JPH0628169Y2 - Hygroscopic respirator - Google Patents
Hygroscopic respiratorInfo
- Publication number
- JPH0628169Y2 JPH0628169Y2 JP1987121305U JP12130587U JPH0628169Y2 JP H0628169 Y2 JPH0628169 Y2 JP H0628169Y2 JP 1987121305 U JP1987121305 U JP 1987121305U JP 12130587 U JP12130587 U JP 12130587U JP H0628169 Y2 JPH0628169 Y2 JP H0628169Y2
- Authority
- JP
- Japan
- Prior art keywords
- hygroscopic agent
- connecting pipe
- side connecting
- hygroscopic
- oil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Drying Of Gases (AREA)
- Transformer Cooling (AREA)
Description
【考案の詳細な説明】 〔産業上の利用分野〕 この考案は、例えば、変圧器またはリアクトルなどの油
入電気機器のような膨張、収縮する空気を内包した空間
を有する機器に使用する吸湿呼吸器に関するものであ
る。DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a hygroscopic breathing apparatus used for equipment having a space containing air that expands and contracts, such as oil-filled electric equipment such as a transformer or a reactor. It is related to vessels.
従来のこの種吸湿呼吸器の一例を示すと第6図のとおり
である。An example of a conventional hygroscopic respirator of this kind is shown in FIG.
図において、符号(1)は図示されていないコンサベータ
等空気が内包されている空間へ連通している空間側接続
管(2)に設けられた空間側フランジ、(3)は吸湿呼吸器本
体であつて、吸湿呼吸器本体(3)には、上部に空間側フ
ランジ(1)に接続して取り付けられる上部接続フランジ
(4)と吸湿剤(5)を投入する吸湿剤投入口(6)とを備え、
下部には内部にフイルター(7)を有するとともに取外し
可能に構成された油壺(8)を備えており、機器、例え
ば、油入電気機器である変圧器(9)の側面に設けられた
支持金具(10)に固定されているものである。In the figure, reference numeral (1) is a space side flange provided on a space side connecting pipe (2) communicating with a space containing air such as a conservator (not shown), and (3) is a hygroscopic respirator main body The upper part of the hygroscopic respirator body (3) is connected to the space side flange (1) and is attached to the upper part.
(4) and a hygroscopic agent input port (6) for feeding the hygroscopic agent (5),
A lower part is equipped with a filter (7) inside and an oil bottle (8) that is configured to be removable, and is provided on a side surface of a device (e.g., a transformer (9) that is an oil-filled electrical device). It is fixed to the metal fitting (10).
このような吸湿呼吸器は油入電気機器の絶縁油劣化防止
方式として開放形コンサベータまたはゴム袋式コンサベ
ータなどを使用しているものにおいて、油面変動に伴う
呼吸作用を吸湿剤を経由して行なわしめるためのもの
で、概ね呼吸量に比例して吸湿剤は劣化するが、この考
案は劣化した吸湿剤の取替方法に関する構造に係るもの
で、吸湿呼吸器の吸湿作用とは直接関係が無いので、こ
こでは吸湿剤の取替方法についてのみ以下に説明する。Such a hygroscopic respirator uses an open type conservator or a rubber bag type conservator as a method for preventing deterioration of insulating oil in oil-filled electrical equipment. The hygroscopic agent deteriorates in proportion to the breathing volume, but this invention relates to the structure for replacing the deteriorated hygroscopic agent, and is directly related to the hygroscopic action of the hygroscopic respirator. Therefore, only the method of replacing the hygroscopic agent will be described below.
吸湿剤(11)を取替えるには、吸湿呼吸器本体(3)の下部
の油壺(8)の止めねじ(12)を弛め、油壺(8)を回して取り
外し、その後、油壺(8)の取付座(13)の中にねじ込まれ
たフイルター(7)を取り外すと、呼吸作用により外気の
水分を吸湿して劣化した吸湿剤(11)は落下するので、吸
湿呼吸器本体(3)の下方に受皿(14)を設置して劣化した
吸湿剤(11)を回収する。To replace the hygroscopic agent (11), loosen the set screw (12) of the oil bottle (8) at the bottom of the hygroscopic respiratory body (3), turn the oil bottle (8) to remove it, and then remove the oil bottle (8). When the filter (7) screwed into the mounting seat (13) of (8) is removed, the moisture absorbent absorbs moisture from the outside air due to breathing action and the deteriorated hygroscopic agent (11) falls off. ) Is installed below and the deteriorated hygroscopic agent (11) is collected.
このようにして劣化した吸湿剤(11)を除去したならば、
次に解体と逆の手順でフイルター(7)、油壺(8)を組み付
けた後、吸湿呼吸器本体(3)の上部の吸湿剤投入口(6)を
開放して新しい吸湿剤(5)を投入した後、吸湿剤投入口
(6)を閉鎖して、吸湿剤取替作業を完了する。If the hygroscopic agent (11) deteriorated in this way is removed,
Next, after assembling the filter (7) and the oil bottle (8) in the reverse order of disassembly, open the moisture absorbent inlet (6) at the top of the moisture absorbent breather body (3) and open a new moisture absorbent (5). After adding the
Close (6) and complete the hygroscopic agent replacement work.
従来の吸湿剤取替作業は、以上のような手順によつて行
なわれるために、現場で吸湿呼吸器本体(3)の下部に設
けている油壺(8)を解体、再組立てしなければならず、
更に劣化した吸湿剤(11)を取り出す場合、周囲に散逸す
ることがあるため充分に養生する必要があり、また新し
い吸湿剤(5)を投入する場合も高い位置まで吸湿剤(5)を
持ち上げ、しかも、吸湿剤投入口が小さいために注意深
くかつ不自然な姿勢で長時間作業する必要があるなどの
問題点があつた。Conventional hygroscopic agent replacement work is performed according to the above procedure, so the oil bottle (8) provided at the bottom of the hygroscopic respiratory body (3) must be disassembled and reassembled on site. Not
When taking out the deteriorated hygroscopic agent (11), it may be scattered around, so it is necessary to cure it sufficiently.When adding a new hygroscopic agent (5), lift the hygroscopic agent (5) to a high position. In addition, there is a problem that it is necessary to work for a long time in a careful and unnatural posture because the inlet for the hygroscopic agent is small.
この考案は、上記のような問題点を解決するためになさ
れたもので、吸湿剤取替作業に際して、解体、再組立作
業を必要とせず、作業時間も大幅に短縮するなど取替作
業を飛躍的に簡略容易化することを可能とする吸湿呼吸
器を得ることを目的とする。This invention was made in order to solve the above problems, and does not require disassembling and reassembling work when replacing the hygroscopic agent, and greatly shortens the work time. An object of the present invention is to obtain a hygroscopic respirator that can be simplified easily.
この考案に係る吸湿呼吸器は、膨張、収縮する空気を内
包する空間に連通する空間側接続管および吸湿呼吸器の
下部に接続して設けられている油壺と連通する油壺側接
続管が機器の側面に固定されているとともに、吸湿剤を
充填しかつ上記空間側接続管および油壺側接続管に気密
に接続する2個の接続口を備えた吸湿剤ケースと、該吸
湿剤ケースを載置して装着する吸湿剤ケースの下方に設
置の装着ガイドと、一端が回転自在に固定されて上記吸
湿剤ケースを押える吸湿剤ケースの上方に設置の上板
と、装着ガイドと上板とを相互に締め付けて吸湿剤ケー
スを固定する固定装置と、空間側接続管及び油壺側接続
管と各接続口とをワンタッチで取り付け、取り外しする
締付装置とを備えている。The hygroscopic respirator according to the present invention includes a space-side connecting pipe that communicates with a space that contains air that expands and contracts, and an oil-vessel-side connecting pipe that communicates with an oil pot that is provided below the hygroscopic respirator. A hygroscopic agent case, which is fixed to the side surface of the device, is equipped with two hygroscopic agents, and has two connection ports that are airtightly connected to the space-side connecting pipe and the oil bottle-side connecting pipe, and the hygroscopic agent case. A mounting guide installed below the desiccant case to be placed and mounted, and an upper plate installed above the desiccant case whose one end is rotatably fixed to press the desiccant case, a mounting guide and an upper plate. A fixing device for fixing the moisture absorbent case to each other by fixing them together, and a tightening device for attaching and removing the space side connection pipe and the oil bottle side connection pipe and each connection port with one touch.
この考案に係る吸湿呼吸器は、上記のように構成されて
いるので、劣化した吸湿剤を取り替えるには、吸湿剤ケ
ースの2個の接続口を、空間側接続管および油壺側接続
管から解離した後、固定装置を解除して上板を吸湿剤ケ
ースの上部より取り除き、次いで、吸湿剤ケースを装着
ガイド上を滑らせて引き出す。Since the hygroscopic respirator according to the present invention is configured as described above, in order to replace the deteriorated hygroscopic agent, the two connection ports of the hygroscopic agent case are connected from the space side connecting pipe and the oil bottle side connecting pipe. After the dissociation, the fixing device is released, the upper plate is removed from the upper part of the hygroscopic agent case, and then the hygroscopic agent case is slid on the mounting guide and pulled out.
次いで、新しい吸湿剤を充填している吸湿剤ケースを装
着ガイド上にのせて押し込み、接続口を空間側および油
壺側接続管に気密に取り付けるとともに、上板および固
定装置によつて、吸湿剤ケースを取り付け固定して、取
替えを終る。Then, place the hygroscopic agent case filled with new hygroscopic agent on the mounting guide and push it in to attach the connection port to the space side and oil bottle side connecting pipes airtightly, and at the same time, use the upper plate and the fixing device to The case is attached and fixed, and the replacement is completed.
以下、この考案をその実施例を示す図に基づいて説明す
る。The present invention will be described below with reference to the drawings showing an embodiment thereof.
第1実施例を示す第1図において、空間側フランジ
(1)、空間側接続管(2)、吸湿剤(5),(11)、フイルター
(7)、油壺(8)、機器例えば油入電気機器である変圧器
(9)、止めねじ(12)、取付座(13)はいずれも従来の吸湿
呼吸器におけるそれらと同等のものである。In FIG. 1 showing the first embodiment, a space side flange
(1), space side connecting pipe (2), moisture absorbent (5), (11), filter
(7), oil jar (8), equipment such as transformers that are oil-filled electrical equipment
(9), the set screw (12), and the mounting seat (13) are all the same as those in the conventional hygroscopic respirator.
次に、符号(21)は変圧器(9)の側面に取り付けられて、
空間側接続管(2)および空間側接続管(2)に連通の補助接
続管(22)と、油壺(8)とこれに連通の補助接続管(23)と
が固定されている支持金具であり、補助接続管(22)(23)
のそれぞれの端部には空間側接続フランジ(24)、油壺側
フランジ(25)が設けられている。Next, the code (21) is attached to the side of the transformer (9),
Support fittings in which the space side connecting pipe (2) and the auxiliary connecting pipe (22) communicating with the space side connecting pipe (2), the oil jar (8) and the auxiliary connecting pipe (23) communicating with this are fixed And the auxiliary connecting pipe (22) (23)
A space side connection flange (24) and an oil bottle side flange (25) are provided at each end of the.
符号(26)は内部に吸湿剤(5)(11)が充填されている吸湿
剤ケースであつて、内部には吸湿される気体の流路を長
くするために設けた複数個の気流仕切板(27)が設けられ
ており、また、吸湿剤(5)(11)を投入、排出する吸湿剤
出入口(28)を備えているとともに、空間側接続フランジ
(24)と油壺側接続フランジ(25)に気密に取り付けられる
フランジ(29)(30)をそれぞれ端部に有する2個の接続管
の接続口(31)(32)を備えている。また、符号(33)は吸湿
剤ケース(26)を取り扱うためのケース取手である。Reference numeral (26) is a hygroscopic agent case in which the hygroscopic agents (5) and (11) are filled, and a plurality of air flow partition plates provided inside to extend the flow path of the gas to be absorbed. (27) is provided, and the moisture absorbent inlet / outlet (28) for charging and discharging the moisture absorbent (5) (11) is provided, and the space side connection flange
(24) and the connection ports (31) (32) of the two connection pipes, each of which has flanges (29) (30) airtightly attached to the oil bottle side connection flange (25), respectively. Reference numeral (33) is a case handle for handling the moisture absorbent case (26).
次に符号(34)は変圧器(9)に取り付けられた支持金具(2
1)に取り付けられて、吸湿剤ケース(26)を載置支承する
ための装着ガイドであり、また、(35)は支持金具(21)に
一端が回動自在に取り付けられている上板であつて、装
着ガイド(34)上に載置された吸湿剤ケース(26)を上部よ
り押えて吸湿剤ケース(26)を固定するものであり、その
固定は、例えば、装着ガイド(34)に回動自在に取り付け
られるとともに回動して吸湿剤ケース(26)に沿わした場
合にその先端が上板(35)の端部に係合する固定ボルト(3
6)と、固定ボルト(36)の端部に螺合して上板(35)を介し
て吸湿剤ケース(26)を締め付け固定する蝶ナツト(37)と
からなる固定装置(38)によつて行なわれる。なお、装着
ガイド(34)には吸湿剤ケース(26)の着脱時の案内となる
ガイド部(39)が設けられており、また、蝶ナツト(37)
は、固定ボルト(36)の端部から抜け落ちないように構成
されている。また、符号(40)は空間側接続フランジ(24)
とフランジ(29)とを、また、油壺側接続フランジ(25)と
フランジ(30)とをワンタツチで取付け、取外しする締付
装置である。Next, the reference numeral (34) is a support metal fitting (2) attached to the transformer (9).
1) is a mounting guide for mounting and supporting the moisture absorbent case (26), and (35) is an upper plate whose one end is rotatably attached to the support metal fitting (21). At this point, the moisture absorbent case (26) placed on the mounting guide (34) is pressed from above to fix the moisture absorbent case (26). A fixing bolt (3) that is rotatably attached and whose tip engages with the end of the upper plate (35) when it rotates and moves along the moisture absorbent case (26).
6) and a butterfly nut (37) that is screwed to the end of the fixing bolt (36) and clamps and fixes the moisture absorbent case (26) through the upper plate (35). Is done. The mounting guide (34) is provided with a guide portion (39) that serves as a guide when the hygroscopic agent case (26) is attached and detached, and the butterfly nut (37).
Are configured so as not to fall off from the ends of the fixing bolt (36). The reference numeral (40) is the space side connection flange (24).
And a flange (29), and an oil pot side connecting flange (25) and a flange (30) are attached and detached by one-touch.
上記のように構成されたこの考案の吸湿呼吸器では、コ
ンサベータ内油面が低下すると油壺(8)、フイルター(7)
を経由して吸湿剤ケース(26)内を気流仕切板(27)に沿つ
て点線矢印方向に移動して外気の水分を吸湿しコンサベ
ータ内に乾燥空気を吸入する。コンサベータ内油面が上
昇すると逆の経路でコンサベータ内空気が排出される。
この呼吸作用により吸湿剤(5)が劣化した場合、新しい
吸湿剤(5)を充填した吸湿剤ケース(26)を現場に持つて
行き、劣化した吸湿剤(11)の入つた吸湿剤ケース(26)を
蝶ナツト(37)を弛めて固定ボルト(36)を外し、ワンタツ
チの締付装置(40)を解除して取り外す。In the hygroscopic respirator of the present invention constructed as described above, when the oil level in the conservator drops, the oil jar (8) and the filter (7)
To move the moisture absorbent case (26) along the airflow partition plate (27) in the direction of the dotted line to absorb the moisture of the outside air and suck the dry air into the conservator. When the oil level in the conservator rises, the air in the conservator is discharged through the reverse route.
When the moisture absorbent (5) deteriorates due to this breathing action, the moisture absorbent case (26) filled with a new moisture absorbent (5) is brought to the site, and the moisture absorbent case (11) containing the deteriorated moisture absorbent (11) is taken. 26) Loosen the butterfly nut (37), remove the fixing bolt (36), release the one-tatch tightening device (40), and remove.
次に新品の吸湿剤ケース(26)を装着ガイド(34)に設けら
れたガイド部(39)に沿つて装着ガイド(34)上を滑らせて
突当りまで押し込み、ワンタツチの締付装置(40)により
吸湿剤ケース(34)に直付けされたフランジ(29)(30)と補
助接続管(22)(23)の接続フランジ(24)(25)とを締付装置
(40)により気密に接続し、固定ボルト(36)を回動して起
こし、その先端の蝶ナツト(37)を回して吸湿剤ケース(2
6)を固定して吸湿剤の取替作業を完了する。Next, slide the new hygroscopic agent case (26) along the guide part (39) provided on the mounting guide (34) onto the mounting guide (34) and push it to the end, and the one-tatch tightening device (40). Tighten the flanges (29) (30) directly attached to the moisture absorbent case (34) with the connecting flanges (24) (25) of the auxiliary connecting pipes (22) (23).
Connect it airtightly with (40), rotate the fixing bolt (36) to raise it, and turn the butterfly nut (37) at its tip to rotate the moisture absorbent case (2
6) is fixed and the replacement work of the hygroscopic agent is completed.
なお、上記第1実施例の他に第2図,第3図に示す第
2,第3実施例のように、吸湿剤ケースの接続用のフラ
ンジ(29)(30)を垂直に付けるようにしても、第1実施例
と同様の効果が得られ、更に、第4図の第4実施例に示
すように、この考案による吸湿呼吸器(41)を2個以上切
換弁(42)を介して並列に組み合わせて、一方を常用予備
としておくことにより、バルブ操作により切り替えるこ
とが可能となり吸湿剤取替えの緊急性を緩和することが
できるなどの効果を得ることができる。また、第5実施
例を示す第5図は吸湿剤ケースの接続口(31)(32)を2重
管にして1箇所としたものである。In addition to the first embodiment described above, as in the second and third embodiments shown in FIGS. 2 and 3, the flanges (29) (30) for connecting the moisture absorbent case should be attached vertically. However, the same effect as that of the first embodiment can be obtained, and as shown in the fourth embodiment of FIG. 4, two or more hygroscopic respirators (41) according to the present invention are provided through the switching valve (42). By combining them in parallel and keeping one of them as a regular spare, it is possible to switch by a valve operation, and it is possible to obtain the effect that the urgency of replacing the hygroscopic agent can be alleviated. Further, FIG. 5 showing the fifth embodiment shows that the connection ports (31) and (32) of the hygroscopic agent case are made into double pipes to be one location.
なお、上記各実施例では油入電気機器について説明した
が、内部を乾燥状態に保つことを必要とする機器に使用
した場合でも、上記実施例と同様な効果を奏する。Although the oil-filled electrical equipment has been described in each of the above-described embodiments, the same effect as that of the above-described embodiment can be obtained even when the oil-filled electrical equipment is used in equipment that needs to keep its inside dry.
以上のように、この考案によれば、吸湿剤取替えを吸湿
剤ケースごと行なえるようにしたので、 (1)現場で吸湿呼吸器本体を解体、再組立する必要が無
く作業が簡単容易である (2)吸湿剤が散逸する恐れが無い (3)現場での吸湿剤取替作業時間が大幅に短縮される (4)不自然な姿勢での作業が無くなる (5)取替える目安がたてやすい (6)空間側接続管及び油壺側接続管に対する吸湿剤ケー
スの接続は、締付装置によりワンタッチで行え、吸湿剤
ケース全体は固定装置の締め付けにより、装着ガイドと
上板との間に容易に固定されるので、吸湿剤取替作業時
間がさらに短くなるとともに、吸湿剤ケースの気密が容
易に保たれる等の多くの効果を奏することができる。As described above, according to the present invention, since the hygroscopic agent can be replaced for each hygroscopic agent case, (1) there is no need to disassemble and reassemble the hygroscopic breathing apparatus main body, and the work is easy and easy. (2) There is no risk of the hygroscopic agent dissipating (3) The time required to replace the hygroscopic agent on the site is greatly reduced (4) The work in an unnatural posture is eliminated (5) It is easy to make a reference for the replacement (6) The moisture absorbent case can be connected to the space-side connecting pipe and the oil bottle-side connecting pipe with one-touch by the tightening device, and the entire moisture-absorbent case can be easily attached between the mounting guide and the upper plate by tightening the fixing device. Since it is fixed to, the hygroscopic agent replacement work time can be further shortened, and many effects such as the airtightness of the hygroscopic agent case can be easily maintained can be obtained.
第1図はこの考案による第1実施例の縦断面図、第2
図,第3図はこの考案の第2,第3実施例の縦断面図、
第4図は第4実施例の概略構成図、第5図は第5実施例
の縦断面図、第6図は従来の吸湿呼吸器の縦断面図であ
る。 (1)……空間側フランジ、(2)……空間側接続管、(5)(1
1)……吸湿剤、(8)……油壺、(9)……機器(油入電気機
器、変圧器)、(21)……支持金具、(22)(23)……補助接
続管、(24)……空間側接続フランジ、(25)……油壺側接
続フランジ、(26)……吸湿剤ケース、(29)(30)……フラ
ンジ、(31)(32)……接続口、(34)……装着ガイド、(35)
……上板、(38)……固定装置、(40)……締付装置。 なお、各図中、同一符号は同一又は相当部分を示す。FIG. 1 is a vertical sectional view of the first embodiment according to the present invention, and FIG.
3 and 4 are longitudinal sectional views of the second and third embodiments of the present invention,
FIG. 4 is a schematic configuration diagram of the fourth embodiment, FIG. 5 is a vertical sectional view of the fifth embodiment, and FIG. 6 is a vertical sectional view of a conventional hygroscopic breathing apparatus. (1) …… Space side flange, (2) …… Space side connecting pipe, (5) (1
1) …… Hygroscopic agent, (8) …… oil jar, (9) …… equipment (oil-filled electrical equipment, transformer), (21) …… supporting metal fittings, (22) (23) …… auxiliary connecting pipe , (24) …… Space side connection flange, (25) …… Oil bottle side connection flange, (26) …… Hygroscopic agent case, (29) (30) …… Flange, (31) (32) …… Connection Mouth, (34) …… Mounting guide, (35)
…… Upper plate, (38) …… Fixing device, (40) …… Tightening device. In each figure, the same reference numerals indicate the same or corresponding parts.
───────────────────────────────────────────────────── フロントページの続き (72)考案者 藤原 利彦 兵庫県赤穂市天和651番地 三菱電機株式 会社赤穂製作所内 (72)考案者 川中 進 兵庫県赤穂市天和651番地 三菱電機株式 会社赤穂製作所内 (56)参考文献 実開 昭58−91425(JP,U) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Creator Toshihiko Fujiwara 651 Tenwa Tenwa, Ako City, Hyogo Prefecture Mitsubishi Electric Corporation Ako Works (72) Creator Susumu Kawanaka 651 Tenwa, Ako City Hyogo Prefecture Mitsubishi Electric Corporation Ako Works (56) Bibliography Shou 58-91425 (JP, U)
Claims (1)
気を有する機器内の空間及び油壺にそれぞれ連通されて
いる空間側接続管及び油壺側接続管と、上記機器の側面
に固定されている装着ガイドと、この装着ガイド上に載
置されて装着されるとともに、上記空間側接続管及び上
記油壺側接続管に気密に接続される2個の接続口を有し
ており、吸湿剤が充填される吸湿剤ケースと、この吸湿
剤ケースの上方に一端が回動自在に配置されて上記吸湿
剤ケースを押さえる上板と、上記装着ガイドと上記上板
とを相互に締め付けて上記吸湿剤ケースを固定する固定
装置と、上記空間側接続管及び上記油壺側接続管と上記
各接続口とをワンタッチで取り付け、取り外しする締付
装置とを備えていることを特徴とする吸湿呼吸器。1. A space-side connecting pipe and an oil-vessel-side connecting pipe which are fixed to a side surface of the device and communicate with a space in the device and an oil bottle having air that expands and contracts, respectively, and fixed to the side face of the device. And a mounting guide that is mounted on the mounting guide and has two connection ports that are airtightly connected to the space-side connecting pipe and the oil jar-side connecting pipe, A hygroscopic agent case filled with a hygroscopic agent, an upper plate having one end rotatably disposed above the hygroscopic agent case and pressing the hygroscopic agent case, and the mounting guide and the upper plate are mutually tightened. Moisture absorption characterized by comprising a fixing device for fixing the moisture absorbent case, a tightening device for attaching and detaching the space side connecting pipe and the oil bottle side connecting pipe and each connection port with one touch Respiratory organs.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987121305U JPH0628169Y2 (en) | 1987-08-07 | 1987-08-07 | Hygroscopic respirator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987121305U JPH0628169Y2 (en) | 1987-08-07 | 1987-08-07 | Hygroscopic respirator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6425319U JPS6425319U (en) | 1989-02-13 |
| JPH0628169Y2 true JPH0628169Y2 (en) | 1994-08-03 |
Family
ID=31368191
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987121305U Expired - Lifetime JPH0628169Y2 (en) | 1987-08-07 | 1987-08-07 | Hygroscopic respirator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0628169Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4268303B2 (en) | 2000-02-01 | 2009-05-27 | キヤノンアネルバ株式会社 | Inline type substrate processing equipment |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5891425U (en) * | 1981-12-15 | 1983-06-21 | 株式会社高岳製作所 | hygroscopic respiratory system |
-
1987
- 1987-08-07 JP JP1987121305U patent/JPH0628169Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6425319U (en) | 1989-02-13 |
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