JPH06247773A - Silicon nitride based sintered body and engine member - Google Patents

Silicon nitride based sintered body and engine member

Info

Publication number
JPH06247773A
JPH06247773A JP5059610A JP5961093A JPH06247773A JP H06247773 A JPH06247773 A JP H06247773A JP 5059610 A JP5059610 A JP 5059610A JP 5961093 A JP5961093 A JP 5961093A JP H06247773 A JPH06247773 A JP H06247773A
Authority
JP
Japan
Prior art keywords
silicon nitride
sintered body
sialon
based sintered
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5059610A
Other languages
Japanese (ja)
Inventor
Takao Nishioka
隆夫 西岡
Takehisa Yamamoto
剛久 山本
Kenji Matsunuma
健二 松沼
Akira Yamakawa
晃 山川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP5059610A priority Critical patent/JPH06247773A/en
Publication of JPH06247773A publication Critical patent/JPH06247773A/en
Pending legal-status Critical Current

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  • Sliding-Contact Bearings (AREA)
  • Ceramic Products (AREA)

Abstract

(57)【要約】 【目的】 静的な強度は勿論のこと、動的な強度、特に
耐久疲労強度特性に優れており、各種機器用の摺動部材
として、特に自動車エンジンの排気バルブ等のエンジン
部材して有用な窒化ケイ素系焼結体を提供する。 【構成】 α−窒化ケイ素(α−Si34)とβ’−サイ
アロンとを含み、他にケイ素を含む結晶相が少なくとも
1種存在し、このケイ素を含む結晶相のX線回折におけ
る主ピークの回折強度が、α−窒化ケイ素の(210)
面とβ’−サイアロンの(210)面の回折強度の和に
対して0.5〜5%の範囲にあり、小野式による回転曲
げ疲労限界が600MPa以上及びCO2ガス雰囲気中
に900℃で1000時間放置後の重量増減率が±3%
以内である窒化ケイ素系焼結体。
(57) [Summary] [Purpose] Not only static strength, but also dynamic strength, especially excellent fatigue strength characteristics, making it a sliding member for various equipment, especially exhaust valves for automobile engines. Provided is a silicon nitride-based sintered body useful as an engine member. [Constitution] α-silicon nitride (α-Si 3 N 4 ) and β'-sialon are present, and at least one crystalline phase containing silicon is present, and the crystalline phase containing silicon is the main component in X-ray diffraction. The diffraction intensity of the peak is (210) of α-silicon nitride.
Plane and β'-sialon (210) plane diffraction intensity in the range of 0.5 to 5%, the Ono formula has a rotational bending fatigue limit of 600 MPa or more, and a CO 2 gas atmosphere at 900 ° C. Weight change rate after leaving for 1000 hours is ± 3%
A silicon nitride-based sintered body that is within.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、特に耐久疲労強度特性
に優れた窒化ケイ素系焼結体、及びこの窒化ケイ素系焼
結体からなるエンジン部材に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a silicon nitride-based sintered body which is particularly excellent in durability and fatigue strength characteristics, and an engine member made of this silicon nitride-based sintered body.

【0002】[0002]

【従来の技術】近年、排気ガス等による地球環境の汚染
が問題となるにつれ、自動車関連分野では燃費の向上を
図るため、エンジンの軽量化や高効率化等の目的で動弁
系等のエンジン部品材料としてセラミックスを使用する
試みがなされている。特に窒化ケイ素系焼結体は、軽
量、高強度、高靭性であり、熱衝撃性に優れ、ヤング率
も高いことから、最も有望視されている材料である。
2. Description of the Related Art In recent years, as pollution of the global environment due to exhaust gas and the like has become a problem, in an automobile-related field, an engine such as a valve train is used for the purpose of weight reduction and high efficiency of the engine in order to improve fuel efficiency. Attempts have been made to use ceramics as component materials. In particular, the silicon nitride-based sintered body is the most promising material because of its light weight, high strength, high toughness, excellent thermal shock resistance, and high Young's modulus.

【0003】かかる窒化ケイ素系焼結体を用いて実用化
されたエンジン部品としては、ターボチャージャーロー
ターや排気バルブ等の例がある。しかし、これらは窒化
ケイ素系焼結体の軽量性や耐摩耗性を利用したものであ
り、動弁系等のエンジン部品として窒化ケイ素系焼結体
を用いるためには、その強度特性、特に耐久疲労強度特
性の点でまだ十分とは言えない現状である。
Examples of engine parts that have been put into practical use by using such a silicon nitride sintered body include turbocharger rotors and exhaust valves. However, these utilize the lightness and wear resistance of the silicon nitride-based sintered body, and in order to use the silicon nitride-based sintered body as an engine part such as a valve train, its strength characteristics, particularly durability At present, it cannot be said that the fatigue strength characteristics are sufficient.

【0004】エンジン部品の中でも特に排気バルブ等
は、通常のレシプロエンジン等に用いる場合、定常運転
状態において1000℃近い高温において、CO2ガス
等の腐食性雰囲気中で繰り返し圧縮−引張の応力が加わ
る。従って、長距離走行による疲労回数を考慮すれば、
排気バルブ等のエンジン部品をセラミックス化するため
には、耐久疲労強度を更に高めると同時に、一層耐食性
に優れた窒化ケイ素系焼結体の開発が望まれている。
Of the engine parts, particularly when used in a normal reciprocating engine or the like, an exhaust valve or the like is repeatedly subjected to compressive-tension stress in a corrosive atmosphere such as CO 2 gas at a high temperature of about 1000 ° C. in a steady operation state. . Therefore, considering the number of fatigue caused by long-distance running,
In order to make engine parts such as exhaust valves into ceramics, it is desired to develop a silicon nitride-based sintered body that is further excellent in corrosion resistance while further improving durability fatigue strength.

【0005】[0005]

【発明が解決しようとする課題】本発明は、かかる従来
の事情に鑑み、静的な強度は勿論のこと、動的な強度、
特に耐久疲労強度特性に優れており、自動車エンジンの
排気バルブ等のエンジン部材や各種機器用軸受等の摺動
部材として有用な窒化ケイ素系焼結体を提供することを
目的とする。
SUMMARY OF THE INVENTION In view of the above conventional circumstances, the present invention provides not only static strength but also dynamic strength,
It is an object of the present invention to provide a silicon nitride-based sintered body which is particularly excellent in durability and fatigue strength characteristics and is useful as a sliding member such as an engine member such as an exhaust valve of an automobile engine and a bearing for various devices.

【0006】[0006]

【課題を解決するための手段】上記目的を達成するた
め、本発明が提供する窒化ケイ素系焼結体は、α−窒化
ケイ素(α−Si34)とβ’−サイアロンとを含み、他
にケイ素を含む結晶相が少なくとも1種存在し、このケ
イ素を含む結晶相のX線回折における主ピークの回折強
度が、α−窒化ケイ素の(210)面とβ’−サイアロ
ンの(210)面の回折強度の和に対して0.5〜5%
の範囲にあることを特徴とする。
To achieve the above object, a silicon nitride-based sintered body provided by the present invention contains α-silicon nitride (α-Si 3 N 4 ) and β'-sialon, There is at least one other crystalline phase containing silicon, and the diffraction intensity of the main peak in X-ray diffraction of the crystalline phase containing silicon is (210) plane of α-silicon nitride and (210) of β′-sialon. 0.5 to 5% of the sum of the diffraction intensity of the surface
It is in the range of.

【0007】又、本発明の窒化ケイ素系焼結体は、静的
な強度が優れているうえに、回転曲げ疲労限界が600
MPa以上と耐久疲労強度が従来の窒化ケイ素系焼結体
よりも格段に改善向上し、且つCO2ガス雰囲気中に9
00℃で1000時間放置した後の重量増減率が3%以
内と耐腐食性にも優れているから、自動車等のエンジン
を構成する排気バルブ、カムフォロワー、ピストンヘッ
ド、ピストンピン等のエンジン部材として適している。
Further, the silicon nitride-based sintered body of the present invention is excellent in static strength and has a rotational bending fatigue limit of 600.
The durability fatigue strength is significantly improved as compared with the conventional silicon nitride-based sintered body, and it is 9 MPa in a CO 2 gas atmosphere.
It has excellent corrosion resistance, with a weight increase / decrease rate of 3% or less after being left at 00 ° C for 1000 hours, so it can be used as an engine component such as exhaust valves, cam followers, piston heads, piston pins, etc. that compose engines for automobiles, etc. Are suitable.

【0008】[0008]

【作用】本発明の窒化ケイ素系焼結体においては、α−
窒化ケイ素(Si34)とβ’−サイアロンとを含むこ
とで、柱状のβ’−サイアロン結晶粒の間に等軸状で微
細なα−Si34結晶粒が存在する組織となる結果、結
晶粒の充填密度が向上して各結晶粒間の粒界相の厚さが
薄くなり、且つ結晶性が低く腐食劣化しやすい粒界相の
耐食性が向上するため、破壊時の欠陥の進展抵抗が向上
することで強度、特に疲労強度が改善向上される。尚、
β’−サイアロンは、一般式Si6-ZAlZZ8-Z(0
<Z<4.2)で表される。
In the silicon nitride sintered body of the present invention, α-
By including silicon nitride (Si 3 N 4 ) and β′-sialon, a structure where equiaxed and fine α-Si 3 N 4 crystal grains exist between columnar β′-sialon crystal grains is formed. As a result, the packing density of the crystal grains is improved, the thickness of the grain boundary phase between the crystal grains is thinned, and the corrosion resistance of the grain boundary phase, which has low crystallinity and is easily corroded and deteriorated, improves the defect The improvement of the propagation resistance improves and improves the strength, particularly the fatigue strength. still,
β′-sialon has the general formula Si 6-Z Al Z O Z N 8-Z (0
It is represented by <Z <4.2).

【0009】窒化ケイ素系焼結体中のα−Si34
β’−サイアロンの結晶粒の充填密度を向上させる条件
として、次の2点も重要である。第1点として、各結晶
相のX線回折におけるピーク強度は、両者のピーク強度
の和を100%としたとき、0<α−Si34≦30%
及び70%≦β’−サイアロン<100%の関係にある
ことが好ましい。α−Si34の析出値が30%を越え
ると焼結性が悪くなり、焼結による緻密化が進行してい
ない場合が多く、結晶粒の充填密度が低下して、粒界相
の厚さが厚くなるため、焼結体の耐食性及び疲労強度が
低下するからである。
The following two points are also important as conditions for improving the packing density of the crystal grains of α-Si 3 N 4 and β'-sialon in the silicon nitride sintered body. As a first point, the peak intensity in X-ray diffraction of each crystal phase is 0 <α-Si 3 N 4 ≦ 30% when the sum of the peak intensities of both is 100%.
And 70% ≦ β′-sialon <100%. If the precipitation value of α-Si 3 N 4 exceeds 30%, the sinterability deteriorates, and the densification due to sintering often does not proceed, and the packing density of the crystal grains decreases and the grain boundary phase This is because the corrosion resistance and fatigue strength of the sintered body decrease because the thickness increases.

【0010】第2点として、焼結体中のα−Si34
平均結晶粒径が0.5μm以下であり、β’−サイアロ
ンの平均結晶粒径が長軸方向で1.0〜5.0μm及び短
軸方向で0.5μm以下であることが好ましい。いずれ
の平均結晶粒径もそれぞれの上限値を越えると充填密度
の低下を招き、粒界相の厚さが大きくなる等により、焼
結体の耐食性や疲労強度を低下させるからである。特
に、本発明の焼結体をエンジン部材等として使用する場
合、平均結晶粒径を上記範囲に制御することで、摺動す
る金属製相手部材との動摩擦係数を低下させて摩擦仕事
によるエネルギー損失を低減させる効果、並びに相手部
材との焼き付き耐荷重を向上させる効果が期待できる。
Secondly, the average crystal grain size of α-Si 3 N 4 in the sintered body is 0.5 μm or less, and the average crystal grain size of β'-sialon is 1.0 to 1.0 in the major axis direction. It is preferably 5.0 μm and 0.5 μm or less in the minor axis direction. If any of the average crystal grain diameters exceeds the respective upper limit values, the packing density is lowered, the thickness of the grain boundary phase is increased, and the corrosion resistance and fatigue strength of the sintered body are lowered. In particular, when the sintered body of the present invention is used as an engine member or the like, by controlling the average crystal grain size within the above range, the dynamic friction coefficient with a sliding metal counterpart member is reduced, and energy loss due to friction work is lost. And the effect of improving the seizure load resistance with the mating member can be expected.

【0011】更に、本発明の窒化ケイ素系焼結体は、α
−Si34とβ’−サイアロンの他に、ケイ素(Si)を
含む結晶相を少なくとも1種含むことが必要である。こ
のSiを含む結晶相としては、焼結助剤として添加した
金属元素を含むシリケートやシリサイド化合物、これら
金属元素の酸化物とSi34との化合物であるアパタト
相やメリライト相等が含まれる。従来の粒界相はガラス
相として存在していたが、本発明の焼結体の粒界相には
これらの結晶相が存在することにより、焼結体の耐食性
が向上し、更には強度特に疲労強度が改善される。
Further, the silicon nitride-based sintered body of the present invention has α
Besides the -Si 3 N 4 beta .'- sialon, it is necessary to include at least one crystalline phase containing silicon (Si). The Si-containing crystal phase includes a silicate or a silicide compound containing a metal element added as a sintering aid, an apatato phase or a melilite phase which is a compound of an oxide of these metal elements and Si 3 N 4 . The conventional grain boundary phase was present as a glass phase, but the presence of these crystal phases in the grain boundary phase of the sintered body of the present invention improves the corrosion resistance of the sintered body, and particularly strength. Fatigue strength is improved.

【0012】ただし、このSiを含む結晶相のX線回折
における主ピークの回折強度が、α−Si34の(21
0)面とβ’−サイアロンの(210)面の回折強度の
和に対して、0.5%未満では粒界相におけるガラス相
の存在比率が高くなるため耐食性が低下する。逆に5%
を越えると、本来粒界相より耐食性に優るα−Si34
やβ’−サイアロンの存在比率が低くなるため耐食性の
点で十分とは言えなくなると共に、劈開強度が低い粒界
相が増加することにより破壊時の欠陥の進展抵抗が低下
し、強度特に疲労強度の低下を招く。
However, the diffraction intensity of the main peak in the X-ray diffraction of the crystal phase containing Si is (21) of α-Si 3 N 4 (21
If it is less than 0.5% with respect to the sum of the diffraction intensity of the (0) plane and the (210) plane of β'-sialon, the existence ratio of the glass phase in the grain boundary phase becomes high, so that the corrosion resistance decreases. Conversely, 5%
If it exceeds, α-Si 3 N 4 which is originally superior in corrosion resistance to the grain boundary phase
The ratio of β'-sialon and β'-sialon is low, so it cannot be said to be sufficient in terms of corrosion resistance, and the increase in the grain boundary phase with low cleavage strength decreases the resistance to the development of defects at fracture, resulting in a decrease in strength, especially fatigue strength. Cause a decrease in

【0013】又、窒化ケイ素系焼結体の気孔率は2%以
下であることが好ましい。気孔率が2%を越えると、焼
結体をエンジン部材等として腐食性ガス雰囲気中で使用
した時、腐食性ガスが気孔内に侵入し、粒界相等の腐食
を促進させるからである。
The porosity of the silicon nitride sintered body is preferably 2% or less. This is because if the porosity exceeds 2%, when the sintered body is used as an engine member or the like in a corrosive gas atmosphere, the corrosive gas penetrates into the pores and promotes the corrosion of the grain boundary phase and the like.

【0014】かかる本発明の窒化ケイ素系焼結体の製造
においては、α−Si34とβ’−サイアロンの両結晶
相を焼結体中に析出させ且つ両結晶粒の充填密度を向上
させるために、原料粉末の粒径や不純物量を調整し、大
気圧又は大気圧付近の窒素ガス雰囲気中で1300〜1
750℃の温度で焼結する。原料粉末としては、例えば
α−Si34が80重量%以上で平均粒径が0.7μm
以下、遷移金属不純物が0.2重量%以下の窒化ケイ素
粉末の使用が好ましい。
In the production of the silicon nitride-based sintered body of the present invention, both α-Si 3 N 4 and β'-sialon crystal phases are precipitated in the sintered body and the packing density of both crystal grains is improved. In order to achieve this, the particle size of the raw material powder and the amount of impurities are adjusted, and 1300 to 1 in a nitrogen gas atmosphere at or near atmospheric pressure is used.
Sinter at a temperature of 750 ° C. As the raw material powder, for example, α-Si 3 N 4 is 80% by weight or more and the average particle size is 0.7 μm.
Hereinafter, it is preferable to use a silicon nitride powder containing 0.2% by weight or less of transition metal impurities.

【0015】焼結助剤としては、主として窒化ケイ素粉
末表面のSiO2と低融点の液相反応を生じるY23
MgO、CaO、TiO2等の酸化物を使用する。又、
β’−サイアロンの生成のためにアルミニウム化合物を
添加するが、β’−サイアロンの一般式Si6-ZAlZ
Z8-ZのZの値が好ましくは0<Z<1.0となるよう
にAl23等のアルミニウム化合物を添加する。
As the sintering aid, Y 2 O 3 which mainly causes a low melting point liquid phase reaction with SiO 2 on the surface of the silicon nitride powder,
Oxides such as MgO, CaO and TiO 2 are used. or,
An aluminum compound is added for the production of β'-sialon, but the general formula of β'-sialon Si 6 -Z Al Z O
An aluminum compound such as Al 2 O 3 is added so that the Z value of Z N 8-Z is preferably 0 <Z <1.0.

【0016】焼結体中にα−Si34とβ’−サイアロ
ン以外のSiを含む結晶相を析出させるためには、焼結
後に焼結体を更に加圧した窒素等の不活性ガス雰囲気中
において800〜1700℃で1時間以上熱処理する方
法か、又は窒化ケイ素原料粉末を予め大気中にて600
〜1000℃で酸化処理して粉末表面で酸化物を生成さ
せる等の酸素量を増加させる方法等がある。又、焼結体
の気孔率を2%以下に抑えるためには、例えば焼結又は
熱処理の条件を10気圧以上の窒素ガス雰囲気中にて1
450〜1700℃とすることが好ましい。
In order to precipitate a crystal phase containing Si other than α-Si 3 N 4 and β'-sialon in the sintered body, the sintered body is further pressurized after sintering and an inert gas such as nitrogen is added. A method of heat-treating at 800 to 1700 ° C. for 1 hour or more in an atmosphere, or a raw material powder of silicon nitride is 600
There is a method of increasing the amount of oxygen, such as an oxidation treatment at up to 1000 ° C. to generate an oxide on the powder surface. Further, in order to suppress the porosity of the sintered body to 2% or less, for example, the conditions of sintering or heat treatment are set to 1 in a nitrogen gas atmosphere of 10 atm or more.
It is preferably set to 450 to 1700 ° C.

【0017】本発明の窒化ケイ素系焼結体は、前記した
柱状のβ’−サイアロン結晶粒と等軸状で微細なα−S
34結晶粒とによる充填密度の向上と、粒界相として
存在するSiを含む結晶相とにより、静的強度が優れる
うえに特に疲労強度が向上し、同時に耐食性が改善され
る。具体的には、回転曲げ疲労限界が600MPa以上
と従来の窒化ケイ素系焼結体よりも格段に向上し、且つ
CO2ガス雰囲気中に900℃で1000時間放置した
後の重量増減率が3%以内となる。
The silicon nitride-based sintered body of the present invention is a fine α-S equiaxed with the above-mentioned columnar β'-sialon crystal grains.
Due to the improvement of the packing density due to the i 3 N 4 crystal grains and the crystal phase containing Si existing as the grain boundary phase, not only the static strength is excellent but also the fatigue strength is particularly improved, and at the same time, the corrosion resistance is improved. Specifically, the rotational bending fatigue limit is 600 MPa or more, which is much higher than that of the conventional silicon nitride-based sintered body, and the weight increase / decrease rate after standing for 1000 hours at 900 ° C. in a CO 2 gas atmosphere is 3%. Within

【0018】この様に優れた耐久疲労強度と耐腐食性と
を備えた窒化ケイ素系焼結体は、各種機器の摺動部材と
して、特に自動車等のエンジン部品、例えば排気バル
ブ、カムフォロワー、ピストンヘッド、ピストンピン等
のエンジン部材として好適である。エンジン部材の場
合、特に上記の重量増減率が5%を越えると、粒界相の
腐食による焼結体の強度劣化や、焼結体表面での化学変
化に伴う表面生成物の析出による耐摩耗性の劣化等の問
題が生じるため、好ましくない。
The silicon nitride-based sintered body having such excellent fatigue strength and corrosion resistance is used as a sliding member for various devices, particularly engine parts of automobiles such as exhaust valves, cam followers, pistons. It is suitable as an engine member such as a head and a piston pin. In the case of engine parts, especially when the above-mentioned weight increase / decrease rate exceeds 5%, the strength of the sintered body deteriorates due to corrosion of the grain boundary phase, and wear resistance due to precipitation of surface products due to chemical changes on the surface of the sintered body. This is not preferable because it causes problems such as deterioration of sex.

【0019】エンジン部材等の各種機械部品とした場
合、機械加工表面の表面粗さが十点平均粗さ(RZ)で
1.2μm以下であることが好ましい。この粗さが1.2
μmを越えると表面の溝部が欠陥として作用し、部品の
疲労強度を低下させると共に、摺動する相手部材を異常
に摩耗させるからである。特に、この異常摩耗や強度劣
化は、腐食性のガス雰囲気中で使用するエンジン部材等
として使用する場合に問題となる。
In the case of various machine parts such as engine members, the machined surface preferably has a ten-point average roughness (R Z ) of 1.2 μm or less. This roughness is 1.2
This is because if the thickness exceeds μm, the groove on the surface acts as a defect, which reduces the fatigue strength of the component and abnormally wears the sliding mating member. In particular, this abnormal wear and strength deterioration pose a problem when used as an engine member or the like used in a corrosive gas atmosphere.

【0020】[0020]

【実施例】実施例1 92重量%の市販のSi34粉末(α化率90%、平均
粒径0.6μm)と、焼結助剤として5重量%のY23
粉末、2重量%のAl23粉末、及び1重量%のMgO
粉末を、ナイロン製ボールミルによりエタノール中で1
00時間湿式混合した後、得られたスラリーを20μm
のナイロンメッシュで篩分けした。このスラリーに有機
バインダーを粉末総量に対して3重量%加え、撹拌機に
より2時間混合した後、90℃で造粒乾燥した。
Example 1 92% by weight of commercially available Si 3 N 4 powder (90% α conversion, average particle size 0.6 μm) and 5% by weight Y 2 O 3 as a sintering aid.
Powder, 2 wt% Al 2 O 3 powder, and 1 wt% MgO
1 powder in ethanol with a nylon ball mill in ethanol
After wet mixing for 00 hours, the resulting slurry was 20 μm
And screened with a nylon mesh. An organic binder was added to this slurry in an amount of 3% by weight based on the total amount of the powder, and the mixture was mixed with a stirrer for 2 hours, and then granulated and dried at 90 ° C.

【0021】この乾燥造粒粉末を150μmのナイロン
メッシュで篩分けし、得られた粉末を各々3000kg
/cm2の圧力でCIP成形し、各成形体を大気中にて
600℃で20時間処理して有機バインダーを除去した
後、1〜50気圧の窒素ガス雰囲気中にて1500〜1
800℃の温度で2〜8時間焼結した。更に、得られた
各焼結体を1〜5気圧の窒素ガス雰囲気中にて1200
〜1650℃の温度で2〜10時間の熱処理を行って、
試料1〜6の各焼結体を得た。
The dried granulated powder was sieved with a nylon mesh of 150 μm, and the obtained powder was 3000 kg each.
CIP molding at a pressure of 1 / cm < 2 >, each molded product is treated in the air at 600 [deg.] C. for 20 hours to remove the organic binder, and then 1500 to 1 in a nitrogen gas atmosphere of 1 to 50 atm.
Sintered at a temperature of 800 ° C. for 2-8 hours. Further, each of the obtained sintered bodies was subjected to 1200 in a nitrogen gas atmosphere of 1 to 5 atm.
Heat treatment at a temperature of ˜1650 ° C. for 2 to 10 hours,
The respective sintered bodies of Samples 1 to 6 were obtained.

【0022】得られた各焼結体について、X線回折法に
より分析したところ、α−Si34とβ’−サイアロン
以外に他のSiを含む結晶相としてイットリウムシリケ
ートが検出された。又、X線回折におけるα−Si34
とβ’−サイアロンのピーク強度比、及び他の結晶相で
あるイットリウムシリケートのメインピーク強度のα−
Si34の(210)面とβ’−サイアロンの(21
0)面の回折強度の和に対する強度比を求めた。更に、
各焼結体について、実施例1と同様に気孔率を相対比重
により逆算して算出した。これらの分析結果を表1に示
した。
When each of the obtained sintered bodies was analyzed by an X-ray diffraction method, yttrium silicate was detected as a crystal phase containing Si other than α-Si 3 N 4 and β'-sialon. In addition, α-Si 3 N 4 in X-ray diffraction
And β'-sialon peak intensity ratio, and α-of the main peak intensity of yttrium silicate which is another crystal phase
(210) plane of Si 3 N 4 and (21) of β'-sialon
The intensity ratio to the sum of the diffraction intensities of the 0) plane was obtained. Furthermore,
For each sintered body, the porosity was calculated by backcalculating the relative specific gravity in the same manner as in Example 1. The results of these analyzes are shown in Table 1.

【0023】[0023]

【表1】 (注)表中の*を付した試料は比較例である。[Table 1] (Note) Samples marked with * in the table are comparative examples.

【0024】又、試料1〜6の各焼結体について、JI
S R1601に準拠した3点曲げ強度試験と、同試験
片を用いたシャルピー衝撃試験を行った。更に、各焼結
体をダイヤモンド砥石を用いて図1に示す小野式回転曲
げ疲労試験用の試験片1の形状に研削加工仕上げし、こ
の試験片1の両端を図2に示す小野式回転曲げ疲労試験
機の試料固定部2に固定し、モーターにより試料固定部
2を回転して試験片1に回転運動を与えながら、同時に
重り3により試料固定部2を介して試験片1に曲げモー
メントを与える耐久疲労試験を行った。この耐久疲労試
験により、試験片が破壊する回転曲げによる疲労限を測
定した。
For each of the sintered bodies of Samples 1 to 6, JI
A three-point bending strength test based on S R1601 and a Charpy impact test using the same test piece were performed. Further, each sintered body was ground and finished into a shape of a test piece 1 for Ono-type rotary bending fatigue test shown in FIG. 1 by using a diamond grindstone, and both ends of the test piece 1 were rotated by Ono-type rotary bending shown in FIG. The test piece 1 is fixed to the sample fixing part 2 of the fatigue testing machine, the sample fixing part 2 is rotated by a motor to give a rotational motion to the test piece 1, and at the same time, a bending moment is applied to the test piece 1 by the weight 3 via the sample fixing part 2. An endurance fatigue test was given. By this endurance fatigue test, the fatigue limit due to rotary bending at which the test piece breaks was measured.

【0025】一方、実用特性を試験するため、市販の排
気量2000ccの6気筒直接駆動式ガソリンエンジン
の排気バルブを前記各焼結体から作製し、この排気バル
ブを取り付けた上記ガソリンエンジンを用いて、400
0〜7400rpmの間を約20秒間隔でスキャニング
する実用耐久疲労試験を行い、排気バルブが破壊するま
での耐久時間を積算時間により求めた。尚、積算時間に
ついては500時間を試験の打ち切り時間とし、この時
間を経過しても破壊していない試料については試験を打
ち切った。
On the other hand, in order to test practical characteristics, an exhaust valve of a commercially available 6-cylinder direct-drive gasoline engine with a displacement of 2000 cc was produced from each of the above-mentioned sintered bodies, and the gasoline engine equipped with this exhaust valve was used. , 400
A practical endurance fatigue test was carried out by scanning from 0 to 7,400 rpm at intervals of about 20 seconds, and the endurance time until the exhaust valve was broken was determined by the integrated time. The cumulative time was set to 500 hours as the test termination time, and the test was terminated for the samples that were not destroyed even after this time elapsed.

【0026】更に、試料1〜6の各焼結体をCO2ガス
濃度75%以上の雰囲気中に900℃で1000時間放
置し、この試験前後における各焼結体の重量増減率を測
定した。これらの試験結果を表2に示した。尚、焼結体
の重量増減率は絶対値で表示した。
Further, each of the sintered bodies of Samples 1 to 6 was allowed to stand in an atmosphere having a CO 2 gas concentration of 75% or more at 900 ° C. for 1000 hours, and the weight change rate of each sintered body before and after this test was measured. The results of these tests are shown in Table 2. In addition, the weight increase / decrease rate of the sintered body is expressed as an absolute value.

【0027】[0027]

【表2】 強 度 試 験 結 果 疲 労 試 験 結 果 重 量 曲げ強度 シャルヒ゜ー衝撃値 疲労限 ハ゛ルフ゛耐久時間 増減率試料 (MPa) (kgm/cm2) (MPa) (hr) (%) 1 1760 0.22 860 500hr打切り 0.4 2 1820 0.24 950 500hr打切り 0.5 3 1520 0.20 730 420hr 0.5 4* 840 0.05 310 2hr 3.8 5* 965 0.03 460 36hr 2.2 6* 660 0.03 220 0.5hr 4.6 (注)表中の*を付した試料は比較例である。[Table 2]Strength test results Exhaustion test results Weight Bending strength Charpy impact value Fatigue limit durability time Increase / decrease ratesample (MPa) (kgm / cm 2 ) (MPa) (hr) (%)  1 1760 0.22 860 500hr censored 0.4 2 1820 0.24 950 500hr censored 0.5 3 1520 0.20 730 420hr 0.5 4 * 840 0.05 310 2hr 3.8 5 * 965 0.03 460 36hr 2.2 6 * 660 0.03 220 0.5hr 4.6 (Note) * in the table The attached sample is a comparative example.

【0028】実施例2 市販のSi34粉末(α化率90%、平均粒径0.6μ
m)に、焼結助剤としてY23粉末、Al23粉末及び
MgO粉末をそれぞれ下記表3に示す割合となるように
添加し、実施例1と同様に混合、造粒及び成形した後、
各成形体を2気圧の窒素ガス雰囲気中にて1550℃で
5時間焼結した。その後、得られた各焼結体を1000
気圧の窒素ガス雰囲気中にて1600℃で1時間HIP
処理し、試料7〜12の各焼結体を得た。
Example 2 Commercially available Si 3 N 4 powder (alpha conversion rate 90%, average particle size 0.6 μm)
m) was added with Y 2 O 3 powder, Al 2 O 3 powder and MgO powder as sintering aids in the proportions shown in Table 3 below, and mixed, granulated and molded in the same manner as in Example 1. After doing
Each compact was sintered at 1550 ° C. for 5 hours in a nitrogen gas atmosphere of 2 atm. Then, each sintered body obtained was
HIP for 1 hour at 1600 ° C in a nitrogen gas atmosphere at atmospheric pressure
It processed and obtained each sintered compact of samples 7-12.

【0029】[0029]

【表3】 (注)表中の*を付した試料は比較例である。[Table 3] (Note) Samples marked with * in the table are comparative examples.

【0030】得られた各焼結体についてX線回折法によ
り分析し、α−Si34とβ’−サイアロン、及びそれ
ら以外に検出された他のSiを含む結晶相を実施例1と
同様に評価した。又、各焼結体より切り出したサンプル
表面を十点平均粗さ(RZ)が0.1μm以下となるように
鏡面加工した後、その表面をHF:HNO3=1:2の
エッチング液を用いて60℃で2時間エッチングした。
このエッチング面を5000倍でSEM観察し、観察写
真より各結晶粒のサンプル数を100個選び出し、α−
Si34とβ’−サイアロンの短軸と長軸の平均結晶粒
径を求めた。更に、各焼結体の気孔率を実施例1と同様
に算出した。これらの分析結果を表4に示した。
Each of the obtained sintered bodies was analyzed by an X-ray diffraction method, and a crystal phase containing α-Si 3 N 4 and β'-sialon, and other detected Si was determined as Example 1. It evaluated similarly. Further, the sample surface cut out from each sintered body was mirror-finished so that the ten-point average roughness (R Z ) was 0.1 μm or less, and then the surface was treated with an etching solution of HF: HNO 3 = 1: 2. It was used for etching at 60 ° C. for 2 hours.
This etched surface was observed with a SEM at a magnification of 5000, and 100 samples of each crystal grain were selected from the observation photograph.
The average crystal grain sizes of the short axis and the long axis of Si 3 N 4 and β′-sialon were obtained. Further, the porosity of each sintered body was calculated in the same manner as in Example 1. The results of these analyzes are shown in Table 4.

【0031】[0031]

【表4】 αSi3N4:β’サイアロン 他Si含有結晶相 気孔率 結晶粒径(μm) 試料 ピーク強度比(%) 対α+β’比(%) (%) α β’(長/短) 7 22: 78 0.6 0.8 0.3 1.8/0.2 8 15: 85 1.4 0.2 0.4 2.2/0.3 9 9: 1 1.6 0.2 0.5 2.8/0.3 10 3: 97 2.8 0.5 0.5 3.5/0.4 11* 0:100 6.5 1.2 − 7.6/1.2 12* 35: 65 なし 5.3 0.3 2.1/0.3 (注)表中の*を付した試料は比較例である。[Table 4] αSi 3 N 4 : β'sialon Other Si-containing crystal phase Porosity grain size (μm) Sample peak intensity ratio (%) to α + β 'ratio (%) (%) α β' (long / Short) 7 22: 78 0.6 0.8 0.3 1.8 / 0.2 8 15: 85 1.4 0.2 0.4 2.2 / 0.3 9 9: 1 1.6 0.2 0.5 2.8 / 0.3 10 3: 97 2.8 0.5 0.5 3.5 / 0.4 11 * 0: 100 6.5 1.2 − 7.6 / 1.2 12 * 35: 65 None 5.3 0.3 2.1 / 0.3 (Note) Samples marked with * in the table are comparative examples.

【0032】更に、試料7〜12の各焼結体について実
施例1と同様に、小野式回転曲げ疲労試験機を用いて回
転曲げによる疲労限を測定し、各焼結体から作製した排
気バルブの実用耐久疲労試験により排気バルブが破壊す
るまでの耐久時間を積算時間により求め、更に加熱CO
2ガス中に放置する試験前後における焼結体の重量増減
率(絶対値)を測定した。これらの結果を表5に示し
た。
Further, for each of the sintered bodies of Samples 7 to 12, the fatigue limit due to rotary bending was measured using an Ono-type rotary bending fatigue tester in the same manner as in Example 1, and the exhaust valve produced from each sintered body was measured. The durability time until the exhaust valve is broken is obtained by the practical durability fatigue test of
The weight increase / decrease rate (absolute value) of the sintered body before and after the test in which it was left in 2 gases was measured. The results are shown in Table 5.

【0033】[0033]

【表5】 (注)表中の*を付した試料は比較例である。[Table 5] (Note) Samples marked with * in the table are comparative examples.

【0034】実施例3 実施例1の試料2の焼結体について、機械加工後の表面
の十点平均粗さ(RZ)を種々変化させた試験片と排気バ
ルブを用いて、実施例1と同様の小野式回転曲げ疲労試
験による回転曲げの疲労限、排気バルブの実用耐久疲労
試験により排気バルブが破壊するまでの耐久時間、更に
加熱CO2ガス中に放置する試験後における排気バルブ
の小野式回転曲げ疲労試験による回転曲げの疲労限をそ
れぞれ測定し、これらの結果を表6に示した。
Example 3 With respect to the sintered body of sample 2 of Example 1, using test pieces and exhaust valves in which the ten-point average roughness (R Z ) of the machined surface was variously changed, Example 1 Similar to the Ono-type rotary bending fatigue test, the fatigue limit of rotary bending, the exhaust valve practical durability fatigue test, the endurance time until the exhaust valve is destroyed, and the exhaust valve Ono after the test of leaving it in heated CO 2 gas The fatigue limit of rotary bending was measured by the rotary bending fatigue test, and the results are shown in Table 6.

【0035】[0035]

【表6】 (注)表中の*を付した試料は比較例である。[Table 6] (Note) Samples marked with * in the table are comparative examples.

【0036】[0036]

【発明の効果】本発明によれば、柱状のβ’−サイアロ
ン結晶粒と等軸状で微細なα−Si34結晶粒とによる
充填密度の向上と、粒界相として存在するSiを含む結
晶相とにより、静的強度が優れるうえに、従来よりも特
に疲労強度が向上し、同時に耐食性が改善された窒化ケ
イ素系焼結体を提供することが出来る。
According to the present invention, the packing density is improved by the columnar β'-sialon crystal grains and the equiaxed and fine α-Si 3 N 4 crystal grains, and Si existing as the grain boundary phase is eliminated. By including the crystal phase, it is possible to provide a silicon nitride-based sintered body that is excellent in static strength, particularly improved in fatigue strength as compared with conventional ones, and at the same time improved in corrosion resistance.

【0037】本発明の窒化ケイ素焼結体は、優れた耐久
疲労強度と耐腐食性とを備えているので各種機器の摺動
部材として、特に自動車等のエンジン部品、例えば排気
バルブ、カムフォロワー、ピストンヘッド、ピストンピ
ン等のエンジン部材としての応用が期待される。
Since the silicon nitride sintered body of the present invention has excellent fatigue strength and corrosion resistance, it can be used as a sliding member for various devices, especially engine parts of automobiles such as exhaust valves, cam followers, Applications as engine members such as piston heads and piston pins are expected.

【図面の簡単な説明】[Brief description of drawings]

【図1】実施例において小野式回転曲げ疲労試験に用い
た試験片の形状及び寸法を示す側面図である。
FIG. 1 is a side view showing the shape and dimensions of a test piece used for an Ono-type rotary bending fatigue test in Examples.

【図2】実施例において使用した小野式回転曲げ疲労試
験機の概要を説明するための一部を切り欠いて示した概
念図である。
FIG. 2 is a partially cutaway conceptual view for explaining an outline of an Ono-type rotary bending fatigue tester used in Examples.

【符号の説明】[Explanation of symbols]

1 試験片 2 試料固定部 3 重り 1 Test piece 2 Sample fixing part 3 Weight

───────────────────────────────────────────────────── フロントページの続き (72)発明者 山川 晃 兵庫県伊丹市昆陽北一丁目1番1号 住友 電気工業株式会社伊丹製作所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Akira Yamakawa 1-1-1 Kunyokita, Itami City, Hyogo Prefecture Sumitomo Electric Industries, Ltd. Itami Works

Claims (8)

【特許請求の範囲】[Claims] 【請求項1】 α−窒化ケイ素とβ’−サイアロンとを
含み、他にケイ素を含む結晶相が少なくとも1種存在
し、このケイ素を含む結晶相のX線回折における主ピー
クの回折強度が、α−窒化ケイ素の(210)面とβ’
−サイアロンの(210)面の回折強度の和に対して
0.5〜5%の範囲にあることを特徴とする窒化ケイ素
系焼結体。
1. At least one crystal phase containing α-silicon nitride and β′-sialon and containing silicon is present, and the diffraction intensity of the main peak in the X-ray diffraction of the crystal phase containing silicon is: α-silicon nitride (210) plane and β '
-A silicon nitride-based sintered body characterized by being in the range of 0.5 to 5% with respect to the sum of the diffraction intensity of the (210) plane of sialon.
【請求項2】 焼結体中のα−窒化ケイ素とβ’−サイ
アロンの各結晶相のX線回折におけるピーク強度は、両
者のピーク強度の和を100%としたとき、0<α−窒
化ケイ素≦30%及び70%≦β’−サイアロン<10
0%の関係にあることを特徴とする、請求項1記載の窒
化ケイ素系焼結体。
2. The peak intensity in the X-ray diffraction of each crystal phase of α-silicon nitride and β′-sialon in the sintered body is 0 <α-nitriding, when the sum of the peak intensities of the two is 100%. Silicon ≦ 30% and 70% ≦ β′-sialon <10
The silicon nitride-based sintered body according to claim 1, wherein the relationship is 0%.
【請求項3】 焼結体中のα−窒化ケイ素の平均結晶粒
径が0.5μm以下であり、β’−サイアロンの平均結
晶粒径が長軸方向で1.0〜5.0μm及び短軸方向で
0.5μm以下であることを特徴とする、請求項1又は
2記載の窒化ケイ素系焼結体。
3. The average crystal grain size of α-silicon nitride in the sintered body is 0.5 μm or less, and the average crystal grain size of β′-sialon is 1.0 to 5.0 μm and short in the major axis direction. The silicon nitride based sintered body according to claim 1 or 2, wherein the axial direction is 0.5 µm or less.
【請求項4】 焼結体の気孔率が2%以下であることを
特徴とする、請求項1〜3のいずれかに記載の窒化ケイ
素系焼結体。
4. The silicon nitride sintered body according to claim 1, wherein the sintered body has a porosity of 2% or less.
【請求項5】 焼結体の回転曲げ疲労限界が600MP
a以上であり、且つCO2ガス雰囲気中に900℃で1
000時間放置した後の重量増減率が3%以内であるこ
とを特徴とする、請求項1〜4のいずれかに記載の窒化
ケイ素系焼結体。
5. The rotary bending fatigue limit of the sintered body is 600MP.
a or more and 1 at 900 ° C. in a CO 2 gas atmosphere
The silicon nitride-based sintered body according to any one of claims 1 to 4, characterized in that the rate of change in weight after being left for 000 hours is within 3%.
【請求項6】 α−窒化ケイ素とβ’−サイアロンとを
含み、他にケイ素を含む結晶相が少なくとも1種存在
し、このケイ素を含む結晶相のX線回折における主ピー
クの回折強度が、α−窒化ケイ素の(210)面とβ’
−サイアロンの(210)面の回折強度の和に対して
0.5〜5%の範囲にあって、回転曲げ疲労限界が60
0MPa以上であり、且つCO2ガス雰囲気中に900
℃で1000時間放置した後の重量増減率が3%以内で
ある窒化ケイ素系焼結体からなることを特徴とするエン
ジン部材。
6. A crystalline phase containing α-silicon nitride and β′-sialon, and at least one other crystalline phase containing silicon is present, and the diffraction intensity of the main peak in X-ray diffraction of the crystalline phase containing silicon is: α-silicon nitride (210) plane and β '
-It is in the range of 0.5 to 5% with respect to the sum of the diffraction intensity of the (210) plane of Sialon, and the rotational bending fatigue limit is 60.
0 MPa or more and 900 in a CO 2 gas atmosphere
An engine member comprising a silicon nitride-based sintered body having a weight change rate of 3% or less after being left at 1000C for 1000 hours.
【請求項7】 焼結体中のα−窒化ケイ素の平均結晶粒
径が0.5μm以下であって、β’−サイアロンの平均
結晶粒径が長軸方向で1.0〜5.0μm及び短軸方向で
0.5μm以下であることを特徴とする、請求項6記載
のエンジン部材。
7. The average crystal grain size of α-silicon nitride in the sintered body is 0.5 μm or less, and the average crystal grain size of β′-sialon is 1.0 to 5.0 μm in the major axis direction. The engine member according to claim 6, wherein the length is 0.5 μm or less in the minor axis direction.
【請求項8】 機械加工表面の表面粗さが、十点平均粗
さ(RZ)で1.2μm以下であることを特徴とする、請
求項6又は7記載のエンジン部材。
8. The engine member according to claim 6, wherein the machined surface has a ten-point average roughness (R Z ) of 1.2 μm or less.
JP5059610A 1993-02-24 1993-02-24 Silicon nitride based sintered body and engine member Pending JPH06247773A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5059610A JPH06247773A (en) 1993-02-24 1993-02-24 Silicon nitride based sintered body and engine member

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5059610A JPH06247773A (en) 1993-02-24 1993-02-24 Silicon nitride based sintered body and engine member

Publications (1)

Publication Number Publication Date
JPH06247773A true JPH06247773A (en) 1994-09-06

Family

ID=13118197

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5059610A Pending JPH06247773A (en) 1993-02-24 1993-02-24 Silicon nitride based sintered body and engine member

Country Status (1)

Country Link
JP (1) JPH06247773A (en)

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