JPH0624054B2 - Perpendicular magnetic recording medium and magnetic recording / reproducing method - Google Patents

Perpendicular magnetic recording medium and magnetic recording / reproducing method

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Publication number
JPH0624054B2
JPH0624054B2 JP6113685A JP6113685A JPH0624054B2 JP H0624054 B2 JPH0624054 B2 JP H0624054B2 JP 6113685 A JP6113685 A JP 6113685A JP 6113685 A JP6113685 A JP 6113685A JP H0624054 B2 JPH0624054 B2 JP H0624054B2
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JP
Japan
Prior art keywords
magnetic recording
perpendicular magnetic
film
recording medium
magnetization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP6113685A
Other languages
Japanese (ja)
Other versions
JPS61220117A (en
Inventor
龍二 杉田
清和 東間
和義 本田
太郎 南部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
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Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP6113685A priority Critical patent/JPH0624054B2/en
Priority to DE8686104108T priority patent/DE3672639D1/en
Priority to EP86104108A priority patent/EP0196071B1/en
Publication of JPS61220117A publication Critical patent/JPS61220117A/en
Priority to US07/140,278 priority patent/US4859501A/en
Publication of JPH0624054B2 publication Critical patent/JPH0624054B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【発明の詳細な説明】 産業上の利用分野 本発明は高密度記録特性の優れた垂直磁気記録媒体及び
それを用いた磁気記録再生方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a perpendicular magnetic recording medium excellent in high density recording characteristics and a magnetic recording / reproducing method using the same.

従来の技術 短波長記録特性の優れた磁気記録方式として、垂直磁気
記録方式がある。この方式においては垂直磁気異方性を
有する磁性層が必要になる。このような磁性層に信号を
記録すると残留磁化は膜面に略垂直方向を向く。従って
信号が短波長になる程媒体内反磁界は減少し、大きな再
生出力が得られる。垂直磁気記録媒体は基板上に磁性層
として、Co-CrあるいはCo−VあるいはCo-Cr-Rh等の
Co基合金の垂直磁気異方性膜を、一般的にはスパッタ
リング法により形成したものである。しかしスパッタリ
ング法は膜の堆積速度が遅く量産性が悪い。
2. Description of the Related Art A perpendicular magnetic recording method is known as a magnetic recording method having excellent short wavelength recording characteristics. This system requires a magnetic layer having perpendicular magnetic anisotropy. When a signal is recorded on such a magnetic layer, the residual magnetization is oriented substantially perpendicular to the film surface. Therefore, the shorter the wavelength of the signal, the smaller the demagnetizing field in the medium and the larger the reproduction output. A perpendicular magnetic recording medium is one in which a perpendicular magnetic anisotropic film of a Co-based alloy such as Co-Cr, Co-V, or Co-Cr-Rh is formed as a magnetic layer on a substrate by a sputtering method in general. is there. However, the sputtering method has a low film deposition rate and poor mass productivity.

スパッタリング法に対し、真空蒸着法(イオンプレーテ
ィング法のように蒸着原子の一部をイオン化して蒸着す
る方法も含む)によれば、膜の堆積速度はスパッタリン
グ法に比べ2桁以上高い1μm/秒以上が可能であり、
量産性が優れている。本発明者らは、真空蒸着法にても
Co-Cr垂直磁気異方性膜が得られることを見い出した。
In contrast to the sputtering method, according to the vacuum vapor deposition method (including the method of ionizing a part of the vapor deposition atoms like the ion plating method), the film deposition rate is 1 μm / two times higher than that of the sputtering method. More than a second is possible,
Excellent mass productivity. The present inventors have found that the vacuum deposition method
It has been found that a Co-Cr perpendicular magnetic anisotropy film can be obtained.

発明が解決しようとする問題点 上記のように、本発明者らは真空蒸着法によれば、非常
に優れた量産性で垂直磁気異方性膜が得られることを明
らかにしたが、この膜が優れた記録再生特性を有するた
めの条件は見い出されていなかった。またスパッタリン
グ法により作製した膜については、垂直磁気異方性膜と
して M⊥/Mが1以上であることが望ましく、特に非
磁性基板上に直接垂直磁気異方性膜が形成された、言わ
ゆる単層膜媒体にとっては、 M⊥/Mが1以上であることが必要条件と考えら
れていた。しかしこの条件を満足するための製膜条件は
きびしく、量産性や歩留りが低いために、よりマージン
の広い条件が求められていた。
Problems to be Solved by the Invention As described above, the present inventors have clarified that the vacuum deposition method can provide a perpendicular magnetic anisotropic film with extremely excellent mass productivity. Has not been found to have excellent recording and reproducing characteristics. Regarding the film produced by the sputtering method, it is desirable that M r ⊥ / M r be 1 or more as the perpendicular magnetic anisotropic film, and in particular, the perpendicular magnetic anisotropic film was formed directly on the non-magnetic substrate, For a so-called single-layer film medium, it was considered that the requirement that M r ⊥ / M r be 1 or more was a necessary condition. However, the film forming conditions for satisfying this condition are strict, and the mass productivity and the yield are low, so that a condition with a wider margin has been demanded.

問題点を解決するための手段 振動試料型磁力計で測定した垂直磁気記録媒体における
垂直磁気異方性膜の膜面に垂直な方向のヒステリシス曲
線が横軸と交わる部分における傾きと等しい傾きを持
ち、かつ原点を通る直線と、磁化M=飽和磁化Mなる
直線との交点における磁界Hを、飽和磁化Mで割っ
た値Ho/Msが3.5π以下であり、かつ前記ヒステリシス曲
線における膜面に垂直な方向の残留磁化Mと膜面内
の残留磁化 Mの比 M⊥/Mが0.2〜0.98の範囲にある。
Means for Solving Problems The hysteresis curve in the direction perpendicular to the film surface of the perpendicular magnetic anisotropy film in a perpendicular magnetic recording medium measured by a vibrating sample magnetometer has a slope equal to the slope at the intersection with the horizontal axis. and a line passing the origin, the magnetic field H o at the intersection of the straight line composed magnetization M = saturation magnetization M s, the value divided by the saturation magnetization M s H o / M s is less than or equal 3.5Pai, and the hysteresis curve the ratio M r ⊥ / M r of the residual magnetization M r of the residual magnetization M r and the film plane in the direction perpendicular to the film plane is in the range of 0.2 to 0.98 in.

作用 垂直磁気異方性膜の静磁気特性を本発明の条件を満たす
ようにすることにより、記録再生特性の優れた垂直磁気
記録媒体が得られる。
Action By making the magnetostatic characteristics of the perpendicular magnetic anisotropic film satisfy the conditions of the present invention, a perpendicular magnetic recording medium having excellent recording and reproducing characteristics can be obtained.

実施例 第1図を用いて本発明の実施例について説明する。第1
図は振動試料型磁力計で測定した、垂直磁気異方性膜の
ヒステリシス曲線の第1及び第2象現の1例を示してお
り、曲線1及び2はそれぞれ膜面に垂直方向及び膜面内
のものである。第1図の横軸は印加磁界,縦軸は磁化を
表わしている。直線3は、膜面に垂直方向のヒステリシ
ス曲線1が横軸と交わる部分における傾きと等しい傾き
を持ちかつ原点を通る。4は磁化M=飽和磁化Mなる
直線である。また図中のHは直線3と直線4の交点に
おける横軸の値である。M及び Mはそれぞれ膜面に垂直方向の残留磁化及び膜面内
の残留磁化である。
Embodiment An embodiment of the present invention will be described with reference to FIG. First
The figure shows an example of the first and second quadrants of the hysteresis curve of a perpendicular magnetic anisotropic film measured by a vibrating sample magnetometer, and curves 1 and 2 are the direction perpendicular to the film surface and the film surface, respectively. It is inside. The horizontal axis of FIG. 1 represents the applied magnetic field and the vertical axis represents the magnetization. The straight line 3 has a slope equal to the slope of the portion where the hysteresis curve 1 in the direction perpendicular to the film surface intersects the horizontal axis, and passes through the origin. 4 is a straight line of magnetization M = saturation magnetization M s . The H o in the figure is the value of the horizontal axis at the intersection of the straight line 3 and the line 4. M r and M r are remanent magnetization in the direction perpendicular to the film surface and remanent magnetization in the film surface, respectively.

前記Hを飽和磁化Mで割った値Ho/Msの異なるCo-Cr
垂直磁気異方性膜を、非磁性基板上に真空蒸着法により
形成し、Mn-Znフェライトより成るリングヘッドで記録
再生した場合の特性について次に説明する。なお、Co-C
r垂直磁気異方性膜の膜厚は0.25μm、ヘッドのギャッ
プ長は、0.2μmとし、低域再生出力及びD50を測定し
た。第2図には低域再生出力として1KFRPIにおける出
力の相対値を示しており、D50とは再生出力値が1KFR
PIにおける出力の半分になる記録密度のことである。こ
こで1KFRPIとは1インチ当たり1000回磁化反転の
あるディジタル信号の記録状態である。第2図の曲線5
及び6は、それぞれ低域再生出力及びD50のHo/Ms依存
性を示す。第2図からHo/Msが3.5πを越えると、低域再
生出力及びD50共に急激に低下していることがわかる。
従ってHo/Msは3.5π以下にする必要がある。このように
記録再生特性がHo/Msに依存する理由はまだ明らかでは
ないが、垂直磁気異方性膜の微視的構造が関係している
ものと考えられる。
Different Co-Cr of said H o was divided by the saturation magnetization M s value H o / M s
The characteristics when the perpendicular magnetic anisotropy film is formed on the non-magnetic substrate by the vacuum deposition method and the recording / reproducing is performed by the ring head made of Mn-Zn ferrite will be described below. Co-C
The film thickness of the r perpendicular magnetic anisotropy film was 0.25 μm, the gap length of the head was 0.2 μm, and the low frequency reproduction output and D 50 were measured. The second FIG shows the relative value of the output in 1KFRPI as low frequency reproduction output, reproduction output value from the D 50 1KFR
It is the recording density that is half the output at PI. Here, 1KFRPI is a recording state of a digital signal having magnetization reversal 1000 times per inch. Curve 5 in Figure 2
And 6, respectively showing the H o / M s dependence of the low-frequency reproduction output and D 50. It can be seen from FIG. 2 that when H o / M s exceeds 3.5π, both the low-frequency reproduction output and D 50 sharply decrease.
Therefore, H o / M s needs to be 3.5π or less. The reason why the recording / reproducing characteristics depend on H o / M s is not clear yet, but it is considered that the microscopic structure of the perpendicular magnetic anisotropy film is involved.

次にHo/Ms3.5πを満足する垂直磁気異方性膜につい
て、膜面に垂直方向の残留磁化Mと膜面内の残留磁
化 Mの比 M⊥/Mと記録再生特性との関係について説明す
る。測定は、前記と同様に、膜厚0.25μmのCo-Cr垂直
磁気異方性膜を、非磁性基板上に真空蒸着法により形成
し、Mn-Znフェライトより成るギャップ長0.2μmのリン
グヘッドで行なった。第3図に結果を示す。第3図の曲
線7及び8はそれぞれ低域再生出力及びD50の M⊥/M依存性を示す。第3図より、低域再生出
力は M⊥/Mが0.98を越えると急激に低下し、D50は M⊥/Mが0.2未満になると急激に低下すること
がわかる。従って低域再生出力及びD50の優れたCo-Cr
垂直磁気異方性膜は M⊥/Mが0.2以上0.98以下の場合に得られる。
なおリングヘッドとしてMn-Znフェライトではなく、ア
モルファスあるいはセンダスト等の金属より成るものを
用いても上記と同様の結果が得られた。
Next, for a perpendicular magnetic anisotropy film satisfying H o / M s 3.5 π, the ratio of the residual magnetization M r in the direction perpendicular to the film surface and the residual magnetization M r in the film surface M r ⊥ / M r and recording / reproduction The relationship with the characteristics will be described. The measurement was performed in the same manner as above by forming a Co-Cr perpendicular magnetic anisotropy film with a thickness of 0.25 μm on a non-magnetic substrate by a vacuum deposition method and using a ring head made of Mn-Zn ferrite with a gap length of 0.2 μm. I did. The results are shown in FIG. Curves 7 and 8 in FIG. 3 show the M r ⊥ / M r dependence of the low frequency reproduction output and D 50 , respectively. From FIG. 3, it can be seen that the low frequency reproduction output sharply decreases when M r ⊥ / M r exceeds 0.98, and D 50 sharply decreases when M r ⊥ / M r becomes less than 0.2. Therefore, Co-Cr with excellent low range reproduction output and D 50
The perpendicular magnetic anisotropic film is obtained when M r ⊥ / M r is 0.2 or more and 0.98 or less.
The same result as above was obtained even when a ring head made of a metal such as amorphous or sendust was used as the ring head instead of Mn-Zn ferrite.

以上の様な、Ho/Ms3.5πなる条件下で 0.2M⊥/M0.98を満足する垂直磁気
異方性膜が優れた記録再生特性を示すという結果は、垂
直磁気異方性膜として M⊥/Mが1以上であることが望ましいとするこ
れまでの技術的常識をくつがえして得られたものであ
る。また、 M⊥/M>1を満足する垂直磁気異方性膜より
も、 0.2M⊥/M0.98を満足する垂直磁気
異方性膜の方が製膜条件がゆるく、高い量産性及び歩留
りを達成出来る。特に真空蒸着法でCoとCrを主成分
とする垂直磁気異方性膜を作製する際に、 M⊥/M>1を満足するための製膜条件はきびし
いので、この場合に本発明の効果が大きい。
Above such as the results of showing the recording and reproducing characteristics with excellent perpendicular magnetic anisotropy film satisfying 0.2M r ⊥ / M r 0.98 under conditions of H o / M s 3.5π is perpendicular This is obtained by overcoming the conventional technical common knowledge that it is desirable that M r ⊥ / M r be 1 or more as an anisotropic film. In addition, than the perpendicular magnetic anisotropy film that satisfies the M r ⊥ / M r> 1 , 0.2M r ⊥ / M is the deposition conditions towards the perpendicular magnetic anisotropy film that satisfies the r 0.98 is loosely High productivity and yield can be achieved. In particular, when the perpendicular magnetic anisotropic film containing Co and Cr as the main components is formed by the vacuum evaporation method, the film forming conditions for satisfying M r ⊥ / M r > 1 are severe. Is very effective.

次により具体的な実施例について説明する。Specific examples will be described below.

膜厚10μmの長尺のポリアミドフィルムを基板として
用い、この上に膜厚0.2μmのCo-Cr垂直磁気異方性膜
を、連続蒸着法によって形成した。ここで連続蒸着法と
は、よく知られているように、長尺のフィルムを円筒状
キャンの周面に沿って走行させつつ、膜を連続的に蒸着
するものである。Co-Cr垂直磁気異方性膜形成時の蒸着
条件は、真空度3×10-5Torr,膜堆積速度0.8μm/
秒,円筒状キャンの周面温度250℃,膜組成Co82wt%,
Cr18wt%である。上記条件で蒸着されたCo-Cr垂直磁気異
方性膜のHo/Msは3.1π, M⊥/Mは0.4であった。これにギャップ長0.25
μm,ギャップ幅30μm,コイル巻数16ターンのMn
-Znフェライトから成るリングヘッドで記録再生を行な
うと、190μV/ターン・mm・m/秒の低域再生出力及
び125KFRPIのD50が得られた。なお190μV/ター
ン・mm・m/秒とは、コイル巻数1ターン,ギャップ幅
1mm,媒体とヘッド間の相対速度1m/秒当たりのヘッ
ド出力が190μVであることを意味する。
A long polyamide film having a film thickness of 10 μm was used as a substrate, and a Co—Cr perpendicular magnetic anisotropic film having a film thickness of 0.2 μm was formed thereon by a continuous vapor deposition method. Here, the continuous vapor deposition method is, as is well known, a method of continuously vapor depositing a film while running a long film along the circumferential surface of a cylindrical can. The deposition conditions for forming the Co-Cr perpendicular magnetic anisotropy film are as follows: vacuum degree 3 × 10 -5 Torr, film deposition rate 0.8 μm /
Sec., Surface temperature of cylindrical can 250 ℃, film composition Co 82 wt%,
Cr 18 wt%. The Co / Cr perpendicular magnetic anisotropy film deposited under the above conditions had a H o / M s of 3.1π and a M r ⊥ / M r of 0.4. Gap length 0.25
μm, Gap width 30μm, Mn with 16 turns
When recording and reproducing with a ring head made of -Zn ferrite, a low frequency reproduction output of 190 μV / turn · mm · m / sec and a D 50 of 125 KFRPI were obtained. Note that 190 μV / turn · mm · m / sec means that the coil output is 1 turn, the gap width is 1 mm, and the head output per 1 m / sec of the relative speed between the medium and the head is 190 μV.

以上述べた具体的な実施例では、Co-Cr垂直磁気異方性
膜の例について説明したが、Co-Cr-Ni,Co-O,Co-Ni-O膜
等のCo基合金の垂直磁気異方性膜であっても全く同様で
ある。
In the specific examples described above, examples of Co-Cr perpendicular magnetic anisotropy films have been described, but the perpendicular magnetic properties of Co-based alloys such as Co-Cr-Ni, Co-O, and Co-Ni-O films have been explained. The same applies to an anisotropic film.

発明の効果 本発明によれば記録再生特性の優れた垂直磁気記録媒体
を高い量産性及び歩留りで提供出来る。
EFFECTS OF THE INVENTION According to the present invention, it is possible to provide a perpendicular magnetic recording medium having excellent recording and reproducing characteristics with high mass productivity and yield.

【図面の簡単な説明】[Brief description of drawings]

第1図は振動試料型磁力計で測定した、垂直磁気異方性
膜のヒステリシス曲線を示す図、第2図は垂直磁気記録
媒体における低域再生出力及びD50とHo/Msとの関係を
示す図、第3図は垂直磁気記録媒体におけ低域再生出力
及びD50と M⊥/Mとの関係を示す図である。 1……膜面に垂直な方向のヒステリシス曲線、2……膜
面内のヒステリシス曲線。
FIG. 1 is a diagram showing a hysteresis curve of a perpendicular magnetic anisotropy film measured by a vibrating sample magnetometer, and FIG. 2 is a low frequency reproduction output in a perpendicular magnetic recording medium and D 50 and H o / M s . FIG. 3 is a diagram showing the relation, and FIG. 3 is a diagram showing the relation between the low frequency reproduction output and D 50 and M r ⊥ / M r in the perpendicular magnetic recording medium. 1 ... Hysteresis curve in the direction perpendicular to the film surface, 2 ... Hysteresis curve in the film surface.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】振動試料型磁力計で測定した垂直磁気記録
媒体における垂直磁気異方性膜の膜面に垂直な方向のヒ
ステリシス曲線が横軸と交わる部分における傾きと等し
い傾きを持ちかつ原点を通る直線と、磁化M=飽和磁化
なる直線との交点における磁界Hを、飽和磁化M
で割った値Ho/Msが3.5π以下であり、かつ前記ヒステ
リシス曲線における膜面に垂直方向の残留磁化M
膜面内の残留磁化 Mの比 M⊥/Mが0.2〜0.98の範囲にあることを特徴と
する垂直磁気記録媒体。
1. A hysteresis curve measured by a vibrating sample magnetometer in a perpendicular magnetic recording medium in a perpendicular magnetic recording medium has a slope equal to a slope at a portion where a hysteresis curve in a direction perpendicular to a film surface intersects with the horizontal axis, and has an origin. a straight line passing through the magnetic field H o at the intersection of the straight line composed magnetization M = saturation magnetization M s, the saturation magnetization M
The value H o / M s divided by s is 3.5π or less, and the ratio M r ⊥ / M r of the residual magnetization M r in the direction perpendicular to the film surface in the hysteresis curve and the residual magnetization M r in the film surface is A perpendicular magnetic recording medium characterized by being in the range of 0.2 to 0.98.
【請求項2】磁性膜が垂直磁気異方性膜のみの単層膜で
あることを特徴とする特許請求の範囲第1項記載の垂直
磁気記録媒体。
2. The perpendicular magnetic recording medium according to claim 1, wherein the magnetic film is a single-layer film having only a perpendicular magnetic anisotropic film.
【請求項3】振動試料型磁力計で測定した垂直磁気記録
媒体における垂直磁気異方性膜の膜面に垂直な方向のヒ
ステリシス曲線が横軸と交わる部分における傾きと等し
い傾きを持ちかつ原点を通る直線と、磁化M=飽和磁化
なる直線との交点における磁界Hを、飽和磁化M
で割った値Ho/Msが3.5π以下であり、かつ前記ヒステ
リシス曲線における膜面に垂直方向の残留磁化M
膜面内の残留磁化 Mの比 M⊥/Mが0.2〜0.98の範囲にある垂直磁気記録
媒体に対して、リングヘッドを用いて記録再生を行うこ
とを特徴とする磁気記録再生方法。
3. A vertical axis of a perpendicular magnetic recording medium in a perpendicular magnetic recording medium measured by a vibrating sample magnetometer has a slope equal to a slope at a portion where a hysteresis curve perpendicular to the film surface intersects with the horizontal axis, and has an origin. a straight line passing through the magnetic field H o at the intersection of the straight line composed magnetization M = saturation magnetization M s, the saturation magnetization M
The value H o / M s divided by s is 3.5π or less, and the ratio M r ⊥ / M r of the residual magnetization M r in the direction perpendicular to the film surface in the hysteresis curve and the residual magnetization M r in the film surface is A magnetic recording / reproducing method characterized by performing recording / reproducing using a ring head with respect to a perpendicular magnetic recording medium in the range of 0.2 to 0.98.
JP6113685A 1985-03-26 1985-03-26 Perpendicular magnetic recording medium and magnetic recording / reproducing method Expired - Lifetime JPH0624054B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP6113685A JPH0624054B2 (en) 1985-03-26 1985-03-26 Perpendicular magnetic recording medium and magnetic recording / reproducing method
DE8686104108T DE3672639D1 (en) 1985-03-26 1986-03-25 RECORDING CARRIER WITH UPPER MAGNETIZATION.
EP86104108A EP0196071B1 (en) 1985-03-26 1986-03-25 Perpendicular magnetic recording medium
US07/140,278 US4859501A (en) 1985-03-26 1987-12-31 Method for providing a perpendicular recording medium for use with a ring-shaped recording and reproducing head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6113685A JPH0624054B2 (en) 1985-03-26 1985-03-26 Perpendicular magnetic recording medium and magnetic recording / reproducing method

Publications (2)

Publication Number Publication Date
JPS61220117A JPS61220117A (en) 1986-09-30
JPH0624054B2 true JPH0624054B2 (en) 1994-03-30

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP6113685A Expired - Lifetime JPH0624054B2 (en) 1985-03-26 1985-03-26 Perpendicular magnetic recording medium and magnetic recording / reproducing method

Country Status (1)

Country Link
JP (1) JPH0624054B2 (en)

Also Published As

Publication number Publication date
JPS61220117A (en) 1986-09-30

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