988U JP 8128988 U JP8128988 U JP 8128988U JP H0622962 Y2 JPH0622962 Y2 JP H0622962Y2
- Authority
- JP
- Japan
- Prior art keywords
- ferromagnetic
- magnetic fluid
- heating
- crucible
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000011553 magnetic fluid Substances 0.000 title claims description 16
- 238000004519 manufacturing process Methods 0.000 title description 8
- 230000005294 ferromagnetic effect Effects 0.000 claims description 28
- 239000000126 substance Substances 0.000 claims description 21
- 238000001704 evaporation Methods 0.000 claims description 20
- 239000007788 liquid Substances 0.000 claims description 16
- 238000010438 heat treatment Methods 0.000 claims description 15
- 230000008020 evaporation Effects 0.000 claims description 14
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 239000004094 surface-active agent Substances 0.000 claims description 6
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 239000002904 solvent Substances 0.000 claims description 5
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 3
- 150000001875 compounds Chemical class 0.000 claims description 3
- 229910001882 dioxygen Inorganic materials 0.000 claims description 3
- 239000011261 inert gas Substances 0.000 claims description 3
- 230000008016 vaporization Effects 0.000 claims 1
- 239000003302 ferromagnetic material Substances 0.000 description 10
- 239000000155 melt Substances 0.000 description 8
- -1 alkyl naphthalene Chemical compound 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 3
- 230000005291 magnetic effect Effects 0.000 description 3
- LTPBRCUWZOMYOC-UHFFFAOYSA-N Beryllium oxide Chemical compound O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 125000005667 alkyl propylene group Chemical group 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 150000001412 amines Chemical class 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 230000005415 magnetization Effects 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- NWGKJDSIEKMTRX-AAZCQSIUSA-N Sorbitan monooleate Chemical compound CCCCCCCC\C=C/CCCCCCCC(=O)OC[C@@H](O)[C@H]1OC[C@H](O)[C@H]1O NWGKJDSIEKMTRX-AAZCQSIUSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 1
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 150000005690 diesters Chemical class 0.000 description 1
- 235000014113 dietary fatty acids Nutrition 0.000 description 1
- USIUVYZYUHIAEV-UHFFFAOYSA-N diphenyl ether Natural products C=1C=CC=CC=1OC1=CC=CC=C1 USIUVYZYUHIAEV-UHFFFAOYSA-N 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000000194 fatty acid Substances 0.000 description 1
- 229930195729 fatty acid Natural products 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000004093 laser heating Methods 0.000 description 1
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- UFWIBTONFRDIAS-UHFFFAOYSA-N naphthalene-acid Natural products C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- FFQLQBKXOPDGSG-UHFFFAOYSA-N octadecyl benzenesulfonate Chemical compound CCCCCCCCCCCCCCCCCCOS(=O)(=O)C1=CC=CC=C1 FFQLQBKXOPDGSG-UHFFFAOYSA-N 0.000 description 1
- 229940049964 oleate Drugs 0.000 description 1
- ZQPPMHVWECSIRJ-KTKRTIGZSA-N oleic acid Chemical compound CCCCCCCC\C=C/CCCCCCCC(O)=O ZQPPMHVWECSIRJ-KTKRTIGZSA-N 0.000 description 1
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 1
- 235000021317 phosphate Nutrition 0.000 description 1
- 150000003013 phosphoric acid derivatives Chemical class 0.000 description 1
- 150000003014 phosphoric acid esters Chemical class 0.000 description 1
- 229920013636 polyphenyl ether polymer Polymers 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 239000000344 soap Substances 0.000 description 1
- 229950004959 sorbitan oleate Drugs 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 description 1
Landscapes
- Lubricants (AREA)
- Soft Magnetic Materials (AREA)
Description
【考案の詳細な説明】 〔産業上の利用分野〕 この考案は磁性流体の製造装置に関し、特に、強磁性物
質を加熱装置によって加熱、蒸発させた蒸気を、界面活
性剤を含有して磁性流体の溶媒となる液体と接触させて
凝縮させるようにした磁性流体の製造装置に関するもの
である。DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a magnetic fluid manufacturing apparatus, and more particularly, to a magnetic fluid containing a surfactant, vapor generated by heating and evaporating a ferromagnetic substance by a heating device. The present invention relates to an apparatus for producing a magnetic fluid, which is brought into contact with a liquid serving as a solvent to be condensed.
従来のこの種の磁性流体の製造装置には、第3図に示す
ようなものがある。FIG. 3 shows a conventional magnetic fluid manufacturing apparatus of this type.
この装置は、上部中央に開口21が形成された横置の円
筒体22の外周に、円筒部材23の両端をフランジ2
4、24で保持した円筒形ドラム25の両端ボス部2
6、26がOリング27、27を介して気密に、かつ回
転可能に支持され、円筒体22および円筒形ドラム25
の内部は円筒体22の一端から吸引し、排気されて高真
空に保持されるようになっている。In this device, both ends of a cylindrical member 23 are provided on the outer circumference of a horizontal cylindrical body 22 having an opening 21 formed at the center of the upper portion of a flange 2
Both end boss portions 2 of the cylindrical drum 25 held by 4, 24
6, 26 are supported airtightly and rotatably via O-rings 27, 27, and have a cylindrical body 22 and a cylindrical drum 25.
The inside of the cylinder is sucked from one end of the cylindrical body 22, exhausted, and maintained in a high vacuum.
前記円筒体22の他端には中空管状の支持部材29、2
9の外方端が固着され、支持部材29、29の内方端に
は電極30、30が固着され、両電極30、30にはル
ツボ31の外周に巻かれたヒータ32の両端が支持され
てそれによりルツボ31は円筒体22内の開口21形成
位置に配置され、ルツボ31に収容した強磁性物質33
は支持部材29、29の中空管内を通して外部から電極
30、30間に適用される電流がヒータ32を流れるこ
とによって加熱され蒸発するようになっている。A hollow tubular support member 29, 2 is provided at the other end of the cylindrical body 22.
The outer end of 9 is fixed, the electrodes 30, 30 are fixed to the inner ends of the support members 29, 29, and both ends of a heater 32 wound around the outer periphery of the crucible 31 are supported by both electrodes 30, 30. As a result, the crucible 31 is arranged at the position where the opening 21 is formed in the cylindrical body 22, and the ferromagnetic material 33 accommodated in the crucible 31 is accommodated.
The electric current applied between the electrodes 30 and 30 from the outside through the hollow tubes of the support members 29 and 29 is heated and evaporated by flowing through the heater 32.
また、円筒形ドラム25の底部には界面活性剤を含有し
て磁性流体の溶媒となる液体34が収容され、この液体
34は円筒形ドラム25の回転にともなってその内周面
に被膜として付着して上昇し、ルツボ31の上方におい
てルツボ31から蒸発する強磁性物質33の蒸気と接触
して凝縮させるようになっている。A liquid 34 containing a surfactant and serving as a solvent for the magnetic fluid is contained in the bottom of the cylindrical drum 25, and the liquid 34 adheres to the inner peripheral surface of the cylindrical drum 25 as a film as the cylindrical drum 25 rotates. As a result, the ferromagnetic substance 33 vaporizes from the crucible 31 above the crucible 31 and comes into contact therewith to condense.
そして、このような強磁性物質33の蒸気と液体34と
の接触、凝縮を所要時間継続させることによって、磁化
の大きい磁性流体が得られるものである。Then, by contacting and condensing the vapor of the ferromagnetic substance 33 and the liquid 34 for a required time, a magnetic fluid having a large magnetization can be obtained.
しかしながら、このような従来のものにあっては、第2
図に示すように、加熱されたルツボ31の内部に満たさ
れた強磁性物質33の溶融物33aの表面に不純物(主
として融点の高い酸化物)33bが存在し、これが集ま
って次第に被膜を形成して、強磁性物質33の溶融物3
3aの表面を覆うため、強磁性物質33の溶融物33a
の蒸発が妨げられ、蒸着速度が低下してしまい、極端な
場合には蒸着が行えなくなってしまうという問題点を有
していた。However, in such a conventional device, the second
As shown in the figure, impurities (mainly oxides with a high melting point) 33b are present on the surface of the melt 33a of the ferromagnetic material 33 filled in the heated crucible 31, and these are collected to form a film gradually. And melt 3 of ferromagnetic material 33
A melt 33a of ferromagnetic material 33 to cover the surface of 3a.
However, there is a problem that the evaporation rate is reduced and the evaporation rate is reduced, so that the evaporation cannot be performed in an extreme case.
この考案は前記のような従来のもののもつ問題点を解決
したものであって、蒸着速度の低下を防止するととも
に、蒸着速度の向上によって蒸着時間の短縮を図ること
のできる磁性流体の製造装置を提供することを目的とす
るものである。This invention solves the problems of the conventional ones described above, and provides a magnetic fluid manufacturing apparatus capable of preventing a decrease in deposition rate and shortening the deposition time by improving the deposition rate. It is intended to be provided.
この考案は前記のような目的を達成するため、内部を高
真空もしくは低圧の不活性ガスまたは酸素ガス雰囲気と
した横置円筒形容器内に、強磁性金属元素または強磁性
化合物からなる強磁性物質の加熱蒸発装置を設けるとと
もに、界面活性剤を含有して磁性流体の溶媒となる液体
を収容し、前記横置円筒形容器をその軸線のまわりに回
転させてその内周面に前記液体の被膜を形成させなが
ら、前記加熱蒸発装置によって蒸発された前記強磁性物
質の蒸気を接触させて凝縮させるようになった磁性流体
の製造装置において、前記加熱蒸発装置を振動させる加
振手段を設けたものである。In order to achieve the above-mentioned object, the present invention is to provide a ferromagnetic material made of a ferromagnetic metal element or a ferromagnetic compound in a horizontal cylindrical container whose inside is a high vacuum or low pressure inert gas or oxygen gas atmosphere. And a liquid containing a surfactant and containing a liquid serving as a solvent for the magnetic fluid, and rotating the horizontal cylindrical container around its axis to coat the liquid on the inner peripheral surface thereof. A magnetic fluid manufacturing apparatus configured to contact and condense the vapor of the ferromagnetic substance vaporized by the heating evaporation device while forming Is.
この考案は前記のような手段を採用したことにより、加
振手段によって加熱蒸発装置が振動し、この振動によっ
て強磁性物質が攪拌されて、それにより強磁性物質の蒸
発が妨げられることなく、むしろ強磁性物質の蒸発が促
進されることとなる。This invention adopts the above-mentioned means, so that the heating-evaporating device vibrates by the vibrating means, and this vibration stirs the ferromagnetic substance, which does not hinder the evaporation of the ferromagnetic substance. The evaporation of the ferromagnetic material will be promoted.
以下、図面に示すこの考案の実施例について説明する。 An embodiment of the present invention shown in the drawings will be described below.
第1図にはこの考案による磁性流体の製造装置の一実施
例が示されており、この製造装置は、上部中央に開口1
が形成された横置の円筒体2を具えている。FIG. 1 shows an embodiment of a magnetic fluid manufacturing apparatus according to the present invention. This manufacturing apparatus has an opening 1 at an upper center.
It is provided with a horizontal cylindrical body 2 in which is formed.
前記円筒体2の外周には、パイレックスガラス製の円筒
部材3の両端を金属製のフランジ4、4で保持した円筒
形ドラム5の両端ボス部6、6がOリング7、7を介し
て気密に、かつ、深溝玉軸受8、8によって回転可能に
支持され、円筒体2および円筒形ドラム5の内部は円筒
体の図中右端から吸引、排気されて高真空に保持される
ようになっている。On the outer circumference of the cylindrical body 2, both end boss portions 6, 6 of a cylindrical drum 5 in which both ends of a Pyrex glass cylindrical member 3 are held by metal flanges 4, 4 are hermetically sealed via O-rings 7, 7. And rotatably supported by the deep groove ball bearings 8 and 8, the insides of the cylindrical body 2 and the cylindrical drum 5 are suctioned and exhausted from the right end of the cylindrical body in the figure to be maintained in a high vacuum. There is.
そして、前記円筒体2の図中左端には中空管状の支持部
材9、9の外方端が固着され、支持部材9、9の内方端
には電極10、10が固着され、両電極10、10には
アルミナ製のルツボ11の外周に巻かれたタングステン
線のヒータ12の両端が支持されてそれによりルツボ1
1は円筒体2内の開口1形成位置に配置され、ルツボ1
1内に収容した強磁性物質13は支持部材9、9の中空
管内を通して外部から電極10、10間に適用される電
流がヒータ12を流れることによって加熱され蒸発する
ようになっている。The outer ends of the hollow tubular support members 9 and 9 are fixed to the left end of the cylindrical body 2 in the figure, and the electrodes 10 and 10 are fixed to the inner ends of the support members 9 and 9. 10, both ends of a tungsten wire heater 12 wound around an alumina crucible 11 are supported, whereby the crucible 1
1 is arranged at a position where the opening 1 is formed in the cylindrical body 2, and the crucible 1
The ferromagnetic substance 13 accommodated in 1 is heated and evaporated by the electric current applied from the outside between the electrodes 10 and 10 through the heater 12 through the hollow tubes of the support members 9 and 9.
また、前記円筒形ドラム5の底部には界面活性剤を含有
して磁性流体の溶媒となる液体14が収容され、この液
体14は円筒形ドラム5の回転にともなってその内周面
に被膜として付着して上昇し、ルツボ11の上方にルツ
ボ11から蒸発する強磁性物質13の蒸気と接触して凝
縮させるようになっている。A liquid 14 containing a surfactant and serving as a solvent for the magnetic fluid is contained in the bottom of the cylindrical drum 5, and the liquid 14 forms a film on the inner peripheral surface thereof as the cylindrical drum 5 rotates. It adheres and rises, and contacts the vapor of the ferromagnetic substance 13 evaporated from the crucible 11 above the crucible 11 to condense it.
さらに、前記円筒体2の図中左端の端板外側には、これ
に固着された前記支持部材9、9を介してルツボ11を
振動させる加振手段、すなわち、圧電素子15が装着さ
れている。Further, on the outside of the end plate at the left end of the cylindrical body 2 in the figure, a vibrating means for vibrating the crucible 11 via the support members 9 and 9 fixed thereto, that is, a piezoelectric element 15 is mounted. .
次に前記のものの作用について説明する。Next, the operation of the above will be described.
まず、液体(たとえば、アルキルナフタリンにアルキル
プロピレンジアミンを添加したもの)14を円筒形ドラ
ム5の底部に収容し、強磁性物質(たとえば、粒状電解
コバルト)13をルツボ11に収容したうえ、円筒体2
および円筒形ドラム5の内部を高真空に保持し、ヒータ
12に通電してルツボ11内の強磁性物質13を加熱
し、また円筒形ドラム5を適宜の速度(たとえば、毎分
2回転)で回転させ、さらに圧電素子15に交流電圧を
印加する。First, a liquid (for example, alkylnaphthalene to which alkyl propylene diamine is added) 14 is accommodated in the bottom of a cylindrical drum 5, a ferromagnetic substance (for example, granular electrolytic cobalt) 13 is accommodated in a crucible 11, and a cylindrical body is also used. Two
Also, the inside of the cylindrical drum 5 is maintained at a high vacuum, the heater 12 is energized to heat the ferromagnetic substance 13 in the crucible 11, and the cylindrical drum 5 is rotated at an appropriate speed (for example, 2 revolutions per minute). The piezoelectric element 15 is rotated and an AC voltage is applied to the piezoelectric element 15.
そして、ルツボ11内の強磁性物質13が安定した加熱
状態となると、ルツボ11内の強磁性物質13は蒸発し
てその蒸気が円筒形ドラム5の内周面に被膜となって付
着している液体14に接触して凝縮され、円筒形ドラム
5の回転にともなって下方へ移動して底部の液体14に
至り、この動作が所要時間(たとえば30分間)継続し
て行われると、磁化の大きい磁性流体が得られることと
なる。When the ferromagnetic substance 13 in the crucible 11 is in a stable heated state, the ferromagnetic substance 13 in the crucible 11 evaporates and its vapor adheres to the inner peripheral surface of the cylindrical drum 5 as a film. When the liquid 14 is contacted and condensed, it moves downward with the rotation of the cylindrical drum 5 to reach the liquid 14 at the bottom, and when this operation is continued for a required time (for example, 30 minutes), the magnetization is large. A magnetic fluid will be obtained.
しかも、この間、交流電圧を印加された圧電素子15は
圧電効果(ピエゾ効果)によって振動し、この振動は円
筒体2の左端板から支持部材9、9を介してルツボ11
に伝わり、さらにルツボ11に収容された強磁性物質1
3に伝わって、強磁性物質13を攪拌させる。Moreover, during this period, the piezoelectric element 15 to which the AC voltage is applied vibrates due to the piezoelectric effect (piezo effect), and this vibration is generated from the left end plate of the cylindrical body 2 via the supporting members 9 and 9 and the crucible 11.
Ferromagnetic material 1 transmitted to the crucible 11 and stored in the crucible 11.
Then, the ferromagnetic substance 13 is agitated.
これによって、第2図に示すように、強磁性物質13の
溶融物13aの表面に存在する不純物13bが被膜を形
成することが防止される。As a result, as shown in FIG. 2, the impurities 13b present on the surface of the melt 13a of the ferromagnetic substance 13 are prevented from forming a film.
そのため、強磁性物質13の溶融物13aの蒸発が妨げ
られず、蒸着時間の経過にともなって蒸着速度が次第に
低下することがない。Therefore, the evaporation of the melt 13a of the ferromagnetic material 13 is not hindered, and the vapor deposition rate does not gradually decrease with the elapse of vapor deposition time.
また、振動によって強磁性物質13の溶融物13aが霧
状に飛散するため、強磁性物質13の溶融物13aの蒸
発が促進され、その結果、従来のものに比べて蒸着速度
がむしろ大きくなり、蒸着時間が短縮されることとな
る。Further, since the melt 13a of the ferromagnetic substance 13 is scattered in a mist state by the vibration, the evaporation of the melt 13a of the ferromagnetic substance 13 is promoted, and as a result, the vapor deposition rate is rather higher than that of the conventional one. The vapor deposition time will be shortened.
そして、圧電素子15の振動数(周波数)としては、強
磁性物質13が共振するような振動数であることが望ま
しい。The frequency (frequency) of the piezoelectric element 15 is preferably such that the ferromagnetic substance 13 resonates.
なお、前記実施例においては加振手段として圧電素子1
5を用いたが、これに限定することなく、たとえば、偏
心カム、ピストンなどを駆動させて振動を発生させる機
械的手段や、電磁石の作る磁場中に置かれたコイルを駆
動させて振動を発生させるもの、磁歪素子によって振動
を発生させるものなどの電気・磁気的手段を用いること
ができる。In addition, in the above-described embodiment, the piezoelectric element 1 is used as the vibrating means.
However, the present invention is not limited to this, for example, mechanical means for driving an eccentric cam, piston, etc. to generate vibration, or driving a coil placed in a magnetic field created by an electromagnet to generate vibration. It is possible to use electric / magnetic means such as a magnetic field generating device or a device that causes vibration by a magnetostrictive element.
また、前記実施例においては加振手段(圧電素子13)
を円筒体2の端板外側面に接して設けたが、加熱蒸発装
置(ルツボ11)に振動が直接または間接に伝わる位置
であれば、どのような位置に加振手段を設置してもよ
い。Further, in the above embodiment, the vibrating means (piezoelectric element 13)
Is provided in contact with the outer surface of the end plate of the cylindrical body 2, but the vibrating means may be installed at any position as long as the vibration is directly or indirectly transmitted to the heating / evaporating device (crucible 11). .
また、前記実施例においては円筒体2および円筒形ドラ
ム5の内部を高真空に保持するように構成したものを示
したがこれに限定することなく、たとえば、低圧の不活
性ガスまたは酸素ガス雰囲気としてもよい。Further, in the above embodiment, the structure in which the insides of the cylindrical body 2 and the cylindrical drum 5 are maintained in a high vacuum is shown, but the present invention is not limited to this, and for example, a low pressure inert gas or oxygen gas atmosphere may be used. May be
また、強磁性物質13としては粒状電解コバルトに限定
することなく、たとえば、鉄、ニッケル、カドミウム等
の強磁性金属元素、またはクロム、マンガン、希土類元
素の少なくとも1種の金属を含む強磁性合金あるいは強
磁性化合物を使用してもよい。Further, the ferromagnetic substance 13 is not limited to granular electrolytic cobalt, but may be, for example, a ferromagnetic metal element such as iron, nickel, cadmium, or a ferromagnetic alloy containing at least one metal of chromium, manganese, or a rare earth element, or Ferromagnetic compounds may be used.
また、液体14としてはアルキルナフタリンにアルキル
プロピレンジアミンを添加したものに限定することな
く、たとえば、低蒸気圧の炭化水素、アルキルジフェニ
ルエーテル、ポリフェニルエーテル、ジエステル、シリ
コーン油、フルオロカーボン油等を使用し、界面活性剤
として、たとえば、カルボン酸と金属またはアミンとの
塩である石けん、ソルビタンオレエートペンタエリスリ
ットオレエート等の多価アルコール脂肪膜エステル、ア
ルキルアリルスルホン酸塩、オクタデシルベンゼンスル
ホネート等のスルホン酸塩、その他リン酸塩、リン酸エ
ステル、アミン誘導体等を使用することができる。Further, the liquid 14 is not limited to the one obtained by adding alkyl propylene diamine to alkyl naphthalene, and, for example, low vapor pressure hydrocarbon, alkyl diphenyl ether, polyphenyl ether, diester, silicone oil, fluorocarbon oil, etc. may be used. As the surfactant, for example, soap which is a salt of carboxylic acid and metal or amine, polyhydric alcohol fatty acid ester such as sorbitan oleate pentaerythrite oleate, sulfonic acid such as alkylallyl sulfonate and octadecylbenzene sulfonate. Salts, other phosphates, phosphoric acid esters, amine derivatives and the like can be used.
さらに、前記実施例においてはアルミナ製のルツボ11
をタングステン線のヒータ12で加熱するように構成し
たものを示したがこれに限定することなく、ルツボ11
はたとえばベリリア製としてもよく、また、加熱は高周
波加熱、赤外線またはレーザ加熱、電子線加熱、アーク
プラズマ加熱であってもよいことは勿論である。Further, in the above embodiment, the crucible 11 made of alumina is used.
Although the structure is shown in which the heater 12 of the tungsten wire is used for heating, the invention is not limited to this, and the crucible 11
Of course may be made of beryllia, and the heating may of course be high frequency heating, infrared or laser heating, electron beam heating or arc plasma heating.
この考案は前記のように構成したことにより、加振手段
により加熱蒸発装置を振動させることによって、加熱蒸
発装置の内部に満たされた強磁性物質の溶融物の表面に
不純物の被膜が形成することが防止されるため、蒸発速
度の低下を防止することができ、また、加熱蒸発装置の
振動によって強磁性物質の蒸発が促進されるため、従来
のものに比べて蒸発速度が大きくなり、そのため蒸着時
間を短縮することができるなどのすぐれた効果を有する
ものである。This invention is configured as described above, and by vibrating the heating / evaporating device by the vibrating means, an impurity film is formed on the surface of the melt of the ferromagnetic substance filled in the heating / evaporating device. The evaporation rate can be prevented from decreasing, and the evaporation of the ferromagnetic material is promoted by the vibration of the heating evaporation apparatus, so that the evaporation rate becomes higher than that of the conventional one, and therefore the evaporation rate is increased. It has an excellent effect that the time can be shortened.
第1図はこの考案による磁性流体の製造装置の一実施例
を示す一部切欠した斜視図、第2図はルツボの拡大断面
図、第3図は従来のものの一例を示す一部切欠した斜視
図である。 1、21……開口 2、22……円筒体 3、23……円筒部材 4、24……フランジ 5、25……円筒形ドラム 6、26……ボス部 7、27……Oリング 8……深溝玉軸受 9、29……支持部材 10、30……電極 11、31……ルツボ 12、32……ヒータ 13、33……強磁性物質 13a、33a……溶融物 13b、33b……不純物 14、34……液体 15……圧電素子FIG. 1 is a partially cutaway perspective view showing an embodiment of a magnetic fluid manufacturing apparatus according to the present invention, FIG. 2 is an enlarged sectional view of a crucible, and FIG. 3 is a partially cutaway perspective view showing an example of a conventional device. It is a figure. 1, 21 ... Opening 2, 22 ... Cylindrical body 3, 23 ... Cylindrical member 4, 24 ... Flange 5, 25 ... Cylindrical drum 6, 26 ... Boss section 7, 27 ... O-ring 8 ... … Deep groove ball bearings 9, 29 …… Supporting members 10, 30 …… Electrodes 11, 31 …… Crucibles 12, 32 …… Heaters 13, 33 …… Ferromagnetic materials 13a, 33a …… Melts 13b, 33b …… Impurities 14, 34 ... Liquid 15 ... Piezoelectric element
Claims (1)
たは酸素ガス雰囲気とした横置円筒形容器内に、強磁性
金属元素または強磁性化合物からなる強磁性物質の加熱
蒸発装置を設けるとともに、界面活性剤を含有して磁性
流体の溶媒となる液体を収容し、前記横置円筒形容器を
その軸線のまわりに回転させてその内周面に前記液体の
被膜を形成させながら、前記加熱蒸発装置によって蒸発
された前記強磁性物質の蒸気を接触させて凝縮させるよ
うになった磁性流体の製造装置において、前記加熱蒸発
装置を振動させる加振手段を設けたことを特徴とする磁
性流体の製造装置。1. A heating / evaporating device for a ferromagnetic substance made of a ferromagnetic metal element or a ferromagnetic compound is provided in a horizontal cylindrical container whose interior is a high vacuum or low pressure inert gas or oxygen gas atmosphere. While containing a liquid containing a surfactant as a solvent for the magnetic fluid and rotating the horizontal cylindrical container around its axis to form a film of the liquid on its inner peripheral surface, the heating evaporation An apparatus for producing a magnetic fluid, in which vapor of the ferromagnetic substance vaporized by the apparatus is brought into contact with the apparatus to condense, and a vibrating means for vibrating the heating and vaporizing apparatus is provided. apparatus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8128988U JPH0622962Y2 (en) | 1988-06-20 | 1988-06-20 | Magnetic fluid manufacturing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8128988U JPH0622962Y2 (en) | 1988-06-20 | 1988-06-20 | Magnetic fluid manufacturing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH022820U JPH022820U (en) | 1990-01-10 |
| JPH0622962Y2 true JPH0622962Y2 (en) | 1994-06-15 |
Family
ID=31306071
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8128988U Expired - Lifetime JPH0622962Y2 (en) | 1988-06-20 | 1988-06-20 | Magnetic fluid manufacturing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0622962Y2 (en) |
-
1988
- 1988-06-20 JP JP8128988U patent/JPH0622962Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH022820U (en) | 1990-01-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6302150B1 (en) | Vapor deposition apparatus, vapor deposition method, and organic EL display device manufacturing method | |
| WO2019038811A1 (en) | Vapor deposition apparatus, vapor deposition method, and method for producing organic el display device | |
| JPH07112539B2 (en) | Method and apparatus for producing fine particles | |
| JP4444906B2 (en) | Heating container and vapor deposition apparatus equipped with the same | |
| JPH10195639A (en) | Evaporation source for organic material and organic thin film forming apparatus using the same | |
| JPH0116765B2 (en) | ||
| JPH0438493Y2 (en) | ||
| JP4411512B2 (en) | Superconducting magnetic field generator, its excitation method, sputtering film forming apparatus using superconducting magnetic field generator, ferromagnetic attachment / detachment jig | |
| JPH0438492Y2 (en) | ||
| JPH0438490Y2 (en) | ||
| JPH0438491Y2 (en) | ||
| JP6564088B2 (en) | Vapor deposition apparatus, vapor deposition method, and organic EL display device manufacturing method | |
| JPS5831076A (en) | Method and device for forming film by physical vapor deposition method | |
| JP2007197827A (en) | Rotary target type electron beam assisted irradiation laser abrasion film formation apparatus and rotary target type electron beam irradiation film formation apparatus | |
| JP3120368B2 (en) | Vacuum deposition equipment | |
| JPS62180068A (en) | Electron beam heating/evaporation equipment | |
| JP2002161355A (en) | Evaporation material container for vacuum evaporation | |
| JPH0647016Y2 (en) | Molecular beam source cell for low temperature vapor deposition | |
| JPS62290864A (en) | Vacuum deposition device | |
| JPH04103760A (en) | Vacuum deposition device for sublimable metallic material | |
| JPS5812699B2 (en) | High temperature metal ion source device | |
| JP2005325400A (en) | Vacuum deposition apparatus and thin film forming method | |
| JPH022820U (en) | ||
| JPH0256905A (en) | Superconducting magnet apparatus | |
| JPS6024305A (en) | Production of ultrafine powder of high melting material |