JPH0627952Y2 - ウエハトレイ・サセプタ・トレイ受台の形状 - Google Patents
ウエハトレイ・サセプタ・トレイ受台の形状Info
- Publication number
- JPH0627952Y2 JPH0627952Y2 JP1989070070U JP7007089U JPH0627952Y2 JP H0627952 Y2 JPH0627952 Y2 JP H0627952Y2 JP 1989070070 U JP1989070070 U JP 1989070070U JP 7007089 U JP7007089 U JP 7007089U JP H0627952 Y2 JPH0627952 Y2 JP H0627952Y2
- Authority
- JP
- Japan
- Prior art keywords
- tray
- wafer
- susceptor
- wafer tray
- peripheral surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989070070U JPH0627952Y2 (ja) | 1989-06-15 | 1989-06-15 | ウエハトレイ・サセプタ・トレイ受台の形状 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989070070U JPH0627952Y2 (ja) | 1989-06-15 | 1989-06-15 | ウエハトレイ・サセプタ・トレイ受台の形状 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0310528U JPH0310528U (fr) | 1991-01-31 |
| JPH0627952Y2 true JPH0627952Y2 (ja) | 1994-07-27 |
Family
ID=31605926
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989070070U Expired - Fee Related JPH0627952Y2 (ja) | 1989-06-15 | 1989-06-15 | ウエハトレイ・サセプタ・トレイ受台の形状 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0627952Y2 (fr) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2804664B2 (ja) * | 1992-01-21 | 1998-09-30 | 株式会社日立製作所 | 試料の静電吸着機構及び電子線描画装置 |
| CN101645394A (zh) | 2004-10-19 | 2010-02-10 | 佳能安内华股份有限公司 | 基板支撑、运送用托盘 |
| JP4758385B2 (ja) * | 2007-04-06 | 2011-08-24 | シャープ株式会社 | 気相成長装置及び気相成長方法 |
| CN111926305B (zh) * | 2020-08-12 | 2024-10-11 | 厦门乾照半导体科技有限公司 | 一种用于led晶圆制程的载盘 |
-
1989
- 1989-06-15 JP JP1989070070U patent/JPH0627952Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0310528U (fr) | 1991-01-31 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |