JPH06309716A - Magneto-optical recording medium and reproducing method of the medium - Google Patents
Magneto-optical recording medium and reproducing method of the mediumInfo
- Publication number
- JPH06309716A JPH06309716A JP9802593A JP9802593A JPH06309716A JP H06309716 A JPH06309716 A JP H06309716A JP 9802593 A JP9802593 A JP 9802593A JP 9802593 A JP9802593 A JP 9802593A JP H06309716 A JPH06309716 A JP H06309716A
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- Prior art keywords
- layer
- magneto
- optical recording
- recording medium
- film
- Prior art date
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Abstract
(57)【要約】
【目的】 本発明は、従来の光磁気記録再生装置でも、
光の回折限界以下の周期の信号を再生でき、線密度及び
トラック密度の向上を可能にする光磁気記録媒体とその
再生方法を提供する。
【構成】 面内磁化膜である第一の磁性層と、キュリー
温度が第一層より高く室温では面内磁化膜であって昇温
すると垂直磁化膜となる第二の磁性層と、垂直磁化膜か
らなる第三の磁性層とを少なくとも有する光磁気記録媒
体、及び該光磁気記録媒体の第三の磁性層に記録された
微少磁区を第二の磁性層に転写しながら磁気光学効果に
より光学信号に変換して読み取ることを特徴とする光磁
気記録媒体における信号再生方法。
(57) [Summary] [Object] The present invention is also applicable to a conventional magneto-optical recording / reproducing apparatus.
Provided are a magneto-optical recording medium capable of reproducing a signal having a period equal to or shorter than a diffraction limit of light and improving linear density and track density, and a reproducing method thereof. [Structure] A first magnetic layer which is an in-plane magnetized film, a second magnetic layer which is an in-plane magnetized film having a Curie temperature higher than that of the first layer and which is a room temperature magnetized film at room temperature and which becomes a vertically magnetized film, and a perpendicular magnetized layer. A magneto-optical recording medium having at least a third magnetic layer made of a film, and an optical magneto-optical effect while transferring the minute magnetic domains recorded in the third magnetic layer of the magneto-optical recording medium to the second magnetic layer. A signal reproducing method in a magneto-optical recording medium, characterized in that the signal is converted and read.
Description
【0001】[0001]
【産業上の利用分野】本発明は、磁気光学効果を利用し
てレーザー光により情報の記録再生を行う光磁気記録媒
体に関し、媒体の高密度化を可能とする光磁気再生方法
及び光磁気記録媒体に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magneto-optical recording medium for recording / reproducing information with a laser beam by utilizing a magneto-optical effect, and a magneto-optical reproducing method and a magneto-optical recording capable of increasing the density of the medium. It concerns media.
【0002】[0002]
【従来の技術】書き換え可能な高密度記録方式として、
半導体レーザーの熱エネルギーを用いて、磁性薄膜に磁
区を書き込んで情報を記録し、磁気光学効果を用いて、
この情報を読み出す光磁気記録媒体が注目されている。2. Description of the Related Art As a rewritable high density recording system,
Using the thermal energy of a semiconductor laser to write magnetic domains in a magnetic thin film to record information, using the magneto-optical effect,
Attention has been paid to a magneto-optical recording medium for reading this information.
【0003】近年、この光磁気記録媒体の記録密度を高
めて更に大容量の記録媒体とする要求が、高まってい
る。In recent years, there is an increasing demand for increasing the recording density of this magneto-optical recording medium to make it a recording medium having a larger capacity.
【0004】ところで、光磁気記録媒体等の光ディスク
の線記録密度は、主として再生層のS/Nによって決め
られており、これは信号のビット列の周期と再生光学系
のレーザー波長、対物レンズの開口数に大きく依存す
る。By the way, the linear recording density of an optical disk such as a magneto-optical recording medium is mainly determined by the S / N of the reproducing layer, which is the period of the signal bit string, the laser wavelength of the reproducing optical system, and the aperture of the objective lens. Depends heavily on the number.
【0005】すなわち再生光学系のレーザー波長λと対
物レンズの開口数NAが決まると、検出限界となるビッ
トの周期fが次式の様に決まる。That is, when the laser wavelength λ of the reproducing optical system and the numerical aperture NA of the objective lens are determined, the bit period f which is the detection limit is determined by the following equation.
【0006】[0006]
【数1】f=λ/2NA 一方、トラック密度は、主としてクロストークによって
制限されている。このクロストークは、主として媒体面
上でのレーザービームの分布(プロファイル)で決ま
り、前記ビット周期と同様にλ/2NAの関数で表され
る。F = λ / 2NA On the other hand, the track density is limited mainly by crosstalk. This crosstalk is mainly determined by the distribution (profile) of the laser beam on the medium surface, and is represented by a function of λ / 2NA as with the bit period.
【0007】したがって、従来の光ディスクで高密度化
を実現するためには、再生光学系のレーザー波長を短く
し、対物レンズの開口数NAを大きくする必要がある。Therefore, in order to realize high density in the conventional optical disk, it is necessary to shorten the laser wavelength of the reproducing optical system and increase the numerical aperture NA of the objective lens.
【0008】しかしながら、レーザー波長や対物レンズ
の開口数の改善にも限度がある。このため、記録媒体の
構成や読み取り方法を工夫し、記録密度を改善する技術
が開発されている。However, there is a limit to the improvement of the laser wavelength and the numerical aperture of the objective lens. Therefore, a technique for improving the recording density by devising the configuration of the recording medium and the reading method has been developed.
【0009】たとえば、特開平3−93058において
は、再生層と記録層からなる媒体を用いて、信号の再生
前に再生層の磁化の向きを一方向に揃えた後に、記録層
に保持された信号を再生層に転写して再生時の符号間干
渉を減少させ、光の回折限界以下の周期の信号を再生可
能(超解像)とし、記録度化の向上を試みている。For example, in Japanese Patent Laid-Open No. 3-93058, a medium composed of a reproducing layer and a recording layer is used, and before the reproduction of a signal, the magnetization direction of the reproducing layer is aligned in one direction, and then the recording layer is held. The signal is transferred to the reproduction layer to reduce intersymbol interference during reproduction, and it is possible to reproduce (super-resolution) a signal having a period equal to or shorter than the diffraction limit of light, in an attempt to improve recording quality.
【0010】[0010]
【発明が解決しようとする課題】しかしながら上記従来
の光磁気再生方法では、再生層の磁化をレーザー光が照
射する前に一方向に揃えなければならない。そのため従
来の装置に再生層の初期化用磁石を追加することが必要
となる。このため前記再生方法は、光磁気記録装置が複
雑化し、コストが高くなる、小型化が難しい等の問題点
を有している。However, in the above-described conventional magneto-optical reproducing method, the magnetization of the reproducing layer must be aligned in one direction before being irradiated with laser light. Therefore, it is necessary to add a reproducing layer initialization magnet to the conventional device. Therefore, the reproducing method has problems that the magneto-optical recording device is complicated, the cost is high, and it is difficult to reduce the size.
【0011】本発明は上記の問題に鑑み、再生層の初期
化を不要とすることで、従来用いられている光磁気記録
再生装置でも、光の回折限界以下の周期の信号を再生で
き、線密度及びトラック密度の向上を可能にすることを
目的とするものである。In view of the above problems, the present invention eliminates the need for initialization of the reproducing layer, so that even a conventionally used magneto-optical recording / reproducing apparatus can reproduce a signal having a period equal to or shorter than the diffraction limit of light. The purpose is to enable improvement of the density and the track density.
【0012】[0012]
【課題を解決するための手段】本発明は上記課題に鑑
み、鋭意検討した結果、面内磁化膜である第一の磁性層
と、キュリー温度が第一層より高く室温では面内磁化膜
であって昇温すると垂直磁化膜となる第二の磁性層と、
垂直磁化膜からなる第三の磁性層とを少なくとも有する
光磁気記録媒体とし、該光磁気記録媒体の第三の磁性層
に記録された微小磁区を、第二の磁性層に転写して読み
出すことにより、上記課題が解決できることを見いだし
た。In view of the above problems, the present invention has made extensive studies and found that the first magnetic layer, which is an in-plane magnetized film, and the in-plane magnetized film, which has a Curie temperature higher than that of the first layer, at room temperature. A second magnetic layer that becomes a perpendicular magnetization film when the temperature rises,
A magneto-optical recording medium having at least a third magnetic layer made of a perpendicularly magnetized film, wherein the minute magnetic domain recorded in the third magnetic layer of the magneto-optical recording medium is transferred to the second magnetic layer and read out. It has been found that the above can solve the above problems.
【0013】[0013]
【実施例】以下、図面を用いて詳しく説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A detailed description will be given below with reference to the drawings.
【0014】図1(a),(b)は本発明の膜構成を示
す模式図、図2は、本発明の光磁気再生方法を示す説明
図、図3は、本発明の光磁気記録媒体の一例に記録した
後の磁化状態を示す図、図4は、第二の磁性層の反磁界
エネルギー2πMs2 と垂直磁気異方性エネルギーku
の温度変化を示した図、図5(a)は、本発明の光磁気
記録媒体の残留θK (磁場0)の温度依存性を示した
図、図5(b)は、比較例の光磁気記録媒体の残留θK
(磁場0)の温度依存性を示した図、本発明の光磁気記
録媒体は、面内磁化膜である第一の磁性層と、キュリー
温度が第一層より高く室温では面内磁化膜であって昇温
すると垂直磁化膜となる第二の磁性層と、垂直磁化膜か
らなる第三の磁性層とを少なくとも有する光磁気記録媒
体とし、その第三の磁性層に記録された微小磁区を、第
二の磁性層に転写して読み出すことにより、前記課題が
達成される。1A and 1B are schematic views showing the film structure of the present invention, FIG. 2 is an explanatory view showing the magneto-optical reproducing method of the present invention, and FIG. 3 is a magneto-optical recording medium of the present invention. FIG. 4 is a diagram showing a magnetization state after recording in one example, and FIG. 4 shows a demagnetizing field energy 2πMs 2 of the second magnetic layer and a perpendicular magnetic anisotropy energy ku
5A shows the temperature dependence of the residual θ K (magnetic field 0) of the magneto-optical recording medium of the present invention, and FIG. 5B shows the light of the comparative example. Residual θ K of magnetic recording medium
The figure showing the temperature dependence of (magnetic field 0). The magneto-optical recording medium of the present invention has a first magnetic layer which is an in-plane magnetized film and an in-plane magnetized film having a Curie temperature higher than that of the first layer at room temperature. A magneto-optical recording medium having at least a second magnetic layer to be a perpendicular magnetization film when heated and a third magnetic layer to be a perpendicular magnetization film is provided, and a minute magnetic domain recorded in the third magnetic layer is recorded. The above object is achieved by transferring the data to the second magnetic layer and reading the data.
【0015】<媒体の構成及び組成>図1(a)に示す
ように、第一、第二及び第三の磁性層を次の通り作成し
た。<Structure and Composition of Medium> As shown in FIG. 1A, first, second and third magnetic layers were prepared as follows.
【0016】第一の磁性層としては、キュリー温度に達
するまで面内磁気異方性を安定に有するもの、例えば希
土類−鉄族非晶質合金、例えば、GdCo, GdFeCo, GdTbFe
Co,GdDyFeCo, NdGdFeCoなどが望ましい。キュリー温度
は再生時の媒体温度付近にあるものなどが好ましい。The first magnetic layer has a stable in-plane magnetic anisotropy until reaching the Curie temperature, for example, a rare earth-iron group amorphous alloy such as GdCo, GdFeCo, GdTbFe.
Co, GdDyFeCo, NdGdFeCo, etc. are preferable. The Curie temperature is preferably near the medium temperature during reproduction.
【0017】第二の磁性層としては、例えば希土類−鉄
族非晶質合金、例えば、GdCo, GdFeCo, GdTbFeCo, GdDy
FeCo, NdGdFeCoなどが望ましい。室温とキュリー温度の
間に補償温度があるものが好ましいものの例として挙げ
られる。The second magnetic layer is, for example, a rare earth-iron group amorphous alloy such as GdCo, GdFeCo, GdTbFeCo, GdDy.
FeCo, NdGdFeCo, etc. are desirable. Those having a compensation temperature between room temperature and Curie temperature are mentioned as examples of preferable ones.
【0018】第三の磁性層としては、垂直磁気異方性が
大きく安定に磁化状態が保持できるもの、例えば希土類
−鉄族非晶質合金、例えば、TbFeCo, DyFeCo, TbDyFeCo
など、もしくはガーネット、あるいは、白金族−鉄族周
期構造膜、例えば、Pt/Co, Pd/Co 白金族−鉄族合金、
例えばPtCo, PdCoなどが望ましい。The third magnetic layer has a large perpendicular magnetic anisotropy and can maintain a stable magnetization state, for example, a rare earth-iron group amorphous alloy such as TbFeCo, DyFeCo, TbDyFeCo.
, Or garnet, or a platinum group-iron group periodic structure film, for example, Pt / Co, Pd / Co platinum group-iron group alloy,
For example, PtCo and PdCo are desirable.
【0019】又これらの磁性層には、Cr, Ti, Ptなどの
耐食性改善のための元素添加を行なっても良い。Further, these magnetic layers may be added with elements such as Cr, Ti and Pt for improving the corrosion resistance.
【0020】上記磁性層に加えて、干渉効果を高めるた
めに、SiN, AlNx, AlOx, TaOx, SiO x 等の誘電体などを
設けても良い。In addition to the above magnetic layer, the interference effect is enhanced.
For SiN, AlNx, AlOx, TaOx, SiO x Such as dielectric
It may be provided.
【0021】また熱伝導性改良のためAl, AlTa, AlTi,
AlCr, Cuなどを設けても良い。In order to improve thermal conductivity, Al, AlTa, AlTi,
AlCr, Cu, etc. may be provided.
【0022】また交換結合力または静磁結合力を調節す
るための中間層、記録補助、再生補助のための補助層を
設けても良い。更に保護膜として前記誘電体層や高分子
樹脂からなる保護コートを付与しても良い。Further, an intermediate layer for adjusting the exchange coupling force or the magnetostatic coupling force, and an auxiliary layer for assisting recording and reproducing may be provided. Further, a protective coat made of the dielectric layer or polymer resin may be provided as a protective film.
【0023】以下に本発明の記録再生プロセスを説明す
る。以下の説明では第一の磁性層を補助層、第二の磁性
層を再生層、第三の磁性層を記録層と呼ぶこととする。The recording / reproducing process of the present invention will be described below. In the following description, the first magnetic layer is called an auxiliary layer, the second magnetic layer is called a reproducing layer, and the third magnetic layer is called a recording layer.
【0024】図3に示すように、まず本発明の光磁気記
録媒体の記録層にデータ信号を記録する。記録は記録層
がキュリー温度以上になるようなパワーのレーザー光を
照射しながら外部磁界を変調して行うか、もしくは、一
度消去した後に、記録方向に磁界を印加しながらレーザ
ーパワーを変調して行う。もしくは、外部磁界を印加し
ながらレーザーパワーを変調して行う。この時、光スポ
ット内の所定領域のみが記録層のキュリー温度近傍にな
る様に記録媒体の線速度を考慮してレーザー光の強度を
決定すれば、光スポットの径以下の記録磁区が形成で
き、その結果、光の回折限界以下の周期の信号を記録で
きる。As shown in FIG. 3, first, a data signal is recorded on the recording layer of the magneto-optical recording medium of the present invention. Recording is performed by irradiating the external magnetic field while irradiating the laser beam with the power such that the recording layer becomes the Curie temperature or higher, or after erasing once, the laser power is modulated while applying the magnetic field in the recording direction. To do. Alternatively, the laser power is modulated while applying an external magnetic field. At this time, if the intensity of the laser light is determined in consideration of the linear velocity of the recording medium so that only a predetermined area within the light spot is near the Curie temperature of the recording layer, a recording magnetic domain smaller than the diameter of the light spot can be formed. As a result, it is possible to record a signal having a period less than the diffraction limit of light.
【0025】データ再生時には、媒体に再生レーザー光
を照射するが、このとき照射部分の温度が上昇する。媒
体は一定の速さで移動するため、媒体上の温度分布は媒
体の移動方向に延びた形状となり、光スポット内の一部
が高温となった温度分布となる。At the time of data reproduction, the medium is irradiated with reproduction laser light, and at this time, the temperature of the irradiated portion rises. Since the medium moves at a constant speed, the temperature distribution on the medium has a shape extending in the moving direction of the medium, and the temperature distribution is such that a part of the light spot has a high temperature.
【0026】ところで単層の磁性薄膜について、飽和磁
化をMs、垂直磁気異方性定数をKuとした時、次の式
のように、With respect to a single-layer magnetic thin film, when the saturation magnetization is Ms and the perpendicular magnetic anisotropy constant is Ku, the following equation is obtained.
【0027】[0027]
【数2】K⊥=Ku−2πMs2 で定義される実効的垂直磁気異方性定数K⊥により、磁
化の主な向きが決定されることが知られている。K⊥が
正の場合には垂直磁化膜、負の場合には面内磁化膜とな
る。It is known that the main direction of magnetization is determined by the effective perpendicular magnetic anisotropy constant K⊥ defined by K⊥ = Ku−2πMs 2 . When K⊥ is positive, it is a perpendicular magnetization film, and when it is negative, it is an in-plane magnetization film.
【0028】ここで2πMs2 は反磁界エネルギーであ
る。従って、図4で示した様に、室温(RT)では、Here, 2πMs 2 is the demagnetizing field energy. Therefore, as shown in FIG. 4, at room temperature (RT),
【0029】[0029]
【数3】Ku<2πMs2 ,K⊥<0 を満足し、即ち面内磁化膜となり、再生時に高温となっ
た時は、## EQU3 ## When Ku <2πMs 2 and K⊥ <0 are satisfied, that is, when the film becomes an in-plane magnetized film and the temperature becomes high during reproduction,
【0030】[0030]
【数4】Ku>2πMs2 ,K⊥>0 を満足、即ち垂直磁化膜となる様に磁性薄膜の飽和磁化
Msと垂直磁気異方性定数Kuを設定しておけば、光ス
ポットの高温部のみが記録層の磁化を転写可能とする垂
直磁化膜となり、超解像が実現する。## EQU4 ## If Ku> 2πMs 2 and K⊥> 0 are satisfied, that is, if the saturation magnetization Ms and perpendicular magnetic anisotropy constant Ku of the magnetic thin film are set so as to form a perpendicular magnetic film, the high temperature part of the light spot Only becomes the perpendicular magnetization film that can transfer the magnetization of the recording layer, and super resolution is realized.
【0031】尚、この磁性薄膜を垂直磁化膜及び面内磁
化膜と直接もしくは中間層等を介して積層する場合、こ
れらの膜からの交換結合力、静磁結合力などが働き、見
かけ上のKuが変化するが、単層膜での垂直磁化温度領
域をやや高めもしくは低めに設定しておけば、他層と積
層した場合にも、室温において面内磁化膜で、昇温する
と垂直磁化膜となる状況が成立する。When this magnetic thin film is laminated with the perpendicularly magnetized film and the in-plane magnetized film directly or through an intermediate layer or the like, exchange coupling force, magnetostatic coupling force and the like from these films work, and apparently. Although Ku changes, if the perpendicular magnetization temperature region in the single-layer film is set to be slightly higher or lower, even when stacked with other layers, the perpendicular magnetization film is increased by the in-plane magnetization film at room temperature when it is heated. The situation is established.
【0032】本発明の光磁気記録媒体は、記録層に加え
て、更に補助層が再生層に直接もしくは中間層を介して
積層されている。この補助層は室温からキュリー温度ま
で面内磁化膜のままであるので、媒体が補助層のキュリ
ー温度に達するまでは、補助層からの交換結合力により
再生層の磁化方向は安定に面内に配向する。In the magneto-optical recording medium of the present invention, in addition to the recording layer, an auxiliary layer is further laminated on the reproducing layer directly or via an intermediate layer. Since this auxiliary layer remains an in-plane magnetized film from room temperature to the Curie temperature, the magnetization direction of the reproducing layer is stably in-plane until the medium reaches the Curie temperature of the auxiliary layer due to the exchange coupling force from the auxiliary layer. Orient.
【0033】そのため補助層のキュリー温度を、再生層
の磁化方向が転移する温度にほぼ等しくなる様に設定す
れば、再生層の検出領域は補助層からの面内磁化配向を
促進する交換結合力が作用しないため、より垂直に磁化
配向しやすくなる。Therefore, if the Curie temperature of the auxiliary layer is set to be substantially equal to the temperature at which the magnetization direction of the reproducing layer transitions, the detection region of the reproducing layer has an exchange coupling force that promotes in-plane magnetization orientation from the auxiliary layer. Does not work, it becomes easier to magnetize vertically.
【0034】この補助層は、記録層と反対側すなわち光
入射側に配置されるため、光の吸収により再生出力が劣
化しない程度に膜厚を薄くし(200オングストローム
以下が望ましい。更に望ましくは100オングストロー
ム以下が望ましい。最も望ましくは、60オングストロ
ーム以下が望ましい。)、再生層への交換力が劣化しな
い程度に厚い(20オングストローム以上が望まし
い。)ことが必要である。Since this auxiliary layer is arranged on the side opposite to the recording layer, that is, on the light incident side, the film thickness is made thin (200 angstroms or less, more preferably 100 angstroms) so that the reproduction output does not deteriorate due to absorption of light. The thickness is preferably angstroms or less, most preferably 60 angstroms or less, and thick enough (20 angstroms or more) so that the exchange power to the reproducing layer does not deteriorate.
【0035】したがって、上述の補助層を設けたことに
より、再生層の面内磁化部分と垂直磁化部分の境界が鮮
明になり、C/Nが向上する。また本発明では、トラッ
ク方向及び半径方向の隣接ビットの影響を受けずに再生
できるため、線記録密度及びトラック密度の両方を高め
て記録したビットが、良好なC/Nで再生できる。Therefore, by providing the above-mentioned auxiliary layer, the boundary between the in-plane magnetized portion and the perpendicular magnetized portion of the reproducing layer becomes clear and C / N is improved. Further, according to the present invention, since reproduction can be performed without being affected by adjacent bits in the track direction and the radial direction, bits recorded by increasing both the linear recording density and the track density can be reproduced with good C / N.
【0036】また、上述では各磁性層が交換相互作用に
より磁気的に結合する場合を述べたが、静磁結合によっ
て磁気的に結合されるとしてもよい。Although the magnetic layers are magnetically coupled by exchange interaction in the above description, they may be magnetically coupled by magnetostatic coupling.
【0037】また、転写をより鮮明に行なうため、キュ
リー温度の異なる中間層などを設けても良い。Further, in order to make the transfer clearer, an intermediate layer having a different Curie temperature may be provided.
【0038】以下に実験例をもって本発明を詳細に説明
するが、本発明はその要旨を越えない限り以下の実験例
に限定されるものではない。The present invention will be described in detail below with reference to experimental examples, but the present invention is not limited to the following experimental examples as long as the gist thereof is not exceeded.
【0039】(実験例1)直流マグネトロンスパッタリ
ング装置に、Si、Tb,Gd、Fe、Coの各ターゲ
ットを取り付け、ポリカーボネイト基板を基板ホルダー
に固定した後、1×10-6Pa以下の高真空になるまで
チャンバー内をクライオポンプで真空排気した。(Experimental Example 1) Each target of Si, Tb, Gd, Fe, and Co was attached to a DC magnetron sputtering apparatus, and a polycarbonate substrate was fixed to a substrate holder, and then a high vacuum of 1 × 10 -6 Pa or less was obtained. The inside of the chamber was evacuated by a cryopump until it became.
【0040】真空排気をしながらArガスを0.4Pa
となるまでチャンバー内に導入した後、干渉層であるS
iN層を780オングストローム成膜し、ついで補助層
であるGdCo層を成膜し、次いで再生層であるGdF
eCo層を成膜し、記録層であるTbFeCo層を成膜
し、次いで保護層としてSiN層を700オングストロ
ーム成膜し、図1(b)の構成の積層膜を得た。Ar gas was supplied to 0.4 Pa while evacuating.
After being introduced into the chamber until
An iN layer is formed in a thickness of 780 angstroms, a GdCo layer that is an auxiliary layer is formed, and then a GdF that is a reproduction layer is formed.
An eCo layer was formed, a TbFeCo layer as a recording layer was formed, and then a SiN layer was formed as a protective layer in a thickness of 700 angstroms to obtain a laminated film having the configuration of FIG. 1 (b).
【0041】SiN層成膜時にはArガスに加えてN2
ガスを導入し、Siターゲットの直流反応性スパッタに
より成膜した。GdFeCo層、TbFeCo層は、G
d、Fe、Co、Tbの各ターゲットに直流パワーを印
加して成膜した。At the time of forming the SiN layer, N 2 is added in addition to Ar gas.
A gas was introduced, and a film was formed by direct current reactive sputtering of a Si target. The GdFeCo layer and the TbFeCo layer are G
A DC power was applied to each target of d, Fe, Co, and Tb to form a film.
【0042】GdFe補助層の膜厚は50オングストロ
ームで、組成は室温からキュリー温度までREリッチで
キュリー温度は140℃付近となるように設定した。The film thickness of the GdFe auxiliary layer was 50 Å, and the composition was set to be RE rich from room temperature to the Curie temperature and the Curie temperature around 140 ° C.
【0043】GdFeCo再生層の膜厚は400オング
ストロームで、組成は補償温度が280℃でキュリー温
度は350℃以上となるように設定した。The thickness of the GdFeCo reproducing layer was 400 Å, and the composition was set so that the compensation temperature was 280 ° C. and the Curie temperature was 350 ° C. or higher.
【0044】TbFeCo記録層の膜厚は400オング
ストロームで、組成は室温でTMリッチで補償温度が室
温以下でキュリー温度は220℃となる様に設定した。The thickness of the TbFeCo recording layer was 400 angstroms, the composition was TM rich at room temperature, the compensation temperature was below room temperature, and the Curie temperature was 220 ° C.
【0045】この積層膜を温度を上げながら、磁界0の
時の残留θK を測定したところ、図5(a)に示した様
に140℃近辺でカー効果が現れ、垂直磁化膜となって
いることが確認された。When the residual θ K when the magnetic field was 0 was measured while raising the temperature of this laminated film, the Kerr effect appeared near 140 ° C. as shown in FIG. Was confirmed.
【0046】(実験例2)次に、実験例1記載の光磁気
記録媒体を用いて、記録再生特性を測定した。(Experimental Example 2) Next, using the magneto-optical recording medium described in Experimental Example 1, the recording / reproducing characteristics were measured.
【0047】測定装置の対物レンズのN.A.は0.5
5、レーザー波長は780nmとした。記録パワーは8
〜10mW、線速度9m/s(回転速度2400rp
m、半径36mm)として、記録層に5.8〜15MH
zのキャリア信号を磁界変調方式で書き込み、C/N比
の記録周波数依存性を調べた。印加磁界は、±150O
eとした。N.V. of the objective lens of the measuring device. A. Is 0.5
5. The laser wavelength was 780 nm. Recording power is 8
-10mW, linear velocity 9m / s (rotation speed 2400rp
m, radius 36 mm) and 5.8 to 15 MH in the recording layer
The z carrier signal was written by the magnetic field modulation method, and the recording frequency dependence of the C / N ratio was examined. Applied magnetic field is ± 150O
e.
【0048】再生パワーは、C/N比がmaxとなる値
に設定した。The reproducing power was set to a value at which the C / N ratio was max.
【0049】結果を表1に示した。The results are shown in Table 1.
【0050】[0050]
【表1】 (実験例3)実験例1、2と同様にポリカーボネイト上
に薄膜を成膜して光磁気記録媒体を作成し、同様の条件
で評価した。[Table 1] (Experimental Example 3) Similar to Experimental Examples 1 and 2, a magneto-optical recording medium was prepared by forming a thin film on a polycarbonate and evaluated under the same conditions.
【0051】干渉層であるSiN層を780オングスト
ローム成膜し、ついで補助層であるGdCo層を成膜
し、次いで再生層1であるGdFeCo層を成膜し、記
録層であるTbFeCo層を成膜し、次いで保護層とし
てSiN層を700オングストローム成膜し、図1
(b)の構成の積層膜を得た。A SiN layer which is an interference layer is formed in a thickness of 780 Å, a GdCo layer which is an auxiliary layer is formed, a GdFeCo layer which is a reproducing layer 1 is formed, and a TbFeCo layer which is a recording layer is formed. Then, a SiN layer as a protective layer is formed to a thickness of 700 angstroms.
A laminated film having the structure of (b) was obtained.
【0052】SiN層成膜時にはArガスに加えてN2
ガスを導入し、Siターゲットの直流反応性スパッタに
より成膜した。GdFeCo層、TbFeCo層は、G
d、Fe、Co、Tbの各ターゲットに直流パワーを印
加して成膜した。At the time of forming the SiN layer, in addition to Ar gas, N 2
A gas was introduced, and a film was formed by direct current reactive sputtering of a Si target. The GdFeCo layer and the TbFeCo layer are G
A DC power was applied to each target of d, Fe, Co, and Tb to form a film.
【0053】GdCoAl補助層の膜厚は30オングス
トロームで、組成は室温からキュリー温度までREリッ
チでキュリー温度は130℃付近となるように設定し
た。The thickness of the GdCoAl auxiliary layer was 30 Å, and the composition was set to be RE rich from room temperature to the Curie temperature and the Curie temperature around 130 ° C.
【0054】GdFeCo再生層の膜厚は400オング
ストロームで、組成は補償温度が270℃でキュリー温
度は350℃以上となるように設定した。The thickness of the GdFeCo reproducing layer was 400 Å, and the composition was set so that the compensation temperature was 270 ° C. and the Curie temperature was 350 ° C. or higher.
【0055】TbFeCo記録層の膜厚は300オング
ストロームで、組成は室温でTMリッチで補償温度が室
温以下でキュリー温度は200℃となる様に設定した。The thickness of the TbFeCo recording layer was 300 Å, the composition was TM rich at room temperature, the compensation temperature was below room temperature, and the Curie temperature was 200 ° C.
【0056】結果を表1に示した。The results are shown in Table 1.
【0057】(実験例4)実験例1、2と同様にポリカ
ーボネイト上に薄膜を成膜して光磁気記録媒体を作成
し、同様の条件で評価した。(Experimental Example 4) Similar to Experimental Examples 1 and 2, a magneto-optical recording medium was prepared by forming a thin film on polycarbonate and evaluated under the same conditions.
【0058】干渉層であるSiN層を780オングスト
ローム成膜し、ついで補助層であるGdCo層を成膜
し、次いで再生層1であるGdFeCo層を成膜し、記
録層であるDyFeCo層を成膜し、次いで保護層とし
てSiN層を700オングストローム成膜し、図1
(b)の構成の積層膜を得た。A SiN layer which is an interference layer is formed in a thickness of 780 Å, a GdCo layer which is an auxiliary layer is formed, a GdFeCo layer which is a reproducing layer 1 is formed, and a DyFeCo layer which is a recording layer is formed. Then, a SiN layer as a protective layer is formed to a thickness of 700 angstroms.
A laminated film having the structure of (b) was obtained.
【0059】SiN層成膜時にはArガスに加えてN2
ガスを導入し、Siターゲットの直流反応性スパッタに
より成膜した。GdFeCo層、TbFeCo層は、G
d、Fe、Co、Tbの各ターゲットに直流パワーを印
加して成膜した。At the time of forming the SiN layer, in addition to Ar gas, N 2
A gas was introduced, and a film was formed by direct current reactive sputtering of a Si target. The GdFeCo layer and the TbFeCo layer are G
A DC power was applied to each target of d, Fe, Co, and Tb to form a film.
【0060】GdCoSi補助層の膜厚は40オングス
トロームで、組成は室温からキュリー温度までREリッ
チでキュリー温度は160℃付近となるように設定し
た。The film thickness of the GdCoSi auxiliary layer was 40 Å, and the composition was set to be RE rich from room temperature to the Curie temperature, and the Curie temperature was around 160 ° C.
【0061】GdFeCo再生層の膜厚は400オング
ストロームで、組成は補償温度が260℃でキュリー温
度は350℃以上となるように設定した。The thickness of the GdFeCo reproducing layer was 400 Å, and the composition was set so that the compensation temperature was 260 ° C. and the Curie temperature was 350 ° C. or higher.
【0062】TbFeCo記録層の膜厚は400オング
ストロームで、組成は室温でTMリッチで補償温度が室
温以下でキュリー温度は200℃となる様に設定した。The thickness of the TbFeCo recording layer was 400 Å, the composition was set to be TM rich at room temperature, the compensation temperature was below room temperature, and the Curie temperature was 200 ° C.
【0063】結果を表1に示した。The results are shown in Table 1.
【0064】(実験例5)実験例1、2と同様にポリカ
ーボネイト上に薄膜を成膜して光磁気記録媒体を作成
し、同様の条件で評価した。(Experimental Example 5) A magneto-optical recording medium was prepared by forming a thin film on polycarbonate in the same manner as in Experimental Examples 1 and 2, and evaluated under the same conditions.
【0065】干渉層であるSiN層を780オングスト
ローム成膜し、ついで補助層であるGdFeCo層を成
膜し、次いで再生層1であるGdFeCo層を成膜し、
記録層であるTbFeCo層を成膜し、次いで保護層と
してSiN層を700オングストローム成膜し、図1
(b)の構成の積層膜を得た。A SiN layer which is an interference layer is formed in a thickness of 780 Å, a GdFeCo layer which is an auxiliary layer is formed, and then a GdFeCo layer which is a reproducing layer 1 is formed.
A TbFeCo layer that is a recording layer is formed, and then a SiN layer is formed as a protective layer at 700 angstroms.
A laminated film having the structure of (b) was obtained.
【0066】SiN層成膜時にはArガスに加えてN2
ガスを導入し、Siターゲットの直流反応性スパッタに
より成膜した。GdFeCo層、TbFeCo層は、G
d、Fe、Co、Tbの各ターゲットに直流パワーを印
加して成膜した。At the time of forming the SiN layer, N 2 is added in addition to Ar gas.
A gas was introduced, and a film was formed by direct current reactive sputtering of a Si target. The GdFeCo layer and the TbFeCo layer are G
A DC power was applied to each target of d, Fe, Co, and Tb to form a film.
【0067】GdFeCo補助層の膜厚は40オングス
トロームで、組成は室温からキュリー温度までREリッ
チでキュリー温度は160℃付近となるように設定し
た。The film thickness of the GdFeCo auxiliary layer was 40 Å, and the composition was set to be RE rich from room temperature to the Curie temperature and the Curie temperature around 160 ° C.
【0068】GdFeCo再生層の膜厚は400オング
ストロームで、組成は補償温度が220℃でキュリー温
度は350℃以上となるように設定した。The thickness of the GdFeCo reproducing layer was 400 Å, and the composition was set so that the compensation temperature was 220 ° C. and the Curie temperature was 350 ° C. or higher.
【0069】TbFeCo記録層の膜厚は400オング
ストロームで、組成は室温でTMリッチで補償温度が室
温以下でキュリー温度は240℃となる様に設定した。The film thickness of the TbFeCo recording layer was 400 Å, the composition was set to be TM rich at room temperature, the compensation temperature was below room temperature, and the Curie temperature was 240 ° C.
【0070】結果を表1に示した。The results are shown in Table 1.
【0071】(比較実験例1)実験例1の補助層を削除
した以外は、同様の成膜機、成膜方法で、同様にポリカ
ーボネイト上に薄膜を成膜して光磁気記録媒体を作成
し、同様の条件で評価した。COMPARATIVE EXPERIMENTAL EXAMPLE 1 A magneto-optical recording medium was prepared by forming a thin film on a polycarbonate in the same manner with the same film-forming machine and film-forming method except that the auxiliary layer of Experimental Example 1 was deleted. , And evaluated under the same conditions.
【0072】結果は図5(b)に示した。これらから本
発明の方法は、比較例と比べて室温でのθK の発生が抑
えられ、また昇温時のθK の立ち上がりが急峻になり、
超解像検出効果の改良が見られる。The results are shown in FIG. 5 (b). From these, the method of the present invention suppresses the occurrence of θ K at room temperature as compared with the comparative example, and the rise of θ K at the time of temperature rise becomes sharp,
An improvement in the super-resolution detection effect can be seen.
【0073】(比較実験例2)次に、比較実験例1記載
の光磁気記録媒体を用いて、比較実験例1と同様に記録
再生特性を測定した。結果を表1に示した。(Comparative Experimental Example 2) Next, using the magneto-optical recording medium described in Comparative Experimental Example 1, recording / reproducing characteristics were measured in the same manner as in Comparative Experimental Example 1. The results are shown in Table 1.
【0074】[0074]
【発明の効果】本発明の光磁気記録方式を用いれば、初
期化磁石が不要な簡素な装置(従来の装置)を用いて、
ビームスポット径より小さい磁区を拡大して再生するこ
とが可能となり、線記録密度及びトラック密度をさらに
向上した高密度記録の達成が可能となった。According to the magneto-optical recording method of the present invention, a simple device (conventional device) that does not require an initialization magnet can be used.
It became possible to reproduce by enlarging a magnetic domain smaller than the beam spot diameter, and it became possible to achieve high density recording with further improved linear recording density and track density.
【図1】(a),(b)は本発明の膜構成を示す模式図
である。1A and 1B are schematic views showing a film structure of the present invention.
【図2】本発明の光磁気再生方法を示す説明図である。FIG. 2 is an explanatory diagram showing a magneto-optical reproducing method of the present invention.
【図3】本発明の光磁気記録媒体の一例に記録した後の
磁化状態を示す図である。FIG. 3 is a diagram showing a magnetized state after recording on an example of the magneto-optical recording medium of the present invention.
【図4】本発明の光磁気記録媒体の第二の磁性層の反磁
界エネルギー2πMs2 と垂直磁気異方性エネルギーK
uの温度変化を示した図である。FIG. 4 is a demagnetizing field energy 2πMs 2 and a perpendicular magnetic anisotropy energy K of the second magnetic layer of the magneto-optical recording medium of the present invention.
It is the figure which showed the temperature change of u.
【図5】(a)は、本発明の光磁気記録媒体の残留θK
(磁場0)の温度依存性を示した図である。(b)は、
比較例の光磁気記録媒体の残留θK (磁場0)の温度依
存性を示した図である。FIG. 5A is a residual θ K of the magneto-optical recording medium of the present invention.
It is the figure which showed the temperature dependence of (magnetic field 0). (B) is
FIG. 7 is a diagram showing the temperature dependence of residual θ K (magnetic field 0) of the magneto-optical recording medium of the comparative example.
1 基板 2 誘電体層 3 第一の磁性層 4 第二の磁性層 5 第三の磁性層 6 誘電体層 1 substrate 2 dielectric layer 3 first magnetic layer 4 second magnetic layer 5 third magnetic layer 6 dielectric layer
Claims (2)
ュリー温度が第一層より高く室温では面内磁化膜であっ
て昇温すると垂直磁化膜となる第二の磁性層と、垂直磁
化膜からなる第三の磁性層とを少なくとも有する光磁気
記録媒体。1. A first magnetic layer formed of an in-plane magnetized film, and a second magnetic layer which is an in-plane magnetized film having a Curie temperature higher than that of the first layer at room temperature and which becomes a perpendicular magnetized film when heated. A magneto-optical recording medium having at least a third magnetic layer made of a perpendicularly magnetized film.
層に記録された磁気信号を第二の磁性層に転写しなが
ら、磁気光学効果により光学信号に変換して読み取るこ
とを特徴とする光磁気記録媒体における信号再生方法。2. The magneto-optical recording medium according to claim 1, wherein the magnetic signal recorded in the third magnetic layer is transferred to the second magnetic layer while being converted into an optical signal by the magneto-optical effect and read. And a signal reproducing method in a magneto-optical recording medium.
Priority Applications (8)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9802593A JPH06309716A (en) | 1993-04-23 | 1993-04-23 | Magneto-optical recording medium and reproducing method of the medium |
| EP93306690A EP0586175B1 (en) | 1992-08-28 | 1993-08-24 | A magnetooptical recording medium and information recording and reproducing methods using the recording medium |
| ES93306690T ES2176194T3 (en) | 1992-08-28 | 1993-08-24 | MAGNETOPOPTIC RECORDING SUPPORT AND RECORDING AND REPRODUCTION METHODS OF INFORMATION USED IN RECORDING SUPPORT. |
| DE69331924T DE69331924T2 (en) | 1992-08-28 | 1993-08-24 | Magneto-optical recording medium and information recording and reproducing method therewith |
| EP01201745A EP1143434A3 (en) | 1992-08-28 | 1993-08-24 | A magnetooptical recording medium and information recording and reproducing methods using the recording medium |
| US08/643,833 US5616428A (en) | 1992-08-28 | 1996-05-07 | Magnetooptical recording medium and information recording and reproducing methods using the recording medium |
| US08/774,721 US5889739A (en) | 1992-08-28 | 1997-01-03 | Magnetooptical recording medium and information recording and reproducing methods using the recording medium |
| US09/820,734 USRE38501E1 (en) | 1992-08-28 | 2001-03-30 | Magnetooptical recording medium and information recording and reproducing methods using the recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9802593A JPH06309716A (en) | 1993-04-23 | 1993-04-23 | Magneto-optical recording medium and reproducing method of the medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06309716A true JPH06309716A (en) | 1994-11-04 |
Family
ID=14208387
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9802593A Pending JPH06309716A (en) | 1992-08-28 | 1993-04-23 | Magneto-optical recording medium and reproducing method of the medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06309716A (en) |
-
1993
- 1993-04-23 JP JP9802593A patent/JPH06309716A/en active Pending
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