JPH06320092A - Drying and solidifying liquid dropping nozzle - Google Patents

Abstract

PURPOSE:To obtain the nozzle without a drying and solidifying liq. being deposited on its tip and solidified by tapering the periphery of the tip toward the tip surface and minimizing the area of the tip surface vertical to the axis of a tube. CONSTITUTION:The nozzle is set almost vertically and consists of a thin tube 1 through which a drying and solidifying liq. is passed and used for dripping the liq. from its tip. The periphery 1a of the tip is tapered toward the tip surface, and the area of the tip surface vertical to the axis V of the tube 1 is minimized. Consequently, there is no horizontal plane of the enough area to deposit the liq. at the tip, and the generation of tubulence is remarkably suppressed since the section of the tube wall at the nozzle tip is tapered in the flow direction of the liq. Accordingly, the liq. dripped from the nozzle is attracted to the wall surface and not deposited on the tip.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a nozzle for appropriately dropping a dry solidifying liquid material onto the surface of a rotating disk in order to apply the dry solidifying liquid material uniformly to the surface of the disk.

[0002]

2. Description of the Related Art As is well known, a spin coater for uniformly applying a dry and solidifying liquid material to the surface of a disk has a horizontal turntable on which the disk is placed, fixed and rotated, and this turntable is used as necessary. It has at least a rotary drive unit that rotates at a low speed and a high speed, and a nozzle that is installed above the turntable to drop the dry and solidifying liquid unit on the disk surface.

To apply the dry solidifying liquid to a disc, first, the disc is placed on a turntable and rotated at a low speed. Next, an appropriate amount of the dry and solidifying liquid substance is dropped from the nozzle onto the central portion on the surface of the disc that is rotating at a low speed. When an appropriate amount of the dry and solidifying liquid substance has been dripped along the periphery of the central portion of the disk surface, the turntable is rotated at high speed. By this high speed rotation, the dry and solidifying liquid substance on the disk surface is uniformly spread over the disk surface to complete the coating.

As described above, the nozzle for dropping the dry and solidifying liquid material on the surface of the disk during the rotation of the disk is conventionally known.
As shown in the side sectional view in FIG. 3, made of stainless steel or Teflon, for example, inner diameter of about 1.0 mm, outer diameter of about 2.0 m
m is a thin tube 1 whose tip is cut perpendicularly to the direction of the axis V, and in the direction of the axis V, in other words, the tip surface perpendicular to the outflow or drip direction of the liquid substance. Have two. The thin tube 1 forming this nozzle is
As shown in the figure, it is installed so as to be perpendicular to the surface of the disk 3 on the turntable (not shown).

[0005]

When the dry solidifying liquid M is dropped on the surface of the rotating disk 3 by the conventional nozzle having such a shape, a minute turbulent flow is generated in the vicinity of the tip surface 2 of the nozzle. This turbulent flow causes a phenomenon in which a small amount of the liquid material M adheres to the tip surface. In addition, disk 3
Is in a rotating state, a part of the liquid material M once reaching the surface of the disk 3 is wound up by the ascending air current generated by the rotation of the disk 3, and also adheres to the tip surface 2 of the nozzle. The phenomenon occurs. As a result,
As shown in the side sectional view in FIG.
A significant amount of will be attached. In this way, the liquid material M attached to the tip surface 2 of the nozzle is dried and solidified over time due to its nature. Then, at some point after solidification, the solidified matter Mc
Peels off from the tip surface 2 and falls on the surface of the disk 3, deteriorating the surface coating quality of the disk 3. Further, such adhesion, solidification, separation, and dropping phenomenon of the liquid material M may occur not only on the tip surface 2 of the nozzle but also on the tip inner peripheral surface. Such an unfavorable phenomenon remarkably occurs when the installation angle of the nozzle is not perpendicular to the disk surface.

Accordingly, an object of the present invention is to provide a nozzle in which a dry and solidifying liquid substance does not adhere to the tip portion and solidify.

[0007]

In order to solve the above-mentioned conventional problems, the nozzle of the present invention is such that the outer peripheral surface of the tip end portion is inclined so as to be narrowed toward the tip end and is perpendicular to the axis of the pipe. The feature is that the area of the tip surface is set as small as possible.

In this structure, the inner peripheral surface of the tip portion may be further inclined so as to widen toward the tip.

Further, in this structure, it is desirable that the inclination angle of the inclined outer peripheral surface of the tip portion with respect to the axis of the tube is 45 degrees or less. The angle of inclination of the inclined inner peripheral surface of the tip portion with respect to the axis of the tube is also preferably 45 degrees or less.

[0010]

According to the nozzle having the above-described structure, the tip surface perpendicular to the axis is formed as small as possible, and there is no horizontal surface having an area that allows the liquid substance to adhere. Further, since the cross section of the tube wall at the tip of the nozzle is tapered along the flow direction of the liquid substance and has an acute tip angle, the generation of turbulent flow at this tip portion is greatly suppressed. As a result, when the liquid material flows down from the nozzle, the liquid material is not attracted to the wall surface of the nozzle and does not adhere to the tip portion. In addition, even if the liquid material that has been lifted up from the surface of the disk reaches the tip of the nozzle, there is no horizontal tip surface, only an inclined side surface, so liquid material adheres to the nozzle tip. There is nothing to do.

[0011]

Embodiments of the present invention will be described below with reference to the drawings.

(Embodiment 1) FIG. 1 is a side sectional view showing a first embodiment of the present invention. In the figure, the same components as those in FIGS. To simplify.

The feature of the nozzle of this embodiment is that the outer peripheral surface 1a at the tip of the thin tube 1 is inclined so as to narrow toward the tip of the tube. The end of this inclined tip outer peripheral surface 1a coincides with the inner surface of the pipe. In terms of machining accuracy and cost, it is impossible to eliminate the horizontal tip surface microscopically, but it is necessary to make the existing tip horizontal surface less than the area where liquid matter cannot easily adhere. It is easy in terms of cost. In other words, this nozzle does not have a horizontal tip surface macroscopically. Further, in this case, the inclination angle θa of the tip inclined outer peripheral surface 1a with respect to the axis V of the tube is preferably 45 degrees or less in order to make the effect of preventing the adhesion of the liquid matter remarkable.

In the nozzle of this embodiment, since the outer peripheral surface 1a of the tip is inclined and there is no horizontal surface of the tip, turbulent flow is unlikely to occur at the tip of the nozzle, and the liquid substance being dropped may adhere to the tip. Absent. Further, even if the liquid matter that is wound up by the rotation of the disk 3 from the surface of the disk 3 reaches the tip of the nozzle, there is no horizontal surface to which it easily adheres,
Since there is only an inclined surface, the rolled up liquid material
It does not adhere to the nozzle tip.

(Embodiment 2) FIG. 2 is a side sectional view showing a second embodiment of the present invention. The same components as those in FIGS. 1 to 3 are designated by the same reference numerals to simplify the description.

The characteristics of the nozzle of this embodiment are the same as those of the first embodiment.
Similarly to the above, in addition to the tip outer peripheral surface 1a being inclined, the inner peripheral surface 1b at the tip is also inclined.
The tip-inclined inner peripheral surface 1b is formed so as to widen toward the tip. Further, the preferable inclination angle θb of the tip inclined inner peripheral surface 1b with respect to the axis V is also 45 degrees or less, like the tip inclined outer peripheral surface 1a.

The nozzle of this embodiment has the same liquid substance adhesion preventing function as that of the first embodiment, but since the inner diameter of the opening of the nozzle is widened, the occurrence of turbulent flow at the opening is further reduced. Further exert the effect of being.

Further, in each of the above-mentioned embodiments, the wall thickness of the tube wall at the tip of the nozzle is tapered toward the tip, and the tip has an acute angle. Therefore, even if the nozzle is slightly inclined, Since there is no change in the basic shape of the nozzle tip, that is, in the shape in which only the inclined peripheral surface exists and the horizontal plane does not exist, there is no change in the liquid substance adhesion prevention effect at the nozzle tip.

[0019]

As described above, according to the nozzle of the present invention, the tip surface perpendicular to the axis of the nozzle is formed as small as possible, and the horizontal surface has an area large enough to allow the liquid matter to adhere. There is no. Further, since the cross section of the tube wall at the tip of the nozzle is tapered along the flow direction of the liquid,
The generation of turbulent flow at this tip is greatly suppressed. As a result, when the liquid material flows down from the nozzle, the liquid material is not attracted to the wall surface of the nozzle and does not adhere to the tip portion. In addition, even if the liquid that has been lifted up from the surface of the disk reaches the tip of the nozzle, there is no horizontal surface at the tip of the nozzle, only inclined side surfaces. No liquid adheres.

[Brief description of drawings]

FIG. 1 is a side sectional view of a nozzle tip portion showing a first embodiment of a nozzle according to the present invention.

FIG. 2 is a side sectional view of a nozzle tip portion showing a second embodiment of the nozzle according to the present invention.

FIG. 3 is a side cross-sectional view of a tip portion of a conventional nozzle for drying and solidifying liquid flow.

FIG. 4 is a side cross-sectional view in the vicinity of a nozzle tip portion for explaining a phenomenon of a conventional nozzle under liquid flow distribution.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 thin tube 1a tip inclined outer peripheral surface 1b tip inclined inner peripheral surface 2 tip horizontal plane 3 disk M dry and solidifiable liquid V nozzle axis

Continuation of front page (51) Int.Cl. ⁵ Identification code Office reference number FI technical display area H01L 21/027

Claims (2)

[Claims] 1. A thin tubular nozzle which is installed substantially vertically and through which a dry solidifying liquid is circulated, and which drops the dry solidifying liquid from its tip, wherein the outer peripheral surface of the tip is A nozzle for dripping a dry solidifying liquid, characterized in that the area of the tip surface perpendicular to the axis of the tube is set as small as possible by inclining so as to narrow toward the tip. 2. The nozzle according to claim 1, wherein the inner peripheral surface of the tip portion is inclined so as to widen toward the tip.